Abstract: A micro-tip is manufactured by forming a recess portion on a first substrate consisting of monocrystalline silicon for forming a tip. A peeling layer is formed on the recess portion, and contact layer is formed on at least a portion other than the peeling layer on the substrate. A tip material layer is formed on the peeling layer and the contact layer. The tip material layer on the peeling layer is transferred onto a second substrate.

Abstract: An X-ray mask structure is produced by a procedure including the steps of preparing a substrate having a surface provided thereon with an X-ray transmitting film, forming, on the substrate, one of a metal film and a multilayered film, having alkali resistivity, removing a predetermined limited portion of the metal film, bonding the substrate and a reinforcing member through the remaining metal film, by an anodic bonding process wherein the remaining metal film functions as an electrically conductive material in the anodic bonding process, etching the substrate with the remaining metal film functioning as an etching mask, to define an X-ray transmitting portion of the X-ray transmitting film and forming a mask pattern by use of an X-ray absorptive material.

Abstract: A process for anodic bonding, in which Si substrate and glass substrate are contacting each other, a voltage is applied therebetween, and then light is irradiated on a contact portion thereof, whereby the Si substrate and the glass substrate are bonded at a lower temperature than transition temperature of the glass substrate.

Abstract: Anodic bonding of an insulator containing no movable ion and a conductor through the medium of a conductive film and an insulator layer containing a movable ion affords a bonded member of the insulator containing no movable ion and the conductor without use of any adhesive agent. A method for effecting the anodic bonding is also provided.

Abstract: An electrostatic actuator includes a movable plate arranged on a substrate through a gap, a movable electrode arranged on the movable plate, and a fixed electrode arranged on the substrate to oppose the movable electrode. The movable electrode and the fixed electrode are arranged not to overlap at any portion in a direction perpendicular to a surface of the fixed electrode. The movable electrode and the fixed electrode have comb-like shapes.

Abstract: An anode bonding method for bonding a first substrate and a second substrate, both of which have a recessed portion, includes the steps of heating the first and second substrates in a stacked state; and bonding the substrates by applying a voltage between the substrates.

Abstract: A microstructure comprising a substrate (1), a patterned structure (beam member) (2) suspended over the substrate (1) with an air-space (4) therebetween and supporting structure (3) for suspending the patterned structure (2) over the substrate (1).The microstructure is prepared by using a sacrificial layer (7) which is removed to form the space between the substrate (1) and the patterned structure (2) adhered to the sacrificial layer. In the case of using resin as the material of the sacrificial layer, the sacrificial layer can be removed without causing sticking, and an electrode can be provided on the patterned structure.The microstructure can have application as electrostatic actuator etc., depending on choice of shape and composition.

Abstract: A method of manufacturing a cantilever drive mechanism arranged in such a manner that a cantilever portion, in which a piezoelectric layer is disposed between electrode layers, and a circuit portion, which is positioned adjacent to the cantilever portion and which drives the cantilever, are formed on the same substrate. The method includes the steps of first forming the circuit portion and then forming the cantilever portion after the circuit portion has been formed.

Abstract: An information processing system including an operational processing system having a plurality of registers, for executing an operational processing. A storage system having a memory unit, connected to the operational processing system, stores information stored in the registers into an information region in the memory unit. A memory information storing unit stores information on a stored information region within the information region. The stored information region has already stored information. A input unit inputs the information stored in the registers into the memory unit. And a control unit controls the input unit to control inputting the information stored in the registers into the memory unit according to the information on the stored information region of the memory unit.

Abstract: According to this invention, when a program requiring an inseparable operation is to be executed, prior to its program processing, an instruction fetch counter setting instruction is executed by an instruction fetch counter setting unit, and a value indicated by the instruction fetch counter setting instruction, i.e., an instruction count required for the program processing, is set in an instruction fetch counter. The instruction fetch counter is counted down by a count down unit every time an instruction is fetched. When an interrupt is generated, an interrupt control unit refers to the instruction fetch counter. When the reference value is "1" or more, the interrupt is inhibited until the value is set to be "0.

Abstract: A parallel plane holding mechanism is constructed as follows. Beams are provided on the peripheral portion of a flat plate-shaped weight member. A base plate is provided so as to face the weight member. First and second electrodes are provided on both surfaces of the weight member and the base plate to face each other. A voltage is applied between the first electrode and the second electrode so that the distance between the weight member and the base plate is controlled to move the weight member to thereby hold a reference surface of the weight member to be parallel to a predetermined reference surface.

Abstract: A cantilever probe comprising a cantilever displacement element containing a piezoelectric material provided between driving electrodes for causing displacement of the piezoelectric material, a probe for information input and output provided on the free end of the element, a drawing electrode for the probe and, a non-electroconductive thin film provided on at least a portion of an end of the element.

Abstract: A photomask or a light-shielding member has a support capable of transmitting light, a light-shielding pattern which shields the light and a light absorbing member provided corresponding to the light-shielding pattern. In one aspect, the light-shielding pattern and the light absorbing member are provided on the same side of the support. In another aspect, the light-shielding pattern and the light absorbing member are provided with the support sandwiched therebetween.

Abstract: An apparatus for inputting and/or outputting information includes a plurality of probes arranged at positions respectively facing each of the plural blocks which carry information, a device for enabling the plurality of probes to respectively perform tracking independently, and a device for inputting information to and/or outputting information from the information carrier by the use of the aforesaid probes.

Abstract: A micro channel element includes a semiconductor substrate and a channel. The micro channel element is produced as follows. A mask having an opening with a desired pattern is formed on a surface of the semiconductor substrate. The semiconductor substrate on which the mask is formed is dipped in a solution of hydrofluoric acid or a solution mixture of hydrofluoric acid and ethyl alcohol. A cathode is arranged near the surface of the substrate dipped in the solution. An anode is connected to the other surface of the semiconductor substrate. A porosity is imparted to a portion of the surface of the semiconductor substrate which corresponds to the opening of the mask by applying a voltage across the cathode and anode. A high-temperature treatment is performed for the semiconductor substrate removed from the solution to increase the pore size and extend the branches of pores of the porous portion on the surface of the semiconductor substrate, thereby forming the micro channel.

Abstract: According to this invention, when a program requiring an inseparable operation is to be executed, prior to its program processing, an instruction fetch counter setting instruction is executed by an instruction fetch counter setting unit, and a value indicated by the instruction fetch counter setting instruction, i.e., an instruction count required for the program processing, is set in an instruction fetch counter. The instruction fetch counter is counted down by a count down unit every time an instruction is fetched. When an interrupt is generated, an interrupt control unit refers to the instruction fetch counter. When the reference value is "1" or more, the interrupt is inhibited until the value is set to be "0.

Abstract: A microactuator having a piezoelectric material and a drive electrode formed adjacent to the piezoelectric material is manufactured by forming an electroplating electrode on a substrate and providing a photosensitive material layer on the substrate on which the electroplating electrode is formed. The photosensitive material layer is exposed in a desired pattern. The exposed photosensitive material layer is developed to partially remove the exposed photosensitive material layer. A metal with electroplating is filled in a substrate portion from which the photosensitive material layer is removed, so that a drive electrode is formed. A remaining photosensitive material layer is removed. Finally, a piezoelectric material is selectively filled in a substrate portion adjacent to the drive electrode.

Abstract: A process for forming an etching pattern, which includes selectively irradiating a light to a clean surface of a material to be worked by etching so as to form radicals from a photoradical forming substance in an atmosphere of the substance, forming a modified portion having an etching resistance at a photo-irradiated portion of the surface, and then subjecting an unmodified portion of the surface of the material to be worked to an etching treatment, thereby forming an etching pattern corresponding to a pattern formed by the irradiation.

Abstract: A method of manufacturing a cantilever drive mechanism arranged in such a manner that a cantilever portion, in which a piezoelectric layer is disposed between electrode layers, and a circuit portion, which is positioned adjacent to the cantilever portion and which drives the cantilever are formed on the same substrate. The method includes the steps of first forming the circuit portion and then forming the cantilever portion after the circuit portion has been formed.

Abstract: A displacement element including a substrate having electrodes and a cantilever provided on the substrate, wherein the cantilever is formed from a semiconductor material and has at least two electrostatic driving electrodes formed by diffusing an impurity into a semiconductor material.