Abstract: It is to provide an electrolyte material with which an increase in the water content can be suppressed even when the ion exchange capacity of a polymer having repeating units based on a monomer having a dioxolane ring is high; and a membrane/electrode assembly excellent in the power generation characteristics under low or no humidity conditions and under high humidity conditions. It is to use an electrolyte material, which comprises a polymer (H) having ion exchange groups converted from precursor groups in a polymer (F), and having an ion exchange capacity of at least 1.35 meq/g dry resin, the polymer (F) having repeating units (A) based on a perfluoromonomer having a precursor group of an ion exchange group and a dioxolane ring and repeating units (B) based on a perfluoromonomer having no precursor group and having a dioxolane ring, and having a TQ of at least 200° C.

Abstract: To provide a membrane/electrode assembly for polymer electrolyte fuel cells, a polymer electrolyte fuel cell and processes for their production, which make it possible to stably exhibit a high power generation performance in various environments. A membrane/electrode assembly for polymer electrolyte fuel cells, which comprises a first electrode having a first catalyst layer and a first gas diffusion layer, a second electrode having a second catalyst layer and a second gas diffusion layer, and a polymer electrolyte membrane disposed between the first electrode and the second electrode, wherein the 90° peel strength at least one of the interface between the first electrode and the polymer electrolyte membrane and the interface between the second electrode and the polymer electrolyte membrane is at least 0.03 N/cm.

Abstract: In a substrate processing control method, a first process acquires a first-reflectance-spectrum of a beam reflected from the first-fine-structure and a second-reflectance-spectrum of a beam reflected from the second-fine-structure for each of varying-pattern-dimensions of the first-fine-structure when the pattern-dimension of the first-fine-structure is varied. A second process acquires reference-spectrum-data for each of the varying-pattern-dimensions of the first-fine-structure by overlapping the first-reflectance-spectrum with the second-reflectance-spectrum. A third process actually measures beams reflected from the first and the second-fine-structure, respectively, after irradiating light beam on to the substrate and acquiring reflectance-spectrums of the actual-measured beams as actual-measured spectrum data.

Abstract: An electrolyte material for polymer electrolyte fuel cells, which is made of a polymer containing repeating units based on a fluoromonomer having a radical polymerization reactivity, wherein the repeating units contain a 5-membered ring (which may contain 1 or 2 oxygen atoms), of which at least one carbon atom is contained in the main chain of the polymer, and an ionic group such as a sulfonic acid group which is bonded to the 5-membered ring directly or via a perfluoroalkylene group having a linear or branched structure; and the polymer has a softening temperature of at least 120° C.

Abstract: Provided is a process for producing a fluoropolymer containing repeating units based on a fluoromonomer represented by the following formula (m) in an amount of from 5 to 50 mol % based on the entire repeating units in the polymer by polymerization reaction of tetrafluoroethylene and the fluoromonomer, wherein the polymerization reaction is carried out by continuously charging the reactor with tetrafluoroethylene and the fluoromonomer: wherein ml is an integer of from 1 to 6. Also provided is an electrolyte material for an electrolyte fuel cell which can be operated at a high temperature to obtain a high output, wherein the electrolyte material contains the fluoropolymer produced by the process.

Abstract: Disclosed is a fine electrode body which is good in ion generation efficiency, maintenancability and handleability, and enables to reduce cost and the required installation space. Also disclosed are an ion generator using such a fine electrode body and a neutralization apparatus. Specifically disclosed is a fine electrode body wherein a discharge electrode, which is composed of a linear conductive member having a plurality of fine projections, and an induction electrode, which is composed of a linear conductive member arranged opposite to the discharge electrode, are arranged on a dielectric body. One or more of such fine electrode bodies are arranged on a sheet-like or film-like supporting body. Also specifically disclosed are an ion generator using such a fine electrode body and a neutralization apparatus.

Abstract: To provide a process for producing fluoropolymer particles, whereby formation of fine particles is suppressed.

Abstract: The present invention is a monitoring method of monitoring a change of a processing state of an object to be processed when a predetermined process is conducted to the object to be processed by using a processing unit. The method includes: a step of respectively setting constant response variables for two states before and after a processing state changes, the response variables being different from each other; and a step of conducting a multiple regression analysis about the response variables in order to produce a model expression, predictor variables of the multiple regression analysis being a plurality of detected data from a plurality of detectors provided in the processing unit. Then, the method includes: a step of actually obtaining a plurality of detected data from the plurality of detectors when the predetermined process is conducted to the object to be processed; and a step of estimating or monitoring a processing state by applying the obtained plurality of detected data to the model expression.

Abstract: Disclosed is a method for producing an alcohol from a lactone or a carboxylic acid ester, which enables to produce an alcohol from a lactone or a carboxylic acid ester under relatively mild conditions with high yield and high catalytic efficiency. This method also enables to produce an optically active alcohol from an optically active lactone or an optically active carboxylic acid ester. Specifically disclosed is a method for producing an alcohol by hydrogen reducing a lactone or a carboxylic acid ester in the presence of a catalyst containing ruthenium and a phosphine compound represented by the following general formula (1): wherein R1 represents a spacer; R2, R3, R4, R5, R6 and R7 independently represent a hydrogen atom, an alkyl group having 1-12 carbon atoms, an aryl group or a heterocyclic group; and R8, R9, R10, R11, R12 and R13 independently represent an alkyl group having 1-12 carbon atoms, an aryl group or a heterocyclic group.

Abstract: An ion generating element capable of cost reduction and space saving while exhibiting a high generation efficiency of positive ions and negative ions and stabilized generation capacity with less variation, and an ion generator and a neutralizer employing it. The ion generating element comprises a dielectric body having at least two faces, at least two discharge electrodes arranged on the at least two faces of the dielectric body, and an induction electrode arranged in the dielectric body and subjected to the action of the at least two discharge electrodes and is characterized in that positive ions and negative ions are generated on the body, and ions are generated from the at least two faces of the dielectric body through discharge generated because of the potential difference between the discharge electrode of the ion generating element and the induction electrode when a drive voltage is applied between them.

Abstract: The present invention is directed to a process of making ?-aminooxyketone and ?-hydroxyketone compounds. The synthetic pathway generally involves reacting an aldehyde or ketone substrate and a nitroso substrate in the presence of a catalyst of the formula (IV): wherein Xa—Xc represent independently nitrogen, carbon, oxygen or sulfur and Z represents a 4 to 10-membered ring with or without a substituent and optionally a further step to convert the ?-aminooxyketone compound formed to the ?-hydroxyketone compound. The present invention results in ?-aminooxyketone and ?-hydroxyketone compounds with high enantioselectivity and high purity. The present invention is also directed to a catalytic asymmetric O-nitroso Aldol/Michael reaction. The substrates of this reaction are generally cyclic ?,?-unsaturated ketone substrate and a nitroso substrate.

Abstract: A plasma processing apparatus for generating a plasma of a processing gas by applying a high frequency power to an electrode provided in a processing chamber and processing a substrate using the plasma is provided. The plasma processing apparatus includes an optical data detection unit, a data storage unit and a control unit. The optical data detection unit detects optical data when plasma processing the substrate. The data storage unit stores correlation data representing a correlation between type data corresponding to a plurality of types classified based on a type of a mask or a film to be processed disposed on the substrate and optical data to be detected by the optical data detection unit, and end point detection setting data sets, each of the setting data sets serving to detect a plasma processing end point and corresponding to one of the types.

Abstract: A belt-conveyor device includes a detecting unit that detects a belt position in a width direction of the endless belt for a plurality of times within more than a cycle of the endless belt, the width direction being a direction orthogonal to direction of travel of the endless belt; an average calculating unit that calculates an average belt position from the belt positions detected by the detecting unit; a storing unit that stores therein a plural sets of correction values and belt positions; and a meander correcting unit that corrects meander of the endless belt based on a correction value that corresponds with the average belt position in the storing unit.

Abstract: A compound containing two fluorosulfonyl groups which are groups convertible to sulfonic acid groups, an intermediate therefor, and methods for their production with high productivity, are provided. Also provided are a fluorosulfonyl group-containing polymer obtained by polymerizing such a compound, and a sulfonic acid group-containing polymer obtained from such a polymer. A method for producing a compound of the following formula (m0), such a compound, a fluorosulfonyl group-containing polymer obtained by polymerizing such a compound, and a sulfonic acid group-containing polymer obtained from such a polymer, provided that RF01 is a single bond or a C1-6 bivalent perfluoro organic group, RF02 is a C1-6 bivalent perfluoro organic group, and n is 0 or 1.

Abstract: In a plasma processing method, a correlation between substrate type data and optical data is obtained by using a multivariate analysis; substrate type data is obtained from optical data based on the correlation when initiating a plasma processing; and a substrate type is determined by using the obtained substrate type data. Further, a setting data set corresponding to the determined substrate type is selected from setting data sets, each for detecting a plasma processing end point of the plasma processing, each of the setting data sets being stored in advance in a data storage unit; an end point of the plasma processing is detected based on the selected setting data set; and the plasma processing is terminated at the detected end point.

Abstract: In a substrate processing control method, a first process acquires a first-reflectance-spectrum of a beam reflected from the first-fine-structure and a second-reflectance-spectrum of a beam reflected from the second-fine-structure for each of varying-pattern-dimensions of the first-fine-structure when the pattern-dimension of the first-fine-structure is varied. A second process acquires reference-spectrum-data for each of the varying-pattern-dimensions of the first-fine-structure by overlapping the first-reflectance-spectrum with the second-reflectance-spectrum. A third process actually measures beams reflected from the first and the second-fine-structure, respectively, after irradiating light beam on to the substrate and acquiring reflectance-spectrums of the actual-measured beams as actual-measured spectrum data.

Abstract: To provide a polymer electrolyte membrane for polymer electrolyte fuel cells having high mechanical strength and excellent dimensional stability when it contains water even when it is made thin and the concentration of ionic groups is increased so as to reduce the electrical resistance, and a membrane/electrode assembly providing high output and having excellent durability. A polymer electrolyte membrane 15, which comprises a fluorinated proton conductive polymer (i) having a proton conductivity of at least 0.06 S/cm in an atmosphere at a temperature of 80° C. under a relative humidity of 50%, and (ii) having repeating units based on a vinyl ether type monomer with a mass (equivalent weight) of at most 400 per 1 mol of ionic groups and repeating units based on a perfluoromonomer (except for the above vinyl ether type monomer) and a fluorinated reinforcing material; and a membrane/electrode assembly 10 comprising the polymer electrolyte membrane 15 interposed between an anode 13 and a cathode 14.

Abstract: An analysis method for a substrate processing apparatus capable of accurately detecting a state in a housing chamber. Emission intensities of processing gas before being introduced into the chamber and processing gas having passed therethrough are measured before an inter-chamber part is replaced. If an emission intensity measured after the replacement coincides with that measured before the replacement, an emission intensity of the processing gas having passed through the chamber is measured, and a variation between the emission intensities of the processing gas having passed through the chamber measured before and after the replacement is calculated. After start of plasma processing on wafers, an emission intensity of the processing gas having passed through the chamber is measured and the variation is removed therefrom to calculate an emission intensity really representing a state in the chamber, thus detecting an end point of plasma processing therefrom.

Abstract: To provide an ion exchange membrane for alkaline chloride electrolysis having a low electric resistance and further having a sufficient mechanical strength. To employ an ion exchange membrane containing a polymer having units (U1). Q1, Q2=a perfluoroalkylene group or the like; Rf1, Rf2=a perfluoroalkyl group or the like; X1=an oxygen atom or the like; a=0 or the like; Y1=a fluorine atom or the like; r=0 or 1; and M=a hydrogen atom or an alkali metal atom.

Abstract: To provide a membrane/electrode assembly for polymer electrolyte fuel cells, a polymer electrolyte fuel cell and processes for their production, which make it possible to stably exhibit a high power generation performance in various environments. A membrane/electrode assembly for polymer electrolyte fuel cells, which comprises a first electrode having a first catalyst layer and a first gas diffusion layer, a second electrode having a second catalyst layer and a second gas diffusion layer, and a polymer electrolyte membrane disposed between the first electrode and the second electrode, wherein the 90° peel strength at least one of the interface between the first electrode and the polymer electrolyte membrane and the interface between the second electrode and the polymer electrolyte membrane is at least 0.03 N/cm.