Abstract: Described are methods of manufacturing a semiconductor device with tungsten contacts between two conductive layers on different interconnect levels. A barrier adhesion layer is formed over interconnect openings followed by a tungsten nucleation film being deposited at a nucleation temperature and a tungsten bulk deposition film being deposited at a bulk deposition temperature, wherein the nucleation temperature is higher than the bulk deposition temperature such that the difference between the nucleation temperature and the bulk deposition temperature improves tungsten gap-fill capability.

Abstract: A method of forming a SiCOH etch stop layer in a copper damascene process is described. A substrate with an exposed metal layer is treated with H2 or NH3 plasma to remove metal oxides. Trimethylsilane is flowed into a chamber with no RF power at about 350° C. to form at least a monolayer on the exposed metal layer. The SiCOH layer is formed by a PECVD process including trimethylsilane and CO2 source gases. Optionally, a composite SiCOH layer comprised of a low compressive stress layer on a high compressive stress layer is formed on the substrate. A conventional damascene sequence is then used to form a second metal layer on the exposed metal layer. Via Rc stability is improved and a lower leakage current is achieved with the trimethylsilane passivation layer. A composite SiCOH etch stop layer provides improved stress migration resistance compared to a single low stress SiCOH layer.