Patents by Inventor Takeshi Akatsu

Takeshi Akatsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220143613
    Abstract: There is provided a biomolecule collection device, comprising: a fluid chamber having a plurality of inner walls; and a plurality of nanowires disposed on two or more inner walls of the plurality of inner walls of the fluid chamber.
    Type: Application
    Filed: January 29, 2020
    Publication date: May 12, 2022
    Inventors: Ryuichi ONOSE, Takeshi AKATSU
  • Publication number: 20190071720
    Abstract: The present disclosure provides devices, systems and methods for sequencing nucleic acid molecules. A sequence of a nucleic acid molecule may be identified at high accuracy using a chip comprising an array of sensors, wherein each individual sensor comprises at least one nano-gap electrode pair configured to generate electrical signals upon flow of the nucleic acid molecule through or in proximity to at least one nano-gap of the nano-gap electrode pair.
    Type: Application
    Filed: March 27, 2018
    Publication date: March 7, 2019
    Inventors: Eric S. Nordman, Mark Oldham, Takeshi Akatsu
  • Publication number: 20110233733
    Abstract: The invention relates to a release substrate produced from semiconductor materials, and which includes a first substrate release layer having a surface in contact with a connecting layer, and a second substrate release layer having a surface in contact with the connecting layer opposite the first substrate release layer so that the connecting layer is located between the first substrate release layer and second substrate release layer; and a concentrated zone of solid nanoparticles located within the connecting layer to maintain the bonding energy of the reversible connection substantially constant even when the substrate is exposed to heat treatment while also facilitating breaking of the connecting layer by mechanical action.
    Type: Application
    Filed: June 2, 2011
    Publication date: September 29, 2011
    Inventors: Olivier Rayssac, Pierre Rayssac, Gisèle Rayssac, Takeshi Akatsu
  • Patent number: 8012289
    Abstract: The invention relates to a method of fabricating a release substrate produced from semiconductor materials, the method comprising creating a reversible connection between two substrate release layers characterized in that the reversible connection is formed by a connecting layer produced using a first material as the basis, the connecting layer further comprising a nanoparticle concentrating zone of a second material disposed to facilitate release of the substrate, the first and second materials being selected to maintain the bonding energy of the reversible connection substantially constant even when the substrate is exposed to heat treatment.
    Type: Grant
    Filed: February 25, 2009
    Date of Patent: September 6, 2011
    Assignee: S.O.I.Tec Silicon on Insulator Technologies
    Inventors: Olivier Rayssac, Pierre Rayssac, legal representative, Gisèle Rayssac, legal representative, Takeshi Akatsu
  • Patent number: 7776716
    Abstract: A method for fabricating semiconductor on insulator wafers by providing a semiconductor substrate or a substrate that includes an epitaxial semiconductor layer as a source substrate, attaching the source substrate to a handle substrate to form a source handle assembly and detaching the source substrate at a predetermined splitting area provided inside the source substrate and being essentially parallel to its main surface, to remove a layer from the source handle assembly to thereby create the semiconductor on insulator wafer. A diffusion barrier layer, in particular, an oxygen diffusion barrier layer can be provided on the source substrate. In addition the invention relates to the corresponding semiconductor on insulator wafers that are produced by the method.
    Type: Grant
    Filed: May 9, 2007
    Date of Patent: August 17, 2010
    Assignees: S.O.I.Tec Silicon on Insulator Technologies, Commissariat à l'Energie Atomique (CEA)
    Inventors: Chrystel Deguet, Takeshi Akatsu, Hubert Moriceau, Thomas Signamarcheix, Loic Sanchez
  • Publication number: 20100167500
    Abstract: A method for forming a semiconductor structure that includes a thin layer of semiconductor material on a receiver wafer is disclosed. The method includes removing a thickness of material from a donor wafer, which comprises a support substrate and an epitaxial layer, for surface preparation and transferring a portion of the epitaxial layer from the donor wafer to the receiver wafer. The thickness removed during the surface preparation is adapted to enable formation of a new semiconductor structure from the remaining epitaxial portion of the donor wafer.
    Type: Application
    Filed: March 5, 2010
    Publication date: July 1, 2010
    Inventors: Nabil Chhaimi, Eric Guiot, Patrick Reynaud, Bruno Ghyselen, Cécile Aulnette, Bénédite Osternaud, Takeshi Akatsu, Yves-Matthieu Le Vaillant
  • Publication number: 20090325362
    Abstract: A method for forming a semiconductor structure that includes a thin layer of semiconductor material on a receiver wafer is disclosed. The method includes removing a thickness of material from a donor wafer, which comprises a support substrate and an epitaxial layer, for surface preparation and transferring a portion of the epitaxial layer from the donor wafer to the receiver wafer. The thickness removed during the surface preparation is adapted to enable formation of a new semiconductor structure from the remaining epitaxial portion of the donor wafer.
    Type: Application
    Filed: July 15, 2009
    Publication date: December 31, 2009
    Inventors: Nabil Chhaimi, Eric Guiot, Patrick Reynaud, Bruno Ghyselen, Cécile Aulnette, Bénédicte Osternaud, Takeshi Akatsu, Bruce Faure
  • Patent number: 7602046
    Abstract: The invention relates to a recyclable donor wafer that includes a substrate and a formed layer thereon, wherein the formed layer has a thickness sufficient to provide (a) at least two useful layers for detachment therefrom and (b) additional material that can be removed to planarize exposed surfaces of the useful layers prior to detachment from the donor wafer.
    Type: Grant
    Filed: March 7, 2005
    Date of Patent: October 13, 2009
    Assignee: S.O.I.Tec Silicon on Insulator Technologies
    Inventors: Bruno Ghyselen, Cécile Aulnette, Bénédite Osternaud, Takeshi Akatsu, Bruce Faure
  • Publication number: 20090179299
    Abstract: The invention relates to a method of fabricating a release substrate produced from semiconductor materials, the method comprising creating a reversible connection between two substrate release layers characterized in that the reversible connection is formed by a connecting layer produced using a first material as the basis, the connecting layer further comprising a nanoparticle concentrating zone of a second material disposed to facilitate release of the substrate, the first and second materials being selected to maintain the bonding energy of the reversible connection substantially constant even when the substrate is exposed to heat treatment.
    Type: Application
    Filed: February 25, 2009
    Publication date: July 16, 2009
    Inventors: Olivier RAYSSAC, Takeshi Akatsu
  • Patent number: 7544265
    Abstract: The invention relates to a method of fabricating a release substrate produced from semiconductor materials, the method comprising creating a reversible connection between two substrate release layers characterized in that the reversible connection is formed by a connecting layer produced using a first material as the basis, the connecting layer further comprising a nanoparticle concentrating zone of a second material disposed to facilitate release of the substrate, the first and second materials being selected to maintain the bonding energy of the reversible connection substantially constant even when the substrate is exposed to heat treatment.
    Type: Grant
    Filed: July 5, 2006
    Date of Patent: June 9, 2009
    Assignee: S.O.I.Tec Silicon on Insulator Technologies
    Inventors: Pierre Rayssac, legal representative, Gisele Rayssac, legal representative, Takeshi Akatsu, Olivier Rayssac
  • Patent number: 7476930
    Abstract: The invention concerns a field-effect transistor with a drain, a source, a channel in electrical contact with the source and the drain, and at least one gate, so as to apply an electric field to the channel when each gate is polarized, where the channel has a multi-layer structure with at least three layers, and with at least one of the layers of the multi-layer structure having electrical properties that are substantially different from those of another layer of the multi-layer structure, and wherein a single gate or two gates are arranged substantially perpendicular to a reference plane of the channel defined by an interface plane between two layers of the multi-layer structure.
    Type: Grant
    Filed: July 5, 2007
    Date of Patent: January 13, 2009
    Assignee: S.O.I.Tec Silicon on Insulator Technologies
    Inventors: Fréderic Allibert, Takeshi Akatsu, Bruno Ghyselen
  • Patent number: 7449394
    Abstract: Methods for forming a semiconductor structure are described. In an embodiment, the technique includes providing a donor wafer having a first semiconductor layer and a second semiconductor layer on the first layer and having a free surface; coimplanting two different atomic species through the free surface of the second layer to form a zone of weakness zone in the first layer; bonding the free surface of the second layer to a host wafer; and supplying energy to detach at the zone of weakness a semiconductor structure comprising the host wafer, the second layer and a portion of the first layer.
    Type: Grant
    Filed: July 11, 2005
    Date of Patent: November 11, 2008
    Assignee: S.O.I.Tec Silicon on Insulator Technologies
    Inventors: Takeshi Akatsu, Nicolas Daval, Nguyet-Phuong Nguyen, Olivier Rayssac, Konstantin Bourdelle
  • Patent number: 7378729
    Abstract: A donor wafer resulting from a method of recycling the wafer after detaching at least one useful layer. The donor wafer includes a substrate; a buffer structure on the substrate; a protective layer associated with the buffer structure; and a post detachment layer located above the buffer structure and presenting projections or rough portions on its surface. The protective layer prevents removal of the entire buffer structure when the post detachment layer is removed.
    Type: Grant
    Filed: November 23, 2005
    Date of Patent: May 27, 2008
    Assignee: S.O.I.Tec Silicon on Insulator Technologies
    Inventors: Bruno Ghyselen, Cécile Aulnette, Bénédite Osternaud, Yves-Mathieu Le Vaillant, Takeshi Akatsu
  • Patent number: 7375008
    Abstract: The invention relates to a method of re-forming a useful layer on a donor wafer after taking off a useful layer formed of a material chosen from among semiconductor materials. The donor wafer includes in succession a substrate and a taking-off structure, the taking-off structure includes the taken-off useful layer before taking-off. The method includes a removal of material involving a portion of the donor wafer on the side where the useful layer has been taken off. The material is removed by mechanical means so as to preserve a portion of the taking-off structure to form at least one other useful layer which can be taken off after re-forming, without adding additional material to the wafer.
    Type: Grant
    Filed: March 7, 2005
    Date of Patent: May 20, 2008
    Assignee: S.O.I.Tec Silicon on Insulator Technologies
    Inventors: Bruno Ghyselen, Cécile Aulnette, Bénédite Osternaud, Takeshi Akatsu, Bruce Faure
  • Patent number: 7326628
    Abstract: A method for producing a semiconductor structure by conducting controlled co-implanting of at least first and second different atomic species into a donor substrate to create an embrittlement zone which defines a thin layer of donor material to be transferred. Implantation energies are selected so that the first and second species are respectively distributed in the donor wafer according to a repartition profile that presents a spreading zone in which each species is mainly distributed at a maximum concentration peak. The implantation doses and energies of the first and second species are selected such that the second species is implanted deeper in the embrittlement zone than the first species spreading zone. The donor substrate is detached at the embrittlement zone to transfer the thin layer to the support substrate while minimizing blister formation in and surface roughness of the transferred layer.
    Type: Grant
    Filed: July 13, 2005
    Date of Patent: February 5, 2008
    Assignee: S.O.I.Tec Silicon on Insulator Technologies
    Inventors: Nadia Ben Mohamed, Nguyet-Phuong Nguyen, Takeshi Akatsu, Alice Boussagol, Gabriela Suciu
  • Patent number: 7323398
    Abstract: A method of manufacturing a crystalline wafer that includes implanting first atomic species in a donor substrate to form a region of weakness at a first depth therein and configured to facilitate detachment of a first layer of the donor substrate from a remaining portion of the donor substrate. The first layer and remaining portion are disposed on opposite sides of the region of weakness. The method also includes implanting second atomic species in the donor substrate to form a gettering region at a second depth therein that is different than the first depth to reduce or minimize migration of the implanted first atomic species past the gettering region. This reduces or minimizes an increase in roughness of a surface produced on the first layer after detachment thereof from the remaining portion at the region of weakness.
    Type: Grant
    Filed: September 20, 2005
    Date of Patent: January 29, 2008
    Assignee: S.O.I.Tec Silicon on Insulator Technologies
    Inventor: Takeshi Akatsu
  • Publication number: 20070284660
    Abstract: A method for fabricating semiconductor on insulator wafers by providing a semiconductor substrate or a substrate that includes an epitaxial semiconductor layer as a source substrate, attaching the source substrate to a handle substrate to form a source handle assembly and detaching the source substrate at a predetermined splitting area provided inside the source substrate and being essentially parallel to its main surface, to remove a layer from the source handle assembly to thereby create the semiconductor on insulator wafer. A diffusion barrier layer, in particular, an oxygen diffusion barrier layer can be provided on the source substrate. In addition the invention relates to the corresponding semiconductor on insulator wafers that are produced by the method.
    Type: Application
    Filed: May 9, 2007
    Publication date: December 13, 2007
    Inventors: Chrystel Deguet, Takeshi Akatsu, Hubert Moriceau, Thomas Signamarcheix, Loic Sanchez
  • Publication number: 20070257301
    Abstract: The invention concerns a field-effect transistor with a drain, a source, a channel in electrical contact with the source and the drain, and at least one gate, so as to apply an electric field to the channel when each gate is polarised, where the channel has a multi-layer structure with at least three layers, and with at least one of the layers of the multi-layer structure having electrical properties that are substantially different from those of another layer of the multi-layer structure, and wherein a single gate or two gates are arranged substantially perpendicular to a reference plane of the channel defined by an interface plane between two layers of the multi-layer structure.
    Type: Application
    Filed: July 5, 2007
    Publication date: November 8, 2007
    Inventors: Frederic Allibert, Takeshi Akatsu, Bruno Ghyselen
  • Patent number: 7285495
    Abstract: A method for thermally treating a semiconductor layer is described. An embodiment of the technique includes implanting atomic species into a first surface of a donor wafer to form a zone of weakness at a predetermined depth that defines the thickness of a transfer layer, bonding the first surface of the donor wafer to a host wafer, supplying energy to detach the transfer layer from the donor wafer at the zone of weakness, and conducting a recovery operation on the transfer layer. The recovery operation is conducted after detachment but while the layer remains in contact with the donor wafer. The recovery operation includes heat treating the transfer layer for a predetermined duration at a recovery temperature that is lower than a re-adhesion temperature at which the transfer layer would re-adhere to the donor wafer, to improve the crystalline quality and the surface roughness of the transfer layer.
    Type: Grant
    Filed: February 16, 2005
    Date of Patent: October 23, 2007
    Assignee: S.O.I.Tec Silicon on Insulator Technologies
    Inventors: Nicolas Daval, Takeshi Akatsu, Nguyet-Phuong Nguyen
  • Patent number: 7282449
    Abstract: A method for thermally treating a silicon germanium semiconductor layer from a donor wafer is described. An embodiment of the technique includes co-implanting atomic species into a first surface of the donor wafer to form a zone of weakness at a predetermined depth that defines the thickness of a transfer layer, bonding the first surface of the donor wafer to a host wafer, supplying energy to detach the transfer layer from the donor wafer at the zone of weakness, and conducting a recovery operation on the transfer layer. The recovery operation is conducted after detachment but while the layer remains in contact with the donor wafer. The recovery operation includes heat treating the transfer layer for a predetermined duration at a recovery temperature that is lower than a re-adhesion temperature at which the transfer layer would re-adhere to the donor wafer, to improve the crystalline quality and the surface roughness of the transfer layer.
    Type: Grant
    Filed: February 17, 2006
    Date of Patent: October 16, 2007
    Assignee: S.O.I.Tec Silicon on Insulator Technologies
    Inventors: Nicolas Daval, Takeshi Akatsu, Nguyet-Phuong Nguyen