Patents by Inventor Steven Shank

Steven Shank has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors
    Publication number: 20050040480
    Abstract: Methods such as Remote Plasma Nitridation (RPN) are used to introduce nitrogen into a gate dielectric layer. However, these methods yield nitrided layers where the layers are not uniform, both in cross-sectional profile and in nitrogen profile. Subjecting the nitrided layer to an additional NO anneal process increases the uniformity of the nitrided layer.
    Type: Application
    Filed: September 2, 2003
    Publication date: February 24, 2005
    Inventors: Jay Burnham, James Nakos, James Quinlivan, Steven Shank, Deborah Tucker, Beth Ward