Abstract: The present invention provides a discharge-pumped excimer laser device which includes a laser chamber filled with a laser gas that is deteriorated to a small extent, magnetic bearings and a motor that are resistant to the entry of dust particles, and parts that are held in contact with the laser gas and suffer little damage, and has a long service life.

Abstract: A magnetic bearing enables to rotatably support a levitated body non-contactingly disposed in a hermetically sealed container filled with a gaseous process substance of a corrosive nature, while without contaminating the gaseous environment and suffering from corrosion. The magnetic bearing has an electromagnet for supporting a levitated body, a displacement sensor for detecting a levitated position of the levitated body, and a controller for supplying signals and excitation currents to the displacement sensor and the electromagnet through cables. An electromagnet target of the magnetic bearing that generates variations in magnetic fields due to rotation of the levitated body, is constructed of a single piece of ferromagnetic material, and is provided with an electrical insulation structure oriented parallel to magnetic fluxes generated by the electromagnet.

Abstract: A circulation fan apparatus including a hermetic vessel 1 containing a corrosive process gas therein, and a circulation fan 2 installed in the hermetic vessel, rotors 2-1, 2-2 of the circulation fan are rotatably supported by bearings, wherein the bearings comprises control-type radial magnetic bearings 4, 5 and at least control-type axial magnetic bearing 6, 7, displacement sensor targets 4-1, 5-1, 6-1, and 7-1 and rotor-side magnetic poles 4-2, 5-2, 6-2, and 7-2 of radial magnetic bearings 4 and 5 and axial magnetic bearings 6 and 7 are fixed to the rotors 2-1 and 2-2 of the circulation fan 2 and are disposed in the hermetic space communicating with the hermetic vessel, and displacement sensors 4-3, 5-3, 6-3, and 7-3 and stator-side magnetic poles 4-4, 5-4, 6-4, and 7-4 opposing the displacement sensor targets and rotor-side magnetic poles are disposed outside of the hermetic vessel with cans 14, 15, 17, and 18 interposed therebetween, whereby even when the circulation fan 2 is rotated at a high speed and u

Abstract: A magnetic bearing device for use with a motor-combined structure having magnetic bearings supporting a rotatable shaft out of contact therewith and a motor for rotating the rotatable shaft. A common power supply supplies electric power to the magnetic bearings and the motor, and a motor drive power supply limits variations of the electric power supplied to the motor to at most a predetermined level with respect to variations of electric power supplied to the common power supply.

Abstract: A liquid diluting device, with a small and simple structure, is capable of reliably sealing and simply changing dilution concentration. Diluent passages are formed in a first body, and a connecting passage for introducing special liquid connects to these diluent passages. A cylindrical dial covering an opening section of the connecting passage is rotatably provided on an outer section of the first body, a plurality of jets passing through from the inside to the outside are formed in conjunction with this cylindrical dial, and the diameters of the plurality of jets are different. A liquid supply passage is set at a position opposite the connecting passage, so that the cylindrical dial is sandwiched between the liquid supply passage and the connecting passage, and the connecting passage and the liquid supply passage are connected by a jet having a diameter matching the dilution factor to introduce special liquid from the liquid supply passage to one of the diluent passages.

Abstract: An excimer laser apparatus comprises a container sealing a laser gas including a halogen gas therein, a pair of discharge electrodes disposed in the container for inducing an electric discharge capable of oscillating a laser light, and a circulating fan with a shaft for producing a high-speed laser gas stream between a pair of the discharge electrodes. Both ends of the shaft are rotatably supported by rotor-stator mechanisms, or one end of the shaft is rotatably supported by a rotor-stator mechanism, and the other end of the shaft is supported by a magnetic bearing. The rotor-stator mechanism comprises a rotor attached to the shaft of the circulating fan, a stator provided at a position opposed to the rotor, an electric motor winding provided in the stator for applying torque to the rotor, and a position control winding provided in the stator for producing a magnetic force to levitate and support the rotor.

Abstract: An excimer laser device which is capable of keeping the rotational speed of a fan constant and uniformizing a laser gas flow between main discharge electrodes even when the pressure of a laser gas filled in a casing varies. The excimer laser device includes a casing filled with a laser gas; a pair of main discharge electrodes disposed in the casing for producing an electric discharge to discharge-pump the laser gas at a high repetition rate; a fan for producing a high-speed laser gas flow between the main discharge electrodes; bearings, the fan having a rotatable shaft rotatably supported by the bearings; a motor for actuating the fan; a rotational speed detecting device for detecting a rotational speed of the fan; and control device for controlling at least one of a voltage and a frequency to be supplied to the motor based on the rotational speed of the fan detected by the rotational speed detecting device, thereby to control the rotational speed of the fan at a constant level.

Abstract: A control apparatus in a magnetic levitation system for controlling attraction and/or repulsion forces created from a pair of electromagnets to levitate an object therebetween at a predetermined target position in a contactless manner, in response to a displacement of the object from the target position. The control apparatus includes a start/stop detector, a phase compensation circuit, an integrator, and a switching circuit. The start/stop detector detects a start and stop of a levitation control procedure and generates a control signal having a predetermined time duration when either of the start and stop of the levitation control procedure is detected. The compensation circuit provides a compensation signal to compensate AC currents flowing through the electromagnet so that the displacement of the object from the target position becomes zero. The integrator integrates the compensation signal.

Abstract: There is provided an electric discharge gas laser comprising a housing containing a laser gas; a rotating fan provided in the housing to circulate the gas in the housing; a bearing device for magnetically supporting a rotating shaft of the rotating, the bearing device being provided with a sensor device comprising a sensor for sensing the position of the rotating shaft to generate signals indicating the position of the rotating shaft, and a signal processor for receiving and processing the signals delivered from the sensor to output processed signals; and a control separated from the bearing device and functionally associated with the bearing device to receive the processed signals from the sensor device for controlling the bearing device on the basis of the processed signals.

Abstract: A magnetic bearing device has an electromagnet for levitating an object under electromagnetic forces, a displacement sensor for detecting the displacement of the levitated object, a controller for supplying a signal to the displacement sensor through a cable and a current to the electromagnet through a cable, and a protective plate of nonmagnetic metal material disposed between the displacement sensor and the levitated object. The controller includes a levitation control system having a noise removing filter for preventing an abnormal signal caused by the protective plate from being applied to the displacement sensor.

Abstract: A magnetic bearing enables to rotatably support a levitated body non-contactingly disposed in a hermetically sealed container filled with a gaseous process substance of a corrosive nature, while without contaminating the gaseous environment and suffering from corrosion. The magnetic bearing has an electromagnet for supporting a levitated body, a displacement sensor for detecting a levitated position of the levitated body, and a controller for supplying signals and excitation currents to the displacement sensor and the electromagnet through cables. An electromagnet target of the magnetic bearing that generates variations in magnetic fields due to rotation of the levitated body, is constructed of a single piece of ferromagnetic material, and is provided with an electrical insulation structure oriented parallel to magnetic fluxes generated by the electromagnet.

Abstract: A multiple-disc clutch type electronically controlled differential limiting device comprises a differential gear, a hydraulically actuated multiple-disc clutch operably disposed between a differential case and a differential side gear to produce, a differential limiting torque by engagement of the clutch, and a differential limiting controller which derives a wheel-speed difference between-right and left driven wheels and hydraulically controls an engaging force of the clutch to increasingly compensate the engaging force in accordance with an increase in the wheel-speed difference. A torsional damper is internally accommodated in the associated drive shaft. A resonance frequency of the torsional damper is set to be equal to a resonance frequency of a torsional vibration system which is constructed by a peripheral member of the differential acting as a mass moment of inertia with respect to the axis of the associated drive shaft and each drive shaft acting as a torsional spring.