Abstract: A heating device provided with a cooling plate and a heating plate is formed in a low height, and floats a substrate above the cooling plate and the heating plate and moves the substrate horizontally between the cooling plate and the heating plate by the pressure of a gas. A heating device 2 includes a cooling plate 3 provided with flotation gas spouting ports 3a, and a heating plate provided with flotation gas spouting ports. The flotation gas spouting ports 3a and 3b are arranged along a wafer moving passage and are formed so as to spout the gas obliquely upward toward a first end of the wafer moving passage on the side of the cooling plate. A pushing member 51 is brought into contact with a back part of a wafer W with respect to a direction in which the wafer W is moved to move the wafer W in a direction toward the heating plate 6 opposite a direction in which the flotation gas is spouted.

Abstract: In the present invention, a plurality of exhaust paths connected to a plurality of cup bodies surrounding substrate holding portions respectively are joined together for common use, and the openings of exhaust rate adjustment sections provided on the exhaust paths are adjusted with reference to data in which combinations of the numbers of rotations of the substrate holding portions are associated with combinations of set exhaust rates of the exhaust paths when solution treatment is performed by rotating the substrate by the substrate holding portion. According to the present invention, the cup body can be exhausted at an intended exhaust rate at all times independently of the state where the substrate in which cup body is subjected to which process.

Abstract: To provide a system that can reduce the power consumption of an air conditioner and the power consumption of a storage device.

Abstract: A substrate processing system processes a plurality of substrates in a single-substrate processing mode by a plurality of processes and provided with a plurality of modules respectively for carrying out processes. When a defect is found in a substrate, a defective processing unit that caused the defect can be easily found out. The substrate processing system and a substrate processing method to be carried out by the substrate processing system can suppress the reduction of throughput when a large number of substrates are to be processed. The substrate processing system is provided with a plurality of modules for processing a plurality of substrates (W) in a single-substrate processing mode by a plurality of processes and includes a substrate carrying means (A4) for carrying a substrate (W) from a sending module to a receiving module, and a control means (6) for controlling the substrate carrying means (A4) on the basis of one of at least two carrying modes each assigning receiving modules to sending modules.

Abstract: A laser scanning microscope comprises: an objective lens for observing a specimen; a focal plane scan lens placed on the opposite side of the objective lens from the specimen and which generates an intermediate image; a mirror placed near to the position of the intermediate image of the focal plane scan lens; a scan unit scanning the mirror in the optical axis direction; and a pupil projection optical system which projects the pupil of the objective lens onto the pupil of the focal plane scan lens and of which the pupil projection magnification ratio is variable.

Abstract: A substrate processing system processes a plurality of substrates in a single-substrate processing mode by a plurality of processes and provided with a plurality of modules respectively for carrying out processes. When a defect is found in a substrate, a defective processing unit that caused the defect can be easily found out. The substrate processing system and a substrate processing method to be carried out by the substrate processing system can suppress the reduction of throughput when a large number of substrates are to be processed. The substrate processing system is provided with a plurality of modules for processing a plurality of substrates (W) in a single-substrate processing mode by a plurality of processes and includes a substrate carrying means (A4) for carrying a substrate (W) from a sending module to a receiving module, and a control means (6) for controlling the substrate carrying means (A4) on the basis of one of at least two carrying modes each assigning receiving modules to sending modules.

Abstract: Capacitive liquid condition sensing apparatus includes a pair of a 1-1 electrode and a 1-2 electrode arranged to form a first capacitance; a pair of a 2-1 electrode and a 2-2 electrode arranged to form a second capacitance; a circuit board formed with a sensing circuit to sense the liquid condition such as a liquid level in accordance with the first and second capacitances; and 1-1, 1-2, 2-1 and 2-2 conductive paths connecting the 1-1, 1-2, 2-1 and 2-2 electrodes, respectively, to the sensing circuit, and including 1-1, 1-2, 2-1 and 2-2 conductive segments, respectively. The 1-1, 1-2, 2-1 and 2-2 conductive segments are arranged in a row, and extend side by side. The 1-1, 1-2, 2-1 and 2-2 conductive segments are arranged so that a first parasitic capacitance formed between the 1-1 conductive segment and the 1-2 conductive segment is equal to a second parasitic capacitance formed between the 2-1 conductive segment and the 2-2 conductive segment.

Abstract: A coater/developer is disclosed that includes a heating module having a pair of rotary bodies configured to rotate about respective horizontal axles, the rotary bodies being spaced apart from each other in a direction along the conveyance path of a substrate so that the rotational axles thereof are parallel to each other; a conveyance path member engaged with and extended between the rotary bodies so as to move along an orbit, the conveyance path member forming a part of the conveyance path of the substrate placed on the conveyance path member; a first transfer part provided at the upstream end of the conveyance path; a second transfer part provided at the downstream end of the conveyance path; and a heating part provided between the upstream end and the downstream end of the conveyance path and configured to heat the substrate.

Abstract: In the present invention, a plurality of exhaust paths connected to a plurality of cup bodies surrounding substrate holding portions respectively are joined together for common use, and the openings of exhaust rate adjustment sections provided on the exhaust paths are adjusted with reference to data in which combinations of the numbers of rotations of the substrate holding portions are associated with combinations of set exhaust rates of the exhaust paths when solution treatment is performed by rotating the substrate by the substrate holding portion. According to the present invention, the cup body can be exhausted at an intended exhaust rate at all times independently of the state where the substrate in which cup body is subjected to which process.

Abstract: An anisotropic electrically conductive film formed by a thermosetting acrylic resin composition is disclosed. The composition contains at least a thermosetting agent (A), a thermo-settable ingredient (B), an acrylic rubber containing hydroxyl groups (C), organic fine particles (D) and electrically conductive particles (E). The thermo-settable ingredient (B) may include a phosphorus-containing acrylic ester (b1). The weight averaged molecular weight of the acrylic rubber containing the hydroxyl groups (C) is not less than 1000000. The organic fine particles (D) include polybutadiene-based fine particles (d1).

Abstract: In the present invention, a plurality of exhaust paths connected to a plurality of cup bodies surrounding substrate holding portions respectively are joined together for common use, and the openings of exhaust rate adjustment sections provided on the exhaust paths are adjusted with reference to data in which combinations of the numbers of rotations of the substrate holding portions are associated with combinations of set exhaust rates of the exhaust paths when solution treatment is performed by rotating the substrate by the substrate holding portion. According to the present invention, the cup body can be exhausted at an intended exhaust rate at all times independently of the state where the substrate in which cup body is subjected to which process.

Abstract: A priority control system includes a terminal, and a processing server coupled over a network. The processing server has an operation processing sections each of which executes a predetermined process, a communications device, a priority determination section, and a priority assignment section. The processing server also has priority information about priorities to be assigned according to a type of operation processing section. Each of the operation processing sections executes the predetermined process based on a packet, provided by the terminal, and generates screen information with a result of the predetermined process. The communications device transmits screen information with an assigned priority. The terminal receives the screen information transferred by a network device on the network in accordance with the priority, and displays the screen information.

Abstract: A vehicle environmental service system includes an in-vehicle information terminal mounted in a vehicle, a center server provided in a center, and a provider terminal managed by an affiliated service provider providing various services to users. The in-vehicle information terminal is capable of communicating with the provider terminal directly or through the center server. The in-vehicle information terminal or the center server has a point calculating unit for determining whether safety driving and/or ecological driving is being performed with respect to each of the users based on prescribed criteria and calculating the number of points to be awarded based on the result of the determination. The center server has a database for managing total number of points obtained by accumulating the number of points to be awarded with respect to each of the users.

Abstract: A traffic control system 100 includes: a quality measuring unit 110 that measures communication quality on a communication line A between a relay server 300 and a client terminal 400; an upstream specifying unit 111 that specifies an amount of streaming data, in a communication line B between a video streaming server 200 and the relay server 300, corresponding to an amount of screen information of a communication data amount accepted for the measured communication quality a of the communication line A; and an upstream control unit 112 that performs control such that an amount of video data to be distributed to the relay server 300 from the video streaming server 200 via the communication line B can be adjusted to the specified amount of streaming data.

Abstract: A coating and developing system for enabling maintenance of an exposure system combined therewith. The system carries a substrate, delivered to a carrier handling block, to a processing block to form a film thereon using a coating block included in the processing block. The substrate is carried through an interface block to the exposure system, the exposed substrate is processed by a developing process using a developing block included in the processing block and the processed substrate is returned to the carrier handling block. A direct carrying means is superposed on the coating block and the developing block to carry a substrate having a surface coated with a film from the carrier handling block directly to the interface block. A test substrate can be carried to the exposure system to inspect the condition of the exposure system even where the coating and developing blocks are under maintenance work.

Abstract: In a complex pipe, a plurality of pipe members containing at least a pipe member for liquid and a pipe member for electricity are fixed in parallel arrangement. One end of the complex pipe is connected to a stationary equipment and the other end is connected to a movable member. The plurality of pipe members are integrally combined by a cover member having flexibility. A liquid supply pipe is inserted with a space in the pipe member for liquid. A fluid for temperature adjustment is supplied to the space between the pipe member for liquid and the liquid supply pipe.

Abstract: A coating and developing system includes two rotating members 131 and 132 respectively having parallel horizontal axes of rotation and disposed longitudinally opposite to each other, a carrying passage forming mechanism 130 extended between the rotating members 131 and 132 to form a carrying passage, and capable of moving along an orbital path to carry a wafer W supported thereon along the carrying passage, a sending-in transfer unit 110 disposed at the upstream end of the carrying passage, a sending-out transfer unit 111 disposed at the downstream end of the carrying passage, a developer pouring nozzle 151 for pouring a developer onto the wafer W, a cleaning nozzle 152 for pouring a cleaning liquid onto the wafer W, and a gas nozzle 154 for blowing a gas against the wafer W.

Abstract: A coater/developer is disclosed that includes a heating module having a pair of rotary bodies configured to rotate about respective horizontal axles, the rotary bodies being spaced apart from each other in a direction along the conveyance path of a substrate so that the rotational axles thereof are parallel to each other; a conveyance path member engaged with and extended between the rotary bodies so as to move along an orbit, the conveyance path member forming a part of the conveyance path of the substrate placed on the conveyance path member; a first transfer part provided at the upstream end of the conveyance path; a second transfer part provided at the downstream end of the conveyance path; and a heating part provided between the upstream end and the downstream end of the conveyance path and configured to heat the substrate.

Abstract: In one or more embodiments, a microscope has a first pulsed laser and a second pulsed laser arranged to irradiate a specimen. Coherent Raman scattering light emanated from the irradiated specimen is extracted, along with multiphoton excitation fluorescence and a second harmonic wave. One or more detectors detect the extracted coherent Raman scattering light, the extracted fluorescence, and the second harmonic wave. A single specimen can simultaneously be observed with respect to either parallel or selective observations of the two-photon excitation fluorescence, the second harmonic wave, and the coherent Raman scattered light.

Abstract: A coating and developing system has a first processing block, a second processing block, and a transfer block interposed between the first and the second processing block. A first direct carrying means carries substrates from a carrier block to the transfer block. The transfer block distributes the substrates to respective film forming unit blocks of the first and the second processing block. Substrates on which films have been formed by the first and the second processing block are collected temporarily in the transfer block. A second direct carrying means carries the substrate collected in the transfer block from the transfer block to an interface block. Use of the first and the second processing block can improve the throughput of the coating and developing system. Since a carrying route from the carrier block to the first processing block, and a carrying route from the carrier block to the second processing block are the same, a carrying program is easy to create.