Patents by Inventor Shubneesh Batra

Shubneesh Batra has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20010035787
    Abstract: A high output, high efficiency charge pump is disclosed and claimed. The charge pump includes a charge storage device. A pre-charge circuit is connected to the charge storage device to charge the charge storage device to a charge level to provide a predetermined output voltage from the charge pump. A blocking circuit is provided to prevent charge leakage from the charge storage device to the pre-charge circuit.
    Type: Application
    Filed: March 1, 2001
    Publication date: November 1, 2001
    Applicant: Micron Technology, Inc.
    Inventors: Todd A. Merritt, Shubneesh Batra
  • Patent number: 6303488
    Abstract: In one aspect, the invention provides a method of exposing a material from which photoresist cannot be substantially selectively removed utilizing photoresist. In one preferred implementation, a first material from which photoresist cannot be substantially selectively removed is formed over a substrate. At least two different material layers are formed over the first material. Photoresist is deposited over the two layers and an opening formed within the photoresist over an outermost of the two layers. First etching is conducted through the outermost of the two layers within the photoresist opening to outwardly expose an innermost of the two layers and form an exposure opening thereto. After the first etching, photoresist is stripped from the substrate. After the stripping, a second etching is conducted of the innermost of the two layers within the exposure opening.
    Type: Grant
    Filed: February 12, 1997
    Date of Patent: October 16, 2001
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, Shubneesh Batra
  • Publication number: 20010028092
    Abstract: A method for interconnecting bit contacts and digit lines of a semiconductor device. A mask, through which portions of sidewall spacers of the digit lines located proximate the bit contacts are exposed, is positioned over the digit lines. Dopant is directed toward the semiconductor device at a non-perpendicular angle to a plane of the semiconductor device so as to dope portions of the sidewall spacers on one side of each of the digit lines while sidewall spacers opposed thereto and adjacent bit contacts are shielded from the dopant. Doped regions of the sidewall spacers may be removed with selectivity over undoped regions thereof to expose connect regions of each conductive element of each digit line. A conductive strap may then be formed to electrically link each connect region to its corresponding bit contact. Semiconductor devices including the conductive straps are also disclosed.
    Type: Application
    Filed: June 6, 2001
    Publication date: October 11, 2001
    Inventors: Tyler A. Lowrey, Shubneesh Batra
  • Patent number: 6301164
    Abstract: A memory device having a first set of programmable elements programmed to store an address of a column having a bad memory cell, and a second set of programmable elements programmed to store a segment-in-time (SIT) of the bad memory cell, the SIT of the bad memory cell indicating a relative position of the bad memory cell within a plurality of memory cells being accessed in a memory access. The SIT allows the memory device to selectively repair a bad memory cell within a column of memory cells accessed during a memory operation.
    Type: Grant
    Filed: August 25, 2000
    Date of Patent: October 9, 2001
    Assignee: Micron Technology, Inc.
    Inventors: Troy A. Manning, Chris G. Martin, Shubneesh Batra, Donald M. Morgan
  • Publication number: 20010026494
    Abstract: An integrated circuit anti-fuse is described which is fabricated as a capacitor using a layer of oxide. The two plates of the anti-fuse are coupled to appropriate voltage levels to rupture the oxide and form a conductive short between the plates. One of the plates is formed as a diffused well which is coupled to an external voltage during programming. The well is biased to an internal voltage during normal operation of the circuit incorporating the anti-fuse.
    Type: Application
    Filed: April 30, 2001
    Publication date: October 4, 2001
    Applicant: Micron Technology, Inc.
    Inventors: Kenneth W. Marr, Shubneesh Batra
  • Publication number: 20010021568
    Abstract: In one aspect, the invention encompasses a method of forming a polished material. A substrate is provided and an elevational step is provided relative to the substrate. The elevational step has an uppermost surface. A material is formed beside the elevational step. The material extends to above the elevational step uppermost surface and has lower and upper layers. The lower layer polishes at slower rate than the upper layer under common polishing conditions. The lower layer joins the upper layer at an interface. The material is polished down to about the elevational level of the elevational step uppermost surface utilizing the common polishing conditions. In another aspect, the invention encompasses a method of forming an isolation region. A substrate is provided. The substrate has an opening extending therein and a surface proximate the opening. A material is formed within the opening. The material extends to above the substrate surface, and comprises a lower layer and an upper layer.
    Type: Application
    Filed: March 14, 2001
    Publication date: September 13, 2001
    Inventors: Shubneesh Batra, Gurtej S. Sandhu
  • Patent number: 6281104
    Abstract: Impurities are added to a conductor layer in a semiconductor process to prevent formation of void spaces and encourage complete filling of contacts. The impurities reduce the melting point and surface tension of a conductor layer, thereby improving filling characteristics during a reflow step. The impurities may be added at any time during the process, including during conductor deposition and/or reflow.
    Type: Grant
    Filed: April 13, 1998
    Date of Patent: August 28, 2001
    Assignee: Micron Technology, Inc.
    Inventors: Shubneesh Batra, Gurtej Sandhu
  • Publication number: 20010014518
    Abstract: A method of forming a thin film transistor relative to a substrate includes, a) providing a thin film transistor layer of polycrystalline material on a substrate, the polycrystalline material comprising grain boundaries; b) providing a fluorine containing layer adjacent the polycrystalline thin film layer; c) annealing the fluorine containing layer at a temperature and for a time period which in combination are effective to drive fluorine from the fluorine containing layer into the polycrystalline thin film layer and incorporate fluorine within the grain boundaries to passivate said grain boundaries; and d) providing a transistor gate operatively adjacent the thin film transistor layer. The thin film transistor can be fabricated to be bottom gated or top gated. A buffering layer can be provided intermediate the thin film transistor layer and the fluorine containing layer, with the buffering layer being transmissive of fluorine from the fluorine containing layer during the annealing.
    Type: Application
    Filed: April 17, 2001
    Publication date: August 16, 2001
    Inventors: Gurtej S. Sandhu, Shubneesh Batra, Pierre C. Fazan
  • Publication number: 20010009528
    Abstract: A method for storing a temperature threshold in an integrated circuit includes measuring operating parameters of the integrated circuit versus temperature, calculating a maximum temperature at which the integrated circuit performance exceeds predetermined specifications and storing parameters corresponding to the maximum temperature in a comparison circuit in the integrated circuit by selectively blowing fusable devices in the comparison circuit. The fusable devices may be antifuses. As a result, the integrated circuit is able to provide signals to devices external to the integrated circuit to indicate that the integrated circuit may be too hot to operate properly.
    Type: Application
    Filed: January 23, 2001
    Publication date: July 26, 2001
    Inventors: Christopher B. Cooper, Ming-Bo Liu, Chris G. Martin, Troy A. Manning, Stephen L. Casper, Charles H. Dennison, Brian M. Shirley, Brian L. Brown, Shubneesh Batra
  • Patent number: 6242781
    Abstract: A method of forming an SRAM cell includes, a) providing a pair of pull-down gates having associated transistor diffusion regions operatively adjacent thereto, one of the diffusion regions of each pull-down gate being electrically connected to the other pull-down gate; b) providing a pair of pull-up resistor nodes for electrical connection with a pair of respective pull-up resistors, the pull-up nodes being in respective electrical connection with one of the pull-down gate diffusion regions and the other pull-down gate; c) providing a first electrical insulating layer outwardly of the resistor nodes; d) providing a pair of contact openings, with respective widths, through the first insulating layer to the pair of resistor nodes; e) providing a second electrical insulating layer over the first layer and to within the pair of contact openings to a thickness which is less than one-half the open widths; f) anisotropically etching the second electrical insulating layer to define respective electrical insulating ann
    Type: Grant
    Filed: July 22, 1997
    Date of Patent: June 5, 2001
    Assignee: Micron Technology, Inc.
    Inventors: Shubneesh Batra, Monte Manning
  • Publication number: 20010002337
    Abstract: In one aspect, the invention provides a method of exposing a material from which photoresist cannot be substantially selectively removed utilizing photoresist. In one preferred implementation, a first material from which photoresist cannot be substantially selectively removed is formed over a substrate. At least two different material layers are formed over the first material. Photoresist is deposited over the two layers and an opening formed within the photoresist over an outermost of the two layers. First etching is conducted through the outermost of the two layers within the photoresist opening to outwardly expose an innermost of the two layers and form an exposure opening thereto. After the first etching, photoresist is stripped from the substrate. After the stripping, a second etching is conducted of the innermost of the two layers within the exposure opening.
    Type: Application
    Filed: December 26, 2000
    Publication date: May 31, 2001
    Inventors: Gurtej S. Sandhu, Shubneesh Batra
  • Patent number: 6238957
    Abstract: A method of forming a thin film transistor relative to a substrate includes, a) providing a thin film transistor layer of polycrystalline material on a substrate, the polycrystalline material comprising grain boundaries; b) providing a fluorine containing layer adjacent the polycrystalline thin film layer; c) annealing the fluorine containing layer at a temperature and for a time period which in combination are effective to drive fluorine from the fluorine containing layer into the polycrystalline thin film layer and incorporate fluorine within the grain boundaries to passivate said grain boundaries; and d) providing a transistor gate operatively adjacent the thin film transistor layer. The thin film transistor can be fabricated to be bottom gated or top gated. A buffering layer can be provided intermediate the thin film transistor layer and the fluorine containing layer, with the buffering layer being transmissive of fluorine from the fluorine containing layer during the annealing.
    Type: Grant
    Filed: December 7, 1999
    Date of Patent: May 29, 2001
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, Shubneesh Batra, Pierre C. Fazan
  • Patent number: 6233190
    Abstract: A method for storing a temperature threshold in an integrated circuit includes measuring operating parameters of the integrated circuit versus temperature, calculating a maximum temperature at which the integrated circuit performance exceeds predetermined specifications and storing parameters corresponding to the maximum temperature in a comparison circuit in the integrated circuit by selectively blowing fusable devices in the comparison circuit. The fusable devices may be antifuses. As a result, the integrated circuit is able to provide signals to devices external to the integrated circuit to indicate that the integrated circuit may be too hot to operate properly.
    Type: Grant
    Filed: August 30, 1999
    Date of Patent: May 15, 2001
    Assignee: Micron Technology, Inc.
    Inventors: Christopher B. Cooper, Ming-Bo Liu, Chris G. Martin, Troy A. Manning, Stephen L. Casper, Charles H. Dennison, Brian M. Shirley, Brian L. Brown, Shubneesh Batra
  • Patent number: 6233194
    Abstract: An integrated circuit anti-fuse is described which is fabricated as a capacitor using a layer of oxide. The two plates of the anti-fuse are coupled to appropriate voltage levels to rupture the oxide and form a conductive short between the plates. One of the plates is formed as a diffused well which is coupled to an external voltage during programming. The well is biased to an internal voltage during normal operation of the circuit incorporating the anti-fuse.
    Type: Grant
    Filed: April 27, 2000
    Date of Patent: May 15, 2001
    Assignee: Micron Technology, Inc.
    Inventors: Kenneth W. Marr, Shubneesh Batra
  • Publication number: 20010000756
    Abstract: A thin film transistor includes: a) a thin film transistor layer comprising a source region, a channel region and a drain region; the thin film transistor layer further comprising a drain offset region positioned between the drain region and the channel region; b) the channel region being substantially polycrystalline and having a first average crystalline grain size; and c) the drain offset region being substantially polycrystalline and having a second average crystalline grain size, the second average crystalline grain size being larger than the first average crystalline grain size. A method for forming such a construction using polycrystalline materials, preferably polysilicon, and an amorphizing silicon implant with subsequent recrystallization is also disclosed.
    Type: Application
    Filed: December 15, 2000
    Publication date: May 3, 2001
    Inventors: Shubneesh Batra, Monte Manning, Sanjay Banerjee, John Damiano
  • Patent number: 6215151
    Abstract: Integrated circuitry and methods of forming integrated circuitry are described. In one implementation, a common masking step is utilized to provide source/drain diffusion regions and halo ion implantation or dopant regions relative to the source/drain regions within one well region of a substrate; and well contact diffusion regions within another well region of the substrate. The common masking step preferably defines at least one mask opening over the substrate within which the well contact diffusion region is to be formed, and the mask opening is suitably dimensioned to reduce the amount of halo ion implantation dopant which ultimately reaches the substrate therebelow. According to one aspect, a plurality of mask openings are provided. According to another aspect, a suitably-dimensioned single mask opening is provided.
    Type: Grant
    Filed: February 23, 1999
    Date of Patent: April 10, 2001
    Assignee: Micron Technology, Inc.
    Inventors: Zhiqiang Wu, Luan C. Tran, Robert Kerr, Shubneesh Batra, Rongsheng Yang
  • Patent number: 6214652
    Abstract: A thin film transistor includes: a) a thin film transistor layer comprising a source region, a channel region and a drain region; the thin film transistor layer further comprising a drain offset region positioned between the drain region and the channel region; b) the channel region being substantially polycrystalline and having a first average crystalline grain size; and c) the drain offset region being substantially polycrystalline and having a second average crystalline grain size, the second average crystalline grain size being larger than the first average crystalline grain size. A method for forming such a construction using polycrystalline materials, preferably polysilicon, and an amorphizing silicon implant with subsequent recrystallization is also disclosed.
    Type: Grant
    Filed: November 17, 1999
    Date of Patent: April 10, 2001
    Assignee: Micron Technology, Inc.
    Inventors: Shubneesh Batra, Monte Manning, Sanjay Banerjee, John Damiano, Jr.
  • Patent number: 6211093
    Abstract: In one aspect, the invention provides a method of exposing a material from which photoresist cannot be substantially selectively removed utilizing photoresist. In still another aspect of the invention, laser ablation of photoresist is utilized. In one implementation, the invention comprises forming a first material over a substrate. Photoresist is deposited over the first material and an opening is formed within the photoresist over the first material. Etching is then conducted into the first material through the photoresist opening. After the etching, the photoresist is laser ablated from over the first material.
    Type: Grant
    Filed: December 22, 1998
    Date of Patent: April 3, 2001
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, Shubneesh Batra
  • Patent number: 6204149
    Abstract: In one aspect, the invention encompasses a method of forming a polished material. A substrate is provided and an elevational step is provided relative to the substrate. The elevational step has an uppermost surface. A material is formed beside the elevational step. The material extends to above the elevational step uppermost surface and lower and upper layers. The lower layer polishes at slower rate than the upper layer under common polishing conditions. The lower layer joins the upper layer at an interface. The material is polished down to about the elevational level of the elevational step uppermost surface utilizing the common polishing conditions. In another aspect, the invention encompasses a method of forming an isolation region. A substrate is provided. The substrate has an opening extending therein and a surface proximate the opening. A material is formed within the opening. The material extends to above the substrate surface, and comprises a lower layer and an upper layer.
    Type: Grant
    Filed: May 26, 1999
    Date of Patent: March 20, 2001
    Assignee: Micron Technology, Inc.
    Inventors: Shubneesh Batra, Gurtej S. Sandhu
  • Patent number: 6200839
    Abstract: A method of forming a thin film transistor includes, a) forming a thin film transistor layer of semiconductive material; b) providing a gate operatively adjacent the thin film transistor layer; c) forming at least one electrically conductive sidewall spacer over at least one lateral edge of the gate, the spacer being electrically continuous therewith; and d) providing a source region, a drain region, a drain offset region, and a channel region in the thin film transistor layer; the drain offset region being positioned operatively adjacent the one electrically conductive sidewall spacer and being gated thereby. The spacer is formed by anisotropically etching a spacer forming layer.
    Type: Grant
    Filed: July 6, 1999
    Date of Patent: March 13, 2001
    Assignee: Micron Technology, Inc.
    Inventors: Shubneesh Batra, Monte Manning, Sanjay Banerjee, LeTien Jung