Abstract: In order to be able to stably manufacture a fluid resistance device having the same resistance characteristics while preventing fluid such as gas from leaking, a fluid resistance device is provided with a fluid resistance element having a resistance flow passage, a base member and a fixing member for holding the fluid resistance element to be fixed between the base member and the fixing member, and a thin plate-shaped seal member interposed between the fixing member and the fluid resistance element.

Abstract: A fluid controller is disclosed, having a body unit, a fluid controlling valve, pressure sensors, and a casing. The fluid controlling valve is attached to a component part attachment face of the body unit. The pressure sensors are attached to the component part attachment face so that the pressure sensing surfaces thereof are positioned substantially perpendicular to the component part attachment face and substantially parallel to the longitudinal direction. On the lateral walls of the casing, the inner surfaces thereof are arranged to be uneven, so that such sections facing the fluid controlling valve and the pressure sensors are arranged to be thin sections, whereas at least a part of such a section that does not face the fluid controlling valve and the pressure sensors is arranged to be a thick section that is thicker than the thin sections.

Abstract: In order to make it possible to increase a diameter and output thereof, a diaphragm structure is provided that has low repulsiveness, can be largely deformed to increase a stroke even without being applied with a large force from an actuator, and is unlikely to give rise to a defect or fault even when formed thin, and a fluid control valve is provided with the diaphragm structure and the actuator that presses the diaphragm structure, wherein the diaphragm structure is provided with: a protruding part that is formed in a tubular shape and pressed by the actuator; a brim part that spreads from a base end of the protruding part outward with respect to the protruding part; and a support part that is formed on an outer circumference of the brim part and attached to another member, and the brim part is formed in a film shape.

Abstract: The flow rate control device is provided with: a fluid resistor provided on the flow channel; a pressure sensor provided in any one of an upstream side or a downstream side of the fluid resistor; a pressure calculating part configured to calculate a pressure in a side with respect to the fluid resistor where the pressure sensor is not provided; a flow rate calculating part configured to calculate a flow rate based on the measurement pressure value and a calculation pressure value calculated by the pressure calculating part; and an abnormality diagnosing part configured to diagnose an abnormality of the measurement flow rate value based on the measurement flow rate value and a calculation flow rate value.

Abstract: The fluid mixing element in accordance with this invention forms a first internal flow channel whose starting end opens on an end surface of one end part and whose terminal end opens on an end surface of the other end part and a second internal flow channel whose starting end opens on a side peripheral surface of a middle part and whose terminal end opens on an end surface of the other end part. It is possible for the fluid mixing element to securely mix a first fluid flowing in a main flow channel with a second fluid flowing in a sub-flow channel by the use of a pipe with a short length with a simple arrangement.

Abstract: The present invention is mainly intended to provide a sealing member which can be easily manufactured and which is capable of sealing with high accuracy and a method of manufacturing the sealing member, wherein the sealing member is a metallic sealing member that is arranged so as to be interposed between a first surface and a second surface which are facing each other. The sealing member is provided with a first protrusion protruded toward the first surface and a pair of second protrusions protruded toward the second surface, wherein the first protrusion is arranged between the paired second protrusions and distal end portions of the first protrusion and second protrusions are mutually parallel flat surfaces.

Abstract: A flow rate measuring device includes a fluid resistance member through which measurement target fluid flows; an upstream side pressure sensor configured to measure pressure on an upstream side of the fluid resistance member from a change of electrical resistance of a resistive element attached to a pressure sensitive surface onto which the target fluid is introduced, and also to measure a temperature of the pressure sensitive surface from a temperature-dependent change of the electrical resistance of the resistive element; a temperature sensor to measure a temperature of the target fluid flowing through the fluid resistance member; and a flow rate calculation part that calculates a flow rate of the target fluid based on the pressure measured by the upstream side pressure sensor, pressure-flow rate characteristics of the fluid resistance member, the upstream side pressure sensor temperature, and the target fluid temperature in the fluid resistance member.

Abstract: This invention provides a diagnostic mechanism of a differential pressure type mass flow controller comprising a diagnostic parameter calculating section that obtains a mass flow rate integrated value by means of an integrating calculation from the lowering pressure value of an inlet side sensor among the inlet side sensor and an outlet side sensor arranged in communication respectively at the inlet side and the outlet side of a differential pressure generating resistive element that generates a differential pressure between the inlet and the outlet by changing a flow rate control valve arranged on the channel where a fluid flows from a flow rate control state to a closed state, and further obtains a diagnostic volume value from the obtained mass flow rate integrated value, and a comparing section that compares the diagnostic volume value obtained at the diagnostic parameter calculating section with a specified volume value.

Abstract: The present invention is directed a valve element which is intended to improve a sealing property at a time of closing a fluid control valve and to improve stability while maintaining durability for a long time period, wherein the valve element constitutes one of a valve seat surface or a seating surface and the valve element includes a concave portion formed in an opposing surface facing the valve seat surface and a resin coating film which is formed in the concave portion and contacts the valve seat surface.

Abstract: In a mass flow controller verifying system, there are provided a verifying gas line arranged in parallel to influent flow gas lines and joined into a post-confluent flow gas line, a reference volume calculating portion adapted to calculate a reference volume determined for a specified piping of a gas piping system, a verifying parameter calculating portion adapted to calculate a verifying parameter based on time series data of a measurement pressure measured by a pressure measurement unit during a control of a flow rate by a mass flow controller to be verified, and a comparing portion adapted to compare a reference parameter set based on the reference volume and the verifying parameter, whereby the verifying system can be introduced into an existing gas piping system used in a semiconductor manufacturing process and so forth at a low cost and is capable of verifying a mass flow controller quickly and accurately.

Abstract: The flow rate control device comprises a basal plate block wherein a single input port into which a fluid flows, a single output port from which the fluid flows out, two inflow channels whose proximal ends are connected to the input port and two outflow channels whose terminal ends are connected to the output port are formed, and two flow rate control units arranged on the basal plate block, and one of the flow rate control units is arranged between one of the inflow channels and one of the outflow channels, the other flow rate control unit is arranged between the other inflow channel and the other outflow channel, and each of the flow rate control units is configured to be capable of operating independently.

Abstract: A fluid controller is disclosed, having a body unit, a fluid controlling valve, pressure sensors, and a casing. The fluid controlling valve is attached to a component part attachment face of the body unit. The pressure sensors are attached to the component part attachment face so that the pressure sensing surfaces thereof are positioned substantially perpendicular to the component part attachment face and substantially parallel to the longitudinal direction. On the lateral walls of the casing, the inner surfaces thereof are arranged to be uneven, so that such sections facing the fluid controlling valve and the pressure sensors are arranged to be thin sections, whereas at least a part of such a section that does not face the fluid controlling valve and the pressure sensors is arranged to be a thick section that is thicker than the thin sections.

Abstract: In a mass flow controller verifying system, there are provided a verifying gas line arranged in parallel to influent flow gas lines and joined into a post-confluent flow gas line, a reference volume calculating portion adapted to calculate a reference volume determined for a specified piping of a gas piping system, a verifying parameter calculating portion adapted to calculate a verifying parameter based on time series data of a measurement pressure measured by a pressure measurement unit during a control of a flow rate by a mass flow controller to be verified, and a comparing portion adapted to compare a reference parameter set based on the reference volume and the verifying parameter, whereby the verifying system can be introduced into an existing gas piping system used in a semiconductor manufacturing process and so forth at a low cost and is capable of verifying a mass flow controller quickly and accurately.

Abstract: A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.

Abstract: A gas supply system is provided. The system includes a plurality of component gas supply pipes, a plurality of flow rate control mechanisms for controlling flow rates of the component gases flowing in the component gas supply pipes, and a material gas supply pipe connected with downstream ends of the component gas supply pipes, and connected with one of the gas supply ports at a downstream. The flow rate control mechanism includes flow rate control valves, individual pressure sensors, and fluid resistance elements provided to the component gas supply pipes in this order from upstream, respectively, a common pressure sensor, and controllers for calculating the flow rates of the gases flowing in the component gas supply and controlling the flow rate control valves of the corresponding component gas supply pipes so that the calculated component gas flow rate approaches a predetermined gas flow rate, respectively.

Abstract: A flow rate measuring device includes a fluid resistance member through which measurement target fluid flows; an upstream side pressure sensor configured to measure pressure on an upstream side of the fluid resistance member from a change of electrical resistance of a resistive element attached to a pressure sensitive surface onto which the target fluid is introduced, and also to measure a temperature of the pressure sensitive surface from a temperature-dependent change of the electrical resistance of the resistive element; a temperature sensor to measure a temperature of the target fluid flowing through the fluid resistance member; and a flow rate calculation part that calculates a flow rate of the target fluid based on the pressure measured by the upstream side pressure sensor, pressure-flow rate characteristics of the fluid resistance member, the upstream side pressure sensor temperature, and the target fluid temperature in the fluid resistance member.

Abstract: The flow rate ratio controlling apparatus comprises differential pressure flow rate controllers (MFC1, MFC2) of the same type and a control processing mechanism (C) for giving commands to the flow rate controllers (MFC1, MFC2) to control them. The flow rate controllers (MFC1, MFC2) are provided with respective branched flow channels (BL1, BL2) branched from a terminal of a main flow channel (ML) in opposite directions. The flow rate controller (MFC1) arranged in the branched flow channel (BL1) is operated so that a detected pressure achieves a predetermined target pressure; a target flow rate for the flow rate controller (MFC2) arranged in the branched flow channel (BL2) is determined from the total measured flow rate and the predetermined flow rate ratio, and the flow rate controller (MFC2) is operated so as to achieve the target flow rate.

Abstract: This invention is to improve procedures of maintenance of a fluid measurement system having a fluid measurement device and a control device. The fluid measurement system has a fluid measurement device and a control device to control the fluid measurement device, and the fluid measurement device comprises a fluid sensor and a related data store part configured to store fluid calculation related data for calculation of one or more fluid parameters with measurement data obtained by the fluid sensor, and the control device obtains the fluid calculation related data from the related data store part and calculates the one or more fluid parameters with the measurement data of the fluid sensor and the fluid calculation related data.

Abstract: A testing method for testing a flow controller with high accuracy by shortening as much as possible the time required for the test including the wait time. A testing-subject flow controller and a testing-standard flow controller are arranged in that order in series from the upstream side in a flow channel through which a fluid whose flow is to be controlled flows. In a flow-uncontrolled state in which the valve of the testing-subject flow controller is practically in the full-open state, and with the fluid flow controlled to a predetermined flow rate by the testing-standard flow controller, whether the actual flow-rate measurement according to the testing-subject flow controller falls within a predetermined range of actual flow-rate measurements according to the testing-standard flow controller is determined.

Abstract: An object of this invention is to provide a flow rate ratio controlling apparatus that does not need devices of a plurality of types and that enables reduction of the number of types of components and the manufacturing cost. The flow rate ratio controlling apparatus comprises differential pressure flow rate controllers (MFC1, MFC2) of the same type and a control processing mechanism (C) for giving commands to the flow rate controllers (MFC1, MFC2) to control them. The flow rate controllers (MFC1, MFC2) are provided with respective branched flow channels (BL1, BL2) branched from a terminal of a main flow channel (ML) in opposite directions.