Abstract: There is provided an etching method including: loading a substrate having a recess and an etching target portion existing on an inner surface of the recess into a processing container, the etching target portion being made of SiN or Si; preferentially modifying a surface of the etching target portion at a top portion of the recess by performing an oxygen-containing plasma process on the substrate inside the processing container; and subsequently, dry-etching the etching target portion in an isotropic manner.

Abstract: The present invention provides a bicontinuous microemulsion composition, including: (A) polyglycerin group-containing organo(poly)siloxane shown by the general formula (1): wherein R1 represents an alkyl group or a phenyl group, R2 represents a group having a polyglycerin structure shown by the formula (2) or the formula (3), R3 represents R1 or R2, “a” is 0 to 6, “b” is 0 to 4, a+b is 0 to 10, and at least one of R3 is R2 when “b” is 0: wherein R4 represents an alkylene group or an aralkylene group, “c” is 0 to 10, and “d” is 2 to 6; (B) silicone oil having a viscosity of 20 mm2/s or less at 25° C., volatile hydrocarbon oil, or ester oil; and (C) water. This provide a transparent bicontinuous microemulsion composition in which anionic or cationic surfactant, and water-soluble monovalent or polyvalent alcohol are unnecessary; and a cosmetic with excellent pleasantness of use.

Abstract: Provided is a musical instrument including a vibratable body; and a vibrator. The vibrator includes a vibrating body that vibrates in a predetermined direction; and a coupling member coupling the vibrating body and the vibratable body and that transmits vibration of the vibrating body to the vibratable body. The coupling member includes a shaft extending between the vibrating body and the vibratable body; a first wire rod coupling one end portion of the shaft and the vibrating body; and a second wire rod coupling another end portion of the shaft and the vibratable body. A resonance frequency of each of the shaft, the first wire rod, and the second wire rod is at least 10 kHz.

Abstract: A rotary operating device includes an operation part that is rotatable according to an operation by an operator, a rotation angle sensor that detects a rotation angle of the operation part, a torque applier that applies application torque to the operation part along a rotation direction of the operation part, a frictional force applier that applies a frictional force to the operation part, and a processor programmed to change the application torque and the frictional force according to the rotation angle.

Abstract: A vibrator includes: a movable portion connected to a vibratable member; a driver configured to drive the movable portion to cause vibration of the movable portion to vibrate the vibratable member; and a driver supporter secured to a support member and configured to support the driver such that the driver is pivotable about an axis extending in a direction intersecting a movable direction of the movable portion.

Abstract: A production method for an organopolysiloxane emulsion composition, wherein (I) an emulsion composition is prepared from an organopolysiloxane (A) that is represented by formula (1) and that has an octamethylcyclotetrasiloxane content of 1,000 ppm or less HO(R12SiO)nH??(1), (wherein R1 is H or a monovalent hydrocarbon group and n is a number that makes the viscosity, at 25° C., of the organopolysiloxane 200 mm2/s or more but less than 2,000 mm2/s), a surfactant (B) that is represented by formula (2) and that has an alkyl naphthalene skeleton R2a—C10H(7-a)—SO3M??(2), (wherein R2 is an alkyl group, M is H+, an alkali metal ion, an alkali earth metal ion, NH4+, or a tertiary NH4+, and m is 1-3), and water (C-1), and wherein (II) water (C-2) is added as necessary and then emulsion polymerization is performed in the presence of an acid catalyst (D).

Abstract: A non-rinse-off hair protective cosmetic including a polyoxyalkylene-modified organopolysiloxane compound which has: a terminal to which a siloxane chain having a polyoxyalkylene group shown by a formula (1) is bonded; 50 or more structural units shown by a formula (2) per molecule; a viscosity of 50,000 mPa·s or more at 25° C.; and an HLB of 1 to 7, where each R1 represents an alkyl group or a phenyl group; A represents a monovalent group having a polyoxyalkylene group shown by a formula (3) or (4). Thus, a non-rinse-off hair protective cosmetic excellent in hair protection performance, resistant to water, but easily removable with a shampoo or the like after use.

Abstract: This organic group-modified organosilicon resin is represented by the average composition formula (1). (R13SiO1/2)a(R23SiO1/2)b(R33SiO1/2)c(R1SiO2/2)d(R1SiO3/2)e(SiO4/2)f ??(1) [a, b, c, d, e and f are numbers that satisfy 0?a?400, 0<b?200, 0?c?400, 0?d?320, 0?e?320, 0<f?1,000, and 0.5?(a+b+c)/f?1.5.] Because this organic group-modified organosilicon resin can form films softer than those formed with trimethylene siloxysilicate, the cosmetic obtained by blending with said silicon resin feels good when used, has good cosmetic holding properties, spreads easily and has an excellent finish, easy removal, and superior scratch resistance.

Abstract: A cosmetic including at least one cyclic silicone represented by formula (1), and having a boiling point of 205 to 255° C. and a viscosity of less than 5 mm2/s (25° C.). This cosmetic has a light touch, a good spread, and excellent water repellency, forms a uniform cosmetic film, can achieve a feeling of use without a strong oily feeling, and has stability over time and cosmetic persistence when a variety of oil such as a silicone, hydrocarbon oil, and ester, an organic ultraviolet absorber, or an oily component being solid at 25° C. is mixed. (Wherein R1 is a monovalent hydrocarbon group having 2 or 3 carbon atoms, R2, R3, R4, R5, and R6 are each independently a monovalent hydrocarbon group having 1 to 3 carbon atoms, “a” is a positive number satisfying 0<a<4, and “b” and “c” are each independently a number of 0 to 3, provided that (a+b+c) <4.

Abstract: Provided is a musical instrument including a vibratable body; and a vibrator. The vibrator includes a vibrating body that vibrates in a predetermined direction; and a coupling member coupling the vibrating body and the vibratable body and that transmits vibration of the vibrating body to the vibratable body. The coupling member includes a shaft extending between the vibrating body and the vibratable body; a first wire rod coupling one end portion of the shaft and the vibrating body; and a second wire rod coupling another end portion of the shaft and the vibratable body. A resonance frequency of each of the shaft, the first wire rod, and the second wire rod is at least 10 kHz.

Abstract: A vibrator includes: a movable portion connected to a vibratable member; a driver configured to drive the movable portion to cause vibration of the movable portion to vibrate the vibratable member; and a driver supporter secured to a support member and configured to support the driver such that the driver is pivotable about an axis extending in a direction intersecting a movable direction of the movable portion.

Abstract: An input apparatus includes an operation member supported movably in accordance with a plurality of sections set on a two-dimensional plane, a section detection section configured to detect a section in which the operation member is located, a determination operation detection section configured to detect a determination operation performed using the operation member, and an execution section configured to perform a process corresponding to the section in which the operation member is located on the basis of the section detected by the section detection section and the determination operation detected by the determination operation detection section. The determination operation is movement of the operation member in a determination direction (y1 direction), which is a direction parallel to the two-dimensional plane.

Abstract: An organic group-modified organosilicon resin having the average compositional formula (1), which is solid or liquid at 25° C., is suited for use in cosmetics. The resin is able to form an emulsion having a pleasant feel on use, a high internal water phase, and stability over time. In formula (1), a, b, c, d, e, and f are numbers: 0?a?400, 0<b?200, 0?c?400, 0?d?320, 0?e?320, 0<f?1,000, and 0.5?(a+b+c)/f?1.5.

Abstract: There is provided a substrate processing method for removing an oxide film formed on a surface of a substrate. The method includes (a) transforming the oxide film into a reaction by-product by supplying a halogen element-containing gas and a basic gas to the substrate accommodated in a processing chamber; and (b) sublimating the reaction by-product to remove the reaction by-product from the substrate by stopping the supply of the halogen element-containing gas into the processing chamber and supplying an inert gas into the processing chamber. The steps (a) and (b) are repeated a plurality of times.

Abstract: There is provided an etching method including: a step of disposing a substrate in a chamber, the substrate having a silicon nitride film, a silicon oxide film, a silicon, and a silicon germanium; a step of setting a pressure in the chamber to 1,333 Pa or more; and a step of selectively etching the silicon nitride film with respect to the silicon oxide film, the silicon, and the silicon germanium by supplying a hydrogen fluoride gas into the chamber.

Abstract: A method for producing a hydrosilyl group-containing organic silicon resin of formula (6) in a solid form, wherein after formulae (1) to (3) are hydrolyzed in the presence of an acid catalyst, hydrolysis is carried out by adding hydrosilyl group-containing organic silicon compounds of formulae (4) and (5), followed by neutralization by a base catalyst with the amount thereof being more than a molar equivalent of the acid catalyst, and then by condensation. By so doing, deactivation amount of the hydrosilyl group can be reduced, so that the method for producing the hydrosilyl group-containing organic silicon resin, which is in a solid form without a solvent and to which a hydrosilyl group can be introduced quantitatively and in a large quantity, is provided, R13SiOSiR13??(1) R13SiX1??(2) SiX24??(3) HnR23-nSiOSiR23-nHn??(4) HnR23-nSiX3??(5) (R13SiO1/2)a(HnR23-nSiO1/2)b(SiO2)c(R4SiO3/2)d??(6).

Abstract: There is provided an etching method including: loading a substrate having a recess and an etching target portion existing on an inner surface of the recess into a processing container, the etching target portion being made of SiN or Si; preferentially modifying a surface of the etching target portion at a top portion of the recess by performing an oxygen-containing plasma process on the substrate inside the processing container; and subsequently, dry-etching the etching target portion in an isotropic manner.

Abstract: A rotary operating device includes an operation part that is rotatable according to an operation by an operator, a rotation angle sensor that detects a rotation angle of the operation part, a torque applier that applies application torque to the operation part along a rotation direction of the operation part, a frictional force applier that applies a frictional force to the operation part, and a processor programmed to change the application torque and the frictional force according to the rotation angle.

Abstract: A substrate processing method for removing an oxide film formed on the surface of a substrate includes modifying the oxide film into a reaction product by supplying a halogen element-containing gas and an alkaline gas onto the substrate accommodated in the interior of a processing chamber, and sublimating the reaction product by stopping the supply of the halogen element-containing gas into the processing chamber for removal from the substrate, wherein an internal pressure of the processing chamber in the sublimating is set to be higher than an internal pressure of the processing chamber in the modifying by supplying an inert gas into the processing chamber.