Patents by Inventor Shyue Seng Tan

Shyue Seng Tan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200212056
    Abstract: A memory device may include a substrate, a first gate structure, a mask and a second gate structure. The substrate may include a source region and a drain region at least partially arranged within the substrate, and a channel region arranged between the source region and the drain region. The first gate structure may be at least partially arranged over the channel region, and may include a top surface that may be substantially flat. The mask may be at least partially arranged over the top surface of the first gate structure. The second gate structure may be at least partially arranged over the mask and at least partially arranged adjacent to the first gate structure.
    Type: Application
    Filed: December 27, 2018
    Publication date: July 2, 2020
    Inventors: Xinshu CAI, Shyue Seng TAN, Khee Yong LIM, Kiok Boone Elgin QUEK
  • Patent number: 10700277
    Abstract: A memory device may include a bottom electrode, first and second switching elements over the bottom electrode, and first and second top electrodes over the first and second switching elements respectively. The first and second top electrodes may include first and second contact surfaces in contact with the first and second switching elements respectively. The first and second switching elements may each have a resistance configured to switch between resistance values in response to changes in voltages applied between the top electrodes and the bottom electrode. The bottom electrode may include at least one conductive layer having third and fourth contact surfaces in contact with the first and second switching elements respectively. An area of the first contact surface may be greater than an area of the third contact surface, and an area of the second contact surface may be greater than an area of the fourth contact surface.
    Type: Grant
    Filed: February 1, 2019
    Date of Patent: June 30, 2020
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Lanxiang Wang, Shyue Seng Tan, Eng Huat Toh
  • Patent number: 10685970
    Abstract: A method of forming a low-cost and compact hybrid SOI and bulk MTP cell and the resulting devices are provided. Embodiments include forming a bulk region in a SOI wafer; forming an NW in the bulk region and a PW in a remaining SOI region of the SOI wafer; forming first and second pairs of common FG stacks over both of the SOI and bulk regions; forming a first shared N+ RSD between each common FG stack of the first and second pairs in a top Si layer; forming a N+ RSD in the top Si layer of the SOI region on an opposite side of each common FG stack from the first shared N+ RSD; forming a second shared N+ RSD between each common FG stack in the bulk region; and forming a P+ RSD between the first and second pairs in the bulk region.
    Type: Grant
    Filed: June 6, 2018
    Date of Patent: June 16, 2020
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Eng Huat Toh, Shyue Seng Tan, Danny Pak-Chum Shum
  • Publication number: 20200182826
    Abstract: A sensor device may include a substrate, first and second source regions, first and second drain regions, first and second channel regions, and first and second gate structures disposed over the first and second channel regions, respectively. The source regions and drain regions may be at least partially disposed within the substrate. The first and second source regions may have first and second source resistances, respectively, and the second source resistance may be higher than the first source resistance. The first gate structure may receive a solution, and a change in pH in the solution may cause a change in a first current flow through the first channel region. In turn, the second current flow through the second channel region may change to compensate for the change in the first current flow to maintain a constant current flow through the sensor device.
    Type: Application
    Filed: December 11, 2018
    Publication date: June 11, 2020
    Inventors: Bin LIU, Eng Huat TOH, Shyue Seng TAN, Ming Tsang TSAI, Khee Yong LIM, Kiok Boone Elgin QUEK
  • Publication number: 20200173959
    Abstract: Integrated circuits and methods of producing the same are provided. In an exemplary embodiment, an integrated circuit includes a detection layer, a substrate, and a transistor having a transistor gate electrode, a transistor source, and a transistor drain. A capacitor gate electrode overlies the substrate, where the capacitor gate electrode and the transistor gate electrode are electrically connected with each other and with the detection layer. A capacitor well is defined within the substrate, and a gate insulator is positioned between the capacitor well and the capacitor gate electrode. A capacitor includes the capacitor gate electrode, the gate insulator, and the capacitor well.
    Type: Application
    Filed: November 29, 2018
    Publication date: June 4, 2020
    Inventors: Eng Huat Toh, Bin Liu, Shyue Seng Tan, Kiok Boone Elgin Quek
  • Publication number: 20200176513
    Abstract: A memory device may include a substrate having conductivity regions and a channel region. A first voltage line may be arranged over the channel region. A second voltage line, and third and fourth voltage lines may be electrically coupled to a first conductivity region and a second conductivity region respectively. Resistive units may be arranged between the third and fourth voltage lines and the second conductivity region. In use, changes in voltages applied between the second and third voltage lines, and between the second and fourth voltage lines may cause resistances of first and second resistive units to switch between lower and higher resistance values. The lower resistance value of the first resistive unit may be different from the lower resistance value of the second resistive unit and/or the higher resistance value of the first resistive unit may be different from the higher resistance value of the second resistive unit.
    Type: Application
    Filed: November 30, 2018
    Publication date: June 4, 2020
    Inventors: Lanxiang WANG, Shyue Seng TAN, Eng Huat TOH
  • Publication number: 20200135275
    Abstract: A device having at least one memory cell over a substrate is provided. The at least one memory cell includes a source region and a drain region in the substrate, and a first gate and a second gate over the substrate. The first and second gates are arranged between the source region and the drain region. The first and second gate are separated by an intergate dielectric. The first gate is configured as a select gate and erase gate of the at least one memory cell, and the second gate is configured as a storage gate of the at least one memory cell. The second gate comprises a floating gate and a control gate over the floating gate. The device further includes source/drain (S/D) contacts extending from the source region and the drain region. The source region and the drain region are coupled to either one of a source line (SL) or a bit line (BL) through the S/D contacts.
    Type: Application
    Filed: October 30, 2018
    Publication date: April 30, 2020
    Inventors: Xinshu Cai, Shyue Seng Tan, Kiok Boone Elgin Quek
  • Patent number: 10636867
    Abstract: A method of forming an integrated circuit with a metal-insulator-poly (MIP) capacitor formed in a high-k metal gate (HKMG) process and the resulting device are provided. Embodiments include a device including a metal gate; a high-k dielectric layer formed around side walls of the metal gate, and a dummy polysilicon gate adjacent to at least one portion of the high-k dielectric layer. The device also includes a capacitor including the HK layer as an insulator, wherein the insulator is between a dummy as one electrode and the metal gate as another electrode.
    Type: Grant
    Filed: July 11, 2018
    Date of Patent: April 28, 2020
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Xinshu Cai, Shyue Seng Tan, Juan Boon Tan, Danny Pak-Chum Shum
  • Publication number: 20200124565
    Abstract: A sensor device includes a substrate, first and second source regions, first and second drain regions, first and second channel regions, and first and second gate structures disposed over the first and second channel regions respectively. The source regions and drain regions are at least partially disposed within the substrate. The second gate structure includes first and second gate elements, and a resistance region configured to provide a resistance to a second current flow through the second channel region. In use, the first gate structure may receive a solution, and a change in pH in the solution changes a first current flow through the first channel region. In turn, the second current flow through the second channel region changes to compensate for the change in the first current flow to maintain a constant current flow through the sensor device.
    Type: Application
    Filed: October 18, 2018
    Publication date: April 23, 2020
    Inventors: Lanxiang WANG, Ping ZHENG, Shyue Seng TAN, Eng Huat TOH
  • Publication number: 20200098769
    Abstract: Devices and methods of forming a device are disclosed. The device includes a substrate defined with at least a device region. A multi-gate transistor disposed in the device region which includes first and second gates both having first and second gate sidewalls. The multi-gate transistor also includes first source/drain (S/D) regions disposed adjacent to the first gate sidewall of the first and second gate, a common second S/D region disposed adjacent to the second gate sidewall of the first and second gate. A negative capacitance element is disposed within the second gate to reduce total overlap capacitance of the transistor. An interlevel dielectric (ILD) layer is disposed over the substrate and covering the transistor. First and second contacts are disposed in the ILD layer which are coupled to the first and second S/D regions respectively.
    Type: Application
    Filed: November 26, 2019
    Publication date: March 26, 2020
    Inventors: Shyue Seng TAN, Kiok Boone Elgin QUEK, Eng Huat TOH
  • Publication number: 20200083237
    Abstract: In a non-limiting embodiment, a memory array is provided having a transistor device. The transistor device includes transistor device first, second and third doped regions in a substrate. The transistor device further includes a first transistor device select gate over a region between the transistor device first doped region and the transistor device second doped region, and a second transistor device select gate over a region between the transistor device first doped region and the transistor device third doped region. The transistor device further includes a transistor device dielectric barrier extending between the first transistor device select gate and the second transistor device select gate. A width of the dielectric barrier compared to a width of the first transistor device select gate and/or the second transistor device select gate may have a ratio ranging from 0.33:1 to 5:1.
    Type: Application
    Filed: September 11, 2018
    Publication date: March 12, 2020
    Inventors: Xinshu Cai, Shyue Seng Tan, Danny Pak-Chum Shum
  • Patent number: 10580781
    Abstract: Devices and methods of forming a device are disclosed. The device includes a substrate defined with at least a device region. A multi-gate transistor disposed in the device region which includes first and second gates both having first and second gate sidewalls. The multi-gate transistor also includes first source/drain (S/D) regions disposed adjacent to the first gate sidewall of the first and second gate, a common second S/D region disposed adjacent to the second gate sidewall of the first and second gate. A negative capacitance element is disposed within the second gate to reduce total overlap capacitance of the transistor. An interlevel dielectric (ILD) layer is disposed over the substrate and covering the transistor. First and second contacts are disposed in the ILD layer which are coupled to the first and second S/D regions respectively.
    Type: Grant
    Filed: October 12, 2017
    Date of Patent: March 3, 2020
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Shyue Seng Tan, Kiok Boone Elgin Quek, Eng Huat Toh
  • Publication number: 20200064397
    Abstract: An integrated wafer probe card with a light source facing a device under test (DUT) side and enabling methodology are provided.
    Type: Application
    Filed: August 21, 2018
    Publication date: February 27, 2020
    Inventors: Lanxiang WANG, Meng Yew SEAH, Shyue Seng TAN, Jeffery Chor-Keung LAM
  • Patent number: 10559691
    Abstract: Methods of forming a compact FinFET OTP/MTP cell and a compact FDSOI OTP/MTP cell and resulting devices are provided. Embodiments include providing a substrate having a BOX layer; forming fins on the BOX layer with a gap in between; forming first and second gates, laterally separated, over and perpendicular to the fins; forming at least one third gate between the first and second gates and contacting the BOX layer through the gap, each third gate overlapping an end of a fin or both fins; forming a S/D region in each of the fins adjacent to the first and second gates, respectively, remote from the at least one third gate; utilizing each of the first and second gates as a WL; utilizing each third gate as a SL or connecting a SL to the S/D region; and connecting a BL to the S/D region or the at least one third gate.
    Type: Grant
    Filed: November 19, 2018
    Date of Patent: February 11, 2020
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Eng Huat Toh, Shyue Seng Tan, Elgin Kiok Boone Quek
  • Publication number: 20200020761
    Abstract: A method of forming an integrated circuit with a metal-insulator-poly (MIP) capacitor formed in a high-k metal gate (HKMG) process and the resulting device are provided. Embodiments include a device including a metal gate; a high-k dielectric layer formed around side walls of the metal gate, and a dummy polysilicon gate adjacent to at least one portion of the high-k dielectric layer. The device also includes a capacitor including the HK layer as an insulator, wherein the insulator is between a dummy as one electrode and the metal gate as another electrode.
    Type: Application
    Filed: July 11, 2018
    Publication date: January 16, 2020
    Inventors: Xinshu CAI, Shyue Seng TAN, Juan Boon TAN, Danny Pak-Chum SHUM
  • Publication number: 20200019500
    Abstract: The present disclosure relates to split gate flash MLC based neuromorphic processing and method of making the same. Embodiments include MLC split-gate flash memory formed over a substrate, the MLC split-gate flash memory embedded with artificial neuromorphic processing to dynamically program and erase each cell of the MLC split-gate flash memory; and sense visual imagery by the artificial neuromorphic processing.
    Type: Application
    Filed: July 12, 2018
    Publication date: January 16, 2020
    Inventors: Danny Pak-Chum SHUM, Shyue Seng TAN, Xinshu CAI, Fan ZHANG, Soh Yun SIAH, Tze Ho Simon CHAN
  • Patent number: 10510859
    Abstract: A semiconductor device with reduce capacitance coupling effect which can reduce the overall parasitic capacitances is disclosed. The semiconductor device includes a gate sidewall spacer with a negative capacitance dielectric layer with and without a dielectric layer. The semiconductor device may also include a plurality of interlevel dielectric (ILD) with a layer of negative capacitance dielectric layer followed by a dielectric layer disposed in-between metal lines in any ILD and combinations. The negative capacitance dielectric layer includes a ferroelectric material which has calculated and selected thicknesses with desired negative capacitance to provide optimal total overlap capacitance in the circuit component which aims to reduce the overall capacitance coupling effect.
    Type: Grant
    Filed: April 24, 2019
    Date of Patent: December 17, 2019
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Shyue Seng Tan, Kiok Boone Elgin Quek, Eng Huat Toh
  • Publication number: 20190378848
    Abstract: A method of forming a low-cost and compact hybrid SOI and bulk MTP cell and the resulting devices are provided. Embodiments include forming a bulk region in a SOI wafer; forming an NW in the bulk region and a PW in a remaining SOI region of the SOI wafer; forming first and second pairs of common FG stacks over both of the SOI and bulk regions; forming a first shared N+ RSD between each common FG stack of the first and second pairs in a top Si layer; forming a N+ RSD in the top Si layer of the SOI region on an opposite side of each common FG stack from the first shared N+ RSD; forming a second shared N+ RSD between each common FG stack in the bulk region; and forming a P+ RSD between the first and second pairs in the bulk region.
    Type: Application
    Filed: June 6, 2018
    Publication date: December 12, 2019
    Inventors: Eng Huat TOH, Shyue Seng TAN, Danny Pak-Chum SHUM
  • Patent number: 10495603
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to high performance ion sensitive field effect transistor (ISFET) with ferroelectric material and methods of manufacture. The structure includes: a substrate comprising a doped region; a gate dielectric material over the doped region; a ferroelectric material over the gate dielectric material; and a sensing membrane over the ferroelectric material.
    Type: Grant
    Filed: May 11, 2018
    Date of Patent: December 3, 2019
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Shyue Seng Tan, Kiok Boone Elgin Quek, Eng Huat Toh, Lanxiang Wang
  • Publication number: 20190346404
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to high performance ion sensitive field effect transistor (ISFET) with ferroelectric material and methods of manufacture. The structure includes: a substrate comprising a doped region; a gate dielectric material over the doped region; a ferroelectric material over the gate dielectric material; and a sensing membrane over the ferroelectric material.
    Type: Application
    Filed: May 11, 2018
    Publication date: November 14, 2019
    Inventors: Shyue Seng TAN, Kiok Boone Elgin QUEK, Eng Huat TOH, Lanxiang WANG