Abstract: Techniques and mechanisms for providing electrical insulation or other protection of an integrated circuit (IC) device with a spacer structure which comprises an (anti)ferromagnetic material. In an embodiment, a transistor comprises doped source or drain regions and a channel region which are each disposed in a fin structure, wherein a gate electrode and an underlying dielectric layer of the transistor each extend over the channel region. Insulation spacers are disposed on opposite sides of the gate electrode, where at least a portion of one such insulation spacer comprises an (anti)ferroelectric material. Another portion of the insulation spacer comprises a non-(anti)ferroelectric material. In another embodiment, the two portions of the spacer are offset vertically from one another, wherein the (anti)ferroelectric portion forms a bottom of the spacer.

Abstract: Embodiments of the disclosure are directed to advanced integrated circuit structure fabrication and, in particular, to memory devices with nitride-based ferroelectric materials. Other embodiments may be disclosed or claimed.

Abstract: An improved trench capacitor structure is disclosed that allows for the formation of narrower capacitors. An example capacitor structure includes a first conductive layer on the sidewalls of an opening through a thickness of a dielectric layer, a capacitor dielectric layer on the first conductive layer, a second conductive layer on the capacitor dielectric layer, and a conductive fill material on the second conductive layer. The capacitor dielectric layer laterally extends above the opening and along a top surface of the dielectric layer, and the conductive fill material fills a remaining portion of the opening.

Abstract: Embodiments described herein may be related to apparatuses, processes, and techniques related MIM capacitors that have a multiple trench structure to increase a charge density, where a dielectric of the MIM capacitor includes a perovskite-based material. In embodiments, a first electrically conductive layer may be coupled with a top metal layer of the MIM, and/or a second conductive layer may be coupled with a bottom metal layer of the MIM to reduce RC effects. Other embodiments may be described and/or claimed.

Abstract: Embodiments of the disclosure are directed to advanced integrated circuit structure fabrication and, in particular, ferroelectric three-dimensional (3D) memory architectures. Other embodiments may be disclosed or claimed.

Abstract: Embodiments of the present disclosure are directed to advanced integrated circuit structure fabrication and, in particular, integrated circuits with high dielectric constant (HiK) interfacial layering between an electrode and a ferroelectric (FE) or anti-ferroelectric (AFE) layer. Other embodiments may be disclosed or claimed.

Abstract: Embodiments of the disclosure are directed to advanced integrated circuit structure fabrication and, in particular, to ferroelectric random access memory (FRAM) devices with an enhanced capacitor architecture. Other embodiments may be disclosed or claimed.

Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, to memory devices having ferroelectric capacitors coupled between intersecting bitlines and wordlines. Other embodiments may be disclosed or claimed.

Abstract: Embodiments of the disclosure are directed to advanced integrated circuit structure fabrication and, in particular, to memory devices utilizing dead-layer-free materials to reduce disturb effects. Other embodiments may be described or claimed.

Abstract: Embodiments of the disclosure are directed to advanced integrated circuit structure fabrication and, in particular, to three-dimensional ferroelectric random access memory (3D FRAM) devices with a sense transistor coupled to a plurality of capacitors to (among other things) help improve signal levels and scaling. Other embodiments may be disclosed or claimed.

Abstract: Embodiments described herein may be related to apparatuses, processes, and techniques related to stacked MIM capacitors with multiple metal and dielectric layers that include insulating spacers on edges of one or more of the multiple layers to prevent unintended electrical coupling between metal layers during manufacturing. The dielectric layers may include Perovskite-based materials. Other embodiments may be described and/or claimed.

Abstract: Embodiments described herein may be related to apparatuses, processes, and techniques related to increasing the capacitance density of MIM capacitors on dies or within packages. In particular, a MIM stack is disclosed that has multiple insulator layers between the metal, in order to increase the dielectric constant of the MIM stack. In particular, the first dielectric layer may include strontium, titanium, and oxygen and may be physically coupled with a second dielectric layer that may include barium, strontium, titanium, and oxygen. Other embodiments may be described and/or claimed.

Abstract: A capacitor is provided which comprises: a first structure comprising metal; a second structure comprising metal; and a third structure between the first and second structures, wherein the third structure comprises an improper ferroelectric material. In some embodiments, a field effect transistor (FET) is provided which comprises: a substrate; a source and drain adjacent to the substrate; and a gate stack between the source and drain, wherein the gate stack includes: a dielectric; a first structure comprising improper ferroelectric material, wherein the first structure is adjacent to the dielectric; and a second structure comprising metal, wherein the second structure is adjacent to the first structure.

Abstract: Described is an ultra-dense ferroelectric memory. The memory is fabricated using a patterning method by that applies atomic layer deposition with selective dry and/or wet etch to increase memory density at a given via opening. A ferroelectric capacitor in one example comprises: a first structure (e.g., first electrode) comprising metal; a second structure (e.g., a second electrode) comprising metal; and a third structure comprising ferroelectric material, wherein the third structure is between and adjacent to the first and second structures, wherein a portion of the third structure is interdigitated with the first and second structures to increase surface area of the third structure. The increased surface area allows for higher memory density.

Abstract: An apparatus is provided which comprises: a first stack comprising a magnetic insulating material (MI such as, EuS, EuO, YIG, TmIG, or GaMnAs) and a transition metal dichalcogenide (TMD such as MoS2, MoSe2, WS2, WSe2, PtS2, PtSe2, WTe2, MoTe2, or graphene; a second stack comprising an MI material and a TMD, wherein the first and second stacks are separated by an insulating material (e.g., oxide); a magnet (e.g., a ferromagnet or a paramagnet) adjacent to the TMDs of the first and second stacks, and also adjacent to the insulating material; and a magnetoelectric material (e.g., (LaBi)FeO3, LuFeO3, PMN-PT, PZT, AlN, or (SmBi)FeO3) adjacent to the magnet.

Abstract: An apparatus is provided which comprises: a first stack comprising a magnetic insulating material (MI such as, EuS, EuO, YIG, TmIG, or GaMnAs) and a transition metal dichalcogenide (TMD such as MoS2, MoSe2, WS2, WSe2, PtS2, PtSe2, WTe2, MoTe2, or graphene; a second stack comprising an MI material and a TMD, wherein the first and second stacks are separated by an insulating material (e.g., oxide); a magnet (e.g., a ferromagnet or a paramagnet) adjacent to the TMDs of the first and second stacks, and also adjacent to the insulating material; and a magnetoelectric material (e.g., (LaBi)FeO3, LuFeO3, PMN-PT, PZT, AlN, or (SmBi)FeO3) adjacent to the magnet.

Abstract: A memory device comprises a series of alternating plate lines and an insulating material over a substrate. Two or more ferroelectric capacitors are through the series of alternating plate lines and an insulating material such that a first one of the ferroelectric capacitors is coupled to a first one of the plate lines and a second one of the ferroelectric capacitors is coupled to a second one of the plate lines. A plurality of substantially parallel bitlines is along a first direction over the two or more ferroelectric capacitors. A plurality of substantially parallel bitlines is along a first direction over the two or more ferroelectric capacitors. A plurality of substantially parallel wordlines is along a second direction orthogonal to the first direction over the two or more ferroelectric capacitors. An access transistor is located over and controls the two or more ferroelectric capacitors, the access transistor incorporating a first one of the bitlines and a first one of the wordlines.

Abstract: A memory device comprises an access transistor comprising a bitline and a wordline. A series of alternating plate lines and an insulating material is over the access transistor, the plate lines comprising an adhesion material on a top and a bottom thereof and a metal material in between the adhesion material, the metal material having one or more voids therein. Two or more ferroelectric capacitors is over the access transistor and through the series of alternating plate lines and an insulating material such that a first one of the ferroelectric capacitors is coupled to a first one of the plate lines and a second one of the ferroelectric capacitors is coupled to a second one of the plate lines, and wherein the two or more ferroelectric capacitors are each coupled to and controlled by the access transistor. A plurality of vias each land on a respective one of the plate lines, wherein the plurality of vias comprises a same metal material as the plate lines.

Abstract: Plate line architectures for 3D-Ferroelectric Random Access Memory (3D-FRAM) are described. In an example, a memory device includes a plurality of bitlines along a first direction and a plurality of wordlines along a second direction orthogonal to the first direction. An access transistor is at an intersection of a first one of the bitlines and a first one of the wordlines. A series of alternating plate lines and insulating material are fabricated over the access transistor. Two or more ferroelectric capacitors are over the access transistor and through the series of alternating plate lines and an insulating material such that a first one of the ferroelectric capacitors is coupled to a first one of the plate lines and a second one of the ferroelectric capacitors is coupled to a second one of the plate lines, and wherein the two or more ferroelectric capacitors are each coupled to and controlled by the access transistor.

Abstract: Metal insulator metal capacitors or backend transistors having epitaxial oxides are described. In a first example, metal-insulator-metal (MIM) capacitor includes a first electrode plate. A capacitor dielectric is on the first electrode plate. The capacitor dielectric includes a single crystalline oxide material. A second electrode plate is on the capacitor dielectric, the second electrode plate having a portion over and parallel with the first electrode plate. In a second example, a transistor includes a gate electrode above a substrate. A gate dielectric above and on the gate electrode. The gate dielectric includes a single crystalline oxide material. A channel material layer is on the single crystalline oxide material. Source or drain contacts are on the channel material layer.