Abstract: An injection port for injecting a sample, an accumulation portion for accumulating the injected sample having a reagent carrier enclosed, a flow passage portion, having a light receiving element at a measuring position located halfway thereof, for passing a reaction fluid having reacted with the reagent in the accumulation portion therethrough, a micro-pump having a feed action of the sample fluid within the flow passage portion and which is a heat generating element provided near a nozzle downstream of the measuring position of the flow passage portion are formed integrally and intensively as a cartridge by a producing method including a semiconductor fabrication process.

Abstract: A cantilever type displacement element comprises a piezoelectric layer and at least two electrodes for applying a voltage to said piezoelectric layer, at least one of said electrodes being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever.

Abstract: An angular acceleration sensor has a weight member, a resilient member for supporting the weight member from the both sides thereof, the resilient member being disposed on a predetermined rotational axis and supporting the weight member for rotation about the rotational axis, and an opposed member opposed to the weight member, an angular acceleration applied to the weight member being detected from a variation in the spacing between the opposed member and the weight member resulting from the rotation of the weight member

Abstract: A process for forming an etching pattern, which includes selectively irradiating a light to a clean surface of a material to be worked by etching so as to form radicals from a photoradical forming substance in an atmosphere of the substance, forming a modified portion having an etching resistance at a photo-irradiated portion of the surface, and then subjecting an unmodified portion of the surface of the material to be worked to an etching treatment, thereby forming an etching pattern corresponding to a pattern formed by the irradiation.

Abstract: A probe drive mechanism includes a cantilever portion in which a piezoelectric layer is disposed between electrode layers, and a circuit portion which is positioned adjacent to the cantilever portion and drives the cantilever. The cantilever portion and the circuit portion are formed on the same substrate. A protection layer covers the circuit portion and part of the substrate, and the cantilever portion is formed on the protection layer adjacent to the circuit portion.

Abstract: A cantilever type probe comprising a piezoelectric bimorph cantilever containing a piezoelectric material provided between driving electrodes for driving a cantilever, a probe formed thereon and a drawing electrode for a probe provided along the surface where a probe is formed, wherein there is provided a shielding electrode for electrically isolating the probe and the drawing electrode from the driving electrodes.

Abstract: A cantilever type probe comprises a cantilever-shaped displacement element and a tip which displacement element has a first electrode layer, a first piezoelectric material film and a second piezoelectric material film which films are laminated on opposite sides of the first electrode layer, and a second electrode layer and a third electrode layer which layer are laminated on outer surfaces of the piezoelectric material films, and which tip is connected with a leader electrode located at a free end of the surface of the displacement element; wherein in the width direction of the cantilever both ends of the first electrode layer protrude outward more than each end of the second and third electrode layers. A scanning tunneling microscope comprises the cantilever type probe, a driving means for displacing the probe, a stage for specimen so as to approach and locate the specimen to the tip, and a potential applying means for applying a bias voltage between the tip and the specimen.

Abstract: An apparatus for relatively moving a probe facing an information carrier and recording information on and/or reproducing information from the information carrier with the probe provided with a detector for detecting an error in the probe.

Abstract: A micro-displacement element comprises a unimorph cantilever having a piezoelectric thin film, a pair of electrodes between which the piezoelectric thin film is sandwiched, and an elastic thin film. One end of the cantilever is supported by a support, and the other end thereof is provided with a probe. The micro-displacement element can be used particularly as an array of plural elements, for an information processing apparatus in which the element faces to a recording medium such that an information recording pulse voltage or an information reproducing bias voltage can be applied to between the probe and the recording medium.

Abstract: A cantilever unit comprises a cantilever for supporting a probe and a displacement amount detecting means, the displacement amount detecting means being integrated with the cantilever. An information processing apparatus comprises the cantilever unit and optionally an information recording medium stationed in close vicinity to the unit, wherein an information in the medium is reproduced at a signal on the basis of an displacement amount of the cantilever. An atomic force microscope and magnetic force microscope comprise the cantilever unit, respectively.

Abstract: A cantilever type probe comprises a cantilever-shaped displacement element having electrodes for driving which displace two layers of piezoelectric material at the interface and first and second surfaces of the layers, respectively, and each of the electrodes being arranged separately within the same plane, and a tip for information input and output connected to electrodes for drawing out arranged separately from the electrodes for driving at the free end of either one of the first and second surfaces of the element. A scanning tunneling microscopy or an information processing device comprises the cantilever type probe, a driver for driving the displacement element of the cantilever type probe and a bias or pulse voltage applicator for applying a bias or pulse voltage between a sample and the probe.

Abstract: A physical vapor deposition device having a delivery roller for delivering a substrate, a rotatory drum upon which a magnetic recording layer is formed on the substrate and a wind-up roller which winds up said substrate. The device also has a heating source ahead of the rotatory drum and one or more conveying rollers, wherein one of the conveying rollers is an expander roller which is provided between the delivery roller and the rotatory drum. A thin film forming device uses the expander roller and also has a delivery roller, at least one conveying roller and a wind-up roller.

Abstract: A magnetic recording medium is formed by disposing on a substrate a magnetic recording layer of a Co-Cr alloy. The durability and the environmental resistance of the magnetic recording medium are improved by forming protective layers including a layer of cobalt oxide and a layer of fluorine-containing resin disposed thereon, on the magnetic layer.

Abstract: A method for preparing a magnetic recording medium comprises forming a magnetic recording layer on a substrate by the physical vapor deposition method, wherein the incident angle on initiation of film formation of the flux of particles is 60.degree. or more and the incident angle on finishing of film formation is 0.degree. to 45.degree. and said recording layer is a vertically magnetized film.

Abstract: A method for preparing a magnetic recording medium comprises delivering a substrate from a delivery roller, passing the substrate through one or a plurality of conveying rollers and forming a magnetic recording layer on said substrate by the physical vapor deposition method in the course of running along the circumferential surface of a rotatory drum, characterized in that said substrate is heated between the delivery roller and the conveying roller or between a conveying roller and another conveying roller, and the conveying roller through which said substrate passes after heating is made an expander roller.