Abstract: In a mass flow controller verifying system, there are provided a verifying gas line arranged in parallel to influent flow gas lines and joined into a post-confluent flow gas line, a reference volume calculating portion adapted to calculate a reference volume determined for a specified piping of a gas piping system, a verifying parameter calculating portion adapted to calculate a verifying parameter based on time series data of a measurement pressure measured by a pressure measurement unit during a control of a flow rate by a mass flow controller to be verified, and a comparing portion adapted to compare a reference parameter set based on the reference volume and the verifying parameter, whereby the verifying system can be introduced into an existing gas piping system used in a semiconductor manufacturing process and so forth at a low cost and is capable of verifying a mass flow controller quickly and accurately.

Abstract: A testing method for testing a flow controller with high accuracy by shortening as much as possible the time required for the test including the wait time. A testing-subject flow controller and a testing-standard flow controller are arranged in that order in series from the upstream side in a flow channel through which a fluid whose flow is to be controlled flows. In a flow-uncontrolled state in which the valve of the testing-subject flow controller is practically in the full-open state, and with the fluid flow controlled to a predetermined flow rate by the testing-standard flow controller, whether the actual flow-rate measurement according to the testing-subject flow controller falls within a predetermined range of actual flow-rate measurements according to the testing-standard flow controller is determined.

Abstract: This invention provides a diagnostic mechanism of a differential pressure type mass flow controller comprising a diagnostic parameter calculating section that obtains a mass flow rate integrated value by means of an integrating calculation from the lowering pressure value of an inlet side sensor among the inlet side sensor and an outlet side sensor arranged in communication respectively at the inlet side and the outlet side of a differential pressure generating resistive element that generates a differential pressure between the inlet and the outlet by changing a flow rate control valve arranged on the channel where a fluid flows from a flow rate control state to a closed state, and further obtains a diagnostic volume value from the obtained mass flow rate integrated value, and a comparing section that compares the diagnostic volume value obtained at the diagnostic parameter calculating section with a specified volume value.

Abstract: A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.

Abstract: A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.

Abstract: A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.

Abstract: In a transfer roller for use in a retention type copying machine, a semiconductive transfer roller is connected through a current limiting resistor having a high resistance value of 100 M.OMEGA. to 1000 M.OMEGA. to a transferring bias voltage source. A pair of auxiliary transfer rollers made of conductive material are arranged on respective sides of the transfer roller. The auxiliary transfer rollers are connected to the transferring bias voltage source through a potentiometer. To the transfer roller is applied a first transferring bias voltage of 600 to 900 volts and to the auxiliary transfer rollers is applied a second transferring bias voltage of 400 to 650 volts. When a resistance of a record paper is decreased due to high humidity, the first transferring bias voltage is automatically decreased and the second transferring bias voltage becomes predominant.

Abstract: A transfer unit includes a pair of guide and field stabilizer members disposed adjacent to a transfer member and along a conveying path for a transfer sheet. A voltage is applied to the stabilizer members which is of the same polarity as a bias voltage applied to the transfer member. It is assured that transfer sheet reliably contacts the pair of field stabilizer members as it passes therebetween.

Abstract: An electrophotographic sensitizing screen having a great number of apertures, wherein at least an insulating layer and a conductive layer are successively formed on a conductive mesh, is disclosed. These apertures are regularly arranged at such an angle as not to produce moire fringes with respect to a light image projected on the screen.

Abstract: An electrophotographic sensitizing screen having a great number of apertures, wherein at least an insulating layer and a conductive layer are successively formed on a conductive mesh, is disclosed. These apertures are regularly arranged at such an angle as not to produce moire fringes with respect to a light image projected on the screen.

Abstract: An electrophotographic sensitizing screen having a great number of apertures, wherein at least an insulating layer and a conductive layer are successively formed on a conductive mesh, is disclosed. These apertures are regularly arranged at such an angle as not to produce moire fringes with respect to a light image projected on the screen.

Abstract: A device for developing a latent image produced on a record sheet by an effect of electrostatic charge by charged particles dispersed in a developer solution is disclosed. The device comprises a tank containing the developer solution and at least one pair of opposed rollers immersed in said developer solution at an intermediate region of said tank, said opposed rollers being passed by the record sheet therebetween and arranged closely adjacent to the record sheet.