Patents by Inventor Szu-Lin LIU
Szu-Lin LIU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11532615Abstract: A trimmable resistor circuit and a method for operating the trimmable resistor circuit are provided. The trimmable resistor circuit includes first sources/drains and first gate structures alternatively arranged in a first row, second sources/drains and second gate structures alternatively arranged in a second row, third sources/drains and third gate structures alternatively arranged in a third row, first resistors disposed between the first row and the second row, and second resistors disposed between the second row and the third row. In the method for operating the trimmable resistor circuit, the first gate structures in the first row and the third gate structures in the third row are turned on. Then, the second gate structures in the second row are turned on/off according to a predetermined resistance value.Type: GrantFiled: December 4, 2020Date of Patent: December 20, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Szu-Lin Liu, Jaw-Juinn Horng
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Patent number: 11515434Abstract: A semiconductor device includes a substrate and a plurality of source/drain (S/D) regions in the substrate, wherein each of the plurality of S/D regions includes a first dopant having a first dopant type, and the each of the plurality of S/D regions are electrically coupled together. The semiconductor device further includes a gate stack over the substrate. The semiconductor device further includes a channel region in the substrate, wherein the channel region is below the gate stack and between adjacent S/D regions of the plurality of S/D regions, the channel region includes a second dopant having the first dopant type, and a concentration of the second dopant in the channel region is less than a concentration of the first dopant in each of the plurality of S/D regions.Type: GrantFiled: September 17, 2019Date of Patent: November 29, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Szu-Lin Liu, Jaw-Juinn Horng
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Publication number: 20220364936Abstract: A thermal sensor in some embodiments comprises two temperature-sensitive branches, each including a thermal-sensing device, such as one or more bipolar-junction transistors, and a current source for generating a current density in the thermal-sensing device to generate a temperature-dependent signal. The thermal sensor further includes a signal processor configured to multiply the temperature-dependent signal from the branches by respective and different gain factors, and combine the resultant signals to generate an output signal that is substantially proportional to the absolute temperature the thermal sensor is disposed at.Type: ApplicationFiled: July 27, 2022Publication date: November 17, 2022Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Jaw-Juinn Horng, Szu-Lin Liu
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Publication number: 20220365129Abstract: A method of calibrating a thermal sensor device is provided. The method includes extracting an incremental voltage to temperature curve for a diode array from a first incremental voltage of the diode array at a first temperature. The diode array and a device under test (DUT) which includes a thermal sensor are heated. After heating the diode array, a first incremental temperature is determined from the incremental voltage to temperature curve for the diode array and a second incremental voltage of the diode array after heating the diode array. An incremental voltage to temperature curve is extracted for the DUT from the first incremental temperature, a first incremental voltage for the DUT at the first temperature, and a second incremental voltage of the DUT after heating the device under test. A temperature error for the thermal sensor is determined from the incremental voltage to temperature curve for the DUT.Type: ApplicationFiled: July 29, 2022Publication date: November 17, 2022Inventors: Szu-Lin Liu, Jaw-Juinn Horng
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Publication number: 20220360257Abstract: An integrated circuit includes a first metal-insulator-semiconductor capacitor, a second metal-insulator-semiconductor capacitor, and a metal-insulator-metal capacitor. A first terminal of the first metal-insulator-semiconductor capacitor is configured to receive a first reference voltage for a higher voltage domain, while a first terminal of the second metal-insulator-semiconductor capacitor is configured to receive a second reference voltage for the higher voltage domain. A second terminal of the first metal-insulator-semiconductor capacitor is conductively connected to a first terminal of the metal-insulator-metal capacitor, while a second terminal of the second metal-insulator-semiconductor capacitor is conductively connected to a second terminal of the metal-insulator-metal capacitor.Type: ApplicationFiled: August 24, 2021Publication date: November 10, 2022Inventors: Szu-Lin LIU, Jaw-Juinn HORNG, Yi-Hsiang WANG, Wei-Lin LAI
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Patent number: 11493389Abstract: A thermal sensor in some embodiments comprises two temperature-sensitive branches, each including a thermal-sensing device, such as one or more bipolar-junction transistors, and a current source for generating a current density in the thermal-sensing device to generate a temperature-dependent signal. The thermal sensor further includes a signal processor configured to multiply the temperature-dependent signal from the branches by respective and different gain factors, and combine the resultant signals to generate an output signal that is substantially proportional to the absolute temperature the thermal sensor is disposed at.Type: GrantFiled: September 16, 2019Date of Patent: November 8, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Jaw-Juinn Horng, Szu-Lin Liu
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Publication number: 20220336683Abstract: A method includes implanting a first dopant having a first dopant type into a substrate to define a plurality of source/drain (S/D) regions. The method further includes implanting a second dopant having the first dopant type into the substrate to define a channel region between adjacent S/D regions of the plurality of S/D regions, wherein a dopant concentration of the second dopant in the channel region is less than half of a dopant concentration of the first dopant in each of the plurality of S/D regions. The method further includes forming a gate stack over the channel region. The method further includes electrically coupling each of the plurality of S/D regions together.Type: ApplicationFiled: June 27, 2022Publication date: October 20, 2022Inventors: Szu-Lin LIU, Jaw-Juinn HORNG
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Patent number: 11448691Abstract: A method of calibrating a thermal sensor device is provided. The method includes extracting an incremental voltage to temperature curve for a diode array from a first incremental voltage of the diode array at a first temperature. The diode array and a device under test (DUT) which includes a thermal sensor are heated. After heating the diode array, a first incremental temperature is determined from the incremental voltage to temperature curve for the diode array and a second incremental voltage of the diode array after heating the diode array. An incremental voltage to temperature curve is extracted for the DUT from the first incremental temperature, a first incremental voltage for the DUT at the first temperature, and a second incremental voltage of the DUT after heating the device under test. A temperature error for the thermal sensor is determined from the incremental voltage to temperature curve for the DUT.Type: GrantFiled: April 23, 2021Date of Patent: September 20, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Szu-Lin Liu, Jaw-Juinn Horng
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Publication number: 20220215151Abstract: An electromigration (EM) sign-off methodology that analyzes an integrated circuit design layout to identify heat sensitive structures, self-heating effects, heat generating structures, and heat dissipating structures. The EM sign-off methodology includes adjustments of an evaluation temperature for a heat sensitive structure by calculating the effects of self-heating within the temperature sensitive structure as well as additional heating and/or cooling as a function of thermal coupling to surrounding heat generating structures and/or heat sink elements located within a defined thermal coupling volume or range.Type: ApplicationFiled: March 23, 2022Publication date: July 7, 2022Inventors: Hsien Yu TSENG, Amit KUNDU, Chun-Wei CHANG, Szu-Lin LIU, Sheng-Feng LIU
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Patent number: 11288437Abstract: An electromigration (EM) sign-off methodology that analyzes an integrated circuit design layout to identify heat sensitive structures, self-heating effects, heat generating structures, and heat dissipating structures. The EM sign-off methodology includes adjustments of an evaluation temperature for a heat sensitive structure by calculating the effects of self-heating within the temperature sensitive structure as well as additional heating and/or cooling as a function of thermal coupling to surrounding heat generating structures and/or heat sink elements located within a defined thermal coupling volume or range.Type: GrantFiled: December 14, 2020Date of Patent: March 29, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Hsien Yu Tseng, Chun-Wei Chang, Szu-Lin Liu, Amit Kundu, Sheng-Feng Liu
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Publication number: 20220029622Abstract: A decoupling capacitance (decap) system which includes: a decap circuit electrically coupled between a first or second reference voltage rail and a first node; and a biasing circuit coupled between the first node and correspondingly the second or first reference voltage rail. Due to the series connection between the decap circuit and the biasing circuit, the voltage drop across the biasing circuit effectively reduces the voltage drop across the decap circuit so that the voltage drop across the decap circuit is less than a voltage drop across the decap system as whole.Type: ApplicationFiled: February 4, 2021Publication date: January 27, 2022Inventors: Szu-Lin LIU, Yi-Hsiang WANG, Jaw-Juinn HORNG
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Publication number: 20210341339Abstract: A circuit is disclosed that includes a first differential input pair, a second differential input pair, a first switch, and a second switch. The first differential input pair receives an output voltage at an output node and a first temperature-dependent voltage. The second differential input pair receives the output voltage and a second temperature-dependent voltage. When the output voltage reaches the second temperature-dependent voltage, the first switch is turned on to pull up the output voltage in response to a first control signal generated according to an output signal of the second differential input pair. When the output voltage reaches the first temperature-dependent voltage, the second switch is turned on to pull down the output voltage in response to a second control signal generated according to an output signal of the first differential input pair.Type: ApplicationFiled: July 16, 2021Publication date: November 4, 2021Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Jaw-Juinn HORNG, Szu-Lin LIU
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Publication number: 20210305248Abstract: A method of biasing a guard ring structure includes biasing a gate of a MOS transistor to a first bias voltage level, biasing first and second S/D regions of the MOS transistor to a power domain voltage level, biasing a gate of the guard ring structure to a second bias voltage level, and biasing first and second heavily doped regions of the guard ring structure to the power domain voltage level. Each of the first and second S/D regions has a first doping type, each of the first and second heavily doped regions has a second doping type different from the first doping type, and each of the first and second S/D regions and the first and second heavily doped regions is positioned in a substrate region having the second doping type.Type: ApplicationFiled: September 23, 2020Publication date: September 30, 2021Inventors: Yi-Hsiang WANG, Szu-Lin LIU, Jaw-Juinn HORNG, Yung-Chow PENG
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Patent number: 11067453Abstract: A circuit is disclosed that includes a capacitive element, a control circuit, and a first switch and a second switch. The capacitive element is configured to generate an output voltage at a terminal thereof. The control circuit is configured to generate a first control signal and a second control signal in response to a first temperature-dependent voltage, a second temperature-dependent voltage, and the output voltage. The first switch and the second switch are coupled to the capacitive element, and configured to be turned on or off in response to the first control signal and the second control signal respectively. The first switch and the second switch have different switching status from each other in a charge mode.Type: GrantFiled: December 13, 2019Date of Patent: July 20, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Jaw-Juinn Horng, Szu-Lin Liu
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Publication number: 20210123816Abstract: A three-dimensional integrated circuit includes a first layer including at least one sensing element configured to output at least one temperature-dependent voltage; and a second layer disposed vertically with respect to the first layer and coupled to the first layer by at least one via. The second layer includes: a compare circuit configured to generate at least one intermediate voltage in response to comparing the at least one temperature-dependent voltage to a feedback voltage; a control circuit configured to generate at least one control signal in response to the intermediate voltage; and a switching circuit configured to couple a capacitor coupled to a feedback node to one of a first voltage supply and a second voltage supply in response to the at least one control signal to generate an output signal that is based on a temperature sensed by the sensing element.Type: ApplicationFiled: January 4, 2021Publication date: April 29, 2021Inventors: Szu-Lin LIU, Jaw-Juinn Horng, Yung-Chow Peng
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Publication number: 20210097227Abstract: An electromigration (EM) sign-off methodology that analyzes an integrated circuit design layout to identify heat sensitive structures, self-heating effects, heat generating structures, and heat dissipating structures. The EM sign-off methodology includes adjustments of an evaluation temperature for a heat sensitive structure by calculating the effects of self-heating within the temperature sensitive structure as well as additional heating and/or cooling as a function of thermal coupling to surrounding heat generating structures and/or heat sink elements located within a defined thermal coupling volume or range.Type: ApplicationFiled: December 14, 2020Publication date: April 1, 2021Inventors: Hsien YU TSENG, Chun-Wei CHANG, Szu-Lin LIU, Amit KUNDU, Sheng-Feng LIU
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Publication number: 20210091071Abstract: A trimmable resistor circuit and a method for operating the trimmable resistor circuit are provided. The trimmable resistor circuit includes first sources/drains and first gate structures alternatively arranged in a first row, second sources/drains and second gate structures alternatively arranged in a second row, third sources/drains and third gate structures alternatively arranged in a third row, first resistors disposed between the first row and the second row, and second resistors disposed between the second row and the third row. In the method for operating the trimmable resistor circuit, the first gate structures in the first row and the third gate structures in the third row are turned on. Then, the second gate structures in the second row are turned on/off according to a predetermined resistance value.Type: ApplicationFiled: December 4, 2020Publication date: March 25, 2021Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Szu-Lin LIU, Jaw-Juinn HORNG
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Publication number: 20210090937Abstract: A system for designing a temperature sensor arrangement includes a processor and a non-transitory computer readable medium, including instructions, connected to the processor. The processor is configured to execute the instructions for designing a sensor array, the sensor array includes a first transistor of a first device, and a plurality of second transistors of a second device. The processor is configured to execute the instructions for designing a guard ring region between the sensor array and another circuit of an integrated circuit, the guard ring region includes a transistor structure. The processor is configured to execute the instructions for designing a thermally conductive element between the sensor array and the guard ring region, the thermally conductive element is connected to the transistor structure, the first transistor and each of the plurality of second transistors. The processor is configured to execute the instructions for generating the temperature sensor arrangement.Type: ApplicationFiled: November 17, 2020Publication date: March 25, 2021Inventors: Jaw-Juinn HORNG, Szu-Lin LIU
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Publication number: 20210083129Abstract: A semiconductor device includes a substrate and a plurality of source/drain (S/D) regions in the substrate, wherein each of the plurality of S/D regions includes a first dopant having a first dopant type, and the each of the plurality of S/D regions are electrically coupled together. The semiconductor device further includes a gate stack over the substrate. The semiconductor device further includes a channel region in the substrate, wherein the channel region is below the gate stack and between adjacent S/D regions of the plurality of S/D regions, the channel region includes a second dopant having the first dopant type, and a concentration of the second dopant in the channel region is less than a concentration of the first dopant in each of the plurality of S/D regions.Type: ApplicationFiled: September 17, 2019Publication date: March 18, 2021Inventors: Szu-Lin LIU, Jaw-Juinn HORNG
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Publication number: 20210063254Abstract: A thermal sensor circuit that includes a temperature sensing circuit, an analog to digital converter, a processor, a divider circuit and a digital circuit is introduced. The temperature sensing circuit generates first and second temperature-dependent voltages. The digital to analog converter converts the first and second temperature-dependent voltages to first and second bit streams. The processor generates a third bit stream based on a thermal coefficient. The divider circuit divides one of the first and second bit streams by a denominator value to generate a fourth bit stream, wherein the denominator value is determined according to a bit value of the third bit stream. The digital circuit subtracts the other one of the first and second bit streams from the fourth bit stream to generate an output bit stream. The processor tunes the thermal coefficient until the output bit stream is equivalent to a bit stream of a reference model.Type: ApplicationFiled: May 5, 2020Publication date: March 4, 2021Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Jaw-Juinn Horng, Szu-Lin Liu