Abstract: A plasma processing method includes: providing a substrate including a silicon-containing film and a mask film having an opening pattern, on a substrate support; and etching the silicon-containing film using the mask film as a mask, with a plasma generated by a plasma generator provided in the chamber. The etching includes: supplying a processing gas containing one or more gases including carbon, hydrogen, and fluorine into the chamber; generating a plasma from the processing gas by supplying a source RF signal to the plasma generator; and supplying a bias RF signal to the substrate support unit. In the etching, the silicon-containing film is etched by at least hydrogen fluoride generated from the processing gas, while forming a carbon-containing film on at least a part of a surface of the mask film.

Abstract: A cooling plate for battery of the present disclosure includes a flat surface portion, and a pair of side surface portions facing each other. In the cooling plate for battery, a cutout or through-hole is formed in at least one of the side surface portions. A battery assembly of the present disclosure includes the cooling plate for battery, and a battery disposed on the flat surface portion of the cooling plate for battery. The battery in the battery assembly includes an electrode stack, a current collector terminal, and a laminating film. The laminating film includes a fusion resin layer, a metal layer, and a protection resin layer, and an extending portion. The extending portion is bent toward the electrode stack, and the cooling plate for battery is disposed such that at least one of the side surface portions of the cooling plate for battery faces the bent extending portion.

Abstract: A substrate processing system includes: a load port configured to be connectable to a storage container that accommodates a substrate; a processing chamber configured to perform substrate processing on the substrate; a measurer provided on a transfer path of the substrate between the storage container and the processing chamber and configured to measure an in-plane spectral distribution of the substrate; and a controller configured to create an outlier detection model based on the in-plane spectral distribution of the substrate measured by the measurer, to calculate an in-plane score of the substrate from the measured in-plane spectral distribution of the substrate by using the created outlier detection model, and to detect an abnormality in the substrate based on the calculated score.

Abstract: A substrate processing apparatus includes a chamber; a substrate support disposed in the chamber; a gas supply that supplies a gas into the chamber; and a controller that controls an overall operation of the substrate processing apparatus. The controller executes a process including: (a) placing a substrate on the substrate support, the substrate including an etching layer and a patterned mask on the etching layer; (b) forming a film on the patterned mask; (c) forming a reaction layer on the film; and (d) removing the reaction layer by applying energy to the reaction layer. In the step (c) a temperature of the substrate is set according to a thickness of the reaction layer to be formed.

Abstract: In the electrode laminate of the present disclosure, a fixing member including a curable resin is disposed on at least one side surface portion. In the electrode laminate of the present disclosure, the fixing member is composed of two or more partial fixing members spaced apart from each other. Further, the battery of the present disclosure includes the electrode laminate of the present disclosure and a laminate film sealing the electrode laminate.

Abstract: The present disclosure provides a battery which has high volumetric efficiency, and in which spring-back of a bent portion of a laminated film is inhibited. The battery of the present disclosure includes an electrode laminate and a laminated film sealing it. The laminated film in the battery of the present disclosure has an extending part which extends on a periphery of the electrode laminate, and is bent toward the electrode laminate. A total thickness of the first region of the electrode laminate and the laminated film sealing the first region is less than a total thickness of the second region of the electrode laminate and the laminated film sealing the second region. Further, in a portion of the laminated film sealing the first region, a belt-like member is arranged such that it is wound around the laminated film to immobilize the extending part.

Abstract: A robot according to the present invention is configured to grasp an elongate member, and the robot includes: a robot body; at least one arm member movable with respect to the robot body; and a control unit that controls a movement of the arm member, wherein the arm member includes: a grasping unit that grasps the elongate member; and an arm body that supports the grasping unit, the arm body having a plurality of joints, the grasping unit includes: a support portion disposed at a distal end of the arm body, the support portion being rotatable about a rotation axis; and a pair of grasping members attached to the support portion, the grasping members being movable closer to and away from each other with the rotation axis interposed therebetween, and the control unit causes the robot to execute: a grasping step for inserting the grasping members into a lamination of the elongate members that have been stored, and for grasping the elongate member; a lifting step for lifting the grasping unit in a state in which t

Abstract: A battery module in which a laminated body configured by laminating plural battery cells to each other is accommodated within a module case and in which plural battery cells are electrically connected to each other, wherein: the each battery cell includes a first electrode lead that protrudes at one side in a width direction along a first side surface portion at one side in the thickness direction, and a second electrode lead that protrudes at another side in the width direction along a second side surface portion at another side in the thickness direction; and each battery cell has a symmetrical structure in which height positions of the first electrode lead and the second electrode lead do not change in an inverted posture inverted along a center line in the thickness direction and an inverted posture inverted along a center line in the width direction.

Abstract: A battery module in which plural battery cells that are laminated to each other are accommodated inside a module case, and the plural battery cells are electrically connected to each other, wherein: each battery cell includes a first side surface portion that is an embossed surface forming a housing space at an interior of the battery cell, and a planar second side surface portion, which are arranged so as to face each other in a lamination direction, and an electrode lead is provided along the second side surface portion and protrudes from width direction end portions of the battery cell, and the battery module includes at least one first connection portion that arranges second side surface portions of two adjacent battery cells so as to face each other, brings electrode leads of the two adjacent battery cells close to each other, and is connected to the bus bar.

Abstract: In the electrode laminate of the present disclosure, a fixing member including a curable resin is disposed on at least one side face portion. The fixing member has a thin film region and a thick film region. The thin film region is formed on at least one end portion including the terminal end of the fixing member, and the thick film region is formed at a portion other than the thin film region. The thickness of the fixing member is thinnest at the terminal end. Further, the battery of the present disclosure includes the electrode laminate of the present disclosure and a laminate film sealing the electrode laminate.

Abstract: A substrate processing apparatus includes: a chamber having a processing space; a base arranged inside the processing space and having an internal space; an electrostatic chuck arranged on the base and including a dielectric member having a support surface, at least one heater electrode layer arranged inside the dielectric member and formed of a first material, and at least one resistive layer arranged inside the dielectric member and formed of a second material, wherein a resistance temperature coefficient of the second material is equal to or greater than that of the first material; a control circuit arranged inside the internal space and configured to control power to be applied to the at least one heater electrode layer; and a detection circuit arranged inside the internal space and configured to detect a voltage applied to the at least one resistive layer.

Abstract: An optical film includes: a transparent substrate; and a colored layer laminated on at least one side of the transparent substrate, the colored layer containing a dye (A), the dye (A) containing a colorant having a wavelength of maximum absorption in the range of 470 nm to 530 nm, the colorant containing a dipyrromethene cobalt complex having a structure represented by formula (I), in which R1 to R7 are combined such that a free energy change between before and after the reaction, calculated by applying R1 to R7 in the formula (I) to a predetermined reaction formula (II) using a quantum chemical calculation program Gaussian 16 with a calculation method B3LYP and a basis function 6-31G (d,p) (however, a basis function LanL2DZ is assigned to elements having an atomic number greater than that of Kr in the periodic table), is 0.92 kcal/mol or greater.

Abstract: A composition for forming a colored layer contains a dye, an active energy radiation-curable resin, a photoinitiator, a solvent, and an additive. The dye contains at least one of a first coloring material, a second coloring material, and a third coloring material, with the wavelength of maximum absorption within the range of 470 to 530 nm and the full width at half maximum of the absorption spectrum is 15 to 45 nm. The wavelength of maximum absorption of the second coloring material is within the range of 560 to 620 nm and the full width at half maximum of the absorption spectrum is 15 to 55 nm. Within the wavelength range of 380 to 780 nm, the third coloring material exhibits the lowest transmittance in the range of 650 to 780 nm. The additive includes a compound A and a sulfur antioxidant.

Abstract: The battery cell includes an electrode body in which electrodes and separators are alternately stacked, a battery case in which the electrode body is accommodated, and an electrode lead in which one end is connected to the electrode body inside the battery case and the other end protrudes from an end portion in the width direction of the battery case and is folded back toward the battery case.

Abstract: The battery module includes a plurality of battery cells stacked on each other, an electrode lead protruding from the battery cell, and a bus bar electrically joined to the electrode lead via a welded portion, the welded portion being formed so as to straddle the end portions of the plurality of electrode leads on a surface where the end portions of the plurality of electrode leads approach each other.

Abstract: A secondary battery includes an electrode assembly, a tubular member, a pair of sealing bodies, a first external terminal, a second external terminal, and a spacer disposed inside the tubular member, wherein the electrode assembly has a first end portion located on one side in a direction parallel to the cylindrical axis direction and a second end portion located on the other side in the parallel direction, and the first end portion is provided with one or more first current collector tabs electrically connected to the first external terminal, and the second end portion is provided with one or more second current collector tabs electrically connected to the second external terminal, and the spacer includes a first member provided between the one sealer and the first end portion, and a second member provided between the other sealer and the second end portion.

Abstract: A secondary battery includes: an electrode assembly including a first end portion where one or more negative electrode tabs are formed, and a second end portion where one or more positive electrode tabs are formed; a housing containing the electrode assembly; and a negative electrode terminal and a positive electrode terminal provided on the housing, the housing includes a main body, a first sealing body, and a second sealing body, the negative electrode terminal is provided on the first sealing body, the positive electrode terminal is provided on the second sealing body, the one or more negative electrode tabs are electrically connected to the negative electrode terminal, the one or more positive electrode tabs are electrically connected to the positive electrode terminal, and one of the one or more negative electrode tabs and the one or more positive electrode tabs is larger in length than the other.

Abstract: An electronic device installed in a plasma processing apparatus is protected during an operation of an interlock mechanism of the plasma processing apparatus. A plasma processing apparatus includes: a plasma processing chamber; a base disposed in the plasma processing chamber and having a heat transfer medium flow path and a space; an electrostatic chuck disposed on the base; a first heater element disposed in the electrostatic chuck; a second heater element disposed in the space; a control circuit substrate disposed in the space and including at least one control element electrically connected to at least one of the first heater element and the second heater element; and a recovery circuit electrically connected between the second heater element and the at least one control element and supplying power to the second heater element based on a temperature in the space.

Abstract: A secondary battery includes an electrode assembly, a housing, and a positive electrode terminal and a negative electrode terminal provided to the housing. The housing includes a main body with a first opening and a second opening respectively provided on opposite sides in a long-side direction of the housing, a first sealing body that closes the first opening, and a second sealing body that closes the second opening. The main body includes a pair of long-side surfaces and a pair of short-side surfaces facing each other in a short-side direction of the housing orthogonal to the long-side direction. The electrode assembly includes a negative electrode current collecting portion located on a first end side in the long-side direction, and a positive electrode current collecting portion located on a second end side in the long-side direction. One short-side surface of the pair of short-side surfaces is provided with an injection port.

Abstract: A secondary battery includes an electrode assembly, a housing that houses the electrode assembly, a positive electrode terminal, and a negative electrode terminal. The housing includes a main body with a first opening and a second opening respectively provided on opposite sides in a long-side direction, a first sealing body that closes the first opening, and a second sealing body that closes the second opening. The main body includes a pair of long-side surfaces and a pair of short-side surfaces facing each other in a short-side direction orthogonal to the long-side direction. The electrode assembly includes a negative electrode current collecting portion located on a first end side in the long-side direction, and a positive electrode current collecting portion located on a second end side in the long-side direction. One short-side surface of the pair of short-side surfaces is provided with a single pressure release valve.