Patents by Inventor Takashi Mochizuki

Takashi Mochizuki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11069512
    Abstract: A film forming apparatus, for forming a film on a target substrate using a processing gas excited by plasma, includes: a processing chamber for accommodating the substrate; a mounting table for mounting thereon the substrate in the processing chamber; a gas injection member provided to face the substrate mounted on the mounting table and configured to inject the processing gas toward the target substrate on the mounting table; and a plasma generation unit for exciting the processing gas by generating plasma between the gas injection member and the mounting table. The gas injection member has a gas injection surface facing the mounting table. Gas injection holes are formed in the gas injection surface. A gas injection hole forming region, on the gas injection surface, where the gas injection holes are formed is smaller than a region on the gas injection surface which corresponds to the target substrate.
    Type: Grant
    Filed: August 8, 2017
    Date of Patent: July 20, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Shinya Okabe, Takashi Mochizuki, Hideaki Yamasaki, Nagayasu Hiramatsu, Kazuki Dempoh
  • Patent number: 10998204
    Abstract: There is provided a method of processing a substrate by a substrate processing apparatus including a substrate mounting table having a refrigerant passage and a heater, and a chiller. The method includes adjusting a temperature of the substrate mounting table to a first temperature to process the substrate; and adjusting the temperature of the substrate mounting table to a second temperature higher than the first temperature to process the substrate. The temperature of the substrate mounting table becomes the second temperature by allowing the refrigerant at a first flow rate to flow from the chiller to the refrigerant passage and operating the heater. The temperature of the substrate mounting table becomes the first temperature by allowing the refrigerant at a second flow rate larger than the first flow rate to flow from the chiller to the refrigerant passage and operating the heater, or stopping an operation of the heater.
    Type: Grant
    Filed: May 15, 2019
    Date of Patent: May 4, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Takashi Mochizuki, Toshiaki Fujisato
  • Publication number: 20210119008
    Abstract: A semiconductor device has: a semiconductor substrate; a drift layer of a first conductivity type; a well region of a second conductivity type; a high-concentration region of the second conductivity type, a source region of the first conductivity type; an insulating film provided on the drift layer; a first contact metal film in contact with the source region and the high-concentration region through a first opening provided in the insulating film; and a second contact metal film formed on a surface of the first contact metal film and contacting the high-concentration region through a second opening provided in the first contact metal film; a source electrode film formed on a surface of a contact metal layer including the first contact metal film and the second contact metal film. The first contact metal film includes titanium nitride, and the second contact metal film includes titanium.
    Type: Application
    Filed: April 11, 2018
    Publication date: April 22, 2021
    Applicant: SHINDENGEN ELECTRIC MANUFACTURING CO., LTD.
    Inventors: Teppei TAKAHASHI, Tetsuto INOUE, Akihiko SUGAI, Takashi MOCHIZUKI, Shunichi NAKAMURA
  • Publication number: 20210005493
    Abstract: When performing processing on a substrate in a plasma-free atmosphere, the substrate is reliably attracted to perform processing with high uniformity in the plane of the substrate. An apparatus includes a DC power source and a processing gas supply part. The DC power source has a positive electrode connected to one of an electrode of an electrostatic chuck and a conductive member, and a negative electrode connected to the other of the electrode and the conductive member, and attracts the substrate to a dielectric layer of the electrostatic chuck by electrostatic attraction force generated by applying voltage between the conductive member located at a processing position and the electrode in a state in which plasma is not formed inside a processing container. The processing gas supply part performs processing by supplying a processing gas to the substrate in a state in which the substrate is attracted to the dielectric layer.
    Type: Application
    Filed: October 12, 2018
    Publication date: January 7, 2021
    Inventors: Toshiaki FUJISATO, Tadahiro ISHIZAKA, Takashi MOCHIZUKI, Daisuke TORIYA
  • Publication number: 20200361270
    Abstract: This lift axle device comprises: a first air spring which corresponds to a first axle; a second air spring which corresponds to a second axle that reciprocates between a down position and lift position; an air bellows; a pneumatic circuit which has a solenoid valve; and a control circuit. The control circuit controls the supply of electric power to the solenoid valve. If the pressure transitions to less than a first pressure, the second axle is placed in the lift position. If the pressure transitions to at least a second pressure, the second axle is placed in the down position. If the pressure transitions to at least the first pressure and less than the second pressure, the second axle is caused to maintain the position thereof.
    Type: Application
    Filed: August 21, 2018
    Publication date: November 19, 2020
    Inventors: Takashi MOCHIZUKI, Hiroyuki YOZA
  • Publication number: 20200165723
    Abstract: A substrate holder according to one embodiment of the present disclosure comprises a stage made of a dielectric material and configured to support a substrate; an attraction electrode provided in the stage and configured to electrostatically attract the substrate; and a heater configured to heat the stage. By applying a DC voltage to the attraction electrode, the substrate is electrostatically attached to a surface of the stage by a Johnsen-Rahbek force. The stage comprises an annular close contact area with which the substrate comes into close contact at a position corresponding to an outer periphery of the substrate on the surface of the stage; and a groove provided in an annular shape in a portion outside the close contact area, and a conductive deposition film formed by the raw material gas is accumulated in the groove.
    Type: Application
    Filed: November 27, 2019
    Publication date: May 28, 2020
    Inventors: Toshiaki FUJISATO, Takashi MOCHIZUKI, Daisuke TORIYA, Kouki SUZUKI, Hwajun NOH
  • Publication number: 20190355597
    Abstract: There is provided a method of processing a substrate by a substrate processing apparatus including a substrate mounting table having a refrigerant passage and a heater, and a chiller. The method includes adjusting a temperature of the substrate mounting table to a first temperature to process the substrate; and adjusting the temperature of the substrate mounting table to a second temperature higher than the first temperature to process the substrate. The temperature of the substrate mounting table becomes the second temperature by allowing the refrigerant at a first flow rate to flow from the chiller to the refrigerant passage and operating the heater. The temperature of the substrate mounting table becomes the first temperature by allowing the refrigerant at a second flow rate larger than the first flow rate to flow from the chiller to the refrigerant passage and operating the heater, or stopping an operation of the heater.
    Type: Application
    Filed: May 15, 2019
    Publication date: November 21, 2019
    Inventors: Takashi MOCHIZUKI, Toshiaki FUJISATO
  • Patent number: 10471420
    Abstract: The present invention provides a cation exchange resin, and a cation exchange membrane and an electrolyte membrane for a fuel cell using the same. The cation exchange resin comprises a divalent hydrophobic unit; and a divalent hydrophilic unit having divalent hydrophilic groups which are repeated via carbon-carbon bond. The divalent hydrophilic groups being composed of one aromatic ring, or being composed of a plurality of aromatic rings which are bonded to each other via a divalent hydrocarbon group, a divalent silicon-containing group, a divalent nitrogen-containing group, a divalent phosphorus-containing group, a divalent oxygen-containing group, a divalent sulfur-containing group, or carbon-carbon bond, and at least one of the aromatic rings having a cation exchange group; wherein the hydrophobic unit and the hydrophilic unit are bonded to each other via carbon-carbon bond.
    Type: Grant
    Filed: June 29, 2016
    Date of Patent: November 12, 2019
    Assignees: UNIVERSITY OF YAMANASHI, TAKAHATA PRECISION CO., LTD.
    Inventors: Kenji Miyatake, Makoto Uchida, Jyunpei Miyake, Takashi Mochizuki, Hideaki Ono, Manai Shimada, Naoki Yokota, Natsumi Yoshimura
  • Publication number: 20190301947
    Abstract: There is provided a thermocouple-fixing jig for fixing a thermocouple to a linear heater, the thermocouple-fixing jig comprising a first member and a second member configured to hold the linear heater therebetween, wherein the second member comprises a first holding portion and a second holding portion that hold a temperature detection part of the thermocouple.
    Type: Application
    Filed: April 1, 2019
    Publication date: October 3, 2019
    Inventors: Hideaki YAMASAKI, Takashi MOCHIZUKI, Takeshi ITATANI
  • Patent number: 10378782
    Abstract: An outdoor unit (100, 110), comprising a housing (1, 20) having fans (2) provided thereon and a compressor (4) and heat exchanger (3-1, 3-2, 23-1, 23-2) disposed on a base (10, 210) thereof; a left-right pair of side covers (8, 28, 9, 29) each being bent and having two surfaces, one surface covering a portion of a side of housing (1, 20), and the other surface covering a portion of the front of the housing (1, 20); a controller housing (7) fixed to the upper section of the surface of at least one side cover (8, 28, 9, 29), of said left-right pair of said covers (8, 28, 9, 29), that covers a portion of the front of the housing (1, 20), said controller housing (7) being fixed at a height allowing the compressor (4) to be moved into and out of the housing unobstructed.
    Type: Grant
    Filed: September 9, 2016
    Date of Patent: August 13, 2019
    Assignee: Hitachi-Johnson Controls Air Conditioning, Inc.
    Inventors: Takumi Kamiaka, Masayoshi Murofushi, Atsuhiko Fukasawa, Shuntaro Inoue, Takashi Mochizuki
  • Publication number: 20180245805
    Abstract: An outdoor unit (100, 110), comprising a housing (1, 20) having fans (2) provided thereon and a compressor (4) and heat exchanger (3-1, 3-2, 23-1, 23-2) disposed on a base (10, 210) thereof; a left-right pair of side covers (8, 28, 9, 29) each being bent and having two surfaces, one surface covering a portion of a side of housing (1, 20), and the other surface covering a portion of the front of the housing (1, 20); a controller housing (7) fixed to the upper section of the surface of at least one side cover (8, 28, 9, 29), of said left-right pair of said covers (8, 28, 9, 29), that covers a portion of the front of the housing (1, 20), said controller housing (7) being fixed at a height allowing the compressor (4) to be moved into and out of the housing unobstructed.
    Type: Application
    Filed: September 9, 2016
    Publication date: August 30, 2018
    Inventors: Takumi KAMIAKA, Masayoshi MUROFUSHI, Atsuhiko FUKASAWA, Shuntaro INOUE, Takashi MOCHIZUKI
  • Publication number: 20180178210
    Abstract: A cation exchange resin having improved chemical properties and mechanical properties, and a cation exchange membrane and an electrolyte membrane for a fuel cell using the same are provided. A cation exchange resin is used, the cation exchange resin comprising: a divalent hydrophobic unit; and a divalent hydrophilic unit having divalent hydrophilic groups which are repeated via carbon-carbon bond, the divalent hydrophilic groups being composed of one aromatic ring, or being composed of a plurality of aromatic rings which are bonded to each other via a divalent hydrocarbon group, a divalent silicon-containing group, a divalent nitrogen-containing group, a divalent phosphorus-containing group, a divalent oxygen-containing group, a divalent sulfur-containing group, or carbon-carbon bond, at least one of the aromatic rings having a cation exchange group; wherein the hydrophobic unit and the hydrophilic unit are bonded to each other via carbon-carbon bond.
    Type: Application
    Filed: June 29, 2016
    Publication date: June 28, 2018
    Applicants: University of Yamanashi, Takahata Precision Japan Co., Ltd.
    Inventors: Kenji MIYATAKE, Makoto UCHIDA, Jyunpei MIYAKE, Takashi MOCHIZUKI, Hideaki ONO, Manai SHIMADA, Naoki YOKOTA, Natsumi YOSHIMURA
  • Publication number: 20180047541
    Abstract: A film forming apparatus, for forming a film on a target substrate using a processing gas excited by plasma, includes: a processing chamber for accommodating the substrate; a mounting table for mounting thereon the substrate in the processing chamber; a gas injection member provided to face the substrate mounted on the mounting table and configured to inject the processing gas toward the target substrate on the mounting table; and a plasma generation unit for exciting the processing gas by generating plasma between the gas injection member and the mounting table. The gas injection member has a gas injection surface facing the mounting table. Gas injection holes are formed in the gas injection surface. A gas injection hole forming region, on the gas injection surface, where the gas injection holes are formed is smaller than a region on the gas injection surface which corresponds to the target substrate.
    Type: Application
    Filed: August 8, 2017
    Publication date: February 15, 2018
    Inventors: Shinya OKABE, Takashi MOCHIZUKI, Hideaki YAMASAKI, Nagayasu HIRAMATSU, Kazuki DEMPOH
  • Patent number: 9623779
    Abstract: A bed height adjustment system for adjusting height of a bed of a vehicle includes: an air spring supporting the bed; a valve unit connected to an air tank and configured to adjust height of the air spring by supplying and discharging air; a relay provided with a dump-signal line and a return-signal line each connected to the valve unit; a pressure switch configured to be switched between an ON state and an OFF state based on whether air is supplied from the valve unit; and an indicator that becomes illuminated state when powered when the pressure switch is in the ON state and becomes non-illuminated state when the pressure switch is in the OFF state.
    Type: Grant
    Filed: December 19, 2013
    Date of Patent: April 18, 2017
    Assignee: Hino Motors, Ltd.
    Inventor: Takashi Mochizuki
  • Patent number: 9625919
    Abstract: A bed height adjustment system for adjusting height of a bed of a vehicle including an air spring supporting the bed; a valve unit connected to an air tank and configured to adjust height of the air spring by supplying and discharging air; and a vehicle-control ECU provided with a dump-signal line and a return-signal line each connected to the valve unit. The valve unit adjusts the height of the air spring into a dump mode by inputting a signal of the dump-signal line, returns the height of the air spring into a normal mode by inputting a signal of the return-signal line, and maintains the dump mode or the normal mode when the signal is not input.
    Type: Grant
    Filed: December 19, 2013
    Date of Patent: April 18, 2017
    Assignee: Hino Motors, Ltd.
    Inventor: Takashi Mochizuki
  • Publication number: 20160143034
    Abstract: This frequency resource allocation method involves receiving, from each mobile station, channel quality information for each frequency resource and a determination result indicating whether or not data has been correctly received by the whole of the frequency resources allocated to that mobile station; for each mobile station, an allocation index for the allocation of frequency resources is calculated on the basis of the channel quality information and the determination result received from the mobile station, and frequency resources are allocated to each mobile station on the basis of the allocation index. To calculate the allocation index, a correction value based on the determination result is found for each of multiple groups into which the frequency resources allocated to that mobile station are divided, and then the allocation index is calculated on the basis of the correction value for each group and the channel quality information.
    Type: Application
    Filed: January 16, 2014
    Publication date: May 19, 2016
    Applicant: NEC CORPORATION
    Inventor: Takashi MOCHIZUKI
  • Patent number: 9231811
    Abstract: A receiver device is provided with: channel estimation unit which obtains channel estimation values for a frequency domain on the basis of pilot symbols disposed in an OFDM subcarrier; interpolation unit which performs interpolation so that the number of samples of channel estimation values obtained by the channel estimation unit is a power of 2; transformation unit which transforms the channel estimation values interpolated by the interpolation unit into a time domain to obtain a delay profile; and power peak position detection unit which detects a power peak position of the delay profile so as to obtain a propagation delay time. The power peak position detection unit references the signal power of the portion interpolated by the interpolation unit in order to detect a suitable power peak position in the delay profile.
    Type: Grant
    Filed: April 24, 2013
    Date of Patent: January 5, 2016
    Assignee: NEC CORPORATION
    Inventors: Takashi Mochizuki, Masahiro Tsuboshima
  • Publication number: 20150355646
    Abstract: A bed height adjustment system for adjusting height of a bed of a vehicle including an air spring supporting the bed; a valve unit connected to an air tank and configured to adjust height of the air spring by supplying and discharging air; and a vehicle-control ECU provided with a dump-signal line and a return-signal line each connected to the valve unit. The valve unit adjusts the height of the air spring into a dump mode by inputting a signal of the dump-signal line, returns the height of the air spring into a normal mode by inputting a signal of the return-signal line, and maintains the dump mode or the normal mode when the signal is not input.
    Type: Application
    Filed: December 19, 2013
    Publication date: December 10, 2015
    Applicant: Hino Motors, Ltd.
    Inventor: Takashi MOCHIZUKI
  • Publication number: 20150352994
    Abstract: A bed height adjustment system for adjusting height of a bed of a vehicle includes: an air spring supporting the bed; a valve unit connected to an air tank and configured to adjust height of the air spring by supplying and discharging air; a relay provided with a dump-signal line and a return-signal line each connected to the valve unit; a pressure switch configured to be switched between an ON state and an OFF state based on whether air is supplied from the valve unit; and an indicator that becomes illuminated state when powered when the pressure switch is in the ON state and becomes non-illuminated state when the pressure switch is in the OFF state.
    Type: Application
    Filed: December 19, 2013
    Publication date: December 10, 2015
    Applicant: HINO MOTORS, LTD.
    Inventor: Takashi MOCHIZUKI
  • Publication number: 20150215149
    Abstract: A receiver device is provided with: channel estimation unit which obtains channel estimation values for a frequency domain on the basis of pilot symbols disposed in an OFDM subcarrier; interpolation unit which performs interpolation so that the number of samples of channel estimation values obtained by the channel estimation unit is a power of 2; transformation unit which transforms the channel estimation values interpolated by the interpolation unit into a time domain to obtain a delay profile; and power peak position detection unit which detects a power peak position of the delay profile so as to obtain a propagation delay time. The power peak position detection unit references the signal power of the portion interpolated by the interpolation unit in order to detect a suitable power peak position in the delay profile.
    Type: Application
    Filed: April 24, 2013
    Publication date: July 30, 2015
    Applicant: NEC Corporation
    Inventors: Takashi Mochizuki, Masahiro Tsuboshima