Patents by Inventor Shou-Gwo Wuu

Shou-Gwo Wuu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20080217719
    Abstract: The present disclosure provides an image sensor semiconductor device. A semiconductor substrate having a first-type conductivity is provided. A plurality of sensor elements is formed in the semiconductor substrate. An isolation feature is formed between the plurality of sensor elements. An ion implantation process is performed to form a doped region having the first-type conductivity substantially underlying the isolation feature using at least two different implant energy.
    Type: Application
    Filed: March 6, 2007
    Publication date: September 11, 2008
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: J. C. Liu, C. H. Cheng, Chien-Hsien Tseng, Alex Hsu, Feng-Jia Shiu, Shou-Gwo Wuu
  • Patent number: 7423306
    Abstract: A pixel comprises a substrate comprising a first well region formed in a top portion of the substrate, having a first conductivity type. A plurality of shallow trench isolation (STI) structures is formed in the first well region of the substrate, defining a pixel region over the substrate. A second well region is formed in a potion of the first well region of the pixel region, having a second conductivity type opposite to the first conductivity type. A top surface region is formed in a top portion of the second well region, having the first conductivity type. A MOS transistor formed on portions the pixel region, having a pair of source/drain regions formed in the first well region, wherein the source/drain regions are formed of the second conductivity type and one thereof electrically connects the first and well doping regions and the first well region is formed with a depth greater than that of the adjacent STI structure.
    Type: Grant
    Filed: September 27, 2006
    Date of Patent: September 9, 2008
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: J. C. Liu, Tzu-Hsuan Hsu, Chien-Hsien Tseng, Dun-Nian Yaung, Shou-Gwo Wuu
  • Publication number: 20080198454
    Abstract: An image sensor device includes a semiconductor substrate having a front surface and a back surface, pixels formed on the front surface of the semiconductor substrate, and grid arrays aligned with one of the pixels. One of the grid arrays is configured to allow a wavelength of light to pass through to the corresponding one of the pixels. The grid arrays are disposed overlying the front or back surface of the semiconductor substrate.
    Type: Application
    Filed: February 19, 2007
    Publication date: August 21, 2008
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ching-Chun Wang, Dun-Nian Yaung, Chien-Hsien Tseng, Shou-Gwo Wuu
  • Publication number: 20080173963
    Abstract: The present disclosure provides a backside illuminated semiconductor device. The device includes a substrate having a front surface and a back surface; a plurality of sensor elements formed in the substrate, each of the plurality of sensor elements is designed and configured to receive light directed towards the back surface; and a sensor isolation feature formed in the substrate, and disposed horizontally between two adjacent elements of the plurality of sensor elements, and vertically between the back surface and the front surface.
    Type: Application
    Filed: January 24, 2007
    Publication date: July 24, 2008
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tzu-Hsuan Hsu, Shou-Gwo Wuu, Dun-Nian Yaung
  • Patent number: 7388187
    Abstract: An image sensor device includes a semiconductor substrate having a first type of conductivity, a semiconductor layer having the first type of conductivity formed on the semiconductor substrate, and pixels formed in the semiconductor layer. The semiconductor layer includes a first deep well having the first type of conductivity and substantially underlying the plurality of pixels, and a second deep well having a second type of conductivity different from the first type of conductivity and substantially underlying the first deep well.
    Type: Grant
    Filed: March 6, 2007
    Date of Patent: June 17, 2008
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Han-Chi Liu, Chung-Wei Chang, Shou-Gwo Wuu, Tong-Chern Ong, Chun-Yao Ko
  • Publication number: 20080111169
    Abstract: A pixel comprises a substrate comprising a first well region formed in a top portion of the substrate, having a first conductivity type. A plurality of shallow trench isolation (STI) structures is formed in the first well region of the substrate, defining a pixel region over the substrate. A second well region is formed in a potion of the first well region of the pixel region, having a second conductivity type opposite to the first conductivity type. A top surface region is formed in a top portion of the second well region, having the first conductivity type. A MOS transistor formed on portions the pixel region, having a pair of source/drain regions formed in the first well region, wherein the source/drain regions are formed of the second conductivity type and one thereof electrically connects the first and well doping regions and the first well region is formed with a depth greater than that of the adjacent STI structure.
    Type: Application
    Filed: September 27, 2006
    Publication date: May 15, 2008
    Inventors: J.C. Liu, Tzu-Hsuan Hsu, Chien-Hsien Tseng, Dun-Nian Yaung, Shou-Gwo Wuu
  • Publication number: 20080105944
    Abstract: The present disclosure provides an image sensor semiconductor device. The semiconductor device includes a semiconductor substrate having a first type of dopant; a semiconductor layer having a second type of dopant different from the first type of dopant and disposed on the semiconductor substrate; and an image sensor formed in the semiconductor layer.
    Type: Application
    Filed: March 6, 2007
    Publication date: May 8, 2008
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Wei Chang, Han-Chi Liu, Chun-Yao Ko, Shou-Gwo Wuu
  • Patent number: 7338830
    Abstract: A plurality of apertures is formed in at least one first insulating layer disposed over a sensor formed in a semiconductor substrate. A second insulating layer is disposed over the at least one first insulating layer and the plurality of apertures in the at least one first insulating layer. The apertures form hollow regions in the at least one first insulating layer over the sensor, allowing more light or energy to pass through the at least one first insulating layer to the sensor, and increasing the sensitivity of the sensor.
    Type: Grant
    Filed: November 10, 2005
    Date of Patent: March 4, 2008
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tzu-Hsuan Hsu, Shou-Gwo Wuu, Ho-Ching Chien, Dun-Nian Yaung
  • Patent number: 7332368
    Abstract: A new method to form an image sensor device is achieved. The method comprises forming an image sensing array in a substrate comprising a plurality of light detecting diodes with spaces between the diodes. A first dielectric layer is formed overlying the diodes but not the spaces. The first dielectric layer has a first refractive index. A second dielectric layer is formed overlying the spaces but not the diodes. The second dielectric layer has a second refractive index that is larger than the first refractive index. A new image sensor device is disclosed.
    Type: Grant
    Filed: November 22, 2005
    Date of Patent: February 19, 2008
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Dun-Nian Yaung, Shou-Gwo Wuu, Ho-Ching Chien, Chien-Hsien Tseng
  • Publication number: 20080014673
    Abstract: The present disclosure provides an image sensor semiconductor device. The semiconductor device includes a substrate having a front surface and a back surface; a plurality of sensor elements formed on the front surface of the substrate, each of the plurality of sensor elements configured to receive light directed towards the back surface; and an aluminum doped feature formed in the substrate and disposed horizontally between two adjacent elements of the plurality of sensor elements and vertically between the back surface and the plurality of sensor elements.
    Type: Application
    Filed: July 10, 2006
    Publication date: January 17, 2008
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shang-Yi CHIANG, Chung WANG, Shou-Gwo WUU, Dun-Nian YAUNG
  • Publication number: 20070267674
    Abstract: Embedded memories. The devices include a substrate, a first dielectric layer, a second dielectric layer, a third dielectric layer, and a plurality of capacitors. The substrate comprises transistors. The first dielectric layer, embedding first and second conductive plugs electrically connecting the transistors therein, overlies the substrate. The second dielectric layer, comprising a plurality of capacitor openings exposing the first conductive plugs, overlies the first dielectric layer. The capacitors comprise a plurality of bottom plates, respectively disposed in the capacitor openings, electrically connecting the first conductive plugs, a plurality of capacitor dielectric layers respectively overlying the bottom plates, and a top plate, comprising a top plate opening, overlying the capacitor dielectric layers. The top plate opening exposes the second dielectric layer, and the top plate is shared by the capacitors.
    Type: Application
    Filed: May 22, 2006
    Publication date: November 22, 2007
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Ching Lin, Chun-Yao Chen, Chen-Jong Wang, Shou-Gwo Wuu, Chung S. Wang, Chien-Hua Huang, Kun-Lung Chen, Ping Yang
  • Patent number: 7282757
    Abstract: A metal-insulator-metal (MIM) capacitor structure and method of manufacturing thereof. A plurality of MIM capacitor patterns is formed in two or more insulating layers. The insulating layers may comprise a via layer and a metallization layer of a semiconductor device. A top portion of the top insulating layer is recessed in a region between at least two adjacent MIM capacitor patterns. When the top plate material of the MIM capacitors is deposited, the top plate material fills the recessed area of the top insulating layer between the adjacent MIM capacitor pattern, forming a connecting region that couples together the top plates of the adjacent MIM capacitors. A portion of the MIM capacitor bottom electrode may be formed in a first metallization layer of the semiconductor device.
    Type: Grant
    Filed: October 20, 2003
    Date of Patent: October 16, 2007
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Chi Tu, Chun-Yao Chen, Shou-Gwo Wuu, Chen-Jong Wang
  • Patent number: 7253458
    Abstract: A complementary metal oxide semiconductor field effect transistor (CMOS-FET) image sensor. An active photosensing pixel is formed on a substrate. At least one side of the pixel has a width equal to or less than approximately 3 ?m. At least one dielectric layer is disposed on the substrate covering the pixel. A color filter is disposed on the least one dielectric layer. A microlens array is disposed on the color filter of the pixel, and the sum of the thickness of all dielectric layers and the color filter divided by the pixel width is equal to or less than approximately 1.87.
    Type: Grant
    Filed: November 4, 2004
    Date of Patent: August 7, 2007
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tzu-Hsuan Hsu, Dun-Nian Yaung, Wen-De Wang, Ho-Ching Chien, Shou-Gwo Wuu
  • Patent number: 7232697
    Abstract: Provided are a semiconductor device and a method for its manufacture. In one example, the method includes forming an isolation structure having a first refraction index over a sensor embedded in a substrate. A first layer having a second refraction index that is different from the first refraction index is formed over the isolation structure. The first layer is removed from at least a portion of the isolation structure. A second layer having a third refraction index is formed over the isolation structure after the first layer is removed. The third refraction index is substantially similar to the first refraction index.
    Type: Grant
    Filed: April 5, 2004
    Date of Patent: June 19, 2007
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tzu-Hsuan Hsu, Dun-Nian Yaung, Shou-Gwo Wuu, Ho-Ching Chien, Chien-Hsien Tseng, Jeng-Shyan Lin
  • Publication number: 20070120160
    Abstract: Provided are a semiconductor device and a method for its manufacture. In one example, the method includes forming an isolation structure having a first refraction index over a sensor embedded in a substrate. A first layer having a second refraction index that is different from the first refraction index is formed over the isolation structure. The first layer is removed from at least a portion of the isolation structure. A second layer having a third refraction index is formed over the isolation structure after the first layer is removed. The third refraction index is substantially similar to the first refraction index.
    Type: Application
    Filed: January 26, 2007
    Publication date: May 31, 2007
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tzu-Hsuan Hsu, Dun-Nian Yaung, Shou-Gwo Wuu, Ho-Ching Chien, Chien-Hsien Tseng, Jeng-Shyan Lin
  • Patent number: 7208369
    Abstract: Semiconductor devices having a dual polysilicon electrode and a method of manufacturing are provided. The semiconductor devices include a first polysilicon layer deposited on a second polysilicon layer. Each polysilicon layer may be doped individually. The method also allows for some semiconductor devices on a wafer to have a single polysilicon wafer and other devices to have a dual polysilicon layer. In one embodiment, the semiconductor devices are utilized to form a memory device wherein the storage capacitors and transistors located in the cell region are formed with a dual polysilicon layer and devices in the periphery region are formed with a single polysilicon layer.
    Type: Grant
    Filed: September 15, 2003
    Date of Patent: April 24, 2007
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Yang Pai, Min-Hsiung Chiang, Chen-Jong Wang, Shou-Gwo Wuu
  • Publication number: 20070015305
    Abstract: A semiconductor device including a semiconductor substrate having a photosensor formed therein; a first layer overlying the substrate, the first layer includes a portion having a generally concave shaped surface being the negative shaped of a micro-lens to be formed there over; a second layer overlying the first layer, the second layer including a generally convex shaped portion vertically aligned with and mating with the generally concave shaped surface, the generally convex shaped portion being constructed and arranged to define a micro-lens positioned to cause parallel light passing through the micro-lens to converge on and strike the photosensor.
    Type: Application
    Filed: July 13, 2005
    Publication date: January 18, 2007
    Inventors: Jeng-Shyan Lin, Chien-Hsien Tseng, Shou-Gwo Wuu, Ho-Ching Chien, Dun-Nian Yaung, Hung-Jen Hsu
  • Publication number: 20070001100
    Abstract: The present disclosure provides a backside illuminated semiconductor device. The device includes a semiconductor substrate having a front surface and a back surface, a sensor element formed on the front surface of the semiconductor substrate, and a light reflective layer (LRL) disposed over the sensor element. The LRL is configured to reflect light directed towards the back surface and through the sensor element.
    Type: Application
    Filed: June 15, 2006
    Publication date: January 4, 2007
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tzu-Hsuan HSU, Shou-Gwo WUU, Dun-Nian YAUNG
  • Publication number: 20060186547
    Abstract: System and method for providing a light shield for a CMOS imager is provided. The light shield comprises a structure formed above a point between a photo-sensitive element and adjacent circuitry. The structure is formed of a light-blocking material, such as a metal, metal alloy, metal compound, or the like, formed in dielectric layers over the photo-sensitive elements.
    Type: Application
    Filed: February 24, 2005
    Publication date: August 24, 2006
    Inventors: Wen-De Wang, Dun-Nian Yaung, Shou-Gwo Wuu, Chung-Yi Yu
  • Publication number: 20060164531
    Abstract: A CMOS image sensor having increased capacitance that allows a photo-diode to generate a larger current is provided. The increased capacitance reduces noise and the dark signal. The image sensor utilizes a transistor having nitride spacers formed on a buffer oxide layer. Additional capacitance may be provided by various capacitor structures, such as a stacked capacitor, a planar capacitor, a trench capacitor, a MOS capacitor, a MIM/PIP capacitor, or the like. Embodiments of the present invention may be utilized in a 4-transistor pixel or a 3-transistor pixel configuration.
    Type: Application
    Filed: January 27, 2005
    Publication date: July 27, 2006
    Inventors: Dun-Nian Yaung, Kuo-Ching Huang, Ho-Ching Chien, Shou-Gwo Wuu