Patents by Inventor Steven A. Cordes

Steven A. Cordes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fabrication of high resolution aluminum ablation masks
    Patent number: 5756236
    Abstract: A method of fabricating a high resolution ablation mask for use at laser fluences of greater than 200 mJ/cm.sup.2 is disclosed. The method comprises combining dry etching and chemical etching of an unetched ablation mask which comprises a transparent substrate, a layer of high UV light refractivity material, e.g. aluminum, deposited on said substrate, and a photoresist layer positioned on a predetermined area of said high UV light refractivity material layer leaving other areas of said high UV light refractivity material layer exposed.
    Type: Grant
    Filed: January 29, 1997
    Date of Patent: May 26, 1998
    Assignee: International Business Machines Corporation
    Inventors: Steven A. Cordes, James L. Speidell, Rajesh S. Patel