Abstract: A turbo vacuum pump comprising a suction part 23A that sucks gas in an axial direction; a discharge part 50 that discharges the gas sucked by the suction part 23A, the discharge part 50 having a plurality of rotating impellers 70, 80 and a stationary impeller 71 arranged so as to be opposed to each of the plurality of rotating impellers 70, 80; and a rotating shaft 21 that rotates the plurality of rotating impellers 70, 80, wherein the plurality of rotating impellers 70, 80 include at least one stage of a first turbine impeller 70 for discharging the sucked gas in the axial direction, the first turbine impeller 70 being fixed to a suction-part-side end face 15 of the rotating shaft 21, and at least one stage of a second turbine impeller 80 fixed to the rotating shaft 21 that extends through the second turbine impeller 80, the second turbine impeller 80 being arranged downstream of the first turbine impeller 70.

Abstract: A turbo vacuum pump of the present invention includes a suction part for sucking gas in an axial direction; a discharge section in which rotating impellers and stationary impellers are alternately arranged; a rotating shaft for rotating the rotating impellers; and a turbine impeller part fixed to the suction side end face of the rotating shaft. The rotating impellers include one or more turbine impellers for discharging the sucked gas in the axial direction, and one or more centrifugal impellers, located downstream of the one or more turbine impellers, for further discharging the discharged gas by a centrifugal drag effect. The one or more centrifugal impellers are fixed to the rotating shaft passing therethrough. The one or more turbine impellers are included in the turbine impeller part.

Abstract: A spray device which can spray a liquid without using a pump and does not cause dripping of a material liquid at a spray port is provided. The spray device comprises a housing 2, a material liquid tank 6 attached to or stored in the housing 2 and reserving a predetermined material liquid, a spray portion 20 having a spray port for spraying the material liquid to the outside, a liquid passage 8 having the material liquid tank 6 communicate with the spray portion 20, and liquid passing adjusting unit 10 for applying resistance to a flow of the material liquid in the liquid passage 8, and the liquid passage 8 is arranged so that the flow direction of the material liquid in the liquid passage 8 is coaxial with the spray direction of the spray portion 20.

Abstract: A vacuum evacuation device 2 of the invention comprises a vacuum pump 4,5 for exhausting a gas G2 in a process chamber 21 into which a process gas G1 is introduced and in which a process reaction is performed, to form a vacuum in said process chamber 21; and a control means 6 for performing a first control that regulates the rotational speed of said vacuum pump 4,5 such that a pressure condition in said process chamber 21 reaches a pressure condition suitable for said process reaction during said process reaction, wherein said control means 6 calculates a specified rotational speed for said vacuum pump 4,5 based on process information related to said process reaction, and performs a second control that brings said vacuum pump 4,5 to said specified rotational speed before said first control. The vacuum evacuation device 2 is capable of bringing the pressure in a process chamber 21 to the target pressure in a short period without a vacuum pump 4,5 being overloaded, regardless of the process reaction condition.

Abstract: A turbo vacuum pump 1 of the present invention comprises a suction part 23A for sucking gas in an axial direction; a discharge section 50 in which rotating impellers 70, 24 and stationary impellers 71, 28 are alternately arranged; a rotating shaft 21 for rotating said rotating impellers 70, 24; a turbine impeller part 73 fixed to the suction part side end face 15 of said rotating shaft 21; said rotating impellers 70,24 including one or more turbine impellers 70 for discharging said sucked gas in said axial direction, and one or more centrifugal impellers 24, located downstream of said one or more turbine impellers 70, for further discharging said discharged gas by a centrifugal drag effect; and said one or more centrifugal impellers 24 being fixed to said rotating shaft 21 passing therethrough; said one or more turbine impellers 70 being included in said turbine impeller part 73.

Abstract: A diluent passage 12 to introduce special liquid and a rinse liquid supply passage 13 which is separate from the diluent passage 12 are formed in the main body 10, and a plurality of jets are disposed at a cylindrical dial 18. A water convey passage is formed to connect two positions at the rinse liquid supply passage 13 where pressure difference occurs therebetween to the other jets 19b, 19c except the jet 19a through which the special liquid is introduced. When water flows in the rinse liquid supply passage 13, the water is introduced to the water convey passage due to the pressure difference of the rinse liquid supply passage 13. The water rinses the other jets 19b, 19c except for the jet 19a through which the special liquid is introduced. Therefore, adjusting changes or choking of the jets 19b, 19c which have not been used for a considerable time can be prevented.

Abstract: A diluent passage 12 to introduce special liquid and a rinse liquid supply passage 13 which is separate from the diluent passage 12 are formed in the main body 10, and a plurality of jets are disposed at a cylindrical dial 18. A water convey passage is formed to connect two positions at the rinse liquid supply passage 13 where pressure difference occurs therebetween to the other jets 19b, 19c except the jet 19a through which the special liquid is introduced. When water flows in the rinse liquid supply passage 13, the water is introduced to the water convey passage due to the pressure difference of the rinse liquid supply passage 13. The water rinses the other jets 19b, 19c except for the jet 19a through which the special liquid is introduced. Therefore, adjusting changes or choking of the jets 19b, 19c which have not been used for a considerable time can be prevented.

Abstract: A liquid diluting device, with a small and simple structure, is capable of reliably sealing and simply changing dilution concentration. Diluent passages are formed in a first body, and a connecting passage for introducing special liquid connects to these diluent passages. A cylindrical dial covering an opening section of the connecting passage is rotatably provided on an outer section of the first body, a plurality of jets passing through from the inside to the outside are formed in conjunction with this cylindrical dial, and the diameters of the plurality of jets are different. A liquid supply passage is set at a position opposite the connecting passage, so that the cylindrical dial is sandwiched between the liquid supply passage and the connecting passage, and the connecting passage and the liquid supply passage are connected by a jet having a diameter matching the dilution factor to introduce special liquid from the liquid supply passage to one of the diluent passages.

Abstract: A liquid dilution device is provided to prevent choking at a jet for adjusting the flow amount of a special liquid. In the liquid dilution device in which the special liquid from a liquid supply passage 33 of a liquid intake device 29, is introduced to a diluent passage 12 formed in a main body 10 through a jet 22, an air intake opening 37 and a plug 38 to open and close the air intake opening 37 are provided at the liquid intake device 29 to connect the liquid supply passage 33 and atmospheric air. At the state that air from the air intake opening can be introduced to the diluent passage 12 through the jet 22 with the plug 38 opened, high velocity air passes through the jet 22 due to negative pressure generated at the diluent passage 12, by making water pass through the diluent passage 12. Due to the high velocity air, the special liquid stuck to the jet 22 is removed and the jet 22 is cleaned.

Abstract: A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.

Abstract: To provide a vacuum pump capable of evacuating in pressure ranges from an atmospheric pressure to a high vacuum, capable of rotating at a high speed to be downsized and improved in pumping performance, and capable of producing a completely oil-free vacuum. A vacuum pump for exhausting a gas comprises: a main shaft 5 rotatably supported by a bearing 22; a motor 23 for driving the main shaft 5 for rotation; a first exhaust section 10 having a first rotary vane 13 attached to the main shaft 5, a first fixed vane 14 fixed in a first casing 12, and an intake port 11; and a second exhaust section 30 having a second rotary vane 33 attached to the main shaft 5, a second fixed vane 34 fixed in a second casing 32, and an exhaust port 31. The intake port 11 is located in the vicinity of an end of the main shaft 5, and the first exhaust section 10, the bearing 22 and the second exhaust section 30 are arranged in this order axially along the main shaft 5.

Abstract: A liquid diluting device, with a small and simple structure, is capable of reliably sealing and simply changing dilution concentration. Diluent passages are formed in a first body, and a connecting passage for introducing special liquid connects to these diluent passages. A cylindrical dial covering an opening section of the connecting passage is rotatably provided on an outer section of the first body, a plurality of jets passing through from the inside to the outside are formed in conjunction with this cylindrical dial, and the diameters of the plurality of jets are different. A liquid supply passage is set at a position opposite the connecting passage, so that the cylindrical dial is sandwiched between the liquid supply passage and the connecting passage, and the connecting passage and the liquid supply passage are connected by a jet having a diameter matching the dilution factor to introduce special liquid from the liquid supply passage to one of the diluent passages.

Abstract: An excimer laser apparatus in which deterioration of the laser gas in the laser container can be suppressed, and damage to the magnetic bearings caused by the laser gas can be suppressed, and which can be reduced in size and operated efficiently, and has low power consumption. Each electromagnet (stator) (7-1) of a magnetic bearing (7) for supporting a rotary shaft (4) of a circulation fan 3 includes excitation coils. Each of the coils is arranged as one unit by embedding a coil body in a ceramic or glass type hardened material which is non-magnetic and has corrosion resistance against a laser gas. The excitation coils are attached to magnetic poles. Alternatively, coil wires (108b) of a radial magnetic bearing (108) can be isolated from a corrosive atmosphere by means of a separation wall (124) while projecting portions of cores (108b) extend through the separation wall (124) and are exposed toward a magnetic bearing rotor (108f).

Abstract: A liquid diluting device, with a small and simple structure, is capable of reliably sealing and simply changing dilution concentration. Diluent passages are formed in a first body, and a connecting passage for introducing special liquid connects to these diluent passages. A cylindrical dial covering an opening section of the connecting passage is rotatably provided on an outer section of the first body, a plurality of jets passing through from the inside to the outside are formed in conjunction with this cylindrical dial, and the diameters of the plurality of jets are different. A liquid supply passage is set at a position opposite the connecting passage, so that the cylindrical dial is sandwiched between the liquid supply passage and the connecting passage, and the connecting passage and the liquid supply passage are connected by a jet having a diameter matching the dilution factor to introduce special liquid from the liquid supply passage to one of the diluent passages.

Abstract: There is provided an electric discharge gas laser comprising a housing, a rotating fan, a bearing device and a control. The housing contains a laser gas. The rotating fan is provided in the housing to circulate the gas in the housing. The bearing device magnetically supports a rotating shaft. The bearing device is provided with a sensor device comprising a sensor and a signal processor. The sensor senses the position of the rotating shaft to generate signals indicating the position of the rotating shaft. The signal processor receives and processes the signals delivered from the sensor to output processed signals. The control is separated from the bearing device and is functionally associated with the bearing device to receive the processed signal from the sensor device for controlling the bearing device on the basis of the processed signals.

Abstract: A gas transfer machine for use as a vacuum pump, for example, has a pump rotor mounted on a rotatable shaft for transferring a gas, and a reluctance-type motor for rotating the rotatable shaft. The reluctance-type motor has a stator, a motor rotor surrounded by the stator, and a shield member isolating the stator from the motor rotor. The motor rotor is directly coupled to the rotatable shaft and has a plurality of magnetic salient poles.

Abstract: A discharge-pumped excimer laser device has a casing, a pair main discharge electrodes, a cross-flow fan for producing a high-speed laser gas flow between the main discharge electrodes, the cross-flow fan having a rotatable shaft projecting from opposite ends thereof, magnetic bearings, the rotatable shaft being rotatably supported by the bearings, protective bearings for supporting the rotatable shaft when the magnetic bearings are not in operation, and a motor for actuating the cross-flow fan. The magnetic bearings include radial magnetic bearings disposed on the opposite ends of the rotatable shaft. One of the radial magnetic bearings which is disposed closely to the motor has a bearing rigidity greater than the bearing rigidity of the magnetic bearing that is disposed remotely from the motor.

Abstract: There is provided a magnetic bearing in which a magnetic gap between magnetic pole faces of the stator and the rotor can be reduced, and which is reduced in size and has excellent corrosion resistance. This magnetic bearing comprises: a magnetic bearing rotor 16 provided on the rotary shaft; and a magnetic bearing stator 41 provided around the magnetic bearing rotor, wherein the magnetic bearing stator comprises: a stator core 42 having magnetic pole faces exposed toward the magnetic bearing rotor; excitation coils 43a attached to the stator core; and corrosion-resistant members 43 for shielding the excitation coils 43a from a corrosive atmosphere. The corrosion-resistant member can be formed by molding a ceramic or glass type hardenable material in a state such that the excitation coil 43a is embedded therein. The corrosion-resistant member may comprise a case 43c formed from the corrosion-resistant material.

Abstract: A liquid dilution device is provided to prevent choking at a jet for adjusting the flow amount of a special liquid. In the liquid dilution device in which the special liquid from a liquid supply passage 33 of a liquid intake device 29, is introduced to a diluent passage 12 formed in a main body 10 through a jet 22, an air intake opening 37 and a plug 38 to open and close the air intake opening 37 are provided at the liquid intake device 29 to connect the liquid supply passage 33 and atmospheric air. At the state that air from the air intake opening can be introduced to the diluent passage 12 through the jet 22 with the plug 38 opened, high velocity air passes through the jet 22 due to negative pressure generated at the diluent passage 12, by making water pass through the diluent passage 12. Due to the high velocity air, the special liquid stuck to the jet 22 is removed and the jet 22 is cleaned.

Abstract: There is provided an excimer laser apparatus in which deterioration of the laser gas in the laser container can be suppressed, and damage to the magnetic bearings caused by the laser gas can be suppressed, and which can be reduced in size and operated efficiently, and has a low power consumption. Each electromagnet (stator) 7-1 of a magnetic bearing 7 for supporting a rotary shaft 4 of a circulation fan 3 includes excitation coils, each of which is arranged as one unit by embedding a coil body in a ceramic or glass type hardened material which is nonmagnetic and has corrosion resistance against a laser gas. The excitation coils are attached to magnetic poles comprising magnetic bodies. Alternatively, an arrangement may be made, such that coil wires 108b of a radial magnetic bearing 108 are isolated from a corrosive atmosphere by means of a separation wall 124 while projecting portions of cores 108b extend through the separation wall 124 and are exposed toward a magnetic bearing rotor 108f.