Patents by Inventor Tak H. Ning
Tak H. Ning has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11916130Abstract: A lateral bipolar junction transistor including an emitter region, base region and collector region laterally orientated over a type IV semiconductor substrate, each of the emitter region, the base region and the collector region being composed of a type III-V semiconductor material. A buried oxide layer is present between the type IV semiconductor substrate and the emitter region, the base region and the collector region. The buried oxide layer having a pedestal aligned with the base region.Type: GrantFiled: February 26, 2021Date of Patent: February 27, 2024Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Kuen-Ting Shiu, Tak H. Ning, Jeng-Bang Yau, Cheng-Wei Cheng, Ko-Tao Lee
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Patent number: 11901449Abstract: A method of forming an electrical device that includes forming a multilayered fin composed of a first source/drain layer for a first transistor, a first channel layer for the first transistor, a common source/drain layer for the first transistor and a second transistor, a second channel layer for the second transistor and a second source/drain layer for the second transistor. A common spacer is formed on the common source/drain layer that separates a first opening to the first channel layer from a second opening to the second channel layer. Gate structures are then formed in the first and second openings.Type: GrantFiled: December 28, 2020Date of Patent: February 13, 2024Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Alexander Reznicek, Bahman Hekmatshoartabari, Tak H. Ning
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Patent number: 11682718Abstract: A vertical bipolar junction transistor may include an intrinsic base epitaxially grown on a first emitter or collector, the intrinsic base being compositionally graded, a second collector or emitter formed on the intrinsic base, and an extrinsic base formed all-around the intrinsic base. The extrinsic base may be isolated from the first emitter or collector by a first spacer. The extrinsic base may be isolated from the second collector or emitter by a second spacer. The extrinsic base may have a larger bandgap than the intrinsic base. The intrinsic base may be doped with a p-type dopant, and the first emitter or collector, and the second collector or emitter may be doped with an n-type dopant. The first emitter or collector, the intrinsic base, and the second collector or emitter may be made of a III-V semiconductor material.Type: GrantFiled: April 15, 2021Date of Patent: June 20, 2023Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Alexander Reznicek, Bahman Hekmatshoartabari, Tak H. Ning, Liying Jiang
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Publication number: 20230123050Abstract: A Darlington pair sensor is disclosed. The Darlington pair sensor has an amplifying/horizontal bipolar junction transistor (BJT) and a sensing/vertical BJT and can be used as a biosensor. The amplifying bipolar junction transistor (BJT) is horizontally disposed on a substrate. The amplifying BJT has a horizontal emitter, a horizontal base, a horizontal collector, and a common extrinsic base/collector. The common extrinsic base/collector is an extrinsic base for the amplifying BJT. The sensing BJT has a vertical orientation with respect to the amplifying BJT. The sensing BJT has a vertical emitter, a vertical base, an extrinsic vertical base, and the common extrinsic base/collector (in common with the amplifying BJT). The common extrinsic base/collector acts as the sensing BJT collector. The extrinsic vertical base is separated into a left extrinsic vertical base and a right extrinsic vertical base giving the sensing BJT has two separated (dual) bases, a sensing base and a control base.Type: ApplicationFiled: October 18, 2021Publication date: April 20, 2023Inventors: Bahman Hekmatshoartabari, Alexander Reznicek, Tak H. Ning
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Patent number: 11575028Abstract: A vertically stacked set of an n-type vertical transport field effect transistor (n-type VT FET) and a p-type vertical transport field effect transistor (p-type VT FET) is provided. The vertically stacked set of the n-type VT FET and the p-type VT FET includes a first bottom source/drain layer on a substrate, that has a first conductivity type, a lower channel pillar on the first bottom source/drain layer, and a first top source/drain on the lower channel pillar, that has the first conductivity type. The vertically stacked set of the n-type VT FET and the p-type VT FET further includes a second bottom source/drain on the first top source/drain, that has a second conductivity type different from the first conductivity type, an upper channel pillar on the second bottom source/drain, and a second top source/drain on the upper channel pillar, that has the second conductivity type.Type: GrantFiled: September 17, 2021Date of Patent: February 7, 2023Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Karthik Balakrishnan, Jeng-Bang Yau, Alexander Reznicek, Tak H. Ning
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Patent number: 11489045Abstract: Semiconductor channel layers vertically aligned and stacked, separated by a work function metal and a gate dielectric partially surrounding and physically separating the work function metal from each, a first portion of the work function metal directly contacts a vertical sidewall of each layer. A first set and a second set of semiconductor channel layers vertically aligned and stacked, separated by a work function metal, a gate dielectric partially surrounding and physically separating the work function metal from each, a first portion of the work function metal between the first set and the second set directly contacts a sidewall of each layer. Forming an initial stack of alternating layers of a sacrificial and a semiconductor channel vertically aligned and stacked, forming a vertical opening creating a first stack of nanosheet layers and a second stack of nanosheet layers, and exposing vertical side surfaces of the alternating layers of both stacks.Type: GrantFiled: March 30, 2021Date of Patent: November 1, 2022Assignee: International Business Machines CorporationInventors: Alexander Reznicek, Ruilong Xie, Bahman Hekmatshoartabari, Tak H. Ning
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Publication number: 20220336645Abstract: A vertical bipolar junction transistor may include an intrinsic base epitaxially grown on a first emitter or collector, the intrinsic base being compositionally graded, a second collector or emitter formed on the intrinsic base, and an extrinsic base formed all-around the intrinsic base. The extrinsic base may be isolated from the first emitter or collector by a first spacer. The extrinsic base may be isolated from the second collector or emitter by a second spacer. The extrinsic base may have a larger bandgap than the intrinsic base. The intrinsic base may be doped with a p-type dopant, and the first emitter or collector, and the second collector or emitter may be doped with an n-type dopant. The first emitter or collector, the intrinsic base, and the second collector or emitter may be made of a III-V semiconductor material.Type: ApplicationFiled: April 15, 2021Publication date: October 20, 2022Inventors: Alexander Reznicek, Bahman Hekmatshoartabari, Tak H. Ning, Liying Jiang
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Publication number: 20220320282Abstract: Semiconductor channel layers vertically aligned and stacked, separated by a work function metal and a gate dielectric partially surrounding and physically separating the work function metal from each, a first portion of the work function metal directly contacts a vertical sidewall of each layer. A first set and a second set of semiconductor channel layers vertically aligned and stacked, separated by a work function metal, a gate dielectric partially surrounding and physically separating the work function metal from each, a first portion of the work function metal between the first set and the second set directly contacts a sidewall of each layer. Forming an initial stack of alternating layers of a sacrificial and a semiconductor channel vertically aligned and stacked, forming a vertical opening creating a first stack of nanosheet layers and a second stack of nanosheet layers, and exposing vertical side surfaces of the alternating layers of both stacks.Type: ApplicationFiled: March 30, 2021Publication date: October 6, 2022Inventors: Alexander Reznicek, Ruilong Xie, Bahman Hekmatshoartabari, Tak H. Ning
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Patent number: 11444185Abstract: A bipolar junction transistor (LBJT) device that includes a base region of a first III-V semiconductor material having A first band gap; and emitter and collector regions present on opposing sides of the base region, wherein the emitter and collector regions are comprised of a second III-V semiconductor material having a wider band gap than the first III-V semiconductor material. A dielectric region is present underlying the base region, emitter region and the collect region. The dielectric region has an inverted apex geometry. The sidewalls of dielectric region that extend to the apex of the inverted apex geometry are present on facets of a supporting substrate III-V semiconductor material having a {110} crystalline orientation.Type: GrantFiled: October 23, 2019Date of Patent: September 13, 2022Assignee: International Business Machines CorporationInventors: Pouya Hashemi, Mahmoud Khojasteh, Tak H. Ning, Alexander Reznicek
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Patent number: 11437502Abstract: A bipolar junction transistor (LBJT) device that includes a base region of a first III-V semiconductor material having A first band gap; and emitter and collector regions present on opposing sides of the base region, wherein the emitter and collector regions are comprised of a second III-V semiconductor material having a wider band gap than the first III-V semiconductor material. A dielectric region is present underlying the base region, emitter region and the collect region. The dielectric region has an inverted apex geometry. The sidewalls of dielectric region that extend to the apex of the inverted apex geometry are present on facets of a supporting substrate III-V semiconductor material having a {110} crystalline orientation.Type: GrantFiled: October 23, 2019Date of Patent: September 6, 2022Assignee: International Business Machines CorporationInventors: Pouya Hashemi, Mahmoud Khojasteh, Tak H. Ning, Alexander Reznicek
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Patent number: 11428699Abstract: A sensor including a surface plasmon resonance detector with a reservoir for containing a liquid sample. The sensor further includes a sensing metallic film positioned within the reservoir so that at least a majority of a surface of the sensing metallic film is to be in contact with the liquid sample being housed within the reservoir. The sensory also includes a semiconductor device having a contact in electrical communication with the sensing metal containing film that is positioned within the reservoir. The semiconductor device measures the net charges of molecules within the liquid sample within a Debye length from the sensing metallic film.Type: GrantFiled: April 30, 2019Date of Patent: August 30, 2022Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Bobby E. Feller, Jianqiang Lin, Robert D. Miller, Ramachandran Muralidhar, Tak H. Ning, Sufi Zafar
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Patent number: 11422139Abstract: A sensor including a surface plasmon resonance detector with a reservoir for containing a liquid sample. The sensor further includes a sensing metallic film positioned within the reservoir so that at least a majority of a surface of the sensing metallic film is to be in contact with the liquid sample being housed within the reservoir. The sensory also includes a semiconductor device having a contact in electrical communication with the sensing metal containing film that is positioned within the reservoir. The semiconductor device measures the net charges of molecules within the liquid sample within a Debye length from the sensing metallic film.Type: GrantFiled: April 30, 2019Date of Patent: August 23, 2022Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Bobby E. Feller, Jianqiang Lin, Robert D. Miller, Ramachandran Muralidhar, Tak H. Ning, Sufi Zafar
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Patent number: 11355553Abstract: A semiconductor structure may include a vertical field effect transistor, the vertical field effect transistor may include a top source drain, a bottom source drain, and an epitaxial channel and a resistive random access memory below the vertical field effect transistor. The resistive random access memory may include an epitaxial oxide layer, a top electrode, and a bottom electrode. The top electrode, which may function as the bottom source drain of the vertical field effect transistor, may be in direct contact with the epitaxial channel of the vertical field effect transistor. The epitaxial oxide layer may separate the top electrode from the bottom electrode. The top source drain may be arranged between a dielectric material and the epitaxial channel. The dielectric material may be in direct contact with a top surface of the epitaxial channel. The epitaxial oxide layer may be composed of a rare earth oxide.Type: GrantFiled: December 5, 2019Date of Patent: June 7, 2022Assignee: International Business Machines CorporationInventors: Alexander Reznicek, Bahman Hekmatshoartabari, Choonghyun Lee, Tak H. Ning
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Patent number: 11329142Abstract: A method for manufacturing a semiconductor device includes forming a fin on a semiconductor substrate, and forming a bottom source/drain region adjacent a base of the fin. In the method, a dielectric layer, a work function metal layer and a first gate metal layer are sequentially deposited on the bottom source/drain region and around the fin. The dielectric layer, the work function metal layer and the first gate metal layer form a gate structure. The method also includes removing the dielectric layer, the work function metal layer and the first gate metal layer from an end portion of the fin, and depositing a second gate metal layer around the end portion of the fin in place of the removed dielectric layer, the removed work function metal layer and the removed first gate metal layer. The second gate metal layer contacts the end portion of the fin.Type: GrantFiled: December 23, 2020Date of Patent: May 10, 2022Assignee: International Business Machines CorporationInventors: Alexander Reznicek, Tak H. Ning, Bahman Hekmatshoartabari, Jeng-Bang Yau
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Publication number: 20220005936Abstract: A vertically stacked set of an n-type vertical transport field effect transistor (n-type VT FET) and a p-type vertical transport field effect transistor (p-type VT FET) is provided. The vertically stacked set of the n-type VT FET and the p-type VT FET includes a first bottom source/drain layer on a substrate, that has a first conductivity type, a lower channel pillar on the first bottom source/drain layer, and a first top source/drain on the lower channel pillar, that has the first conductivity type. The vertically stacked set of the n-type VT FET and the p-type VT FET further includes a second bottom source/drain on the first top source/drain, that has a second conductivity type different from the first conductivity type, an upper channel pillar on the second bottom source/drain, and a second top source/drain on the upper channel pillar, that has the second conductivity type.Type: ApplicationFiled: September 17, 2021Publication date: January 6, 2022Inventors: Karthik Balakrishnan, Jeng-Bang Yau, Alexander Reznicek, Tak H. Ning
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Patent number: 11177372Abstract: A vertically stacked set of an n-type vertical transport field effect transistor (n-type VT FET) and a p-type vertical transport field effect transistor (p-type VT FET) is provided. The vertically stacked set of the n-type VT FET and the p-type VT FET includes a first bottom source/drain layer on a substrate, that has a first conductivity type, a lower channel pillar on the first bottom source/drain layer, and a first top source/drain on the lower channel pillar, that has the first conductivity type. The vertically stacked set of the n-type VT FET and the p-type VT FET further includes a second bottom source/drain on the first top source/drain, that has a second conductivity type different from the first conductivity type, an upper channel pillar on the second bottom source/drain, and a second top source/drain on the upper channel pillar, that has the second conductivity type.Type: GrantFiled: November 1, 2019Date of Patent: November 16, 2021Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Karthik Balakrishnan, Jeng-Bang Yau, Alexander Reznicek, Tak H. Ning
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Patent number: 11158729Abstract: A vertically stacked set of an n-type vertical transport field effect transistor (n-type VT FET) and a p-type vertical transport field effect transistor (p-type VT FET) is provided. The vertically stacked set of the n-type VT FET and the p-type VT FET includes a first bottom source/drain layer on a substrate, that has a first conductivity type, a lower channel pillar on the first bottom source/drain layer, and a first top source/drain on the lower channel pillar, that has the first conductivity type. The vertically stacked set of the n-type VT FET and the p-type VT FET further includes a second bottom source/drain on the first top source/drain, that has a second conductivity type different from the first conductivity type, an upper channel pillar on the second bottom source/drain, and a second top source/drain on the upper channel pillar, that has the second conductivity type.Type: GrantFiled: November 1, 2019Date of Patent: October 26, 2021Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Karthik Balakrishnan, Jeng-Bang Yau, Alexander Reznicek, Tak H. Ning
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Patent number: 11152478Abstract: A method of fabricating the vertical field effect transistor includes forming a dielectric layer on a metal semiconductor alloy layer that is present on a substrate of a semiconductor material. The dielectric layer is bonded to a supporting substrate. The substrate of the semiconductor material is cleaved, wherein a remaining portion of the semiconductor material provides a semiconductor surface layer in direct contact with the metal semiconductor alloy layer. A vertical fin type field effect transistor (FinFET) is formed atop the stack of the semiconductor surface layer, the metal semiconductor alloy layer, the dielectric layer and the supporting substrate, wherein the semiconductor surface layer provides at least one of a source region or a drain region of the FinFET and the metal semiconductor alloy provides a contact to the source region or the drain region of the FinFET.Type: GrantFiled: December 24, 2018Date of Patent: October 19, 2021Assignee: Samsung Electronics Co., Ltd.Inventors: Kangguo Cheng, Tak H. Ning, Alexander Reznicek
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Patent number: 11145668Abstract: Semiconductor device, memory arrays, and methods of forming a memory cell include or utilize one or more memory cells. The memory cell(s) include a first nanosheet transistor connected to a first terminal, a second nanosheet transistor located on top of the first nanosheet transistor and connected in parallel to the first nanosheet transistor and connected to a second terminal, where the first and second nanosheet transistors share a common floating gate and a common output terminal, and an access transistor connected in series to the common output terminal and a low voltage terminal, the access transistor configured to trigger hot-carrier injection to the common floating gate to change a voltage of the common floating gate.Type: GrantFiled: April 4, 2019Date of Patent: October 12, 2021Assignee: International Business Machines CorporationInventors: Alexander Reznicek, Karthik Balakrishnan, Jeng-Bang Yau, Tak H. Ning
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Publication number: 20210249521Abstract: A lateral bipolar junction transistor including an emitter region, base region and collector region laterally orientated over a type IV semiconductor substrate, each of the emitter region, the base region and the collector region being composed of a type III-V semiconductor material. A buried oxide layer is present between the type IV semiconductor substrate and the emitter region, the base region and the collector region. The buried oxide layer having a pedestal aligned with the base region.Type: ApplicationFiled: February 26, 2021Publication date: August 12, 2021Inventors: Kuen-Ting Shiu, Tak H. Ning, Jeng-Bang Yau, Cheng-Wei Cheng, Ko-Tao Lee