Abstract: An actuator-sensor device for an optics module of a lithography apparatus comprises: an actuator-sensor unit having an actuator and a sensor; a control unit electrically connected to the actuator-sensor unit; and a support element which on a first supporting side of same supports the actuator-sensor unit and which on a second supporting side of same supports the control unit, with the second supporting side being opposite to the first supporting side.

Abstract: A facet mirror for an illumination optical unit of a projection exposure apparatus has a large number of displaceable individual facets with a facet main body and a reflection surface arranged on it. At least some of the individual facets have a displacement range such that they come into contact with a stop surface in one or more displacement positions.

Abstract: A facet mirror for an illumination optical unit of a projection exposure apparatus has a large number of displaceable individual facets with a facet main body and a reflection surface arranged on it. At least some of the individual facets have a displacement range such that they come into contact with a stop surface in one or more displacement positions.

Abstract: A polygon scanner (10) for detecting objects (24) in a monitored zone (22) is provided having a light transmitter (12); having a light receiver (30); having an evaluation unit (32); and having a rotatable mirror unit (20) for a periodic deflection of the light beam (16) that has a plurality of mirror facets (34) in order thus to scan an angular section multiple times per rotation of the mirror unit (20) by a respective mirror facet (34), wherein at least some of the mirror facets (34) have a different curvature from one another. In this respect, at least one of the mirror facets (34) is configured as a free-form surface whose curvature is adapted to the angle of incidence of the transmitted light beam (16) on the mirror facet (34) that varies during the rotation of the mirror unit (20).

Abstract: A magazine (200) is described for portion-wise receiving individualized bulk electronic components (298). The magazine (200) comprises (a) a receiving structure (110) which comprises multiple closable receiving cavities (112, 112a), which are arranged along a longitudinal axis (100a) of the receiving structure (110); (b) a cover structure (120) which is arranged at an upper side of the receiving structure (110), displaceable along the longitudinal axis (100a), so that in a closed position of the cover structure (120) all receiving cavities (112, 112a) are covered and in one opening position of multiple opening positions at least one receiving cavity (112) is free; and (c) a closure foil (225) which encompasses the cover structure (120) along the longitudinal axis (100a) in the form of a closed tape, wherein at least a part of the closure foil (225) is releasably connected to the receiving structure (110).

Abstract: The present invention relates to a method of operating a pump generating a flow of a fluid with a pressure, the method comprising operating the pump with a pump speed S satisfying the equation S=Ssimple(1+COR(t)); wherein S is the pump speed, Ssimple is the pump speed disregarding any compression and/or expansion of the fluid, t is a time, and COR(t) is a time dependent correction function; wherein the time dependent correction function COR(t) is a product of a corrective amplitude Acor and a time-dependent function f(t), i.e., COR(t)=Acor·ƒ(t); and wherein the corrective amplitude Acor is set based on a measure for the flow and a measure for the pressure. The present invention also relates to a corresponding use, a pump, a pump system and an HPLC system.

Abstract: A sensor (10) is provided that has at least one sensor functional group (12), a heating device (14, 22), and a heating control (14, 20) to control a heating power (Pheating) of the heating device (14, 22). In this respect, the heating control (20) is configured to adapt the heating power (Pheating) to a power consumption (Psensor) of the sensor functional group (12).

Abstract: A magazine (200) is described for portion-wise receiving individualized bulk electronic components (298). The magazine (200) comprises (a) a receiving structure (110) which comprises multiple closable receiving cavities (112, 112a), which are arranged along a longitudinal axis (100a) of the receiving structure (110); (b) a cover structure (120) which is arranged at an upper side of the receiving structure (110), displaceable along the longitudinal axis (100a), so that in a closed position of the cover structure (120) all receiving cavities (112, 112a) are covered and in one opening position of multiple opening positions at least one receiving cavity (112) is free; and (c) a closure foil (225) which encompasses the cover structure (120) along the longitudinal axis (100a) in the form of a closed tape, wherein at least a part of the closure foil (225) is releasably connected to the receiving structure (110).

Abstract: A light receiver (100), comprising: a plurality of avalanche photodiode elements (10) each being biased with a bias voltage above a breakdown voltage and thus operated in a Geiger mode in order to trigger a Geiger current upon light reception and a plurality of readout circuits (42, 44, 46) associated with individual avalanche photodiode elements (10) or a group of avalanche photodiode elements (10) for reading out a Geiger current generated upon light reception, wherein the readout circuits (42, 44, 46) each comprise a measurement path (42) and a blanking path (46) as well as a switching element (44) for selectively supplying the Geiger current, or a measurement current corresponding to the Geiger current, to the measurement path (42) or the blanking path (46).

Abstract: A light receiver (22) having a plurality of avalanche photodiode elements (24) each configured to be biased with a bias voltage above a breakdown voltage and thus to be operated in a Geiger mode for triggering a Geiger current upon light reception, the light receiver (22) comprising a plurality of bias voltage terminals (40a-c) providing different bias voltages, wherein the avalanche photodiode elements (24) form a plurality of groups (421-42n), and wherein the avalanche photodiode elements (24) of a group (421-42n) are each supplied with a same one of the different bias voltages.

Abstract: A light receiver (50) is provided having a plurality of avalanche photodiode elements (10) that are each biased by a bias above a breakdown voltage and that are thus operated in a Geiger mode to trigger a Geiger current on light reception. The avalanche photodiode elements (10) have a first connector (20, 22, 28a-b) and a second connector (20, 22, 28a-b). A first signal tapping circuit (12) for reading out the avalanche photodiode elements is connected to one of the connectors (20, 22, 28a-b). In this respect, a second signal tapping circuit (12) for reading out the avalanche photodiode elements (10) is connected to the other connector (20, 22, 28a-b).

Abstract: An illumination optical unit for EUV projection lithography illuminates an object field with illumination light. The illumination optical unit has a first facet mirror including a plurality of first facets on a first mirror carrier. Disposed downstream of the first facet mirror is a second facet mirror including a plurality of second facets arranged on a second mirror carrier around a facet arrangement center. Partial beams of the illumination light are guided superposed on one another into the object field, respectively via illumination channels which have one of the first facets and one of the second facets. Second maximum angle facets are arranged at the edge of the second mirror carrier. The second maximum angle facets predetermine maximum illumination angles of the illumination light which deviate maximally from a chief ray incidence on the object field.

Abstract: A polygon scanner (10) for detecting objects (24) in a monitored zone (22) is provided having a light transmitter (12); having a light receiver (30); having an evaluation unit (32); and having a rotatable mirror unit (20) for a periodic deflection of the light beam (16) that has a plurality of mirror facets (34) in order thus to scan an angular section multiple times per rotation of the mirror unit (20) by a respective mirror facet (34), wherein at least some of the mirror facets (34) have a different curvature from one another. In this respect, at least one of the mirror facets (34) is configured as a free-form surface whose curvature is adapted to the angle of incidence of the transmitted light beam (16) on the mirror facet (34) that varies during the rotation of the mirror unit (20).

Abstract: The present invention relates to a method of operating a pump generating a flow of a fluid with a pressure, the method comprising operating the pump with a pump speed S satisfying the equation S=Ssimple(1+COR(t)); wherein S is the pump speed, Ssimple is the pump speed disregarding any compression and/or expansion of the fluid, t is a time, and COR(t) is a time dependent correction function; wherein the time dependent correction function COR(t) is a product of a corrective amplitude Acor and a time-dependent function f(t), i.e., COR(t)=Acor·f (t); and wherein the corrective amplitude Acor is set by means of a measure for the flow and a measure for the pressure. The present invention also relates to a corresponding use, a pump, a pump system and an HPLC system.

Abstract: A light receiver (10, 50) having a plurality of avalanche photo diode elements (10, 12a-c) which are biased with a bias voltage greater than a breakthrough voltage and are thus operated in a Geiger mode in order to trigger a Geiger current upon light reception, and having a signal detection circuit (50) for reading out the avalanche photo diode elements (10, 12a-c), wherein the signal detection circuit (50) comprises an active coupling element (52) having an input (54) connected to the avalanche photo diode elements (10, 12a-c) and an output (56), the active coupling element (52) mapping the Geiger current at the input (54) to a measuring current corresponding to the Geiger current in its course and level, wherein the input (54) forms a virtual short-circuit for the Geiger current with respect to a potential (ground, ?UBE; Uconst?UBE), and the output (56) is decoupled from the input (54).

Abstract: A light receiver (22) having a plurality of avalanche photodiode elements (24) biased with a bias voltage above a breakdown voltage and thus operated in a Geiger mode in order to trigger a Geiger current upon light reception, wherein the avalanche photodiode elements (24) form a plurality of groups, wherein the light receiver (22) comprises a plurality of bias voltage terminals for supplying groups with different bias voltages and/or a plurality of readout circuits (60, 62, 64), each associated with a group (721-72n) and comprising a measurement path (60) and a blanking path (64) as well as a switching element (62) for selectively supplying the Geiger current, or a measurement current corresponding to the Geiger current, to the measurement path (60) or the blanking path (64).

Abstract: A light receiver (22) comprising a plurality of avalanche photodiode elements (24), a first terminal (40) and a second terminal (42) for supplying a bias voltage so that the avalanche photodiode elements (24) are biased with a bias voltage above a breakdown voltage and thus operated in a Geiger mode, at least one temperature measuring element (44) for measuring an operating temperature of the avalanche photodiode elements (24) and a voltage compensation unit (46) for adapting the bias voltage to the operating temperature.

Abstract: A light receiver (22) having a plurality of avalanche photodiode elements (24) each configured to be biased with a bias voltage above a breakdown voltage and thus to be operated in a Geiger mode for triggering a Geiger current upon light reception, the light receiver (22) comprising a plurality of bias voltage terminals (40a-c) providing different bias voltages, wherein the avalanche photodiode elements (24) form a plurality of groups (421-42n), and wherein the avalanche photodiode elements (24) of a group (421-42n) are each supplied with a same one of the different bias voltages.

Abstract: A magazine (200) is described for portion-wise receiving individualized bulk electronic components (298). The magazine (200) comprises (a) a receiving structure (110) which comprises multiple closable receiving cavities (112, 112a), which are arranged along a longitudinal axis (100a) of the receiving structure (110); (b) a cover structure (120) which is arranged at an upper side of the receiving structure (110), displaceable along the longitudinal axis (100a), so that in a closed position of the cover structure (120) all receiving cavities (112, 112a) are covered and in one opening position of multiple opening positions at least one receiving cavity (112) is free; and (c) a closure foil (225) which encompasses the cover structure (120) along the longitudinal axis (100a) in the form of a closed tape, wherein at least a part of the closure foil (225) is releasably connected to the receiving structure (110).

Abstract: A light receiver (100), comprising: a plurality of avalanche photodiode elements (10) each being biased with a bias voltage above a breakdown voltage and thus operated in a Geiger mode in order to trigger a Geiger current upon light reception and a plurality of readout circuits (42, 44, 46) associated with individual avalanche photodiode elements (10) or a group of avalanche photodiode elements (10) for reading out a Geiger current generated upon light reception, wherein the readout circuits (42, 44, 46) each comprise a measurement path (42) and a blanking path (46) as well as a switching element (44) for selectively supplying the Geiger current, or a measurement current corresponding to the Geiger current, to the measurement path (42) or the blanking path (46).