Patents by Inventor Siva P. Adusumilli

Siva P. Adusumilli has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11637173
    Abstract: A structure includes a semiconductor substrate, and a polycrystalline resistor region over the semiconductor substrate. The polycrystalline resistor region includes a semiconductor material in a polycrystalline morphology. A dopant-including polycrystalline region is between the polycrystalline resistor region and the semiconductor substrate.
    Type: Grant
    Filed: September 29, 2020
    Date of Patent: April 25, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Yves T. Ngu, Siva P. Adusumilli, Steven M. Shank, Michael J. Zierak, Mickey H. Yu
  • Publication number: 20230124962
    Abstract: The present disclosure relates generally to structures in semiconductor devices and methods of forming the same. More particularly, the present disclosure relates to high electron mobility transistor (HEMT) devices having a silicided polysilicon layer. The present disclosure may provide an active region above a substrate, source and drain electrodes in contact with the active region, a gate above the active region, the gate being laterally between the source and drain electrodes, a polysilicon layer above the substrate, and a silicide layer on the polysilicon layer. The active region includes at least two material layers with different band gaps. The polysilicon layer may be configured as an electronic fuse, a resistor, or a diode.
    Type: Application
    Filed: October 17, 2021
    Publication date: April 20, 2023
    Inventors: VIBHOR JAIN, JOHNATAN AVRAHAM KANTAROVSKY, MARK DAVID LEVY, EPHREM GEBRESELASIE, YVES NGU, SIVA P. ADUSUMILLI
  • Publication number: 20230121393
    Abstract: Structures including devices, such as transistors, integrated on a semiconductor substrate and methods of forming a structure including devices, such as transistors, integrated on a semiconductor substrate. A first transistor is formed in a first device region of a semiconductor substrate, and a second transistor is formed in a second device region of the semiconductor substrate. The second transistor includes a layer stack on the semiconductor substrate, and the layer stack includes a layer comprised of a III-V compound semiconductor material. A polycrystalline layer includes a section that is positioned in the semiconductor substrate beneath the first device region.
    Type: Application
    Filed: December 21, 2022
    Publication date: April 20, 2023
    Inventors: Siva P. Adusumilli, Mark Levy, Jeonghyun Hwang
  • Publication number: 20230105338
    Abstract: A structure includes a first layer having a recess. The structure further includes an intermediate layer contacting the first layer and a contact-free biosensor aligned above the recess. The portion of the intermediate layer that is positioned along the recess separates the contact-free biosensor from the recess.
    Type: Application
    Filed: October 5, 2021
    Publication date: April 6, 2023
    Applicant: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Bartlomiej J. Pawlak, Aaron L. Vallett, Siva P. Adusumilli, Mark D. Lagerquist
  • Patent number: 11616127
    Abstract: The present disclosure relates generally to structures in semiconductor devices and methods of forming the same. More particularly, the present disclosure relates to semiconductor devices having field plates that are arranged symmetrically around a gate. The present disclosure provides a semiconductor device including an active region above a substrate, source and drain electrodes in contact with the active region, a gate above the active region and laterally between the source and drain electrodes, a first field plate between the source electrode and the gate, a second field plate between the drain electrode and the gate, in which the gate is spaced apart laterally and substantially equidistant from the first field plate and the second field plate.
    Type: Grant
    Filed: February 13, 2022
    Date of Patent: March 28, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Johnatan Avraham Kantarovsky, Rajendran Krishnasamy, Siva P. Adusumilli, Steven Bentley, Michael Joseph Zierak, Jeonghyun Hwang
  • Patent number: 11611002
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to photodiodes and/or PIN diode structures and methods of manufacture. The structure includes: a spiral fin structure comprising semiconductor substrate material and dielectric material; a photosensitive semiconductor material over sidewalls and a top surface of the spiral fin structure, the photosensitive semiconductor material positioned to capture laterally emitted incident light; a doped semiconductor material above the photosensitive semiconductor material; and contacts electrically contacting the semiconductor substrate material and the doped semiconductor material from a top surface thereof.
    Type: Grant
    Filed: July 22, 2020
    Date of Patent: March 21, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Mark D. Levy, Edward W. Kiewra, Siva P. Adusumilli, John J. Ellis-Monaghan
  • Patent number: 11605649
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to switches in a bulk substrate and methods of manufacture. The structure includes: at least one active device having a channel region of a first semiconductor material; a single air gap under the channel region of the at least one active device; and a second semiconductor material being coplanar with and laterally bounding at least one side of the single air gap, the second semiconductor material being different material than the first semiconductor material.
    Type: Grant
    Filed: May 3, 2021
    Date of Patent: March 14, 2023
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Mark D. Levy, Siva P. Adusumilli, Alvin J. Joseph, Ramsey Hazbun
  • Publication number: 20230063731
    Abstract: Structures with altered crystallinity beneath semiconductor devices and methods associated with forming such structures. Trench isolation regions surround an active device region composed of a single-crystal semiconductor material. A first non-single-crystal layer is arranged beneath the trench isolation regions and the active device region. A second non-single-crystal layer is arranged beneath the trench isolation regions and the active device region. The first non-single-crystal layer is arranged between the second non-single-crystal layer and the active device region.
    Type: Application
    Filed: November 9, 2022
    Publication date: March 2, 2023
    Inventors: Steven M. Shank, Anthony K. Stamper, Ian McCallum-Cook, Siva P. Adusumilli
  • Patent number: 11588056
    Abstract: A structure includes a semiconductor-on-insulator (SOI) substrate including a semiconductor substrate, a buried insulator layer over the semiconductor substrate, and an SOI layer over the buried insulator layer. At least one polycrystalline active region fill shape is in the SOI layer. A polycrystalline isolation region may be in the semiconductor substrate under the buried insulator layer. The at least one polycrystalline active region fill shape is laterally aligned over the polycrystalline isolation region, where provided. Where provided, the polycrystalline isolation region may extend to different depths in the semiconductor substrate.
    Type: Grant
    Filed: August 13, 2020
    Date of Patent: February 21, 2023
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Mark D. Levy, Siva P. Adusumilli, Jagar Singh
  • Patent number: 11581450
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to photodiodes and/or PIN diode structures and methods of manufacture. The structure includes: at least one vertical pillar feature within a trench; a photosensitive semiconductor material extending laterally from sidewalls of the at least one vertical pillar feature; and a contact electrically connecting to the photosensitive semiconductor material.
    Type: Grant
    Filed: June 11, 2020
    Date of Patent: February 14, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Mark D. Levy, Siva P. Adusumilli, Vibhor Jain, John J. Ellis-Monaghan
  • Publication number: 20230037420
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to gate structures and methods of manufacture. The structure includes: a gate structure comprising a horizontal portion and a substantially vertical stem portion; and an air gap surrounding the substantially vertical stem portion and having a curved surface under the horizontal portion.
    Type: Application
    Filed: July 27, 2021
    Publication date: February 9, 2023
    Inventors: Johnatan A. Kantarovsky, Mark D. Levy, Brett T. Cucci, Jeonghyun Hwang, Siva P. Adusumilli
  • Patent number: 11569170
    Abstract: A semiconductor device is provided, the semiconductor device comprising a substrate having merged cavities in the substrate. An active region is over the merged cavities in the substrate. A thermally conductive layer is in the merged cavities in the substrate, whereby the thermally conductive layer at least partially fills up the merged cavities in the substrate. A first contact pillar connects the thermally conductive layer in the merged cavities in the substrate with a metallization layer above the active region.
    Type: Grant
    Filed: October 7, 2020
    Date of Patent: January 31, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Siva P. Adusumilli, Mark David Levy, Ramsey Hazbun, Alvin Joseph, Steven Bentley
  • Patent number: 11569374
    Abstract: Structures including devices, such as transistors, integrated on a semiconductor substrate and methods of forming a structure including devices, such as transistors, integrated on a semiconductor substrate. A first transistor is formed in a first device region of a semiconductor substrate, and a second transistor is formed in a second device region of the semiconductor substrate. The second transistor includes a layer stack on the semiconductor substrate, and the layer stack includes a layer comprised of a III-V compound semiconductor material. A polycrystalline layer includes a section that is positioned in the semiconductor substrate beneath the first device region.
    Type: Grant
    Filed: December 2, 2020
    Date of Patent: January 31, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Siva P. Adusumilli, Mark Levy, Jeonghyun Hwang
  • Patent number: 11567277
    Abstract: Structures that include a distributed Bragg reflector and methods of fabricating a structure that includes a distributed Bragg reflector. The structure includes a substrate, an optical component, and a distributed Bragg reflector positioned between the optical component and the substrate. The distributed Bragg reflector includes airgaps and silicon layers that alternate in a vertical direction with the airgaps to define a plurality of periods.
    Type: Grant
    Filed: September 13, 2021
    Date of Patent: January 31, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Yusheng Bian, Mark Levy, Siva P. Adusumilli
  • Patent number: 11545577
    Abstract: Disclosed is a structure including a semiconductor layer with a device area and, within the device area, a monocrystalline portion and polycrystalline portion(s) that extend through the monocrystalline portion. The structure includes an active device including a device component, which is in device area and which includes polycrystalline portion(s). For example, the device can be a field effect transistor (FET) (e.g., a simple FET or a multi-finger FET for a low noise amplifier or RF switch) with at least one source/drain region, which is in the device area and which includes at least one polycrystalline portion that extends through the monocrystalline portion. The embodiments can vary with regard to the type of structure (e.g., bulk or SOI), with regard to the type of device therein, and also with regard to the number, size, shape, location, orientation, etc. of the polycrystalline portion(s). Also disclosed is a method for forming the structure.
    Type: Grant
    Filed: December 8, 2020
    Date of Patent: January 3, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Siva P. Adusumilli, John J. Ellis-Monaghan, Steven M. Shank, Yves T. Ngu, Michael J. Zierak
  • Patent number: 11545549
    Abstract: Body-contacted semiconductor structures and methods of forming a body-contacted semiconductor structure. A semiconductor substrate, which contains of a single-crystal semiconductor material, includes a device region and a plurality of body contact regions each comprised of the single-crystal semiconductor material. A polycrystalline layer and polycrystalline regions are formed in the semiconductor substrate. The polycrystalline regions are positioned between the polycrystalline layer and the device region, and the polycrystalline regions have a laterally-spaced arrangement with a gap between each adjacent pair of the polycrystalline regions. One of the plurality of body contact regions is arranged in the gap between each adjacent pair of the polycrystalline regions.
    Type: Grant
    Filed: September 23, 2020
    Date of Patent: January 3, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Steven M. Shank, Siva P. Adusumilli, Yves Ngu, Michael Zierak
  • Publication number: 20220413232
    Abstract: Structures for a coupler and methods of forming a structure for a coupler. A structure for a directional coupler may include a first waveguide core having one or more first airgaps and a second waveguide core including one or more second airgaps. The one or more second airgaps are positioned in the second waveguide core adjacent to the one or more first airgaps in the first waveguide core. A structure for an edge coupler is also provided in which the waveguide core of the edge coupler includes one or more airgaps.
    Type: Application
    Filed: June 29, 2021
    Publication date: December 29, 2022
    Inventors: Spencer Porter, Mark Levy, Siva P. Adusumilli, Yusheng Bian
  • Patent number: 11536914
    Abstract: A photodetector array includes a substrate, and an array of pixels over the substrate. Each pixel includes a set of diffraction gratings directly on a semiconductor photodetector. A pitch of the set of diffraction gratings associated with each pixel in the array of pixels are different to enable each pixel to detect a specific wavelength of light different than other pixels of the array of pixels. An air cavity may be provided in the substrate under the germanium photodetector to improve light absorption. A method of forming the photodetector array is also disclosed.
    Type: Grant
    Filed: November 17, 2020
    Date of Patent: December 27, 2022
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Yusheng Bian, Siva P. Adusumilli, Mark D. Levy
  • Publication number: 20220406833
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to photodetectors with buried airgap mirror reflectors. The structure includes a photodetector and at least one airgap in a substrate under the photodetector.
    Type: Application
    Filed: August 26, 2022
    Publication date: December 22, 2022
    Inventors: Siva P. ADUSUMILLI, Vibhor JAIN, Alvin J. JOSEPH, Steven M. SHANK
  • Publication number: 20220399372
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to field effect transistors and methods of manufacture. The structure includes: at least one gate structure comprising source/drain regions; and at least one isolation structure perpendicular to the at least one gate structure and within the source/drain regions.
    Type: Application
    Filed: June 10, 2021
    Publication date: December 15, 2022
    Inventors: Anthony K. STAMPER, Uzma RANA, Siva P. ADUSUMILLI, Steven M. SHANK