Patents by Inventor Tak H. Ning

Tak H. Ning has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190157433
    Abstract: A bipolar junction transistor (LBJT) device that includes a base region of a first III-V semiconductor material having A first band gap; and emitter and collector regions present on opposing sides of the base region, wherein the emitter and collector regions are comprised of a second III-V semiconductor material having a wider band gap than the first III-V semiconductor material. A dielectric region is present underlying the base region, emitter region and the collect region. The dielectric region has an inverted apex geometry. The sidewalls of dielectric region that extend to the apex of the inverted apex geometry are present on facets of a supporting substrate III-V semiconductor material having a {110} crystalline orientation.
    Type: Application
    Filed: November 21, 2017
    Publication date: May 23, 2019
    Inventors: Pouya Hashemi, Mahmoud Khojasteh, Tak H. Ning, Alexander Reznicek
  • Publication number: 20190157416
    Abstract: A vertical, single column compound semiconductor bipolar junction transistor device includes an all-around extrinsic base. Homojunction and heterojunction devices are formed using III-V compound semiconductor materials with appropriate bandgaps. Fabrication of the transistor device includes epitaxially growing a III-V compound semiconductor base region on a heavily doped III-V compound semiconductor bottom layer. A polycrystalline emitter/collector layer and the all-around extrinsic base are grown on the base region.
    Type: Application
    Filed: November 20, 2017
    Publication date: May 23, 2019
    Inventors: Karthik Balakrishnan, Pouya Hashemi, Tak H. Ning, Alexander Reznicek
  • Publication number: 20190157417
    Abstract: A vertical, single column compound semiconductor bipolar junction transistor device includes an all-around extrinsic base. Homojunction and heterojunction devices are formed using III-V compound semiconductor materials with appropriate bandgaps. Fabrication of the transistor device includes epitaxially growing a III-V compound semiconductor base region on a heavily doped III-V compound semiconductor bottom layer. A polycrystalline emitter/collector layer and the all-around extrinsic base are grown on the base region.
    Type: Application
    Filed: June 16, 2018
    Publication date: May 23, 2019
    Inventors: Karthik Balakrishnan, Pouya Hashemi, Tak H. Ning, Alexander Reznicek
  • Publication number: 20190157434
    Abstract: A vertical, single column compound semiconductor bipolar junction transistor device includes an all-around extrinsic base. Aspect ratio trapping is employed during fabrication of the transistor device on a silicon substrate. Homojunction and heterojunction devices are formed using III-V materials with appropriate bandgaps. The emitter of the device may be electrically connected by a lateral buried metal contact.
    Type: Application
    Filed: November 20, 2017
    Publication date: May 23, 2019
    Inventors: Karthik Balakrishnan, Pouya Hashemi, Tak H. Ning, Alexander Reznicek
  • Publication number: 20190148509
    Abstract: A method of fabricating the vertical field effect transistor includes forming a dielectric layer on a metal semiconductor alloy layer that is present on a substrate of a semiconductor material. The dielectric layer is bonded to a supporting substrate. The substrate of the semiconductor material is cleaved, wherein a remaining portion of the semiconductor material provides a semiconductor surface layer in direct contact with the metal semiconductor alloy layer. A vertical fin type field effect transistor (FinFET) is formed atop the stack of the semiconductor surface layer, the metal semiconductor alloy layer, the dielectric layer and the supporting substrate, wherein the semiconductor surface layer provides at least one of a source region or a drain region of the FinFET and the metal semiconductor alloy provides a contact to the source region or the drain region of the FinFET.
    Type: Application
    Filed: December 24, 2018
    Publication date: May 16, 2019
    Inventors: Kangguo Cheng, Tak H. Ning, Alexander Reznicek
  • Publication number: 20190140109
    Abstract: A semiconductor device that is composed of an epitaxial semiconductor material stacked structure that includes a first epitaxial channel for a first junction field effect transistor (JFET) atop a supporting substrate and a second epitaxial channel region for a second junction field effect transistor (JFET). A commonly electrically contacted source/drain region for each of the first JFET and the second JFET is positioned at an interface of the first and second epitaxial channel region. A channel length for each of the first and second is substantially perpendicular to an upper surface of the supporting substrate. An epitaxial semiconductor gate conductor in direct contact with each of said first epitaxial channel region and the second epitaxial channel region.
    Type: Application
    Filed: January 8, 2019
    Publication date: May 9, 2019
    Inventors: Karthik Balakrishnan, Bahman Hekmatshoartabari, Tak H. Ning, Alexander Reznicek
  • Patent number: 10283516
    Abstract: Semiconductor device, memory arrays, and methods of forming a memory cell include or utilize one or more memory cells. The memory cell(s) include a first nanosheet transistor located on top of a substrate and connected to a first terminal, a second nanosheet transistor located on top of the first nanosheet transistor and connected in parallel to the first nanosheet transistor and connected to a second terminal, where the first and second nanosheet transistors share a common floating gate and a common output terminal, and an access transistor connected in series to the common output terminal and a low voltage terminal, the access transistor configured to trigger hot-carrier injection to the common floating gate to change a voltage of the common floating gate.
    Type: Grant
    Filed: June 27, 2018
    Date of Patent: May 7, 2019
    Assignee: International Business Machines Corporation
    Inventors: Alexander Reznicek, Karthik Balakrishnan, Jeng-Bang Yau, Tak H. Ning
  • Patent number: 10256302
    Abstract: A vertical transistor has a first air-gap spacer between a gate and a bottom source/drain region, and a second air-gap spacer between the gate and the contact to the bottom source/drain region. A dielectric layer disposed between the gate and the contact to the top source/drain decreases parasitic capacitance and inhibits electrical shorting.
    Type: Grant
    Filed: June 19, 2017
    Date of Patent: April 9, 2019
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Tak H. Ning
  • Patent number: 10243065
    Abstract: A SOI lateral heterojunction Si-emitter SiGe-base bipolar transistor is provided that contains an intrinsic base region that includes a small band gap region (i.e., a silicon germanium alloy base of a first conductivity type) and a large band gap region (i.e., a silicon region of the first conductivity type) A silicon emitter of a second conductivity type that is opposite the first conductivity type is formed on the large-band gap side of the intrinsic base region and a silicon collector of the second conductivity type is formed on the small-band gap side of the intrinsic base region.
    Type: Grant
    Filed: February 23, 2018
    Date of Patent: March 26, 2019
    Assignee: International Business Machines Corporation
    Inventors: Pouya Hashemi, Tak H. Ning, Alexander Reznicek
  • Patent number: 10236366
    Abstract: After forming a trench extending through an insulator layer and an underlying top semiconductor portion that is comprised of a first semiconductor material and a dopant of a first conductivity type to define an emitter and a collector on opposite sides of the trench in the top semiconductor portion, an intrinsic base comprising a second semiconductor material having a bandgap less than a bandgap of the first semiconductor material and a dopant of a second conductivity type opposite the first conductivity type is formed in a lower portion the trench by selective epitaxial growth. The intrinsic base protrudes above the top semiconductor portion and is laterally surrounded by entire top semiconductor portion and a portion of the insulator layer. An extrinsic base is then formed on top of the intrinsic base to fill a remaining volume of the trench by a deposition process.
    Type: Grant
    Filed: December 19, 2017
    Date of Patent: March 19, 2019
    Assignee: International Business Machines Corporation
    Inventors: Jin Cai, Kevin K. Chan, Christopher P. D'Emic, Tak H. Ning, Jeng-Bang Yau
  • Patent number: 10229979
    Abstract: A structure includes a laterally diffused (LD) MOSFET with an n-type drift region disposed on a surface of a substrate and a p-type body region contained in the drift region. The structure further includes an n-type source region contained in the p-type body region; an n-type drain region contained in the n-type drift region; a gate electrode disposed on a gate dielectric overlying a portion of the p-type body region and the n-type drift region and an electrically conductive field shield member disposed within the n-type drift region at least partially beneath the p-type body region and generally parallel to the gate electrode. The electrically conductive buried field shield member is contained within and surrounded by a layer of buried field shield oxide and is common to both a first LD MOSFET and a second LD MOSFET that are connected in parallel. Methods to fabricate the structure are also disclosed.
    Type: Grant
    Filed: October 25, 2017
    Date of Patent: March 12, 2019
    Assignee: International Business Machines Corporation
    Inventor: Tak H. Ning
  • Patent number: 10230005
    Abstract: A semiconductor device that is composed of an epitaxial semiconductor material stacked structure that includes a first epitaxial channel for a first junction field effect transistor (JFET) atop a supporting substrate and a second epitaxial channel region for a second junction field effect transistor (JFET). A commonly electrically contacted source/drain region for each of the first JFET and the second JFET is positioned at an interface of the first and second epitaxial channel region. A channel length for each of the first and second is substantially perpendicular to an upper surface of the supporting substrate. An epitaxial semiconductor gate conductor in direct contact with each of said first epitaxial channel region and the second epitaxial channel region.
    Type: Grant
    Filed: June 8, 2017
    Date of Patent: March 12, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Karthik Balakrishnan, Bahman Hekmatshoartabari, Tak H. Ning, Alexander Reznicek
  • Publication number: 20190043945
    Abstract: A lateral bipolar junction transistor (LBJT) device that may include a dielectric stack including a pedestal of a base region passivating dielectric and a nucleation dielectric layer; and a base region composed of a germanium containing material or a type III-V semiconductor material in contact with the pedestal of the base region passivating dielectric. An emitter region and collector region may be present on opposing sides of the base region contacting a sidewall of the pedestal of the base region passivating dielectric and an upper surface of the nucleation dielectric layer.
    Type: Application
    Filed: October 2, 2018
    Publication date: February 7, 2019
    Inventors: Kevin K. Chan, Pouya Hashemi, Tak H. Ning, Alexander Reznicek
  • Patent number: 10192864
    Abstract: A method of forming a semiconductor structure includes depositing a high-k dielectric layer within a first recess located between sidewall spacers of a first CMOS device and within a second recess located between sidewall spacers of a second CMOS device. A dummy titanium nitride layer is deposited on the high-k dielectric layer. Next, the high-k dielectric layer and the dummy titanium nitride layer are removed from the second recess in the second CMOS device. A silicon cap layer is deposited within the first recess and the second recess, the silicon cap layer is located above the high-k dielectric layer and dummy titanium nitride layer in the first CMOS device. Subsequently, dopants are implanted into the silicon cap layer located in the second recess of the second CMOS device.
    Type: Grant
    Filed: September 14, 2016
    Date of Patent: January 29, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Jin Cai, Effendi Leobandung, Tak H. Ning
  • Patent number: 10170568
    Abstract: A structure includes a laterally diffused (LD) MOSFET with an n-type drift region disposed on a surface of a substrate and a p-type body region contained in the drift region. The structure further includes an n-type source region contained in the p-type body region; an n-type drain region contained in the n-type drift region; a gate electrode disposed on a gate dielectric overlying a portion of the p-type body region and the n-type drift region and an electrically conductive field shield member disposed within the n-type drift region at least partially beneath the p-type body region and generally parallel to the gate electrode. The electrically conductive buried field shield member is contained within and surrounded by a layer of buried field shield oxide and is common to both a first LD MOSFET and a second LD MOSFET that are connected in parallel. Methods to fabricate the structure are also disclosed.
    Type: Grant
    Filed: October 25, 2017
    Date of Patent: January 1, 2019
    Assignee: International Business Machines Corporation
    Inventor: Tak H. Ning
  • Patent number: 10170463
    Abstract: Methods of forming integrated chips include forming a gate stack around a first semiconductor fin and a second semiconductor fin. The gate stack around the second semiconductor fin is etched away. An extrinsic base is formed around the second semiconductor fin in a region exposed by etching away the gate stack.
    Type: Grant
    Filed: May 16, 2017
    Date of Patent: January 1, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Brent A. Anderson, Kangguo Cheng, Terence B. Hook, Tak H. Ning
  • Patent number: 10170575
    Abstract: A method of fabricating the vertical field effect transistor includes forming a dielectric layer on a metal semiconductor alloy layer that is present on a substrate of a semiconductor material. The dielectric layer is bonded to a supporting substrate. The substrate of the semiconductor material is cleaved, wherein a remaining portion of the semiconductor material provides a semiconductor surface layer in direct contact with the metal semiconductor alloy layer. A vertical fin type field effect transistor (FinFET) is formed atop the stack of the semiconductor surface layer, the metal semiconductor alloy layer, the dielectric layer and the supporting substrate, wherein the semiconductor surface layer provides at least one of a source region or a drain region of the FinFET and the metal semiconductor alloy provides a contact to the source region or the drain region of the FinFET.
    Type: Grant
    Filed: May 17, 2016
    Date of Patent: January 1, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo Cheng, Tak H. Ning, Alexander Reznicek
  • Patent number: 10170567
    Abstract: A structure includes a laterally diffused (LD) MOSFET with an n-type drift region disposed on a surface of a substrate and a p-type body region contained in the drift region. The structure further includes an n-type source region contained in the p-type body region; an n-type drain region contained in the n-type drift region; a gate electrode disposed on a gate dielectric overlying a portion of the p-type body region and the n-type drift region and an electrically conductive field shield member disposed within the n-type drift region at least partially beneath the p-type body region and generally parallel to the gate electrode. The electrically conductive buried field shield member is contained within and surrounded by a layer of buried field shield oxide and is common to both a first LD MOSFET and a second LD MOSFET that are connected in parallel. Methods to fabricate the structure are also disclosed.
    Type: Grant
    Filed: October 25, 2017
    Date of Patent: January 1, 2019
    Assignee: International Business Machines Corporation
    Inventor: Tak H. Ning
  • Publication number: 20180358476
    Abstract: A semiconductor device that is composed of an epitaxial semiconductor material stacked structure that includes a first epitaxial channel for a first junction field effect transistor (JFET) atop a supporting substrate and a second epitaxial channel region for a second junction field effect transistor (JFET). A commonly electrically contacted source/drain region for each of the first JFET and the second JFET is positioned at an interface of the first and second epitaxial channel region. A channel length for each of the first and second is substantially perpendicular to an upper surface of the supporting substrate. An epitaxial semiconductor gate conductor in direct contact with each of said first epitaxial channel region and the second epitaxial channel region.
    Type: Application
    Filed: June 8, 2017
    Publication date: December 13, 2018
    Inventors: Karthik Balakrishnan, Bahman Hekmatshoartabari, Tak H. Ning, Alexander Reznicek
  • Patent number: 10141405
    Abstract: A lateral bipolar junction transistor (LBJT) device that may include a dielectric stack including a pedestal of a base region passivating dielectric and a nucleation dielectric layer; and a base region composed of a germanium containing material or a type III-V semiconductor material in contact with the pedestal of the base region passivating dielectric. An emitter region and collector region may be present on opposing sides of the base region contacting a sidewall of the pedestal of the base region passivating dielectric and an upper surface of the nucleation dielectric layer.
    Type: Grant
    Filed: May 9, 2017
    Date of Patent: November 27, 2018
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Pouya Hashemi, Tak H. Ning, Alexander Reznicek