Patents by Inventor Shinichi Sekiguchi

Shinichi Sekiguchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10978315
    Abstract: The present invention relates to a vacuum evacuation system used to evacuate a processing gas from one or more process chambers for use in, for example, a semiconductor-device manufacturing apparatus. The vacuum evacuation system is a vacuum apparatus for evacuating a gas from a plurality of process chambers (1). The vacuum evacuation system includes a plurality of first vacuum pumps (5) coupled to the plurality of process chambers (1) respectively, a collecting pipe (7) coupled to the plurality of first vacuum pumps (5), and a second vacuum pump (8) coupled to the collecting pipe (7).
    Type: Grant
    Filed: May 28, 2015
    Date of Patent: April 13, 2021
    Assignee: EBARA CORPORATION
    Inventors: Atsushi Shiokawa, Tetsuro Sugiura, Shinichi Sekiguchi, Takashi Kyotani, Tetsuo Komai, Norio Kimura, Keiichi Ishikawa, Toru Osuga
  • Patent number: 10641272
    Abstract: A vacuum pump with abatement function which can prevent contamination of a process chamber without allowing products generated by exhaust gas treatment to flow back to the process chamber, and can reduce the amount of gas to be treated without allowing a purge gas and a diluent gas to be contained in an exhaust gas, and thus can achieve energy saving by reducing the amount of energy required for the exhaust gas treatment in an abatement part is disclosed. The vacuum pump with abatement function includes a vacuum pump to which at least one abatement part for treating an exhaust gas is attached. The vacuum pump comprises a dry vacuum pump having a pair of multistage pump rotors each of which comprises a plurality of rotors arranged on a rotating shaft, and the at least one abatement part is connected to an interstage of the multistage pump rotors.
    Type: Grant
    Filed: March 10, 2015
    Date of Patent: May 5, 2020
    Assignee: EBARA CORPORATION
    Inventors: Koichi Iwasaki, Hiroki Furuta, Keiichi Ishikawa, Tetsuo Komai, Shinichi Sekiguchi
  • Patent number: 10641256
    Abstract: A vacuum pump with abatement function which can prevent contamination of a process chamber without allowing products generated by exhaust gas treatment to flow back to the process chamber, and can reduce the amount of gas to be treated without allowing a purge gas and a diluent gas to be contained in an exhaust gas, and thus can achieve energy saving by reducing the amount of energy required for the exhaust gas treatment in an abatement part is disclosed. The vacuum pump with abatement function includes a vacuum pump to which at least one abatement part for treating an exhaust gas is attached. The vacuum pump comprises a dry vacuum pump having a main pump capable of evacuating gas from an atmospheric pressure and a booster pump for increasing an evacuation speed of the main pump, and the at least one abatement part for treating the exhaust gas is connected between the main pump and the booster pump.
    Type: Grant
    Filed: March 12, 2015
    Date of Patent: May 5, 2020
    Assignee: EBARA CORPORATION
    Inventors: Hiroki Furuta, Koichi Iwasaki, Keiichi Ishikawa, Tetsuo Komai, Shinichi Sekiguchi
  • Patent number: 10040026
    Abstract: The fan scrubber is provided with a casing having a gas draw-in port and a gas ejection port, a fan disposed in the casing, a nozzle from which a liquid is jetted into the casing, and a canned motor connected to the fan. The canned motor has a main shaft connected to the fan, a rotor which rotates integrally with the main shaft, a stator disposed on the periphery of the rotor, a motor casing in which the rotor and the stator are housed, and a can which partitions the interior of the motor casing into a rotor chamber in which the rotor is disposed and a stator chamber in which the stator is disposed.
    Type: Grant
    Filed: July 5, 2016
    Date of Patent: August 7, 2018
    Assignee: EBARA CORPORATION
    Inventors: Hiroki Furuta, Tetsuro Sugiura, Tetsuo Komai, Atsushi Oyama, Takashi Kyotani, Shinichi Sekiguchi, Takanori Inada
  • Publication number: 20170200622
    Abstract: The present invention relates to a vacuum evacuation system used to evacuate a processing gas from one or more process chambers for use in, for example, a semiconductor-device manufacturing apparatus. The vacuum evacuation system is a vacuum apparatus for evacuating a gas from a plurality of process chambers (1). The vacuum evacuation system includes a plurality of first vacuum pumps (5) coupled to the plurality of process chambers (1) respectively, a collecting pipe (7) coupled to the plurality of first vacuum pumps (5), and a second vacuum pump (8) coupled to the collecting pipe (7).
    Type: Application
    Filed: May 28, 2015
    Publication date: July 13, 2017
    Applicant: EBARA CORPORATION
    Inventors: Atsushi SHIOKAWA, Tetsuro SUGIURA, Shinichi SEKIGUCHI, Takashi KYOTANI, Tetsuo KOMAI, Norio KIMURA, Keiichi ISHIKAWA, Toru OSUGA
  • Publication number: 20170007961
    Abstract: The fan scrubber is provided with a casing having a gas draw-in port and a gas ejection port, a fan disposed in the casing, a nozzle from which a liquid is jetted into the casing, and a canned motor connected to the fan. The canned motor has a main shaft connected to the fan, a rotor which rotates integrally with the main shaft, a stator disposed on the periphery of the rotor, a motor casing in which the rotor and the stator are housed, and a can which partitions the interior of the motor casing into a rotor chamber in which the rotor is disposed and a stator chamber in which the stator is disposed.
    Type: Application
    Filed: July 5, 2016
    Publication date: January 12, 2017
    Applicant: EBARA CORPORATION
    Inventors: Hiroki FURUTA, Tetsuro SUGIURA, Tetsuo KOMAI, Atsushi OYAMA, Takashi KYOTANI, Shinichi SEKIGUCHI, Takanori INADA
  • Publication number: 20150260192
    Abstract: A vacuum pump with abatement function which can prevent contamination of a process chamber without allowing products generated by exhaust gas treatment to flow back to the process chamber, and can reduce the amount of gas to be treated without allowing a purge gas and a diluent gas to be contained in an exhaust gas, and thus can achieve energy saving by reducing the amount of energy required for the exhaust gas treatment in an abatement part is disclosed. The vacuum pump with abatement function includes a vacuum pump to which at least one abatement part for treating an exhaust gas is attached. The vacuum pump comprises a dry vacuum pump having a pair of multistage pump rotors each of which comprises a plurality of rotors arranged on a rotating shaft, and the at least one abatement part is connected to an interstage of the multistage pump rotors.
    Type: Application
    Filed: March 10, 2015
    Publication date: September 17, 2015
    Inventors: Koichi IWASAKI, Hiroki FURUTA, Keiichi ISHIKAWA, Tetsuo KOMAI, Shinichi SEKIGUCHI
  • Publication number: 20150260174
    Abstract: A vacuum pump with abatement function which can prevent contamination of a process chamber without allowing products generated by exhaust gas treatment to flow back to the process chamber, and can reduce the amount of gas to be treated without allowing a purge gas and a diluent gas to be contained in an exhaust gas, and thus can achieve energy saving by reducing the amount of energy required for the exhaust gas treatment in an abatement part is disclosed. The vacuum pump with abatement function includes a vacuum pump to which at least one abatement part for treating an exhaust gas is attached. The vacuum pump comprises a dry vacuum pump having a main pump capable of evacuating gas from an atmospheric pressure and a booster pump for increasing an evacuation speed of the main pump, and the at least one abatement part for treating the exhaust gas is connected between the main pump and the booster pump.
    Type: Application
    Filed: March 12, 2015
    Publication date: September 17, 2015
    Inventors: Hiroki FURUTA, Koichi IWASAKI, Keiichi ISHIKAWA, Tetsuo KOMAI, Shinichi SEKIGUCHI
  • Patent number: 8172515
    Abstract: A turbo vacuum pump comprising a suction part 23A that sucks gas in an axial direction; a discharge part 50 that discharges the gas sucked by the suction part 23A, the discharge part 50 having a plurality of rotating impellers 70, 80 and a stationary impeller 71 arranged so as to be opposed to each of the plurality of rotating impellers 70, 80; and a rotating shaft 21 that rotates the plurality of rotating impellers 70, 80, wherein the plurality of rotating impellers 70, 80 include at least one stage of a first turbine impeller 70 for discharging the sucked gas in the axial direction, the first turbine impeller 70 being fixed to a suction-part-side end face 15 of the rotating shaft 21, and at least one stage of a second turbine impeller 80 fixed to the rotating shaft 21 that extends through the second turbine impeller 80, the second turbine impeller 80 being arranged downstream of the first turbine impeller 70.
    Type: Grant
    Filed: February 4, 2009
    Date of Patent: May 8, 2012
    Assignee: Ebara Corporation
    Inventors: Hiroyasu Kawashima, Shinichi Sekiguchi
  • Patent number: 8066495
    Abstract: A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.
    Type: Grant
    Filed: November 6, 2009
    Date of Patent: November 29, 2011
    Assignee: Ebara Corporation
    Inventors: Shinichi Sekiguchi, Hiroaki Ogamino, Hiroyasu Kawashima
  • Patent number: 7938619
    Abstract: A turbo vacuum pump of the present invention includes a suction part for sucking gas in an axial direction; a discharge section in which rotating impellers and stationary impellers are alternately arranged; a rotating shaft for rotating the rotating impellers; and a turbine impeller part fixed to the suction side end face of the rotating shaft. The rotating impellers include one or more turbine impellers for discharging the sucked gas in the axial direction, and one or more centrifugal impellers, located downstream of the one or more turbine impellers, for further discharging the discharged gas by a centrifugal drag effect. The one or more centrifugal impellers are fixed to the rotating shaft passing therethrough. The one or more turbine impellers are included in the turbine impeller part.
    Type: Grant
    Filed: January 23, 2009
    Date of Patent: May 10, 2011
    Assignee: Ebara Corporation
    Inventors: Hiroyuki Kawasaki, Shinichi Sekiguchi
  • Patent number: 7717684
    Abstract: A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.
    Type: Grant
    Filed: August 19, 2004
    Date of Patent: May 18, 2010
    Assignee: Ebara Corporation
    Inventors: Shinichi Sekiguchi, Hiroaki Ogamino, Hiroyasu Kawashima
  • Publication number: 20100047096
    Abstract: A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.
    Type: Application
    Filed: November 6, 2009
    Publication date: February 25, 2010
    Applicant: EBARA CORPORATION
    Inventors: Shinichi Sekiguchi, Hiroaki Ogamino, Hiroyasu Kawashima
  • Patent number: 7645116
    Abstract: A turbo vacuum pump of the present invention includes a suction part for sucking gas in an axial direction; a discharge section in which rotating impellers and stationary impellers are alternately arranged; a rotating shaft for rotating the rotating impellers; and a turbine impeller part fixed to the suction side end face of the rotating shaft. The rotating impellers include one or more turbine impellers for discharging the sucked gas in the axial direction, and one or more centrifugal impellers, located downstream of the one or more turbine impellers, for further discharging the discharged gas by a centrifugal drag effect. The one or more centrifugal impellers are fixed to the rotating shaft passing therethrough. The one or more turbine impellers are included in the turbine impeller part.
    Type: Grant
    Filed: April 27, 2006
    Date of Patent: January 12, 2010
    Assignee: Ebara Corporation
    Inventors: Hiroyuki Kawasaki, Shinichi Sekiguchi
  • Patent number: 7645126
    Abstract: To provide a vacuum pump capable of evacuating in pressure ranges from an atmospheric pressure to a high vacuum, capable of rotating at a high speed to be downsized and improved in pumping performance, and capable of producing a completely oil-free vacuum. A vacuum pump for exhausting a gas comprises: a main shaft 5 rotatably supported by a bearing 22; a motor 23 for driving the main shaft 5 for rotation; a first exhaust section 10 having a first rotary vane 13 attached to the main shaft 5, a first fixed vane 14 fixed in a first casing 12, and an intake port 11; and a second exhaust section 30 having a second rotary vane 33 attached to the main shaft 5, a second fixed vane 34 fixed in a second casing 32, and an exhaust port 31. The intake port 11 is located in the vicinity of an end of the main shaft 5, and the first exhaust section 10, the bearing 22 and the second exhaust section 30 are arranged in this order axially along the main shaft 5.
    Type: Grant
    Filed: July 9, 2004
    Date of Patent: January 12, 2010
    Assignee: Ebara Corporation
    Inventors: Shinichi Sekiguchi, Matsutaro Miyamoto
  • Publication number: 20090196734
    Abstract: A turbo vacuum pump comprising a suction part 23A that sucks gas in an axial direction; a discharge part 50 that discharges the gas sucked by the suction part 23A, the discharge part 50 having a plurality of rotating impellers 70, 80 and a stationary impeller 71 arranged so as to be opposed to each of the plurality of rotating impellers 70, 80; and a rotating shaft 21 that rotates the plurality of rotating impellers 70, 80, wherein the plurality of rotating impellers 70, 80 include at least one stage of a first turbine impeller 70 for discharging the sucked gas in the axial direction, the first turbine impeller 70 being fixed to a suction-part-side end face 15 of the rotating shaft 21, and at least one stage of a second turbine impeller 80 fixed to the rotating shaft 21 that extends through the second turbine impeller 80, the second turbine impeller 80 being arranged downstream of the first turbine impeller 70.
    Type: Application
    Filed: February 4, 2009
    Publication date: August 6, 2009
    Applicant: EBARA CORPORATION
    Inventors: Hiroyasu Kawashima, Shinichi Sekiguchi
  • Publication number: 20090142183
    Abstract: A turbo vacuum pump of the present invention includes a suction part for sucking gas in an axial direction; a discharge section in which rotating impellers and stationary impellers are alternately arranged; a rotating shaft for rotating the rotating impellers; and a turbine impeller part fixed to the suction side end face of the rotating shaft. The rotating impellers include one or more turbine impellers for discharging the sucked gas in the axial direction, and one or more centrifugal impellers, located downstream of the one or more turbine impellers, for further discharging the discharged gas by a centrifugal drag effect. The one or more centrifugal impellers are fixed to the rotating shaft passing therethrough. The one or more turbine impellers are included in the turbine impeller part.
    Type: Application
    Filed: January 23, 2009
    Publication date: June 4, 2009
    Inventors: Hiroyuki Kawasaki, Shinichi Sekiguchi
  • Publication number: 20080142617
    Abstract: A spray device which can spray a liquid without using a pump and does not cause dripping of a material liquid at a spray port is provided. The spray device comprises a housing 2, a material liquid tank 6 attached to or stored in the housing 2 and reserving a predetermined material liquid, a spray portion 20 having a spray port for spraying the material liquid to the outside, a liquid passage 8 having the material liquid tank 6 communicate with the spray portion 20, and liquid passing adjusting unit 10 for applying resistance to a flow of the material liquid in the liquid passage 8, and the liquid passage 8 is arranged so that the flow direction of the material liquid in the liquid passage 8 is coaxial with the spray direction of the spray portion 20.
    Type: Application
    Filed: October 5, 2005
    Publication date: June 19, 2008
    Inventors: Shoji Kasuya, Hiroshi Hashimoto, Shinichi Sekiguchi
  • Publication number: 20070048145
    Abstract: A vacuum evacuation device 2 of the invention comprises a vacuum pump 4,5 for exhausting a gas G2 in a process chamber 21 into which a process gas G1 is introduced and in which a process reaction is performed, to form a vacuum in said process chamber 21; and a control means 6 for performing a first control that regulates the rotational speed of said vacuum pump 4,5 such that a pressure condition in said process chamber 21 reaches a pressure condition suitable for said process reaction during said process reaction, wherein said control means 6 calculates a specified rotational speed for said vacuum pump 4,5 based on process information related to said process reaction, and performs a second control that brings said vacuum pump 4,5 to said specified rotational speed before said first control. The vacuum evacuation device 2 is capable of bringing the pressure in a process chamber 21 to the target pressure in a short period without a vacuum pump 4,5 being overloaded, regardless of the process reaction condition.
    Type: Application
    Filed: August 10, 2006
    Publication date: March 1, 2007
    Inventors: Katsutoshi Ishii, Ken Nakao, Takanobu Asano, Kota Umezawa, Hiroaki Ogamino, Tadashi Urata, Katsuaki Usui, Masafumi Inoue, Shinichi Sekiguchi, Hironobu Yamasaki
  • Publication number: 20060263205
    Abstract: A turbo vacuum pump 1 of the present invention comprises a suction part 23A for sucking gas in an axial direction; a discharge section 50 in which rotating impellers 70, 24 and stationary impellers 71, 28 are alternately arranged; a rotating shaft 21 for rotating said rotating impellers 70, 24; a turbine impeller part 73 fixed to the suction part side end face 15 of said rotating shaft 21; said rotating impellers 70,24 including one or more turbine impellers 70 for discharging said sucked gas in said axial direction, and one or more centrifugal impellers 24, located downstream of said one or more turbine impellers 70, for further discharging said discharged gas by a centrifugal drag effect; and said one or more centrifugal impellers 24 being fixed to said rotating shaft 21 passing therethrough; said one or more turbine impellers 70 being included in said turbine impeller part 73.
    Type: Application
    Filed: April 27, 2006
    Publication date: November 23, 2006
    Inventors: Hiroyuki Kawasaki, Shinichi Sekiguchi