Abstract: A calibration data generation apparatus includes a flow rate sensor that measures the flow rate of a fluid flowing through a fluid control valve; a differential pressure control mechanism; a temperature control mechanism; and a control unit that when the fluid passing has sound velocity, uses the temperature control mechanism to change the temperature from a reference temperature to comparative temperature. In addition, the control unit includes a valve opening control part that controls the fluid control valve so that at the comparative temperature, an output value outputted from one of the position sensor and the flow rate sensor becomes equal to the reference output value of the one; and a calibration data generation part that generates the calibration data on the basis of a calibration data generation output value outputted from the other one of the position sensor and the flow rate sensor.

Abstract: Provided is a flow rate control apparatus that includes a flow restrictor, a downstream side valve, a downstream side pressure sensor, first and second flow rate calculators, and a flow rate controller. The downstream side valve is disposed downstream of the flow restrictor in a flow path. The downstream side pressure sensor measures a pressure between the flow restrictor and the downstream side valve. The first flow rate calculator calculates a first flow rate of fluid flowing through the flow restrictor. The second flow rate calculator calculates a second flow rate of fluid flowing out of the downstream side valve on the basis of the first flow rate and the temporal variation in downstream side pressure measured by the downstream side pressure sensor. The flow rate controller controls the downstream side valve on the basis of a set flow rate and the second flow rate.

Abstract: In order to provide a fluid control apparatus that without enhancing temporal control performance, every time, can stabilize a fluid flow rate achieved by, for example, pulse control, and eliminate fluid wasted at the time of supplying the fluid by including one flow path, a control mechanism includes a first feedback controller adapted to control a first valve on the basis of first pressure measured by a first pressure sensor. In addition, when a second valve is closed, the first pressure feedback controller controls the first valve so that the first pressure measured by the first pressure sensor reaches target burst pressure, and when and after the first pressure reaches the target burst pressure and the second valve is opened, the control mechanism is configured to control the first valve so that the flow rate of the fluid flowing through the flow path reaches a target constant flow rate.

Abstract: Provided is a fluid control device that achieves high sealing performance at full closure, and can suppress damage to a valve body or a valve seat surface even without mechanical accuracy improvements. The fluid control device includes: a fluid control valve provided in a flow path through which fluid flows: and a control mechanism that controls the fluid control valve. The fluid control valve includes: a valve seat surface; a valve body that contacts and separates from the valve seat surface; and an actuator that drives the valve body. Further, the control mechanism includes a speed adjustment part that when the valve body is brought close to the valve seat surface in order to fully close the fluid control valve, and the valve seat surface and the valve body reach a predetermined distance apart, reduces the moving speed of the valve body more than before reaching the predetermined distance.

Abstract: To provide a fluid control valve that enables the internal volume to be reduced and, for example, the falling response performance to be improved without compromising the accuracy in controlling a pressure, a flow rate, and so on of fluid, a fluid control valve includes a valve seat portion, a valve body capable of making or breaking contact with the valve seat portion, a fluid resistance, and a pair of clamping members that clamps the fluid resistance. The fluid resistance and the pair of clamping members form an in-valve space in which the valve body or at least part of an actuation member that moves the valve body is housed. Fluid passes through the fluid resistance from the downstream-side in-valve space and flows out to the outside.

Abstract: To provide a flow rate characteristic function identification method, flow rate sensor, and flow rate characteristic function identification program that can set a flow rate characteristic function reflecting not only the type or shape of a fluid resistance but also the effects of states such as an attachment state of the fluid resistance, and calculate a flow rate with higher accuracy. An actual flow rate characteristic function, which is a flow rate characteristic function when an actual fluid resistance is provided in a flow path, is identified on the basis of multiple flow rate characteristic functions including a first reference flow rate characteristic function and a second reference flow rate characteristic function, and predetermined weighting.

Abstract: The present invention is mainly intended to provide a sealing member which can be easily manufactured and which is capable of sealing with high accuracy and a method of manufacturing the sealing member, wherein the sealing member is a metallic sealing member that is arranged so as to be interposed between a first surface and a second surface which are facing each other. The sealing member is provided with a first protrusion protruded toward the first surface and a pair of second protrusions protruded toward the second surface, wherein the first protrusion is arranged between the paired second protrusions and distal end portions of the first protrusion and second protrusions are mutually parallel flat surfaces.

Abstract: The fluid mixing element in accordance with this invention forms a first internal flow channel whose starting end opens on an end surface of one end part and whose terminal end opens on an end surface of the other end part and a second internal flow channel whose starting end opens on a side peripheral surface of a middle part and whose terminal end opens on an end surface of the other end part. It is possible for the fluid mixing element to securely mix a first fluid flowing in a main flow channel with a second fluid flowing in a sub-flow channel by the use of a pipe with a short length with a simple arrangement.

Abstract: This invention provides a fluid mechanism that can arrange a plurality of fluid device units and external fluid devices mounted as a set on the fluid device units effectively and compactly. Each of the fluid device units is arranged with respective side surfaces in a longitudinal direction of the fluid device unit tightly attached, and the external fluid devices are arranged side-by-side external to and outside of the fluid device unit in the width direction. Furthermore, as for an introducing path and a discharging path that connect the external fluid devices and the fluid device unit, the introducing path, which is short, is connected to the discharging path, which is long.

Abstract: In order to make it possible to increase a diameter and output thereof, a diaphragm structure is provided that has low repulsiveness, can be largely deformed to increase a stroke even without being applied with a large force from an actuator, and is unlikely to give rise to a defect or fault even when formed thin, and a fluid control valve is provided with the diaphragm structure and the actuator that presses the diaphragm structure, wherein the diaphragm structure is provided with: a protruding part that is formed in a tubular shape and pressed by the actuator; a brim part that spreads from a base end of the protruding part outward with respect to the protruding part; and a support part that is formed on an outer circumference of the brim part and attached to another member, and the brim part is formed in a film shape.

Abstract: This invention is to improve procedures of maintenance of a fluid measurement system having a fluid measurement device and a control device. The fluid measurement system has a fluid measurement device and a control device to control the fluid measurement device, and the fluid measurement device comprises a fluid sensor and a related data store part configured to store fluid calculation related data for calculation of one or more fluid parameters with measurement data obtained by the fluid sensor, and the control device obtains the fluid calculation related data from the related data store part and calculates the one or more fluid parameters with the measurement data of the fluid sensor and the fluid calculation related data.

Abstract: In order to be able to stably manufacture a fluid resistance device having the same resistance characteristics while preventing fluid such as gas from leaking, a fluid resistance device is provided with a fluid resistance element having a resistance flow passage, a base member and a fixing member for holding the fluid resistance element to be fixed between the base member and the fixing member, and a thin plate-shaped seal member interposed between the fixing member and the fluid resistance element.

Abstract: The present invention is directed a valve element which is intended to improve a sealing property at a time of closing a fluid control valve and to improve stability while maintaining durability for a long time period, wherein the valve element constitutes one of a valve seat surface or a seating surface and the valve element includes a concave portion formed in an opposing surface facing the valve seat surface and a resin coating film which is formed in the concave portion and contacts the valve seat surface.

Abstract: The flow rate control device comprises a basal plate block wherein a single input port into which a fluid flows, a single output port from which the fluid flows out, two inflow channels whose proximal ends are connected to the input port and two outflow channels whose terminal ends are connected to the output port are formed, and two flow rate control units arranged on the basal plate block, and one of the flow rate control units is arranged between one of the inflow channels and one of the outflow channels, the other flow rate control unit is arranged between the other inflow channel and the other outflow channel, and each of the flow rate control units is configured to be capable of operating independently.

Abstract: A gas supply system is provided. The system includes a plurality of component gas supply pipes, a plurality of flow rate control mechanisms for controlling flow rates of the component gases flowing in the component gas supply pipes, and a material gas supply pipe connected with downstream ends of the component gas supply pipes, and connected with one of the gas supply ports at a downstream. The flow rate control mechanism includes flow rate control valves, individual pressure sensors, and fluid resistance elements provided to the component gas supply pipes in this order from upstream, respectively, a common pressure sensor, and controllers for calculating the flow rates of the gases flowing in the component gas supply and controlling the flow rate control valves of the corresponding component gas supply pipes so that the calculated component gas flow rate approaches a predetermined gas flow rate, respectively.

Abstract: To provide a fluid control valve that enables the internal volume to be reduced and, for example, the falling response performance to be improved without compromising the accuracy in controlling a pressure, a flow rate, and so on of fluid, a fluid control valve includes a valve seat portion, a valve body capable of making or breaking contact with the valve seat portion, a fluid resistance, and a pair of clamping members that clamps the fluid resistance. The fluid resistance and the pair of clamping members form an in-valve space in which the valve body or at least part of an actuation member that moves the valve body is housed. Fluid passes through the fluid resistance from the downstream-side in-valve space and flows out to the outside.

Abstract: A gas supply system is provided. The system includes a plurality of component gas supply pipes, a plurality of flow rate control mechanisms for controlling flow rates of the component gases flowing in the component gas supply pipes, and a material gas supply pipe connected with downstream ends of the component gas supply pipes, and connected with one of the gas supply ports at a downstream. The flow rate control mechanism includes flow rate control valves, individual pressure sensors, and fluid resistance elements provided to the component gas supply pipes in this order from upstream, respectively, a common pressure sensor, and controllers for calculating the flow rates of the gases flowing in the component gas supply and controlling the flow rate control valves of the corresponding component gas supply pipes so that the calculated component gas flow rate approaches a predetermined gas flow rate, respectively.

Abstract: This invention provides a fluid mechanism that can arrange a plurality of fluid device units and external fluid devices mounted as a set on the fluid device units effectively and compactly. Each of the fluid device units is arranged with respective side surfaces in a longitudinal direction of the fluid device unit tightly attached, and the external fluid devices are arranged side-by-side external to and outside of the fluid device unit in the width direction. Furthermore, as for an introducing path and a discharging path that connect the external fluid devices and the fluid device unit, the introducing path, which is short, is connected to the discharging path, which is long.

Abstract: In order to provide an inspection system of a flow sensor capable of charging an appropriate pressure in a flow path in response to the inspection target flow sensor and significantly reducing a waiting time until a start of an inspection, the inspection system is provided with: fluid resistances respectively provided for a plurality of respective branch flow paths branched in a downstream of an upstream side flow path where the inspection target flow sensor is provided: valves respectively provided for the respective branch flow paths; a fluid sensor having at least a part thereof being provided in an upstream side than each of the fluid resistances for measuring a pressure or a flow rate of the fluid; and a valve opening/closing control part configured to allow a plurality of the valves to be in opened states at the time of inspecting the inspection target flow sensor.

Abstract: This invention provides a fluid mechanism that can arrange a plurality of fluid device units and external fluid devices mounted as a set on the fluid device units effectively and compactly. Each of the fluid device units is arranged with respective side surfaces in a longitudinal direction of the fluid device unit tightly attached, and the external fluid devices are arranged side-by-side external to and outside of the fluid device unit in the width direction. Furthermore, as for an introducing path and a discharging path that connect the external fluid devices and the fluid device unit, the introducing path, which is short, is connected to the discharging path, which is long.