Abstract: Film formation conditions are determined in accordance with relationships among a film formation temperature Ts (° C.), a plasma potential Vs (V) in the plasma at the time of the film formation, and characteristics of the formed film. For a piezoelectric film containing at least one kind of Pb-containing perovskite type oxide, the film formation conditions should preferably be determined within a range such that Formulas (1) and (2) shown below are satisfied, or within a range such that Formulas (3) and (4) shown below are satisfied: 400?Ts(° C.)?475 ??(1) 20?Vs(V)?50 ??(2) 475?Ts(° C.

Abstract: A method of forming a pattern of an inorganic material film, which method is more versatile, easy, and practical. The method includes the steps of: (a) forming a sacrifice layer having a pattern on a substrate by employing a material having a different thermal expansion coefficient from that of an inorganic material of the inorganic material film; (b) forming an inorganic material layer on the substrate, on which the sacrifice layer has been formed, at a predetermined deposition temperature by employing the inorganic material; (c) lowering a temperature of at least the inorganic material layer to produce cracks in the inorganic material layer formed on the sacrifice layer; and (d) removing the sacrifice layer and the inorganic material layer formed thereon.

Abstract: A perovskite oxide is represented by a general formula ABO3 A represents at least one kind of metal element forming an A site, B represents at least one kind of metal element forming a B site. The B site includes at least one kind of metal element B1 selected from an element group consisting of the IV group elements and at least one kind of metal element B2 selected from an element group consisting of the V and VI group elements, and at least a part of the metal element B2 is of the 0 to +4 valence.

Abstract: On a transparent glass substrate (10), a first phase difference compensating layer (12) and a second phase difference compensating layer (14), which are formed of inorganic material, are provided. The first phase difference compensating layer (12) includes a stacked two kinds of deposition films sufficiently thinner than reference wavelength, one has high refraction index, and the other has low refraction index, to be a negative C-plate. The second phase difference compensating layer (14) includes at least two oblique deposition films, to be a positive O-plate. The first phase difference compensating layer (12) compensates a phase difference from liquid crystal molecules in a vertical orientation in a liquid crystal layer, and the second phase difference compensating layer (14) compensates a phase difference from liquid crystal molecules in a hybrid orientation in the liquid crystal layer.

Abstract: A process for producing a piezoelectric device constituted by a first electrode, at least one second electrode, and a piezoelectric film sandwiched between the first electrode and the at least one second electrode so that an electric field can be applied to the piezoelectric film. First, a seed layer of a material containing at least one element is formed on a substrate, and then the first electrode is formed on the seed layer. Next, the at least one element is diffused through the first electrode so that the at least one element precipitates on a surface of the first electrode on the opposite side to the seed layer, and then the piezoelectric film is formed on the first electrode.

Abstract: A birefringence element is formed by at least one layer of inorganic dielectric film formed on a light transmissive base material by oblique vapor deposition. The at least one layer of inorganic dielectric film has a film structure constituted by a great number of columnar structures that extend in a direction inclined with respect to the surface of the light transmissive base material and a great number of apertures, which are formed between the columnar structures and extend substantially in the same direction as the columnar structures. The mean cross sectional area of the apertures of at least the topmost layer of the at least one layer of inorganic dielectric film is within a range of 10 to 7500 nm2.

Abstract: An inorganic film base plate is produced with a process comprising the steps of: preparing a surface recess-protrusion base plate, which is provided with a recess-protrusion pattern on a surface, and forming an inorganic film along a surface shape of the surface recess-protrusion base plate, the inorganic film containing a plurality of pillar-shaped structure bodies, each of which extends in a direction nonparallel with the base plate surface of the surface recess-protrusion base plate. Force of physical action may then be exerted upon the thus formed inorganic film in order to separate an on-protrusion film region of the inorganic film and an adjacent on-recess film region of the inorganic film from each other.

Abstract: In a step (A), a selectively removable resist layer or a selectively removable sacrifice layer is formed in a predetermined pattern in a protrusion non-forming region on a base plate. In a step (B), a pillar-shaped structure film is formed on a side of the base plate, on which side the resist layer or the sacrifice layer has been formed in the predetermined pattern. The pillar-shaped structure film contains a plurality of pillar-shaped bodies, each of which extends in a direction nonparallel with a base plate surface of the base plate. In a step (C), the resist layer or the sacrifice layer, and a region of the pillar-shaped structure film, which region is located on the resist layer or the sacrifice layer, are removed by use of a lift-off technique. At least one protruding region, which contains the pillar-shaped bodies, is thus formed.

Abstract: The liquid ejection head has a liquid ejection device which ejects liquid and is partially formed of a directionally solidified silicon substrate.

Abstract: The functional structural element includes: a substrate member which has a surface made of directionally solidified silicon; and a functional structural body which is made of a functional material and is formed on the surface of the substrate member.

Abstract: A display device includes a first substrate, a first electrode provided on the first substrate, an insulation layer provided on the first electrode, a second electrode provided on the insulation layer, a cavity partition surrounding the second electrode with an interval therebetween, a second substrate provided on the cavity partition, and a droplet of a coloring liquid sealed in the cavity partition. In the display device, a third electrode for promoting restoration of the droplet of a coloring liquid to a spherical shape is provided. In the display device, the insulation layer includes a insulator film and a low surface energy film; the insulator film assumes a specific inductive capacity of three or more and a thickness of 10 nm to 100 nm; and the low surface energy film assumes a thickness of 100 nm or less.

Abstract: A phase difference plate which comprises one sheet of polymer film containing a compound having a rod-shaped molecular structure and exhibiting a maximum absorption wavelength (?max) of less than 250 nm in an ultraviolet spectrum of its solution and which exhibits a retardation value as measured at a wavelength of 450 nm (Re450) of 60 to 135 nm and a retardation value as measured at a wavelength of 590 nm (Re590) of 100 to 170 nm, where the relationship: Re590-Re450>2 nm is satisfied. The phase difference plate functions as a ?/4 plate.

Abstract: A method of manufacturing a ceramic film by using an AD method, by which a film having good crystallinity can be fabricated without using a high-temperature process. The method of manufacturing a ceramic film by using an aerosol including the steps of: (a) dispersing ceramic raw material powder containing an amorphous component in a gas to generate an aerosol; and (b) supplying the aerosol generated at step (a) into a chamber in which a substrate is placed and depositing the ceramic raw material powder on the substrate to form a ceramic film.

Abstract: A phase difference plate which comprises one sheet of polymer film containing a compound having a rod-shaped molecular structure and exhibiting a maximum absorption wavelength (?max) of less than 250 nm in an ultraviolet spectrum of its solution and which exhibits a retardation value as measured at a wavelength of 450 nm (Re450) of 60 to 135 nm and a retardation value as measured at a wave length of 590 nm (Re590) of 100 to 170 nm, where the relationship: Re590?Re450?2 nm is satisfied. The phase difference plate functions as a ?/4 plate.

Abstract: A transparent base plate supports a first compensating layer, which is adapted to compensate for a phase difference due to liquid crystal molecules having undergone normal orientation in a liquid crystal layer of a TN liquid crystal display device, and second compensating layers, which are adapted to compensate for the phase difference due to the liquid crystal molecules having undergone hybrid orientation in the liquid crystal layer. Each of the second compensating layers is constituted of one of oblique incidence vacuum deposited films, which are formed on opposite surfaces of the base plate with oblique incidence vacuum evaporation of an inorganic material. An azimuthal angle and/or a polar angle of a direction of vacuum evaporation with respect to a plane of vacuum evaporation is set to be different between the second compensating layers.

Abstract: A display device comprises a plurality of light modulating elements being arranged in an array. In the display device, an image is displayed by driving the light modulating elements and each of the light modulating elements has a pair of substrates which are spaced apart from each other; a fluid which is enclosed in a sealed space formed by a gap between the substrates; and a driving section which deforms the fluid in the sealed space to control an area of the fluid in the sealed space, the area extending in a face of at least one of the substrates, thereby adjusting an amount of transmitted light or reflected light.

Abstract: A display device is made up of a transparent porous layer, a colored layer, and a penetrant-moving part. The transparent porous layer is formed from a transparent material and has pores into which a penetrant is penetrable. The colored layer is stacked on one surface of the transparent porous layer. The penetrant-moving part is used for performing penetration of the penetrant into the transparent porous layer or discharge of the penetrant from the transparent porous layer. After the penetration of the penetrant into the transparent porous layer performed by the penetrant-moving part, the transparent porous layer becomes transparent and therefore the colored layer is displayed through the transparent porous layer. After the discharge of the penetrant from the transparent porous layer performed by the penetrant-moving part, the transparent porous layer becomes opaque and therefore the transparent porous layer is displayed.

Abstract: A display device includes a porous body impregnated with electroendosmosis liquid, a transparent plate which is opposed to the porous body with a space intervening therebetween and is provided on its side facing the porous body with a light diffusive reflection surface and on the other side opposite to the one side with a light transmission surface, and an electric field forming system which forms an electric field acting on the electroendosmosis liquid and controls whether the electroendosmosis liquid is brought into contact with the light diffusive reflection surface by changing the electric field to selectively move the electroendosmosis liquid toward the porous body or the space.

Abstract: A display device includes a first substrate, a first electrode provided on the first substrate, an insulation layer provided on the first electrode, a second electrode provided on the insulation layer, a cavity partition surrounding the second electrode with an interval therebetween, a second substrate provided on the cavity partition, and a droplet of a coloring liquid sealed in the cavity partition. In the display device, a third electrode for promoting restoration of the droplet of a coloring liquid to a spherical shape is provided. In the display device, the insulation layer includes a insulator film and a low surface energy film; the insulator film assumes a specific inductive capacity of three or more and a thickness of 10 nm to 100 nm; and the low surface energy film assumes a thickness of 100 nm or less.

Abstract: A display device comprises a plurality of light modulating elements being arranged in an array. In the display device, an image is displayed by driving the light modulating elements and each of the light modulating elements has a pair of substrates which are spaced apart from each other; a fluid which is enclosed in a sealed space formed by a gap between the substrates; and a driving section which deforms the fluid in the sealed space to control an area of the fluid in the sealed space, the area extending in a face of at least one of the substrates, thereby adjusting an amount of transmitted light or reflected light.