Abstract: Extreme ultraviolet (EUV) mask blanks, methods for their manufacture and production systems therefor are disclosed. The EUV mask blanks comprise a substrate; a multilayer stack of reflective layers on the substrate; and an absorber layer comprising tantalum and iridium or ruthenium and antimony.

Abstract: Extreme ultraviolet (EUV) mask blanks, methods for their manufacture and production systems therefor are disclosed. The EUV mask blanks comprise a substrate, a multilayer stack of reflective layers on the substrate, a capping layer on the multilayer stack of reflecting layers, and an absorber on the capping layer. The absorber comprising a plurality of bilayers comprising a first layer of silicon and a second layer selected from the group consisting of TaSb, CSb, TaNi, TaCu, SbN, CrN, Cr, Ir, Pd, Re, Os, Cd, Co, Ag, Pt, oxides of TaSb, CSb, TaNi, TaCu, SbN, CrN, Cr, Ir, Pd, Re, Os, Cd, Co, Ag, Pt, and nitrides of TaSb, CSb, TaNi, TaCu, Cr, Ir, Pd, Re, Os, Cd, Co, Ag, and Pt.

Abstract: Extreme ultraviolet (EUV) mask blanks, methods for their manufacture and production systems therefor are disclosed. The EUV mask blanks comprise a substrate,; a multilayer stack of reflective layers on the substrate, a capping layer on the multilayer stack of reflecting layers, and an absorber on the capping layer. The absorber comprises a first layer selected from the group consisting of Mo, Nb, V, alloys of Mo, Nb and V, oxides of Mo, oxides of Nb, oxides of V, nitrides of Mo, nitrides of Nb and nitrides of V and a second layer selected from the group consisting of TaSb, CSb, SbN, TaNi, TaCu and TaRu.

Abstract: Extreme ultraviolet (EUV) mask blanks, methods for their manufacture and production systems therefor are disclosed. The EUV mask blanks comprise a substrate; a multilayer stack of reflective layers on the substrate; a capping layer on the multilayer stack of reflecting layers; and an absorber layer on the capping layer, the absorber layer made from antimony and nitrogen.

Abstract: Methods for the manufacture of extreme ultraviolet (EUV) mask blanks and production systems therefor are disclosed. A method for forming an EUV mask blank comprises forming a bilayer on a portion of a multi-cathode PVD chamber interior and then forming a multilayer stack of Si/Mo on a substrate in the multi-cathode PVD chamber.

Abstract: Methods of cleaning a PVD chamber component, for example, process kit components are disclosed. The method comprises at least one of directing a jet of pressurized fluid at a surface of the PVD chamber component, directing pressurized carbon dioxide at the surface of the PVD chamber component, placing the PVD chamber component in a liquid and producing ultrasonic waves in the liquid to further remove contaminants from the surface of the PVD chamber component, using a plasma to clean the surface of the PVD chamber component, subjecting the PVD chamber component to a thermal cycle by heating up to a peak temperature of at least 50° C.

Abstract: The present disclosure relates to touch technologies, and provides a touch component, a touch apparatus using the touch component, and a touch-control method applied to the touch apparatus. The touch component is applied to a wearable device, and includes: M self-capacitive touch electrodes (Cs1 to Csm) disposed on a single pattern wiring layer (10). Each of the touch electrodes (Cs1 to Csm) is connected to a touch chip by a wire on the pattern wiring layer (10). M is a positive integer greater than 2 and less than 10. The M touch electrodes (Cs1 to Csm) form a touch sensing surface of the touch component, the touch sensing surface has at least two sliding detection directions, the at least two sliding detection directions intersect, and a quantity of touch electrodes in each of the sliding detection directions is greater than 1.

Abstract: A driver for a lighting device includes: a lighting driver configured to drive LED(s) of the lighting device in a first mode of operation when a primary power source is available and provided to the lighting driver and to control power output and/or final output current utilizing a backup or other secondary power source during an emergency mode of operation. In example embodiments and implementations, the lighting driver includes a single instance of a LED driver (e.g., only one LED driver circuit) configured to drive LED(s) of the lighting device during both modes of operation.

Abstract: LED driver apparatus and methods may include a sensing circuit for adjusting an output based on either a pulse width modulation dimming control or an analog dimming control. An LED driver apparatus and methods may also include a sensor for a parameter such as temperature and for recording such parameter, for example as a function of time. A setting unit for an LED driver apparatus can be used to sense and/or adjust settings in the LED apparatus even when the LED apparatus is not independently powered.

Abstract: This disclosure relates in general to a stem cell treatment. This disclosure further relates to a stem cell treatment using a composition comprising stem cells having highly expressed Fas-L. This disclosure further relates to a stem cell treatment of multiple myeloma. This disclosure also relates to a composition comprising stem cells having highly expressed Fas-L. This disclosure also relates to preparation of a composition comprising stem cell having highly expressed Fas-L. This disclosure also relates to preparation of a composition comprising stem cells having highly expressed Fas-L by using a salicylate. An example of salicylate may be aspirin. This disclosure further relates to a stem cell treatment of multiple myeloma. This disclosure also relates to a stem cell treatment of an inflammatory disease and/or autoimmune disease.

Abstract: A driver for a lighting device includes: a lighting driver configured to drive LED(s) of the lighting device in a first mode of operation when a primary power source is available and provided to the lighting driver and to control power output and/or final output current utilizing a backup or other secondary power source during an emergency mode of operation. In example embodiments and implementations, the lighting driver includes a single instance of a LED driver (e.g., only one LED driver circuit) configured to drive LED(s) of the lighting device during both modes of operation.

Abstract: This disclosure relates in general to a stem cell treatment. This disclosure further relates to a stem cell treatment using a composition comprising stem cells having highly expressed Fas-L. This disclosure further relates to a stem cell treatment of multiple myeloma. This disclosure also relates to a composition comprising stem cells having highly expressed Fas-L. This disclosure also relates to preparation of a composition comprising stem cell having highly expressed Fas-L. This disclosure also relates to preparation of a composition comprising stem cells having highly expressed Fas-L by using a salicylate. An example of salicylate may be aspirin. This disclosure further relates to a stem cell treatment of multiple myeloma. This disclosure also relates to a stem cell treatment of an inflammatory disease and/or autoimmune disease.