Abstract: The present invention is relating to an ion generator and an ionizer, in which the ion generator can obtain stable ion generation even if the electrode and the power supply slightly change, satisfies voltage and frequency conditions for realizing an ozone concentration less than 50 ppb as an allowable concentration.

Abstract: To provide a process for producing a perfluorocarbon polymer, whereby a perfluorocarbon polymer having a high content of —SO2F groups and a high molecular weight can be efficiently obtained. The process comprises polymerizing a monomer mixture comprising the liquid monomer (A) of the following formula (1) and tetrafluoroethylene at a polymerization temperature of from 25 to 45° C. by sequentially or continuously adding an initiator of the following formula (2): CF2?CF(OCF2CFX1)k—O1—(CF2)m—(CF2CFX2)n—SO2F??(1) wherein each of X1 and X2 which may be the same or different, is a fluorine atom or a trifluoromethyl group, k is an integer of from 0 to 3, l is 0 or 1, m is an integer of from 0 to 12, and n is an integer of from 0 to 3, [CF3CF2CF2O(CF(CF3)CF2O)pCF(CF3)COO]2??(2) wherein p is an integer of from 0 to 8.

Abstract: A membrane-electrode assembly for polymer electrolyte fuel cells which is excellent in water repellency and gas diffusivity and which exhibits a high output power density, can be obtained by using, as an electrolyte material for polymer electrolyte fuel cells, a fluoropolymer obtained by contacting a fluoropolymer which is excellent in gas diffusivity and which has alicyclic structures in its main chain and further has sulfonic acid groups, with fluorine gas for fluorination to increase water repellency and stabilize the molecule ends.

Abstract: An ion generating element capable of cost reduction and space saving while exhibiting a high generation efficiency of positive ions and negative ions and stabilized generation capacity with less variation, and an ion generator and a neutralizer employing it. The ion generating element comprises a dielectric body having at least two faces, at least two discharge electrodes arranged on the at least two faces of the dielectric body, and an induction electrode arranged in the dielectric body and subjected to the action of the at least two discharge electrodes and is characterized in that positive ions and negative ions are generated on the body, and ions are generated from the at least two faces of the dielectric body through discharge generated because of the potential difference between the discharge electrode of the ion generating element and the induction electrode when a drive voltage is applied between them.

Abstract: A compound containing two fluorosulfonyl groups which are groups convertible to sulfonic acid groups, an intermediate therefor, and methods for their production with high productivity, are provided. Also provided are a fluorosulfonyl group-containing polymer obtained by polymerizing such a compound, and a sulfonic acid group-containing polymer obtained from such a polymer.

Abstract: An etching amount calculating method that can stably and accurately calculate the amount of etching even if a disturbance is added. Superposed interference light resulting from superposition of interference light of reflected light from a mask film and reflected light from the bottom of a concave portion on other interference light is received. A waveform in a predetermined time period is extracted from a superposed interference wave calculated from the superposed interference light. The period of an interference wave of the reflected light from the mask film and the reflected light from the bottom is detected from the distribution of frequencies of the extracted waveform. The steps described above are repeated while shifting the predetermined time period by a predetermined time, and the detected periods are integrated and averaged at each repetition. The etching amount of the concave portion is calculated based on the integrated and averaged periods.

Abstract: A membrane-electrode assembly for polymer electrolyte fuel cells which is excellent in water repellency and gas diffusivity and which exhibits a high output power density, can be obtained by using, as an electrolyte material for polymer electrolyte fuel cells, a fluoropolymer obtained by contacting a fluoropolymer which is excellent in gas diffusivity and which has alicyclic structures in its main chain and further has sulfonic acid groups, with fluorine gas for fluorination to increase water repellency and stabilize the molecule ends.

Abstract: A compound containing two fluorosulfonyl groups which are groups convertible to sulfonic acid groups, an intermediate therefor, and methods for their production with high productivity, are provided. Also provided are a fluorosulfonyl group-containing polymer obtained by polymerizing such a compound, and a sulfonic acid group-containing polymer obtained from such a polymer.

Abstract: An electrolyte membrane for a polymer electrolyte fuel cell, which comprises an ion exchange membrane made of a fluoropolymer having a softening temperature of at least 90° C. and having acidic groups, and contains cerium atoms.

Abstract: An etching method capable of controlling the film thickness of a hard mask layer uniformly is provided. A plasma etching is performed on a native oxide film by using an etching gas containing, for example, CF4 and Ar while a thickness of a silicon nitride film is being monitored and the etching is finished when the thickness of the silicon nitride film reaches a predetermined value. Then, a plasma etching is performed on a silicon substrate by employing an etching gas containing, for example, Cl2, HBr and Ar and using the silicon nitride film as a mask while a depth of a trench is being monitored and the etching is finished when the depth of the trench reaches a specified value.

Abstract: To provide a fluorosulfonyl group-containing monomer having a high polymerization reactivity and plural fluorosulfonyl groups. Further, to provide a fluorosulfonyl group-containing polymer and a sulfonic acid group-containing polymer, obtained by using the monomer. A perfluoro(2-methylene-1,3-dioxolane) derivative which is represented by the following formula (3) and which has two fluorosulfonyl groups, and its production process and its synthetic intermediate. A fluorosulfonyl group-containing polymer having monomer units represented by the following formula (3U) obtained by polymerizing the compound (3) by itself or with a comonomer, and a sulfonic acid group-containing polymer having the following units (5U) obtained by hydrolyzing a fluorosulfonyl group of the polymer. In the following formulae, each of Rf1 and Rf2 which are independent of each other, is a C1-8 perfluoroalkylene group which may have an etheric oxygen atom between carbon atoms.

Abstract: A membrane/electrode assembly for a polymer electrolyte fuel cell, comprising an anode and a cathode each having a catalyst layer containing a proton conductive polymer, and a polymer electrolyte membrane disposed between the anode and the cathode, wherein the proton conductive polymer has an electrical conductivity of at least 0.07 S/cm at a temperature of 80° C. at a relative humidity of 40% and has a water content less than 150 mass %.

Abstract: A neutralization apparatus comprising an ion generation element employing a novel, high efficiency discharge system capable of generating high concentration ions with a low ozone concentration. In the neutralization apparatus, the ion generation element is a minute electrode ion generation element consisting of a discharge electrode and an induction electrode having minute protrusions arranged in one direction on a plane, and a thin dielectric film sandwiched between them.

Abstract: A polymer electrolyte membrane made of a polymer has a low electrical resistance, high heat resistance and is strong against repeats of swelling and shrinkage. Thus, a membrane/electrode assembly for polymer electrolyte fuel cells having high power generation performance and excellent in durability can be provided. For a polymer electrolyte membrane 15 or for a catalyst layer 11 constituting electrodes 13 and 14, a polymer comprising units (U1) and units (U2) is used: Q1, Q2, Q3: a perfluoroalkylene group which may have —O— or the like; Rf1, Rf2: a perfluoroalkyl group which may have —O—; X1, X2: an oxygen atom or the like; a, b: 0 or the like; Y1, Y2: a fluorine atom or a monovalent perfluoroorganic group; and s, t: 0 to 1.

Abstract: To provide an electrolyte material having high electrical conductivity (ion exchange capacity) and a high softening temperature. An electrolyte material comprising a copolymer containing repeating units represented by the following formula (1) and repeating units represented by the following formula (2): wherein RF is a fluorine atom or the like, each of X1 and X2 is a fluorine atom or a trifluoromethyl group, m is from 2 to 4, and Y is a hydroxyl group or the like.

Abstract: A particle monitoring apparatus including a light source configured to emit plural light fluxes, a projecting optical system configured to convert the plural light fluxes into a band-shaped light flux, to lead the band-shaped light flux into a flow passage of a given gas stream, and to partially superpose the plural light fluxes to form a substantially uniform light intensity distribution of the band-shaped light flux in a widthwise direction; a light detector configured to detect intensity of light; and a particle detector configured to determine sizes of the particles passing the light flux based on intensities of the scattered lights detected by the light detector and to count the number of the particles.

Abstract: The present invention is relating to an ion generator and an ionizer, in which the ion generator can obtain stable ion generation even if the electrode and the power supply slightly change, satisfies voltage and frequency conditions for realizing an ozone concentration less than 50 ppb as an allowable concentration.

Abstract: A polymer electrolyte membrane made of a polymer has a low electrical resistance, high heat resistance and is strong against repeats of swelling and shrinkage. Thus, a membrane/electrode assembly for polymer electrolyte fuel cells having high power generation performance and excellent in durability can be provided. For a polymer electrolyte membrane 15 or for a catalyst layer 11 constituting electrodes 13 and 14, a polymer comprising units (U1) and units (U2) is used: Q1, Q2: a perfluoroalkylene group which may have —O— or the like; Rf1, Rf2: a perfluoroalkyl group which may have —O—; X: an oxygen atom or the like; a: 0 or the like; Y, Z: a fluorine atom, or a monovalent perfluoroorganic group such as —CF3; S: 0 to 1; and t: 0 to 3.

Abstract: A membrane/electrode assembly for a polymer electrolyte fuel cell capable of exhibiting high power generation performance constantly for a long period of time in a high temperature and low humidity environment, and a polymer electrolyte membrane whereby such a membrane/electrode assembly is obtainable. A polymer electrode membrane 15, comprising a proton conductive polymer which has an electrical conductivity of at least 0.07 S/cm at a temperature of 80° C. at a relative humidity of 40% and which has a water content of less than 15 mass; and a membrane/electrode assembly 10 comprising an anode 13 and a cathode 14 each having a catalyst layer 11, and a polymer electrolyte membrane 15 disposed between the anode 13 and the cathode 14.

Abstract: It is to provide a process for producing a polymer for an electrolyte material to prepare polymer electrolyte fuel cells which can be operated at a high temperature and with which high output can be obtained, with a stable composition. A process for producing a fluoropolymer by polymerization reaction of tetrafluoroethylene and a fluoromonomer represented by the following formula (m), wherein the polymerization reaction is carried out by continuously charging the reactor with tetrafluoroethylene and the fluoromonomer: wherein m1 is an integer of from 1 to 6.