Abstract: This invention relates to an electron optical system array having a plurality of electron lenses. The electron optical system array includes a plurality of electrode structures which are arranged along the paths of a plurality of charged-particle beams and have pluralities of apertures on the paths of the plurality of charged-particle beams. At least one of the plurality of electrode structures includes a substrate having a plurality of apertures for transmitting the plurality of charged-particle beams, and a plurality of electrodes extending from the side surfaces of the plurality of apertures to the peripheries of the plurality of apertures. At least the surface of the substrate is insulated.

Abstract: A method for manufacturing ink jet recording heads includes the steps of forming a film of a first inorganic material in the form of ink flow path pattern using a soluble first inorganic material on the substrate having ink-discharge, pressure-generating elements formed thereon, forming a film of a second inorganic material becoming ink flow walls on the film of the first inorganic material using the second inorganic material, forming ink-discharge openings on the film of the second inorganic material above the ink-discharge, pressure-generating elements, and eluting the film of the first inorganic material.

Abstract: A female mold substrate used for the production of a microprobe tip or probe detecting a tunneling current or weak force includes a substrate provided with a recess section and a heat-flowable layer having flowability by heat treatment formed on the substrate and covering the recess. The female mold substrate is made by forming a recess section on the top surface of a substrate and forming a heat-flowable layer on the top surface of the substrate including the recess section. A microprobe tip detecting a tunneling current or weak force is made by forming a tip material layer on the female mold substrate and transferring the tip of material layer onto another substrate.

Abstract: Spinnable balls each having two surfaces with different optical characteristics can be produced by forming a plurality of balls with the same specific gravity on a thermoplastic film, and softening the thermoplastic film by controlling a heating temperature thereof based on the specific gravity of the balls so that the hemispheres of the balls are embedded into the thermoplastic film by their own weight. A layer having different optical characteristics from those of the balls is then formed on the exposed surface of each ball. Finally, the balls provided with the layers are detached from the thermoplastic film.

Abstract: An optical prove for detecting or irradiating evanescent light is manufactured by forming a film having a regulated film thickness on a substrate, then forming a recess from the rear surface of the substrate, and forming a through hole in the film from the side of the recess by etching. The obtained optical probe has a micro-aperture at the tip of the through hole and usually, a plurality of optical probes each having a micro-aperture of uniform profile are formed on a single substrate. In the recess, light-receiving or light-irradiating means may be provided.

Abstract: A microprobe chip for detecting evanescent waves includes a photoconductive material and a substrate for supporting the photoconductive material. The photoconductive material is connected to electrodes formed on the substrate. A method for making a microprobe chip for detecting evanescent waves includes forming a film comprising a photoconductive material on a peeling layer of a first substrate, the film having a shape of the microprobe chip, and transferring the film on the peeling layer onto a junction layer provided on a second substrate. A method for making a probe provided with a microprobe chip for detecting evanescent waves includes forming a film comprising a photoconductive material and having the shape of the microprobe chip on a peeling layer of a first substrate, forming a thin film cantilever on a second substrate, and transferring the film on the peeling layer onto a junction layer formed on the thin film cantilever.

Abstract: A light deflection device comprises a segmental sphere body having a deflection face portion for deflecting and transmitting an incident light beam, and a segmental sphere face portion opposing to the deflecting face portion, a base plate for supporting the segmental sphere body in a turnable manner, and a driving means for turning the segmental sphere body, the refractive index of the segmental sphere body being different from the refractive index of a space or medium brought into contact with the deflection face portion. A light deflection device array coomprises the light deflection devices arranged in a one-dimensional or two-dimensional array.

Abstract: A light deflection device includes a deflection member having a sphere body enclosing a deflection face portion for deflecting a light beam, or a segmental sphere body having the deflection face portion and a segmental sphere face opposing to the deflection face portion. The device also includes a supporting member for supporting the deflection member in a turnable manner, and a driver for turning the deflection member. The driver is provided on the sphere face of the deflection member, and at a position opposing the sphere face or the segmental sphere face of the deflection member to apply a driving force to the sphere face or the segmental face. In one embodiment, a light deflection device array includes the arrangement of light deflection devices in a one-dimensional or two-dimensional array.

Abstract: The invention provides a method of producing a through-hole, a substrate used to produce a through-hole, a substrate having a through-hole, and a device using such a through-hole or a substrate having such a through-hole, which are characterized in that: a through-hole can be produced only by etching a silicon substrate from its back side; the opening length d can be precisely controlled to a desired value regardless of the variations in the silicon wafer thickness, and the orientation flat angle, and also regardless of the type of a silicon crystal orientation-dependent anisotropic etchant employed; high productivity, high production reproducibility, and ease of production can be achieved; a high-liberality can be achieved in the shape of the opening end even if temperature treatment is performed at a high temperature for a long time; and a high-precision through-hole can be produced regardless of the shape of a device formed on the surface of a substrate.

Abstract: A torsion type probe for scanning probe microscopes, especially for atomic force microscopes, includes a supporting block, a torsion beam device arranged on the supporting block, a thin-film plane plate rotatably supported by the torsion beam means, and a tip formed on the thin-film plane plate. The torsion beam device include a piezoresistor, which is preferably formed in the surface or lateral walls of the torsion beam device, to detect torsion of the torsion beam device as the probe scans the surface of a sample.

Abstract: An information processing apparatus is used for recording and/or reproducing information on a recording medium by means of a plurality of probes. The apparatus comprises a substrate carrying thereon a plurality of probes arranged two-dimensionally in a plane, at least three sensors at three different points on the substrate for detecting the distance between the substrate and the recording medium, a switching circuit for selecting a parallel connection or a serial connection for the sensors, and a regulating system for regulating the relative inclination and the distance between the probe plane and the recording medium surface plane according to the output of the sensors connected in series and that of the sensors connected in parallel.

Abstract: In a display device of the type wherein a display state is selected by rotation of polarized colored balls, the colored balls are formed from a paraelectric material, and the charged state of each colored ball is provided by an electret-forming treatment due to charge-injection to a minute colored ball per se of a paraelectric material or a film of a paraelectric material coating a minute ball. As a result, a colored ball having an increased charge can be produced stably from an inexpensive material.

Abstract: In executing indivisible operations to be executed without being interrupted, pseudo-store instructions PST which do not perform data writing are used to perform a check for the presence or absence in a memory of pages necessary for execution of the indivisible operations. In the event of absence of the necessary pages, the necessary pages are pre-stored in the memory. This prevents the generation of page fault interruptions during the execution of an indivisible operation, thereby enabling the indivisible operation to be implemented on a software basis. A disable interrupt instruction is executed prior to the execution of the indivisible operation as required, and data indicating an address of the disable interrupt instruction is preserved in order to return to the disable interrupt instruction.

Abstract: A microstructure comprising a substrate (1), a patterned structure (beam member) (2) suspended over the substrate (1) with an air-space (4) therebetween and supporting structure (3) for suspending the patterned structure (2) over the substrate (1). The microstructure is prepared by using a sacrificial layer (7) which is removed to form the space between the substrate (1) and the patterned structure (2) adhered to the sacrificial layer. In the case of using resin as the material of the sacrificial layer, the sacrificial layer can be removed without causing sticking, and an electrode can be provided on the patterned structure. The microstructure can have application as electrostatic actuator, etc., depending on choice of shape and composition.

Abstract: An air bridge type structure of a bridge shape which joins to a substrate or micro-structure is manufactured by forming an air bridge type structure on a first substrate and transferring the air bridge type structure to a second substrate and/or a micro-structure formed on the second substrate. A mold substrate, comprising a recessed portion provided on the surface of the mold substrate and a peeling layer formed on the recessed portion, is used for formation of the air bridge type structure. A micro-structure can be supported by the air bridge type structure, for example, a probe for detecting tunneling current or micro-force, supported by the air bridge type structure. Accordingly, electrical connection between structures and the substrate or between the structures one to another can be performed, even if there is undercutting underneath the structures.

Abstract: A probe for detecting minute physical behavior comprises a lever member, particularly in the form of a cantilever, formed of a monocrystalline silicon layer and a tip in the form of one-end-supported beam which is bowed and formed upon the lever member. The probe is manufactured by forming a film of a material with low density and high elasticity on the silicon layer of an SOI substrate, then oxidizing part of the silicon layer and removing the oxidized portion to form a tip with the material as a so-called bird's beak, and finally the SOI substrate is worked to form the cantilever shape of the lever member. The probe can be used for an information recording/reproducing device with good traceability even in high speed scanning over a recording medium.

Abstract: There is provided a microstructure comprising a substrate, support members, a lever and an electrode formed on the lever is characterized in that said support members support said substrate and said beam and/or the electrode section with a void interposed therebetween and an electrode is formed on the lower surface of said beam. There are also provided a method of forming such a microstructure and an electrostatic actuator having a beam that is displaced by applying a voltage to the electrodes of the actuator.

Abstract: A process for producing a probe-driving mechanism. A laminate of a first and second insulating layer is placed on a support. Electrode layers and piezoelectric layers are successively laminated on the second insulating layer. Part of the support and second insulating layer is removed to form a cantilever.

Abstract: A probe has a metal tip on a cantilever. A diffused layer made from a metal silicide is formed at an interface between the tip and the cantilever. In the diffused layer, a material for forming the cantilever and a material for forming the tip are diffused.

Abstract: A micro-tip for detecting tunneling current, micro force or magnetic force is manufactured as follows. A recess portion is formed on the surface of a first substrate. A peeling layer are formed on the substrate including the recess of the first substrate. A micro-tip is formed on the peeling layer of the first substrate. A joining layer is formed on a second substrate. The micro-tip on the peeling layer including the recess in the first substrate is transferred onto the joining layer on the second substrate. The peeling layer mainly consists of an oxide or a nitride, of a metal element, a semi-metal element or a semiconductor element.