Patents by Inventor Stefan Hembacher

Stefan Hembacher has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20080186467
    Abstract: There is provided an optical imaging device, in particular for microlithography, comprising at least one optical element and at least one holding device associated to the optical element (109), wherein the holding device holds the optical element and a first part (109.1) of the optical element contacts a first atmosphere and a second part (109.2) of the optical element at least temporarily contacts a second atmosphere. There is provided a reduction device at least reducing dynamic fluctuations in the pressure difference between the first atmosphere and the second atmosphere.
    Type: Application
    Filed: November 19, 2007
    Publication date: August 7, 2008
    Applicant: Carl Zeiss SMT AG
    Inventors: Stefan Hembacher, Bernhard Gellrich, Jens Kugler, Sascha Bleidistel
  • Publication number: 20080013063
    Abstract: There is provided an optical imaging device, in particular for microlithography, comprising at least one optical element and at least one holding device associated to the optical element (109), wherein the holding device holds the optical element and a first part (109.1) of the optical element contacts a first atmosphere and a second part (109.2) of the optical element at least temporarily contacts a second atmosphere. There is provided a reduction device at least reducing dynamic fluctuations in the pressure difference between the first atmosphere and the second atmosphere.
    Type: Application
    Filed: May 18, 2007
    Publication date: January 17, 2008
    Applicant: CARL ZEISS SMT AG
    Inventors: Stefan Hembacher, Bernhard Gellrich, Jens Kugler
  • Publication number: 20070285645
    Abstract: A device or the operation of a device for the holding, especially sealing support of an optical element, especially an optical lens with at least one holding element for mounting the optical element and preferably at least one sealing element for sealing contact at at least a part of the optical element and/or the holding element, wherein the sealing element or at least a part thereof is displaceable between a first position, in which the sealing element rests against the optical element and a second position, in which the sealing element is spaced apart from the optical element, or wherein the sealing element is switchable such that it rests against the optical element under different contact pressure or adjustable contact force. The holding element can either take on the holding function alone and independently of the sealing element or work together with the sealing element in this regard.
    Type: Application
    Filed: April 6, 2007
    Publication date: December 13, 2007
    Inventors: Tilman Schwertner, Stefan Hembacher