Patents by Inventor Steven S. Nasiri
Steven S. Nasiri has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20080283990Abstract: A method of bonding of germanium to aluminum between two substrates to create a robust electrical and mechanical contact is disclosed. An aluminum-germanium bond has the following unique combination of attributes: (1) it can form a hermetic seal; (2) it can be used to create an electrically conductive path between two substrates; (3) it can be patterned so that this conduction path is localized; (4) the bond can be made with the aluminum that is available as standard foundry CMOS process. This has the significant advantage of allowing for wafer-level bonding or packaging without the addition of any additional process layers to the CMOS wafer.Type: ApplicationFiled: July 31, 2008Publication date: November 20, 2008Applicant: InvenSense Inc.Inventors: Steven S. Nasiri, Anthony Francis Flannery, JR.
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Patent number: 7442570Abstract: A method of bonding of germanium to aluminum between two substrates to create a robust electrical and mechanical contact is disclosed. An aluminum-germanium bond has the following unique combination of attributes: (1) it can form a hermetic seal; (2) it can be used to create an electrically conductive path between two substrates; (3) it can be patterned so that this conduction path is localized; (4) the bond can be made with the aluminum that is available as standard foundry CMOS process. This has the significant advantage of allowing for wafer-level bonding or packaging without the addition of any additional process layers to the CMOS wafer.Type: GrantFiled: March 18, 2005Date of Patent: October 28, 2008Assignee: Invensence Inc.Inventors: Steven S. Nasiri, Anthony Francis Flannery, Jr.
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Publication number: 20080166115Abstract: Methods and apparatus for electronically stabilizing an image captured by a device including a motion detection unit are provided. In one implementation, the method includes capturing a first exposure of the image, and capturing a second exposure of the image including using the motion detection unit to ensure that the second exposure of the image has a pre-determined blur property. The second exposure is longer than the first exposure. The method further includes combining the second exposure of the image having the pre-determined blur property and the first exposure of the image to electronically stabilize the image captured by the device.Type: ApplicationFiled: January 5, 2007Publication date: July 10, 2008Inventors: David Sachs, Jianbo Shi, Steven S. Nasiri, Kishore Moturi
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Patent number: 7267260Abstract: Optical fibers are inserted and bonded in a two dimensional array of feedthroughs provided by an insert having a top plate, a bottom plate and a sandwiched spacer plate. Top and bottom plate feature funnel shaped hole sections that capture the approaching fiber end during its insertion. The funnel sections terminate in narrow hole sections that tightly hold the inserted fiber ends. Having top and bottom plate spaced apart provides for high angular precision of the bonded fiber ends with minimal fabrication effort of the insert. Optical fibers may be combined in linear arrays and simultaneously inserted significantly reducing assembly efforts. The insert is attached to a fiber housing and hermetically sealed within an external housing, which features a glass plate to provide beam propagation to and from the fiber ends. An optical gel fills the gap between the insert's output face and the glass plate.Type: GrantFiled: October 15, 2003Date of Patent: September 11, 2007Assignee: Intel CorporationInventors: Steven S. Nasiri, Janusz Liberkowski, Zhenfang Chen, Jeff Jarfa
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Patent number: 7258011Abstract: A sensor for measuring acceleration in three mutually orthogonal axes, X, Y and Z is disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to move substantially in the X, Y, and Z, about by at least one linkage and is responsive to accelerations in the X, Y and Z directions. The sensor includes at least one paddle disposed in the sensing plane; and at least one pivot on the linkage. Finally, the sensor includes at least one electrode at the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the acceleration.Type: GrantFiled: November 21, 2005Date of Patent: August 21, 2007Assignee: InvenSense Inc.Inventors: Steven S. Nasiri, Joseph Seeger
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Patent number: 7250112Abstract: A method for making an angular velocity sensor having two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame is provided. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame.Type: GrantFiled: July 28, 2005Date of Patent: July 31, 2007Assignee: InvenSense IncInventors: Steven S. Nasiri, Anthony Francis Flannery, Jr.
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Patent number: 7250353Abstract: A MEMs (microelectromechanical systems) structure is provided. In one implementation, the MEMs structure includes a substrate wafer including a MEMs device formed on a surface of the substrate wafer, and a MEMs cover structure to cover the MEMs device formed on the surface of the substrate wafer. The MEMs cover structure comprises a first wafer bonded to a second wafer, in which only the first wafer of the MEMs cover structure is sawed through and not the second wafer of the MEMs cover structure during dicing of the MEMs structure.Type: GrantFiled: March 29, 2005Date of Patent: July 31, 2007Assignee: InvenSense, Inc.Inventors: Steven S. Nasiri, Anthony Francis Flannery, Jr., Martin Lim
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Patent number: 7247246Abstract: A wafer-scale fabrication method for providing MEMS assemblies having a MEMS subassembly sandwiched between and bonded to a cap and a base is provided. The MEMS subassembly includes at least one MEMS device element flexibly connected to the MEMS assembly. The vertical separation between the MEMS device element and an electrode on the base is lithographically defined. Precise control of this critical vertical gap dimension is thereby provided. Fabrication cost is greatly reduced by wafer scale integration.Type: GrantFiled: February 2, 2004Date of Patent: July 24, 2007Assignee: Atmel CorporationInventors: Steven S. Nasiri, Anthony Francis Flannery, Jr.
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Patent number: 7104129Abstract: A MEMS assembly having a MEMS subassembly sandwiched between and bonded to a cap and a base is provided. The MEMS subassembly includes at least one MEMS device element flexibly connected to the MEMS assembly. The vertical separation between the MEMS device element and an electrode on the base is lithographically defined. Precise control of this critical vertical gap dimension is thereby provided.Type: GrantFiled: February 2, 2004Date of Patent: September 12, 2006Assignee: InvenSense Inc.Inventors: Steven S. Nasiri, Anthony Francis Flannery, Jr.
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Patent number: 6939473Abstract: A method for making an angular velocity sensor having two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame provided. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame. In a preferred embodiment, the angular velocity sensor is fabricated from a bulk MEMS gyroscope wafer, a cap wafer and a reference wafer. In a further preferred embodiment, this assembly wafers provides a hermetic barrier between the masses and an ambient environment.Type: GrantFiled: October 20, 2003Date of Patent: September 6, 2005Assignee: Invensense Inc.Inventors: Steven S. Nasiri, Anthony Francis Flannery, Jr.
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Patent number: 6892575Abstract: An angular velocity sensor has two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame. In a preferred embodiment, the angular velocity sensor is fabricated from a bulk MEMS gyroscope wafer, a cap wafer and a reference wafer. In a further preferred embodiment, this assembly of wafers provides a hermetic barrier between the masses and an ambient environment.Type: GrantFiled: October 20, 2003Date of Patent: May 17, 2005Assignee: Invensense Inc.Inventors: Steven S. Nasiri, Joseph Seeger
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Patent number: 6843574Abstract: The present invention is directed towards apparatuses for rotating a gimbaled platform with rotatable actuators. Gimbal springs comprised of component springs with compliant axes that intersect at a nonzero angle are coupled to the gimbaled platform. Preferably, the compliant axes of the component springs are oriented at an approximately 45 degree angle relative to the actuator rotation axes. Wraparound lever arms coupling the rotatable actuators with the gimbal springs serve to increase the leverage ratio, thereby permitting greater platform rotation for a given actuator rotation.Type: GrantFiled: August 20, 2002Date of Patent: January 18, 2005Assignee: Intel CorporationInventors: James Starr, Mitchell J. Novack, Haesung Kwon, James H. Smith, Steven S. Nasiri
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Patent number: 6823127Abstract: Optical fibers are inserted and bonded in a two dimensional array of feedthroughs provided by an insert having a top plate, a bottom plate and a sandwiched spacer plate. Top and bottom plate feature funnel shaped hole sections that capture the approaching fiber end during its insertion. The funnel sections terminate in narrow hole sections that tightly hold the inserted fiber ends. Having top and bottom plate spaced apart provides for high angular precision of the bonded fiber ends with minimal fabrication effort of the insert. Optical fibers may be combined in linear arrays and simultaneously inserted significantly reducing assembly efforts. The insert is attached to a fiber housing and hermetically sealed within an external housing, which features a glass plate to provide beam propagation to and from the fiber ends. An optical gel fills the gap between the insert's output face and the glass plate.Type: GrantFiled: September 5, 2002Date of Patent: November 23, 2004Assignee: Intel CorporationInventors: Steven S. Nasiri, Janusz Liberkowski, Zhenfang Chen, Jeff Jarfa
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Publication number: 20040081420Abstract: Optical fibers are inserted and bonded in a two dimensional array of feedthroughs provided by an insert having a top plate, a bottom plate and a sandwiched spacer plate. Top and bottom plate feature funnel shaped hole sections that capture the approaching fiber end during its insertion. The funnel sections terminate in narrow hole sections that tightly hold the inserted fiber ends. Having top and bottom plate spaced apart provides for high angular precision of the bonded fiber ends with minimal fabrication effort of the insert. Optical fibers may be combined in linear arrays and simultaneously inserted significantly reducing assembly efforts. The insert is attached to a fiber housing and hermetically sealed within an external housing, which features a glass plate to provide beam propagation to and from the fiber ends. An optical gel fills the gap between the insert's output face and the glass plate.Type: ApplicationFiled: October 15, 2003Publication date: April 29, 2004Applicant: Intel CorporationInventors: Steven S. Nasiri, Janusz Liberkowski, Zhenfang Chen, Jeff Jarfa
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Publication number: 20040047582Abstract: Optical fibers are inserted and bonded in a two dimensional array of feedthroughs provided by an insert having a top plate, a bottom plate and a sandwiched spacer plate. Top and bottom plate feature funnel shaped hole sections that capture the approaching fiber end during its insertion. The funnel sections terminate in narrow hole sections that tightly hold the inserted fiber ends. Having top and bottom plate spaced apart provides for high angular precision of the bonded fiber ends with minimal fabrication effort of the insert. Optical fibers may be combined in linear arrays and simultaneously inserted significantly reducing assembly efforts. The insert is attached to a fiber housing and hermetically sealed within an external housing, which features a glass plate to provide beam propagation to and from the fiber ends. An optical gel fills the gap between the insert's output face and the glass plate.Type: ApplicationFiled: September 5, 2002Publication date: March 11, 2004Inventors: Steven S. Nasiri, Janusz Liberkowski, Zhenfang Chen, Jeff Jarfa
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Publication number: 20040037492Abstract: The present invention is directed towards apparatuses for rotating a gimbaled platform with rotatable actuators. Gimbal springs comprised of component springs with compliant axes that intersect at a nonzero angle are coupled to the gimbaled platform. Preferably, the compliant axes of the component springs are oriented at an approximately 45 degree angle relative to the actuator rotation axes. Wraparound lever arms coupling the rotatable actuators with the gimbal springs serve to increase the leverage ratio, thereby permitting greater platform rotation for a given actuator rotation.Type: ApplicationFiled: August 20, 2002Publication date: February 26, 2004Inventors: James Starr, Mitchell J. Novack, Haesung Kwon, James H. Smith, Steven S. Nasiri
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Patent number: 6636656Abstract: An optical switching fabric enables an optical signal entering the device on any one of multiple input ports to be directed to any one of multiple output ports. The present optical switching fabrics include sensing and monitoring devices that permit precise initial calibration and continuous switch connection status monitoring and control. Light entering the switching fabric on an input port is reflected by one of a first set of individually controllable mirrors to one of a second set of individually controllable mirrors and then to a corresponding output port. The switching fabrics include control lasers and position sensing devices which provide output signals corresponding to the orientations of the mirrors. In addition, a subset of the input ports and output ports can be attached to monitor light sources and detectors for recalibration and control.Type: GrantFiled: October 24, 2001Date of Patent: October 21, 2003Assignee: Transparent Networks, Inc.Inventors: Cheng-Chung Huang, Steven S. Nasiri, Alex Harwit, Dmitry Vasily Bakin, Randall Brian Sprague, Janusz Bryzek
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Publication number: 20030174928Abstract: An optical switching fabric enables an optical signal entering the device on any one of multiple input ports to be directed to any one of multiple output ports. The present optical switching fabrics include sensing and monitoring devices that permit precise initial calibration and continuous switch connection status monitoring and control. Light entering the switching fabric on an input port is reflected by one of a first set of individually controllable mirrors to one of a second set of individually controllable mirrors and then to a corresponding output port. The switching fabrics include control lasers and position sensing devices which provide output signals corresponding to the orientations of the mirrors. In addition, a subset of the input ports and output ports can be attached to monitor light sources and detectors for recalibration and control.Type: ApplicationFiled: October 24, 2001Publication date: September 18, 2003Inventors: Cheng-Chung Huang, Steven S. Nasiri, Alex Harwit, Dmitry Vasily Bakin, Randall Brian Sprague, Janusz Bryzek
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Patent number: 6480320Abstract: A freely rotatable microelectromechanical mirror and mirror array. Each mirror is connected to a plate flexibly suspended from a plurality of actuators by a plurality of plate flexures. The actuators are flexibly suspended from a support structure by a plurality of actuator flexures. The support structure is held above and electrically isolated from a reference layer by a plurality of standoff posts. The reference layer contains a plurality of actuation means such as control electrodes to move the actuators in first and second directions when actuated. Control voltages can be selectively applied to selective control electrodes to selectively move the actuators, and extend the plurality of plate flexures. The extended plate flexures create a net restoring force or torque to translate or rotate the freely movable plate. The plate and attached mirror are thereby translated or rotated about an arbitrary axis of rotation without stress.Type: GrantFiled: February 7, 2001Date of Patent: November 12, 2002Assignee: Transparent Optical, Inc.Inventor: Steven S. Nasiri
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Publication number: 20020149069Abstract: A semiconductor sensor with epi-pocket isolation is described. In one embodiment, the semiconductor sensor comprises a deformable member which includes a first silicon region of a first conductivity type and a second silicon region of a second conductivity type surrounding the first silicon region. The semiconductor sensor further comprises a stress-sensitive diffused resistive element disposed on the deformable member in the first silicon region.Type: ApplicationFiled: June 28, 2002Publication date: October 17, 2002Inventors: Janusz Bryzek, David W. Burns, Steven S. Nasiri