Abstract: Disclosed are PEALD (plasma-enhanced atomic layer deposition) apparatus and PEALD method for manufacturing a semiconductor device, the PEALD apparatus comprising: a housing including a reaction chamber in which a deposition reaction is performed; a rotary disk unit installed in the housing and provided with a plurality of susceptors for receiving wafers thereon so as to move the wafers; a gas spray unit mounted on the upper end of the housing above the rotary disk unit, and provided with first reactive gas sprayers, second reactive gas sprayers and inert gas sprayers on a lower surface of a circular disk for spraying respective gases into the housing; a gas feed unit connected to the gas spray unit for supplying first and second reactive gases and a purge gas into the housing; a gas exhaust port formed around the rotary disk unit; and a plasma generator for generating plasma to excite the second reactive gas.

Abstract: An apparatus for resolution of phase ambiguity is disclosed. The apparatus receives modulated signal and resolves a phase ambiguity of the modulated signal while recovering the modulated signal to original data, wherein the apparatus includes a phase ambiguity detector for receiving demodulated data and frame synchronization information, and detecting a phase ambiguity value from the demodulated data based on a frame synchronization information; a phase ambiguity eliminator for receiving the phase ambiguity value and the demodulated data, and generating a phase ambiguity eliminated data by inverting the phase ambiguity value and multiplying the inverted phase ambiguity value and the demodulated data. The present invention can resolve a phase ambiguity occurred in various modulation modes including a burst mode communication with same algorithm so it can effectively implemented to an adaptive MODEM.

Abstract: This invention relates to the recovery of platinum group metals and, more particularly, to the recovery of platinum group metals from various sources by roasting the source material with one or more of sulfuric acid, a sulfate and/or a bi-sulfate and with one or more halogen salt. The roasted product is put in contact with a leaching solution to dissolve at least a portion of the platinum group metals, which then may be separated and recovered.

Abstract: A medical insurance control system and method thereof using medical insurance electronic recording medium and communication networks applicable with a smart medium card stored with individual history information and medical insurance related information on medical insurance beneficiary and on-line access information, the card being used to make an on-line information access to check medical treatment history of the relevant medical insurance beneficiary and to allow a medical institution to immediately request medical insurance premium and medical treatment fee (patients burden) on-line and have same certified in payment, wherein the medical insurance card holder can be confirmed as a legitimate medical insurance beneficiary by the medical insurance management system when receiving medical treatments in hospitals and clinics to thereby efficiently prevent medical institutions from making false and unlawful requests or medical insurance beneficiaries from making a non-payment for a long time, wherein the medic

Abstract: A multi-beam light scanning apparatus has a lateral magnification M in a sub-scanning direction from a light source to a scanned surface satisfying 8.5≦M≦9.5, and a lateral magnification M2 in the sub-scanning direction from a light deflector to the scanned surface satisfying 0.5≦M2≦2.0. The multi-beam light scanning apparatus can use a light source having a relatively low power.

Abstract: A door of a microwave oven comprising: a door panel which is installed on a front surface of a casing having a cavity corresponding to a cooking space of food to be opened and closed; a door frame which is combined with the door panel to be located at a front of the cavity; a choke cover which is inserted in the door frame, for covering a choke seal; and a frame subsidiary plate which is positioned to opposed to the choke cover and is combined with the door frame to remove a gap formed between the choke cover and a lateral surface of the door frame.

Abstract: This invention relates to a method for fast searching and analyzing inter-relations between patents associated with a target patent from a patent database having information on issued patents of United States and published European patents and creating a citation relation diagram. Especially, this invention is characterized by a method of creating a patent relation table through inter-relation between patents, classifying the data stored in the table into many independent folders by using a specific Hashing function and storing the classified data into the independent folders in the form of computer files.

Abstract: The present invention relates to an efficient snapshot technique based on a mapping for a large logical volume shared in multiple hosts. According to the present invention, problems of time delays in a conventional snapshot technique is solved by employing a FAB and an SSB, which are bits representing whether a COW operation is carried out to a mapping entry. In other words, the present invention solves the problems of delaying a write operation of corresponding volume, which is simultaneously executed when a snapshot is created, until the snapshot creation is completed. Further, in the write operation carried out after the snapshot creation, an operation of determining whether the COW operation is carried out is achieved by reading only an original mapping block by using the FAB and the SSB, without reading out the snapshot mapping block.

Abstract: The present invention includes a semiconductor device having a shallow trench isolation and a method of fabricating the same. The semiconductor device includes a gate electrode being arranged to cross over the active region. An oxide pattern is interposed between the active region and the edge of the gate electrode. The oxide pattern defines a channel region under the gate electrode. A lightly doped diffusion layer is formed in the active region downward and outward from the oxide pattern, and a heavy doped diffusion layer is formed in a predetermined region of the active region and surrounded by the lightly doped diffusion layer. In the method of fabricating the semiconductor substrate, a trench isolation layer is formed at a predetermined region of a semiconductor substrate to define an active region. A pair of preliminary lightly doped diffusion layers are formed in a line to cross over the active region. Then, oxide patterns are formed to cover at least the preliminary lightly doped diffusion layers.

Abstract: A circuit that includes a data input circuit for outputting data in response to a first signal, a logic circuit for generating a second signal in response to the first signal, a latch circuit for latching the data in response to the second signal, and a decoder for decoding an output signal of the latch circuit and for generating a code. A method includes outputting a mode register set (MRS) code based upon data received by a circuit implemented in a semiconductor device, where the data is unrelated to register data.

Abstract: The present invention relates to an optical signal processing element capable of performing various functions of equalization of output power, wavelength converting, reshaping or reamplifying an input optical signal using an optical amplifier in which saturable absorbers are integrated, the saturable absorbers being used as an optical gate to improve the extinction ratio of the input optical signal. The saturable absorber and the optical amplifier are connected in series, and a transparent output optical power outputted from the saturable absorber is not less than a saturation input optical power of the optical amplifier.

Abstract: A method and device are provided for adjusting a focus bias of an objective lens of an optical pickup for an optical disc using a level of a tracking error signal. The level of the tracking error signal outputted when the optical disc is rotated and driven is detected for a predetermined period of time. An operation of adjusting the focus bias of the objective lens is carried out on the basis of the detected level of the tracking error signal. A focus bias adjustment value is set as an optimum focus bias value at a time when the detected level of the tracking error signal is maximized. In accordance with the method, a period of time for adjusting the focus bias is very short, on the order of “0” to several hundred milliseconds, in comparison with periods of time for adjusting the focus bias in conventional methods, such that the focus bias can be quickly adjusted.

Abstract: There is provided a method for reorganizing data in a RAID system using a striping technique. First, it is determined whether an additional disk exists in a storage medium in the system. Then, it is checked whether a data is stored at a reorganization-requested location for a disk write operation reorganization-requested data to the reorganization request location if there exists the additional disk. Thereafter, a if no data is stored in the reorganization-requested location.

Abstract: A monolithic ink-jet printhead includes a substrate having an ink chamber to be supplied with ink to be ejected on a front surface thereof, a manifold for supplying ink to the ink chamber on a rear surface thereof, and an ink channel in communication with the ink chamber and the manifold, a nozzle plate including a plurality of passivation layers stacked on the substrate and a heat dissipating layer overlying the passivation layers, the nozzle plate having a nozzle penetrating the nozzle plate, a heater formed between adjacent passivation layers and located above the ink chamber for heating the ink to be supplied within the ink chamber, and a conductor provided between adjacent passivation layers, the conductor being electrically connected to the heater for applying current across the heater, wherein the heat dissipating layer is made of a thermally conductive metal for dissipating heat from the heater.

Abstract: A temperature-compensated collimating lens provided of a single piece of lens, which does not have variation in its focal distance due to temperature changes, and an optical scanning apparatus using the same. The collimating lens to transform a ray of light from a light source into approximate parallel rays. The collimating lens is provided a single lens of plastic, and the single lens has a refraction surface provided on one side and a diffraction surface provided on the other side. The refraction surface and the diffraction surface have predetermined powers to prevent power of the collimating lens from changing due to change in temperature. The refraction surface and the diffraction surface have a power to satisfy the condition of, 1 - 3 ≤ K d K r ≤ - 2.

Abstract: In the method of forming fine patterns of a semiconductor integrated circuit, a mask layer is formed over a semiconductor structure having a first region and a second region. A portion of the mask layer over the first region is removed to expose the semiconductor structure, and sacrificial layer patterns are formed over the exposed semiconductor structure. Then, spacers are formed on sidewalls of the sacrificial layer patterns and the mask layer, and portions of the spacers are removed to create fine mask patterns. The semiconductor structure is then patterned using the fine mask patterns to create fine patterns.

Abstract: A semiconductor device includes a substrate of a first conductive type, and a well region of an opposite second conductive type is formed in the substrate. A first impurity region of the first conductive type extends to a first depth within the well region, and a second impurity region of the first conductive type is spaced from the first impurity region to define a channel region therebetween and extends to a second depth within the well region. Preferably, the second depth is greater than the first depth. A gate electrode is located over the channel region, and a silicide layer is formed at a third depth within the first impurity region. The third depth is less than the first depth, and a difference between the first depth and the third depth is less than or equal to a difference at which a leakage current from the silicide layer to the well region is sufficient to electrically bias the well region through the silicide layer.

Abstract: The present invention disclose a laser cutter for cutting an object being cut such as a two glasses-attached panel for LCD using a laser beam. The laser cutter includes a laser unit for irradiating a laser beam with a specific wavelength along a marked cutting line of the object, a pre-scriber for forming a pre-cut groove at starting edge of the marked cutting line, and a cooling unit for cooling the cutting line which said laser beam has been irradiated.

Abstract: A method of fabricating the SRAM cell is disclosed. The method includes forming a gate on a substrate, forming an oxidation barrier film on side portions of the gate, oxidizing the resultant structure by using an oxidation process to form an oxide film on a top surface of the gate, implanting high density impurity ions to the substrate to form a lightly doped region and a highly doped region in the substrate at side portions of the gate, forming an insulating layer over the substrate to define a contact hole that exposes portions of the gate and the highly doped region, and forming an interconnect in the contact hole to connect the gate and the highly doped region.

Abstract: A transmitter and a receiver are disclosed herein that support transmit antenna diversity using space-time block coding in a wireless communication system. The transmitter produces symbol combinations containing, as their elements, input symbols, the inversions and conjugates of the symbols, and symbols obtained by rotating the phases of the symbols once, forms a matrix having symbols in at least two columns orthogonal to each other with the symbol combinations, and transmits the matrix. The receiver detects symbols that minimize maximum likelihood (ML) decoding metrics over all possible symbols using channel gains from transmit antennas to a receive antenna. Also, the receiver selects candidate symbols among all possible symbols according to the characteristics of transmitted modulation symbols and detects symbols that minimize the ML decoding metrics.