Abstract: A coating and developing apparatus includes a processing block having at least one coating film-forming unit block stack and a vertically stacked developing unit block stack. Each unit block stack includes vertically stacked unit blocks, and each unit block includes processing modules containing liquid processing modules and heating modules. Each unit block includes a transport mechanism moveable along a transport passage from a carrier block side to an interface block side, to transport a substrate between the processing modules belonging to the unit block. Transfer units are provided on the carrier block sides of the coating film-forming unit blocks and the developing unit blocks respectively, for transferring a substrate to and from the transport mechanism of the associated coating film-forming or developing unit blocks. A first transfer mechanism transfers a substrate removed from a carrier to one of the transfer units associated with the coating film-forming unit blocks.

Abstract: A storage system comprises storage devices providing logical volumes. The storage devices are divided into a plurality of types of tiers having different performance levels. A controller is operable to control to store data to a logical volume of the logical volumes. The controller is configured to receive a command commanding to copy data to deploy a template to a logical volume of the logical volumes or to back up data to a logical volume of the logical volumes. In response to the command, the controller is configured to allocate a storage area of a tier of the plurality of types of tiers to the logical volume. The tier of the storage area to allocate to the logical volume is determined based on whether the command received by the controller is to copy data to the template to the logical volume or to back up data to the logical volume.

Abstract: A scanning microscope is provided with a scan unit that scans a sample, the scanning microscope including: a transmissive VPH grating for dispersing light from the sample; and a photodetector for detecting the light diffracted by the VPH grating.

Abstract: A process block including a group of liquid-process related unit blocks, a first heating-process related block arranged on a carrier block side of the group of unit blocks, and a second heating-process related block arranged on an interface block side of the group of unit blocks. The group of liquid-process unit blocks includes doubled unit blocks for preprocessing for forming an antireflection film and a resist film, doubled unit blocks for post-processing for forming an upper layer film and performing a cleaning operation before exposure, and a unit block for developing. The first heating-process related block heats a substrate coated with a resist liquid and a substrate that has been developed. The second heating-process related block heats a substrate that has been exposed but is not yet developed, a substrate on which an antireflection film has been formed and a substrate on which an upper layer film has been formed.

Abstract: Embodiments of the invention provide object-based tier management to improve the allocation of objects to different media of different speeds based on access characteristics such as access frequency. One embodiment is directed to a method of managing object-based data in an information system which includes an application server and a storage system. The method comprises receiving a write command including a first data to be written into a virtual volume; identifying an object to which the first data corresponds; checking if a second data corresponding to the object has been stored in the virtual volume; if the second data has been stored in a page of the virtual volume, checking if the page which stores the second data has a vacancy area; and if the page has a vacancy area, writing the first data in the page which stores the second data.

Abstract: A process block is formed by arranging a heating-process related block on the side of a carrier block, a group of liquid-process related unit blocks, and a heating block on the side of an interface block, in this order from the side of the carrier block to the side of the interface block. The group of liquid-process related unit blocks is composed of: a group of unit blocks for coating films that is formed by stacking upward a unit block for an antireflection film, a unit block for a resist film, and a unit block for an upper layer film, in this order; and unit blocks for developing that are stacked on one another in the up and down direction with respect to the group of unit blocks for coating films. Liquid process modules of each of the liquid-process related unit blocks are arranged on the right and left sides of a transfer path for a substrate.

Abstract: The present disclosure provides a chemical liquid supply nozzle capable of suppressing the drying process of chemical liquid with a low cost. The chemical liquid supply nozzle is provided with a cutoff valve and a suction unit that sucks chemical liquid to a suction flow path at a nozzle main body connected to a front end of flow path member. Accordingly, the chemical liquid remaining at the downstream side of the cutoff valve after the chemical liquid is discharged, is sucked toward the upstream side of the cutoff valve and removed, to thereby suppress the drying and solidifying process of the chemical liquid at the chemical liquid flow path. Also, there is no need to block the chemical liquid flow path by sucking thinner at the downstream side of chemical liquid flow path, and the number of dummy dispense may be reduced, thereby reducing an overall operation cost of the process.

Abstract: In accordance with an aspect of the invention, a storage system includes a processor; a memory; a disk control module configured to receive a write command for writing to an unallocated area and to identify an object of the write command to be written as a written object; and an object allocation acquisition module configured to obtain object allocation information specifying one or more virtual volume locations for storing the written object. The disk control module allocates, to each of the one or more virtual volume locations, an area selected from a plurality of logical volumes if the written object is predefined as a randomly accessed object. The disk control module allocates to the one or more virtual volume locations a consecutive area of one logical volume if the written object is predefined as a sequentially accessed object.

Abstract: Exemplary embodiments provide a technique to manage object based tier to improve allocation of media to unallocated area. In one embodiment, a method of allocating an area of a logical volume to an unallocated area of a virtual volume for a write command comprises: calculating an object location of an object based on the write command and an object allocation information, the write command containing a virtual volume name and a virtual volume address of a virtual volume; selecting a tier from a plurality of tiers based on the calculated object location and an object and tier definition information; selecting a media type from a plurality of media types based on the selected tier and a tier and media definition information; and selecting a logical volume from a plurality of logical volumes based on the virtual volume specified by the write command, the object allocation information, a pool information, and the selected media type.

Abstract: A process margin is improved and high connection reliability is obtained. Disclosed is an anisotropic conductive material including an adhesive composite and conductive particles dispersed in the adhesive composite, the adhesive composite containing a film forming resin, an ethylene vinyl acetate copolymer, a radical polymerizable resin, and a radical polymerization initiator, wherein the ethylene vinyl acetate copolymer to be used has a melt flow rate of not less than 400 g/10 min.

Abstract: Systems and methods directed to changing tiers for a storage area that utilizes thin provisioning. Systems and methods check the area subject to a tier change command and change the tier based on the tier specified in the tier change command, and the tier presently associated with the targeted storage area. The pages of the systems and methods may be further restricted to one file per page.

Abstract: Arrangements reducing power consumption of an air conditioner and a storage device. A control method with a management server apparatus for a plurality of storage devices and an air conditioner includes calculating plural combinations of allocating the work amount to the plurality of storage devices, calculating the heating value of each storage device included in the plurality of storage devices for each of the plural combinations, calculating the quantity of heat conducted to the air conditioner, based on the heating value and positional information of the plurality of storage devices and the air conditioner, calculating the power consumption to cool the quantity of heat conducted to the air conditioner, selecting a combination included in the plural combinations based on the power consumption of the air conditioner, and issuing a move of the data stored in a first storage device to a second storage device, based on the selected combination.

Abstract: In one embodiment, a coating and developing apparatus is provided with a processing block including a liquid processing block disposed on the carrier block side and a heating processing block disposed on the interface block side. The liquid processing block includes a first unit block, a second unit block, and one or more of developing unit blocks overlying or underlying a stack of the first unit block and the second unit block. The first unit block includes antireflection film-forming modules and resist film-forming modules disposed on both sides of the transport passage thereof. The second unit block includes upper film-forming modules and hardening modules disposed on both sides of the transport passage thereof.

Abstract: A coating/developing device includes a processing block having a plurality of coating unit blocks stacked and a developing unit block stacked on the coating unit blocks. Each of the unit blocks is provided with a liquid processing unit for coating a liquid chemical on a substrate, a heating unit for heating the substrate, a cooling unit for cooling the substrate and a transfer unit for transferring the substrate between the units. The liquid processing unit is provided with a coating unit for coating a resist liquid on the substrate, a first bottom antireflection coating (BARC) forming unit for coating a liquid chemical for a BARC on the substrate before the resist liquid is coated thereon, and a second BARC forming unit for coating a liquid chemical for the BARC on the substrate after the resist liquid is coated thereon.

Abstract: Arrangements reducing power consumption of an air conditioner and a storage device. A control method with a management server apparatus for a plurality of storage devices and an air conditioner includes calculating plural combinations of allocating the work amount to the plurality of storage devices, calculating the heating value of each storage device included in the plurality of storage devices for each of the plural combinations, calculating the quantity of heat conducted to the air conditioner, based on the heating value and positional information of the plurality of storage devices and the air conditioner, calculating the power consumption to cool the quantity of heat conducted to the air conditioner, selecting a combination included in the plural combinations based on the power consumption of the air conditioner, and issuing a move of the data stored in a first storage device to a second storage device, based on the selected combination.

Abstract: A photographing system includes: a photographing section photographing a subject to acquire a frame image including a subject image; and a matching section repeats image search through pattern matching between a template image and a subject image while sequentially changing a size ratio of the template image to the subject image, and obtains one or more size ratios at which patterns match each other, in a certain order of image search, and holds a size ratio having a largest value among such obtained size ratios as a first size ratio, and thereafter performs image search in a manner that pattern matching is performed at a first frequency in a range of a size ratio equal to or larger than the first size ratio, and is performed at a frequency lower than the first frequency in a range of a size ratio smaller than the first size ratio.

Abstract: A NdFeB sintered magnet production system including: a first weight unit for measuring the mold weight when the alloy powder is not yet filled; a guide attachment unit to extend the mold cavity with a guide to form a supply cavity with a predetermined volume; a powder supply unit for supplying the alloy powder into the supply cavity so that the alloy powder volume is equal to the supply cavity capacity; a filling unit for pressing the alloy powder contained in the supply cavity into the mold cavity to densify the alloy powder to the filling density; a second weight unit for measuring the mold weight after being filled with the alloy powder; and a controlling unit for computing the alloy powder weight filled into the mold cavity based on the difference between the measurement value from each of the first weight unit and the second weight unit.

Abstract: The thin provisioning storage system maintains migration history between the first and the second group which the unallocated pages of virtual volume would be allocated from, and updates on writes against storage areas of virtual volume having migration history. Before the storage controller determines to migrate data allocated in the first group to the second group, the storage controller checks the migration history and if the data stored in the first group has been previously migrated from the second group and is still maintained in the second group, the storage controller would change the allocation between the virtual volume and the first group to the second group for the data subject to migration and not perform the data migration.

Abstract: An anisotropic electrically conductive film formed by a thermosetting acrylic resin composition is disclosed. The composition contains at least a thermosetting agent (A), a thermo-settable ingredient (B), an acrylic rubber containing hydroxyl groups (C), organic fine particles (D) and electrically conductive particles (E). The thermo-settable ingredient (B) may include a phosphorus-containing acrylic ester (b1). The weight averaged molecular weight of the acrylic rubber containing the hydroxyl groups (C) is not less than 1000000. The organic fine particles (D) include polybutadiene-based fine particles (d1).

Abstract: A sample observation apparatus includes excitation light irradiation unit to irradiate sample with excitation light; excitation light modulator to modulate spatial intensity distribution of the excitation light on the sample; excitation light modulation control unit to control the excitation light modulator according to modulation control signal; photo detection unit to detect light emission from the sample and to generate a detection signal; image generation unit to generate image data of the sample according to the modulation control signal and the detection signal; modulation control signal generation unit to generate the modulation control signal such that Nyquist frequency of the image data will be larger than cut-off frequency in the spatial intensity distribution of the excitation light on the sample; and image processing unit to emphasize high-frequency component that exceeds the cut-off frequency included in the image data.