Abstract: An imprint system has a design data storing section which stores template information and remaining film thickness set value information, a vaporization-to-be-compensated storing section which stores a plurality of distributions of applied amounts for compensating vaporization, an arithmetic section which calculates a distribution of an applied amount for filling a pattern based upon said template information, calculates a distribution of an applied amount for forming a remaining film thickness based upon said remaining film thickness set value information, calculates a pattern density of the template from said template information, extracts a distribution of an applied amount for compensating vaporization, corresponding to this pattern density, from said vaporization-to-be-compensated storing section, and adds up this extracted distribution of an applied amount for compensating vaporization, said distribution of an applied amount for filling a pattern, and said distribution of an applied amount for forming a

Abstract: An imprint method, in which pattern forming is performed by having a light curable material applied on a sample face of a substrate being a processing target hardened by being exposed to light in a state where the light curable material and a pattern formed surface of a template contact each other, the pattern formed surface having a concave-convex pattern formed thereon; wherein in one exposure performed with respect to a predetermined shot of the light curable material, an exposure amount at a light curable material on a first region which contacts a pattern formed region including the concave-convex pattern of the template is greater than an exposure amount at a light curable material on a second region which at least contacts a part of a pattern periphery region of the template, the pattern periphery region existing in a periphery of the pattern formed region of the template.

Abstract: A noble metal fine particle support and method of manufacturing the same are provided, in which noble metal fine particles are supported without unevenness on the surface of a substrate and that has almost no limitation on the type of the substrate. The present invention provides a noble metal fine particle support in which a substrate surface is coated with an amino compound, and noble metal fine particles are supported on the coating. The invention also provides a method of manufacturing a noble metal fine particle support, including coating the surface of a substrate with an amino compound to provide a positive charge for the surface, and contacting the substrate and a solution in which noble metal fine particles having a negative charge is dispersed, to cause the substrate to support the noble metal fine particles.