Abstract: A semiconductor structure comprises a semiconductor substrate, an N-type stacked nanosheet channel structure formed on the semiconductor substrate, and a P-type stacked nanosheet channel structure formed adjacent to the N-type stacked nanosheet channel structure on the semiconductor substrate. Each of the adjacent N-type and P-type stacked nanosheet channel structures comprises a plurality of stacked channel regions with each such channel region being substantially surrounded by a gate dielectric layer and a gate work function metal layer, and with the gate work function metal layer being separated from the channel regions by the gate dielectric layer. The gate dielectric and gate work function metal layers of the adjacent N-type and P-type stacked nanosheet channel structures are substantially eliminated from a shared gate region between the adjacent N-type and P-type stacked nanosheet channel structures.

Abstract: A semiconductor structure comprises a semiconductor substrate, an N-type stacked nanosheet channel structure formed on the semiconductor substrate, and a P-type stacked nanosheet channel structure formed adjacent to the N-type stacked nanosheet channel structure on the semiconductor substrate. Each of the adjacent N-type and P-type stacked nanosheet channel structures comprises a plurality of stacked channel regions with each such channel region being substantially surrounded by a gate dielectric layer and a gate work function metal layer, and with the gate work function metal layer being separated from the channel regions by the gate dielectric layer. The gate dielectric and gate work function metal layers of the adjacent N-type and P-type stacked nanosheet channel structures are substantially eliminated from a shared gate region between the adjacent N-type and P-type stacked nanosheet channel structures.

Abstract: A method of forming a semiconductor structure includes forming first and second stacked nanosheet channel structures on a semiconductor substrate, with each nanosheet channel structure including a plurality of stacked channel regions interspersed with sacrificial regions. In a resulting semiconductor structure, an N-type stacked nanosheet channel structure is formed on the semiconductor substrate, and a P-type stacked nanosheet channel structure is formed adjacent to the N-type stacked nanosheet channel structure on the semiconductor substrate. Each of the adjacent N-type and P-type stacked nanosheet channel structures includes a plurality of stacked channel regions with each such channel region being substantially surrounded by a gate dielectric layer and a gate work function metal layer.

Abstract: A double diffusion break (DDB) gate structure is provided by removing the vestigial antenna to provide a space and the space is filled, at least in part, with an interlevel dielectric (ILD) material. Removal of the vestigial antenna from the DDB gate structure will reduce the device capacitance and improve device performance, while enabling DDB in tight integration schemes.

Abstract: A double diffusion break (DDB) gate structure is provided by removing the vestigial antenna to provide a space and the space is filled, at least in part, with an interlevel dielectric (ILD) material. Removal of the vestigial antenna from the DDB gate structure will reduce the device capacitance and improve device performance, while enabling DDB in tight integration schemes.

Abstract: Controlled recessing of materials in cavities and resulting devices are disclosed.

Abstract: A method for forming a semiconductor device comprises forming a first fin and a second fin on a semiconductor substrate, forming a sacrificial gate stack over a channel region of the first fin and the second fin, depositing a layer of spacer material over the first fin and the second fin, depositing a layer of dielectric material over the layer of spacer material, removing a portion of the dielectric material to form a first cavity that exposes a portion of the first fin, epitaxially growing a first semiconductor material on the exposed portion of the first fin to form a source/drain region on the first fin, depositing a protective layer on the source/drain region on the first fin, removing a portion of the dielectric material to form a second cavity that exposes a portion of the second fin, and epitaxially growing a source/drain region on the second fin.

Abstract: The specification and drawings present a new method, ASIC and computer/software related product (e.g., a computer readable memory) are presented for realizing conformal doping in embedded deep trench applications in the ASIC. A common SOI substrate with intrinsic or low dopant concentration is used for manufacturing such ASICs comprising a logic area having MOSFETs utilizing, for example, ultra thin body and box technology and an eDRAM area having deep trench capacitors with the conformal doping.

Abstract: The specification and drawings present a new method, device and computer/software related product (e.g., a computer readable memory) are presented for realizing eDRAM strap formation in Fin FET device structures. Semiconductor on insulator (SOI) substrate comprising at least an insulator layer between a first semiconductor layer and a second semiconductor layer is provided. The (metal) strap formation is accomplished by depositing conductive layer on fins portion of the second semiconductor layer (Si) and a semiconductor material (polysilicon) in each DT capacitor extending to the second semiconductor layer. The metal strap is sealed by a nitride spacer to prevent the shorts between PWL and DT capacitors.

Abstract: The specification and drawings present a new method, device and computer/software related product (e.g., a computer readable memory) are presented for realizing eDRAM strap formation in Fin FET device structures. Semiconductor on insulator (SOI) substrate comprising at least an insulator layer between a first semiconductor layer and a second semiconductor layer is provided. The (metal) strap formation is accomplished by depositing conductive layer on fins portion of the second semiconductor layer (Si) and a semiconductor material (polysilicon) in each DT capacitor extending to the second semiconductor layer. The metal strap is sealed by a nitride spacer to prevent the shorts between PWL and DT capacitors.

Abstract: A non-planar semiconductor transistor device includes a substrate layer. Conductive channels extend between corresponding source and drain electrodes. A gate stack extending in a direction perpendicular to the conductive channels crosses over the plurality of conductive channels. The gate stack includes a dielectric layer running along the substrate and the plurality of conductive channels and arranged with a substantially uniform layer thickness, a work-function electrode layer covers the dielectric layer and is arranged with a substantially uniform layer thickness, and a metal layer, distinct from the work-function electrode layer, covers the work-function electrode layer and is arranged with a substantially uniform height with respect to the substrate such that the metal layer fills a gap between proximate conductive channels of the plurality of conductive channels.

Abstract: Various embodiment integrate embedded dynamic random access memory with fin field effect transistors. In one embodiment, a first fin structure and at least a second fin structure are formed on a substrate. A deep trench area is formed between the first and second fin structures. A high-k metal gate is formed within the deep trench area. The high-k metal gate includes a high-k dielectric layer and a metal layer. A polysilicon material is deposited within the deep trench area adjacent to the metal layer. The high-k metal gate and the polysilicon material are recessed and etched to an area below a top surface of a substrate insulator layer. A poly strap is formed in the deep trench area. The poly strap is dimensioned to be below a top surface of the first and second fin structures. The first and second fin structures are electrically coupled to the poly strap.

Abstract: Embodiment of the present invention provides a method of forming a semiconductor device in a sidewall image transfer process with multiple critical dimensions. The method includes forming a multi-level dielectric layer over a plurality of mandrels, the multi-level dielectric layer having a plurality of regions covering the plurality of mandrels, the plurality of regions of the multi-level dielectric layer having different thicknesses; etching the plurality of regions of the multi-level dielectric layer into spacers by applying a directional etching process, the spacers being formed next to sidewalls of the plurality of mandrels and having different widths corresponding to the different thicknesses of the plurality of regions of the multi-level dielectric layer; removing the plurality of mandrels in-between the spacers; and transferring bottom images of the spacers into one or more layers underneath the spacers.

Abstract: A non-planar semiconductor transistor device includes a substrate layer. Conductive channels extend between corresponding source and drain electrodes. A gate stack extending in a direction perpendicular to the conductive channels crosses over the plurality of conductive channels. The gate stack includes a dielectric layer running along the substrate and the plurality of conductive channels and arranged with a substantially uniform layer thickness, a work-function electrode layer covers the dielectric layer and is arranged with a substantially uniform layer thickness, and a metal layer, distinct from the work-function electrode layer, covers the work-function electrode layer and is arranged with a substantially uniform height with respect to the substrate such that the metal layer fills a gap between proximate conductive channels of the plurality of conductive channels.

Abstract: A non-planar semiconductor transistor device includes a substrate layer. Conductive channels extend between corresponding source and drain electrodes. A gate stack extending in a direction perpendicular to the conductive channels crosses over the plurality of conductive channels. The gate stack includes a dielectric layer running along the substrate and the plurality of conductive channels and arranged with a substantially uniform layer thickness, a work-function electrode layer covers the dielectric layer and is arranged with a substantially uniform layer thickness, and a metal layer, distinct from the work-function electrode layer, covers the work-function electrode layer and is arranged with a substantially uniform height with respect to the substrate such that the metal layer fills a gap between proximate conductive channels of the plurality of conductive channels.

Abstract: The specification and drawings present a new method, ASIC and computer/software related product (e.g., a computer readable memory) are presented for realizing conformal doping in embedded deep trench applications in the ASIC. A common SOI substrate with intrinsic or low dopant concentration is used for manufacturing such ASICs comprising a logic area having MOSFETs utilizing, for example, ultra thin body and box technology and an eDRAM area having deep trench capacitors with the conformal doping.

Abstract: The specification and drawings present a new method, ASIC and computer/software related product (e.g., a computer readable memory) are presented for realizing conformal doping in embedded deep trench applications in the ASIC. A common SOI substrate with intrinsic or low dopant concentration is used for manufacturing such ASICs comprising a logic area having MOSFETs utilizing, for example, ultra thin body and box technology and an eDRAM area having deep trench capacitors with the conformal doping.

Abstract: The specification and drawings present a new method, device and computer/software related product (e.g., a computer readable memory) are presented for realizing eDRAM strap formation in Fin FET device structures. Semiconductor on insulator (SOI) substrate comprising at least an insulator layer between a first semiconductor layer and a second semiconductor layer is provided. The (metal) strap formation is accomplished by depositing conductive layer on fins portion of the second semiconductor layer (Si) and a semiconductor material (polysilicon) in each DT capacitor extending to the second semiconductor layer. The metal strap is sealed by a nitride spacer to prevent the shorts between PWL and DT capacitors.

Abstract: The specification and drawings present a new method, device and computer/software related product (e.g., a computer readable memory) are presented for realizing eDRAM strap formation in Fin FET device structures. Semiconductor on insulator (SOI) substrate comprising at least an insulator layer between a first semiconductor layer and a second semiconductor layer is provided. The (metal) strap formation is accomplished by depositing conductive layer on fins portion of the second semiconductor layer (Si) and a semiconductor material (polysilicon) in each DT capacitor extending to the second semiconductor layer. The metal strap is sealed by a nitride spacer to prevent the shorts between PWL and DT capacitors.

Abstract: A method is provided for fabricating a transistor. According to the method, a second semiconductor layer is formed on a first semiconductor layer, and a dummy gate structure is formed on the second semiconductor layer. A gate spacer is formed on sidewalls of the dummy gate structure, and the dummy gate structure is removed to form a cavity. The second semiconductor layer beneath the cavity is removed. A gate dielectric is formed on the first portion of the first semiconductor layer and adjacent to the sidewalls of the second semiconductor layer and sidewalls of the gate spacer. A gate conductor is formed on the first portion of the gate dielectric and abutting the second portion of the gate dielectric. Raised source/drain regions are formed in the second semiconductor layer, with at least part of the raised source/drain regions being below the gate spacer.