Patents by Inventor Shu Hui Wang

Shu Hui Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10770299
    Abstract: A semiconductor device includes a semiconductor fin and a gate structure. The semiconductor fin extends along a first direction above a substrate. The gate structure extends across the semiconductor fin along a second direction substantially perpendicular to the first direction. The gate structure includes a chlorine-containing N-work function metal layer wrapping around the semiconductor fin, and a filling metal over and in contact with the chlorine-containing N-work function metal layer.
    Type: Grant
    Filed: December 23, 2019
    Date of Patent: September 8, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Li-Jung Liu, Chun-Sheng Liang, Shu-Hui Wang
  • Publication number: 20200152521
    Abstract: A method includes removing a dummy gate structure formed over a first fin and a second fin, forming an interfacial layer in the first trench and the second trench, forming a first high-k dielectric layer over the interfacial layer in the first trench and the second trench, removing the first high-k dielectric layer in the second trench, forming a self-assembled monolayer over the first high-k dielectric layer in the first trench, forming a second high-k dielectric layer over the self-assembled monolayer in the first trench and over the interfacial layer in the second trench, forming a work function metal layer in the first and the second trenches, and forming a bulk conductive layer over the work function metal layer in the first and the second trenches. In some embodiments, the first high-k dielectric layer includes lanthanum and oxygen.
    Type: Application
    Filed: January 6, 2020
    Publication date: May 14, 2020
    Inventors: Ju-Li Huang, Hsin-Che Chiang, Ju-Yuan Tzeng, Wei-Ze Xu, Yueh-Yi Chen, Shu-Hui Wang, Shih-Hsun Chang
  • Publication number: 20200135477
    Abstract: A semiconductor device includes a semiconductor fin and a gate structure. The semiconductor fin extends along a first direction above a substrate. The gate structure extends across the semiconductor fin along a second direction substantially perpendicular to the first direction. The gate structure includes a chlorine-containing N-work function metal layer wrapping around the semiconductor fin, and a filling metal over and in contact with the chlorine-containing N-work function metal layer.
    Type: Application
    Filed: December 23, 2019
    Publication date: April 30, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Li-Jung LIU, Chun-Sheng LIANG, Shu-Hui WANG
  • Publication number: 20200135734
    Abstract: A semiconductor device includes first-type-channel field effect transistors (FETs) including a first first-type-channel FET including a first gate structure and a second first-type-channel FET including a second gate structure. The first first-type-channel FET has a smaller threshold voltage than the second first-type-channel FET. The first gate structure includes a first work function adjustment material (WFM) layer and the second gate structure includes a second WFM layer. At least one of thickness and material of the first and second WFM layers is different from each other.
    Type: Application
    Filed: December 20, 2019
    Publication date: April 30, 2020
    Inventors: Shun-Jang LIAO, Chia-Chun LIAO, Shu-Hui WANG, Shih-Hsun CHANG
  • Publication number: 20200075741
    Abstract: A semiconductor device includes a substrate, a first gate structure, a plurality of first gate spacers, a second gate structure, and a plurality of second gate spacers. The substrate has a first fin structure and a second fin structure. The first gate structure is over the first fin structure, in which the first gate structure includes a first high dielectric constant material and a first metal. A bottom surface of the first high dielectric constant material is higher than bottom surfaces of the first gate spacers. The second gate structure is narrower than the first gate structure and over the second fin structure, in which the second gate structure includes a second high dielectric constant material and a second metal. A bottom surface of the second high dielectric constant material is lower than bottom surfaces of the second gate spacers.
    Type: Application
    Filed: November 8, 2019
    Publication date: March 5, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Che CHIANG, Ju-Yuan TZENG, Chun-Sheng LIANG, Shu-Hui WANG, Chih-Yang YEH, Jeng-Ya David YEH
  • Patent number: 10535653
    Abstract: A semiconductor structure includes a pair of gate structures and an isolation structure. Each of the gate structures includes a work function metal, a gate, and a barrier layer between the work function metal and the gate. The isolation structure is disposed between the gate structures. The barrier layer covers a sidewall of the isolation structure.
    Type: Grant
    Filed: December 17, 2017
    Date of Patent: January 14, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Jen Chen, Chun-Sheng Liang, Shu-Hui Wang, Shih-Hsun Chang, Hsin-Che Chiang
  • Patent number: 10529629
    Abstract: A method includes removing a dummy gate structure formed over a first fin and a second fin, forming an interfacial layer in the first trench and the second trench, forming a first high-k dielectric layer over the interfacial layer in the first trench and the second trench, removing the first high-k dielectric layer in the second trench, forming a self-assembled monolayer over the first high-k dielectric layer in the first trench, forming a second high-k dielectric layer over the self-assembled monolayer in the first trench and over the interfacial layer in the second trench, forming a work function metal layer in the first and the second trenches, and forming a bulk conductive layer over the work function metal layer in the first and the second trenches. In some embodiments, the first high-k dielectric layer includes lanthanum and oxygen.
    Type: Grant
    Filed: April 30, 2018
    Date of Patent: January 7, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ju-Li Huang, Hsin-Che Chiang, Ju-Yuan Tzeng, Wei-Ze Xu, Yueh-Yi Chen, Shu-Hui Wang, Shih-Hsun Chang
  • Publication number: 20190393326
    Abstract: A method of forming a gate structure of a semiconductor device including depositing a high-k dielectric layer over a substrate is provided. A dummy metal layer is formed over the high-k dielectric layer. The dummy metal layer includes fluorine. A high temperature process is performed to drive the fluorine from the dummy metal layer into the high-k dielectric layer thereby forming a passivated high-k dielectric layer. Thereafter, the dummy metal layer is removed. At least one work function layer over the passivated high-k dielectric layer is formed. A fill metal layer is formed over the at least one work function layer.
    Type: Application
    Filed: August 30, 2019
    Publication date: December 26, 2019
    Inventors: Hsin-Che CHIANG, Ju-Yuan TZENG, Chun-Sheng LIANG, Shu-Hui WANG, Kuo-Hua PAN
  • Patent number: 10515964
    Abstract: A semiconductor device includes first-type-channel field effect transistors (FETs) including a first first-type-channel FET including a first gate structure and a second first-type-channel FET including a second gate structure. The first first-type-channel FET has a smaller threshold voltage than the second first-type-channel FET. The first gate structure includes a first work function adjustment material (WFM) layer and the second gate structure includes a second WFM layer. At least one of thickness and material of the first and second WFM layers is different from each other.
    Type: Grant
    Filed: July 30, 2018
    Date of Patent: December 24, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shun-Jang Liao, Chia-Chun Liao, Shu-Hui Wang, Shih-Hsun Chang
  • Patent number: 10515811
    Abstract: A semiconductor device includes a semiconductor substrate, a filling conductor, an N-work function conductor layer and a gate dielectric layer. The filling conductor is over the semiconductor substrate. The N-work function conductor layer wraps around the filling conductor. The N-work function conductor layer comprises chlorine. The gate dielectric layer is between the N-work function conductor layer and the semiconductor.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: December 24, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Li-Jung Liu, Chun-Sheng Liang, Shu-Hui Wang
  • Patent number: 10475895
    Abstract: A semiconductor device includes a substrate, a first dielectric layer, a first device and a second device. The first dielectric layer is disposed on the substrate. The first device is disposed on the first dielectric layer on a first region of the substrate, and includes two first spacers, a second dielectric layer and a first gate structure. The first spacers are separated to form a first trench. The second dielectric layer is disposed on side surfaces and a bottom surface of the first trench. The first gate structure is disposed on the second dielectric layer. The second device is disposed on a second region of the substrate, and includes two second spacers and a second gate structure. The second spacers are disposed on the first dielectric layer and are separated to form a second trench. The second gate structure is disposed on the substrate within the second trench.
    Type: Grant
    Filed: June 21, 2017
    Date of Patent: November 12, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Che Chiang, Ju-Yuan Tzeng, Chun-Sheng Liang, Shu-Hui Wang, Chih-Yang Yeh, Jeng-ya David Yeh
  • Publication number: 20190333826
    Abstract: A method includes removing a dummy gate structure formed over a first fin and a second fin, forming an interfacial layer in the first trench and the second trench, forming a first high-k dielectric layer over the interfacial layer in the first trench and the second trench, removing the first high-k dielectric layer in the second trench, forming a self-assembled monolayer over the first high-k dielectric layer in the first trench, forming a second high-k dielectric layer over the self-assembled monolayer in the first trench and over the interfacial layer in the second trench, forming a work function metal layer in the first and the second trenches, and forming a bulk conductive layer over the work function metal layer in the first and the second trenches. In some embodiments, the first high-k dielectric layer includes lanthanum and oxygen.
    Type: Application
    Filed: April 30, 2018
    Publication date: October 31, 2019
    Inventors: Ju-Li Huang, Hsin-Che Chiang, Ju-Yuan Tzeng, Wei-Ze Xu, Yueh-Yi Chen, Shu-Hui Wang, Shih-Hsun Chang
  • Publication number: 20190280097
    Abstract: A semiconductor structure can include a resistor on a substrate formed simultaneously with other devices, such as transistors. A diffusion barrier layer formed on a substrate is patterned to form a resistor and barrier layers under a transistor gate. A filler material, a first connector, and a second connector are formed on the resistor at the same manner and time as the gate of the transistor. The filler material is removed to form a resistor on a substrate.
    Type: Application
    Filed: May 20, 2019
    Publication date: September 12, 2019
    Inventors: Hua Feng Chen, Shu-Hui Wang, Mu-Chi Chiang
  • Patent number: 10403737
    Abstract: A method of forming a gate structure of a semiconductor device including depositing a high-k dielectric layer over a substrate is provided. A dummy metal layer is formed over the high-k dielectric layer. The dummy metal layer includes fluorine. A high temperature process is performed to drive the fluorine from the dummy metal layer into the high-k dielectric layer thereby forming a passivated high-k dielectric layer. Thereafter, the dummy metal layer is removed. At least one work function layer over the passivated high-k dielectric layer is formed. A fill metal layer is formed over the at least one work function layer.
    Type: Grant
    Filed: November 16, 2018
    Date of Patent: September 3, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsin-Che Chiang, Ju-Yuan Tzeng, Chun-Sheng Liang, Shu-Hui Wang, Kuo-Hua Pan
  • Publication number: 20190259760
    Abstract: A semiconductor device manufacturing method includes forming fins in first and second regions defined on a substrate. The fins include first fin, second fin, third fin, and fourth fin. A dielectric layer is formed over fins and a work function adjustment layer is formed over dielectric layer. A hard mask is formed covering third and fourth fins. A first conductive material layer is formed over first fin and not over second fin. A second conductive material layer is formed over first and second fins. A first metal gate electrode fill material is formed over first and second fins. The hard mask covering third and fourth fins is removed. A third conductive material layer is formed over third fin and not over fourth fin. A fourth conductive material layer is formed over third and fourth fins, and a second metal gate electrode fill material is formed over third and fourth fins.
    Type: Application
    Filed: April 29, 2019
    Publication date: August 22, 2019
    Inventors: Chia-Chun LIAO, Chun-Sheng LIANG, Shu-Hui WANG, Shih-Hsun CHANG, Yi-Jen CHEN
  • Publication number: 20190244876
    Abstract: A positioning assembly for a computer radiator contains: multiple first shank members, multiple resilient elements, and multiple second shank members. Each of the multiple first shank members includes a first head knob, a first extension, a locking rib, a shoulder, a slot, and an orifice, wherein an outer diameter of the first extension is less than the first head knob, and the locking rib is in a conical cylinder shape. Each of the multiple resilient elements is fitted on the first extension. Each of the multiple shank members includes a second head knob and a second extension extending downward from a bottom of the second head knob, wherein an outer diameter of the second extension is less than an inner diameter of the orifice so that the second extension is located on a lower end of the orifice after inserting into a top of the orifice.
    Type: Application
    Filed: May 30, 2018
    Publication date: August 8, 2019
    Inventor: SHU-HUI WANG
  • Patent number: 10345388
    Abstract: A method for screening a lithium ion battery is provided. A number of lithium ion batteries are galvanostatically discharged a to an inflection point voltage at an inflection point of a discharge curve at a first constant current I1. The number of lithium ion batteries are rested for a first rest time T1 to raise an open circuit voltage of the number of lithium ion batteries to U1. U1 is greater than the inflection point voltage. The number of lithium ion batteries are galvanostatically discharged to the inflection point voltage at a second constant current I2, in which I2<<I1. The number of lithium ion batteries are rested for a second rest time T2 and the batteries are screened based on a self-discharge of the number of lithium ion batteries.
    Type: Grant
    Filed: June 8, 2017
    Date of Patent: July 9, 2019
    Assignees: JIANGSU HUADONG INSTITUTE OF LI-ION BATTERY CO., LTD, TSINGHUA UNIVERSITY
    Inventors: Yong Yang, Hong-Sheng Zhang, Xiang-Ming He, Jian-Jun Li, Li Wang, Guo-Hua Li, Tuan-Wei Li, Shu-Hui Wang
  • Publication number: 20190165117
    Abstract: A semiconductor device includes a substrate, a gate stack. The substrate includes a semiconductor fin. The gate stack is disposed on the semiconductor fin. The gate stack includes a dielectric layer disposed over the semiconductor fin, and a metal stack disposed over the dielectric layer and having a first metallic layer and a second metallic layer over the first metallic layer, and a gate electrode disposed over the metal stack. The first metallic layer and the second metallic layer have a first element, and a percentage of the first element in the first metallic layer is greater than that in the second metallic layer.
    Type: Application
    Filed: August 28, 2018
    Publication date: May 30, 2019
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Che CHIANG, Ju-Yuan TZENG, Chun-Sheng LIANG, Chih-Yang YEH, Shu-Hui WANG, Jeng-Ya David YEH
  • Patent number: 10297669
    Abstract: A semiconductor structure can include a resistor on a substrate formed simultaneously with other devices, such as transistors. A diffusion barrier layer formed on a substrate is patterned to form a resistor and barrier layers under a transistor gate. A filler material, a first connector, and a second connector are formed on the resistor at the same manner and time as the gate of the transistor. The filler material is removed to form a resistor on a substrate.
    Type: Grant
    Filed: November 14, 2016
    Date of Patent: May 21, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hua Feng Chen, Shu-Hui Wang, Mu-Chi Chiang
  • Patent number: 10276574
    Abstract: A semiconductor device manufacturing method includes forming fins in first and second regions defined on a substrate. The fins include first fin, second fin, third fin, and fourth fin. A dielectric layer is formed over fins and a work function adjustment layer is formed over dielectric layer. A hard mask is formed covering third and fourth fins. A first conductive material layer is formed over first fin and not over second fin. A second conductive material layer is formed over first and second fins. A first metal gate electrode fill material is formed over first and second fins. The hard mask covering third and fourth fins is removed. A third conductive material layer is formed over third fin and not over fourth fin. A fourth conductive material layer is formed over third and fourth fins, and a second metal gate electrode fill material is formed over third and fourth fins.
    Type: Grant
    Filed: July 15, 2016
    Date of Patent: April 30, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Chun Liao, Chun-Sheng Liang, Shu-Hui Wang, Shih-Hsun Chang, Yi-Jen Chen