Abstract: A gas ejector of a gas supply apparatus includes a nozzle portion. The opening of a first-stage restricting cylinder constituting the nozzle portion has a circular cross-sectional shape with a diameter r1. A second-stage restricting cylinder is continuously formed with the first-stage restricting cylinder along a Z direction. The opening of the second-stage restricting cylinder has a circular cross-sectional shape with a diameter r2, and supplies a source gas supplied from the first-stage restricting cylinder to a low-vacuum processing chamber below. At this time, the diameter r2 is set to satisfy “r2>r1”.

Abstract: In an activated gas generation apparatus, metal electrodes are formed on a bottom surface of a dielectric electrode, and are disposed so as to face each other with a central region of the dielectric electrode interposed therebetween in plan view. The metal electrodes face each other along the Y direction. A wedge-shaped stepped part is provided so as to protrude upward in the central region on an upper surface of the dielectric electrode. The wedge-shaped stepped part is formed so as to have a shorter formation width in the Y direction as approaching each of a plurality of gas spray holes in plan view.

Abstract: A radiation imaging apparatus includes a housing including an incident surface of radiation, an imaging panel stored in the housing and including an effective region for detecting radiation incident through the incident surface, a buffer member arranged between the incident surface and the imaging panel, and an electrically conductive member fixed to the buffer member. An edge of the electrically conductive member surrounds an edge of the effective region in a planar view with respect to the incident surface.

Abstract: The present invention has an object to provide, as a film formation process system of remote plasma type, a radical gas generation system in which a process can be performed evenly on, for example, a target object having a large area through the use of a radical gas. In a radical gas generation system (500) according to the present invention, a process chamber apparatus (200) includes a table (201) that causes a target object (202) to rotate. A radical gas generator (100) includes a plurality of discharge cells (70). Each of the plurality of discharge cells (70) includes an opening (102). The opening (102) is connected to the inside of the process chamber apparatus (200) and faces the target object (202). Through the opening (102), a radical gas (G2) is output.

Abstract: A gas jetting apparatus capable of uniformly jetting, even onto a treatment-target object having a high-aspect-ratio groove, a gas into the groove. The gas jetting apparatus includes a gas jetting cell unit for jetting a gas toward a treatment-target object. The gas jetting cell unit includes a first cone-shaped member and a second cone-shaped member. A gap is formed between a side surface of a first cone shape and a side surface of the second cone-shaped member. Apex sides of the cone-shaped members face the treatment-target object.

Abstract: A first magnetic body is arranged between a coil and an image pickup element, and has an opening through which light directed from an imaging optical system toward the image pickup element passes. A second magnetic body is arranged at a position on the coil side with respect to the first magnetic body in an optical axis direction of the imaging optical system. The second magnetic body is arranged such that at least a portion thereof overlaps the first magnetic body when seen in the optical axis direction, at a position on the coil side with respect to the opening. The second magnetic body is made of a ferromagnetic material having higher relative permeability than that of the first magnetic body, and has a smaller area than that of the first magnetic body when seen in the optical axis direction.

Abstract: A power supply apparatus includes a controller that performs the following action. The controller determines a target direct-current electric amount value in accordance with an external input. Then, the controller performs feedback control in such a manner that an amount of direct-current electric power input to an inverter reaches the target direct-current electric amount value.

Abstract: To provide a manufacturing method of a membrane electrode assembly which improves the reliability of seal, mechanical strength, and handling ability of a solid polymer type fuel cell. The manufacturing method of a membrane electrode assembly according to the present invention prepares a membrane electrode assembly which differs in size of gas diffusion layers at an anode side and cathode side, provides the outer peripheral edge of the membrane electrode assembly with a resin frame by molding, and, at that time, provides projections or a concave part and convex part at a top mold and bottom mold used for the molding so as to keep to a minimum the penetration of the resin frame material to the gas diffusion layers and/or electrode layers and prevent warping of the outer peripheral edges of the larger gas diffusion layer etc.

Abstract: The present invention provides a gas jetting apparatus for a film formation apparatus. The gas jetting apparatus is capable of uniformly jetting, even onto a treatment-target object having a high-aspect-ratio groove, a gas into the groove. The gas jetting apparatus (100) according to the present invention includes a gas jetting cell unit (23) for rectifying a gas and jetting the rectified gas into the film formation apparatus (200). The gas jetting cell unit (23) has a fan shape internally formed with a gap (d0) serving as a gas route. A gas in a gas dispersion supply unit (99) enters from a wider-width side of the fan shape into the gap (d0), and, due to the fan shape, the gas is rectified, accelerated, and output from a narrower-width side of the fan shape into the film formation apparatus (200).

Abstract: An imaging apparatus includes a first magnetic core and a first coil wound around the first magnetic core, a second magnetic core and a second coil wound around the second magnetic core, an imaging element provided between the first coil and the second coil, and a magnetic member, wherein the magnetic member includes a first magnetic portion arranged between the first coil and one surface serving as a light-receiving surface side of the imaging element, a second magnetic portion arranged between the second coil and the other surface side opposite to the light-receiving surface side of the imaging element, and a third magnetic portion which connects the first magnetic portion and the second magnetic portion, and wherein the first magnetic portion is arranged so as to face the first magnetic core, and/or the second magnetic portion is arranged so as to face the second magnetic core.

Abstract: In an ozone generation apparatus, a discharge cell includes a first electrode part, a second electrode part, and a dielectric partition plate. The first electrode part and the second electrode part face each other, and the dielectric partition plate is provided between the first and second electrode parts.

Abstract: A power supply apparatus outputs an alternating-current voltage to a plasma generator being a capacitive load and the power supply apparatus has a configuration that a transformer included in the power supply apparatus has a secondary-side magnetizing inductance more than five times as great as a leakage inductance.

Abstract: An electric discharge generator and power supply device of electric discharge generator includes a radical gas generation apparatus, a process chamber apparatus, and an n-phase inverter power supply device. The radical gas generation apparatus is located adjacent to the process chamber apparatus. The radical gas generation apparatus includes a plurality of (n) discharge cells. The n-phase inverter power supply device includes a power supply circuit configuration offering a means to control output of n-phase alternating current voltages and variably controls, according to positions of the plurality of discharge cells, the alternating current voltages of different phases.

Abstract: A power supply apparatus includes a controller that performs the following action and resonance means for creating a resonance state between the power supply apparatus and a plasma generator. That is, the controller changes, when a value of electric power input equal to 100% (or a value of electric power input equal to or more than a threshold % and equal to or less than 100%) of a rated power is instructed, an inverter frequency and obtains an inverter output power factor for each of a plurality of inverter frequencies. Then, the controller determines, as a driving frequency of the inverter, one of the plurality of inverter frequencies at which the inverter output power factor is maximized.

Abstract: When an operation body is urged upward by a flat spring and is in a return position, a projection disposed on the operation body is held between opposing positioning portions and the position of the operation body in an X-direction is set. When the operation body is pressed at a position away from a central portion of the operation body in the X-direction, the operation body pivots on one of retaining structures downward. At this time, the projection moves away from the opposing positioning portions, and resistance against a pressing operation can thereby be reduced.

Abstract: A current-limiting reactor that regulates a short-circuit current, a controller that controls an action of an inverter, and a detection unit that detects a short circuit. The controller causes the inverter to stop when a short circuit has occurred.

Abstract: An imaging apparatus includes a first magnetic core and a first coil wound around the first magnetic core, a second magnetic core and a second coil wound around the second magnetic core, an imaging element provided between the first coil and the second coil, and a magnetic member, wherein the magnetic member includes a first magnetic portion arranged between the first coil and one surface serving as a light-receiving surface side of the imaging element, a second magnetic portion arranged between the second coil and the other surface side opposite to the light-receiving surface side of the imaging element, and a third magnetic portion which connects the first magnetic portion and the second magnetic portion, and wherein the first magnetic portion is arranged so as to face the first magnetic core, and/or the second magnetic portion is arranged so as to face the second magnetic core.

Abstract: To provide a manufacturing method of a membrane electrode assembly which improves the reliability of seal, mechanical strength, and handling ability of a solid polymer type fuel cell. The manufacturing method of a membrane electrode assembly according to the present invention prepares a membrane electrode assembly which differs in size of gas diffusion layers at an anode side and cathode side, provides the outer peripheral edge of the membrane electrode assembly with a resin frame by molding, and, at that time, provides projections or a concave part and convex part at a top mold and bottom mold used for the molding so as to keep to a minimum the penetration of the resin frame material to the gas diffusion layers and/or electrode layers and prevent warping of the outer peripheral edges of the larger gas diffusion layer etc.

Abstract: A first magnetic body is arranged between a coil and an image pickup element, and has an opening through which light directed from an imaging optical system toward the image pickup element passes. A second magnetic body is arranged at a position on the coil side with respect to the first magnetic body in an optical axis direction of the imaging optical system. The second magnetic body is arranged such that at least a portion thereof overlaps the first magnetic body when seen in the optical axis direction, at a position on the coil side with respect to the opening. The second magnetic body is made of a ferromagnetic material having higher relative permeability than that of the first magnetic body, and has a smaller area than that of the first magnetic body when seen in the optical axis direction.

Abstract: When an operation body is urged upward by a flat spring and is in a return position, a projection disposed on the operation body is held between opposing positioning portions and the position of the operation body in an X-direction is set. When the operation body is pressed at a position away from a central portion of the operation body in the X-direction, the operation body pivots on one of retaining structures downward. At this time, the projection moves away from the opposing positioning portions, and resistance against a pressing operation can thereby be reduced.