Abstract: According to one embodiment, a sensor is disclosed. The sensor includes a substrate, a first fixed electrode arranged on the substrate, a movable electrode arranged above the first fixed electrode and being movable non-parallely, a second fixed electrode arranged above the movable electrode. The sensor further includes a detector to detect a difference between a first capacitance between the first fixed electrode and the movable electrode and a second capacitance between the movable electrode and the second fixed electrode.

Abstract: According to one embodiment, an electronic device includes a variable capacitor includes first and second electrodes, and indicating a first state in which a distance between the first and second electrodes is a first distance and a second state in which the distance between the first and second electrodes is a second distance shorter than the first distance, in accordance with a voltage applied between the first and second electrodes, a voltage applying circuit applying a voltage between the first and second electrodes, and a voltage detecting circuit detecting a first voltage based on an interelectrode voltage between the first and second electrodes. The variable capacitor, the voltage applying circuit and the voltage detecting circuit are provided in a same chip.

Abstract: According to one embodiment, a method of controlling a MEMS variable capacitor includes first and second electrodes, and having a capacitance varying according to a voltage applied between the first and second electrodes, the method includes applying a voltage between the first and second electrodes, evaluating whether the capacitance of the MEMS variable capacitor satisfies a predetermined condition while the voltage is being applied between the first and second electrodes, and determining that the voltage applied between the first and second electrodes is a voltage which should be applied therebetween, on a condition that the capacitance of the MEMS variable capacitor is evaluated as satisfying the predetermined condition.

Abstract: According to an embodiment, a MEMS includes a substrate; a substrate; a membrane arranged above the substrate; a first conductor with a first plane, the first conductor being connected to the membrane; and a second conductor with a second plane facing the first plane, the second conductor being arranged with a gap between the first conductor and the second conductor, wherein relative positions of the first conductor and the second conductor change in a direction in which an area of the first plane facing the second plane changes.

Abstract: According to one embodiment, a MEMS device is disclosed. The device includes a substrate, a first and second MEMS elements on the substrate. Each of the first and second MEMS elements includes a fixed electrode on the substrate, a movable electrode above the fixed electrode, a first insulating film, the first insulating film and the substrate defining a cavity in which the fixed and movable electrodes are contained, and a first anchor on a surface of the first insulating film inside the cavity and configured to connect the movable electrode to the first insulating film. The cavity of the first MEMS element is closed. The cavity of the second MEMS element is opened by a through hole.

Abstract: According to one embodiment, a MEMS element comprises a first electrode fixed on a substrate, a second electrode formed above the first electrode to face it, and vertically movable, a first anchor portion formed on the substrate and configured to support the second electrode, and a first spring portion configured to connect the second electrode and the first anchor portion. The first spring portion includes a liner layer includes a brittle material in contact with the second electrode and the first anchor portion, and a base layer formed on the liner layer, includes a brittle material having a composition different from that of the liner layer, and having a film thickness larger than that of the liner layer.

Abstract: According to one embodiment, an electronic device includes at least one variable capacitor including a first electrode and a second electrode, and being brought into one of a first state and a second state according to a voltage applied between the first electrode and the second electrode, the first electrode and the second electrode being closer to each other in the second state compared with in the first state, and a charge pump circuit provided in a first integrated circuit chip and producing a voltage for establishing the second state. An external capacitor is connectable to the first integrated circuit chip and is receivable the voltage produced by the charge pump circuit.

Abstract: According to one embodiment, a MEMS device is disclosed. The device includes a substrate, a first and second MEMS elements on the substrate. Each of the first and second MEMS elements includes a fixed electrode on the substrate, a movable electrode above the fixed electrode, a first insulating film, the first insulating film and the substrate defining a cavity in which the fixed and movable electrodes are contained, and a first anchor on a surface of the first insulating film inside the cavity and configured to connect the movable electrode to the first insulating film. The cavity of the first MEMS element is closed. The cavity of the second MEMS element is opened by a through hole.

Abstract: According to one embodiment, a MEMS element comprises a first electrode that is fixed on a substrate and has plate shape, a second electrode that is disposed above the first electrode while facing the first electrode, the second electrode being movable in a vertical direction and having plate shape, and a first film that includes a first cavity in which the second electrode is accommodated on the substrate. The second electrode is connected to an anchor portion connected to the substrate via a spring portion. An upper surface of the second electrode is connected to the first film.

Abstract: According to one embodiment, an actuator includes a substrate, a lower electrode disposed on the substrate, an upper electrode, a support and a driving unit. The upper electrode is opposed to the lower electrode. The support supports the upper electrode. The driving unit is connected between the lower electrode and the upper electrode and feeds a driving voltage. The driving voltage at which the lower and upper electrodes start to come into contact with each other is defined as a pull-in voltage. A capacitance between the lower and upper electrodes is defined as a pull-in capacitance. There exist a first region and a second region. In the second region, a change rate of a capacitance ratio changes more slowly than in the first region, when the absolute value of the potential difference is further increased. The driving unit feeds the driving voltage in the second region.

Abstract: According to one embodiment, a semiconductor device includes an electrostatic actuator including first and second lower electrodes, an upper electrode, and an insulating film provided between the upper electrode and the first and second lower electrodes, the first lower electrode and upper electrode configuring a first variable capacitance element, the second lower electrode and upper electrode configuring a second variable capacitance element, a first fixed capacitance element connected to the first lower electrode, a second fixed capacitance element connected to the second lower electrode, and a detection circuit connected to the upper electrode and configured to detect a charge amount stored in the insulating film.

Abstract: According to one embodiment, a variable-capacitor device includes a first MEMS variable-capacitor element, and a second MEMS variable-capacitor element including one end series-connected to one end of the first MEMS variable-capacitor element. In a down-state, a first capacitance value of the first MEMS variable-capacitor element differs from a second capacitance value of the second MEMS variable-capacitor element.

Abstract: According to one embodiment, a MEMS device includes an electrode on a substrate, a movable structure which is supported in midair above the electrode by first and second anchor portions on the substrate, and moves toward the electrode, a first spring structure which connects the first anchor portion to the movable structure and uses a ductile material, and a second spring structure which connects the second anchor portion to the movable structure and uses a brittle material.

Abstract: According to one embodiment, a MEMS element comprises a first electrode that is fixed on a substrate and has plate shape, a second electrode that is disposed above the first electrode while facing the first electrode, the second electrode being movable in a vertical direction and having plate shape, and a first film that includes a first cavity in which the second electrode is accommodated on the substrate. The second electrode is connected to an anchor portion connected to the substrate via a spring portion. An upper surface of the second electrode is connected to the first film.

Abstract: Provided is a MEMS device that includes first and second lower electrodes on a substrate. The MEMS device also includes a first driving electrode forming a capacitance element having a first capacitance between the first lower electrode and the first driving electrode, a second driving electrode forming a capacitance element having a second capacitance between the second lower electrode and the second driving electrode, and an upper electrode supported in midair above the driving electrodes. The upper electrode moves toward the driving electrodes and has a variable third capacitance between the first driving electrode and the upper electrode and a variable fourth capacitance between the second driving electrode and the upper electrode.

Abstract: According to one embodiment, a MEMS element comprises a first electrode fixed on a substrate, a second electrode formed above the first electrode to face it, and vertically movable, a first anchor portion formed on the substrate and configured to support the second electrode, and a first spring portion configured to connect the second electrode and the first anchor portion. The first spring portion includes a liner layer includes a brittle material in contact with the second electrode and the first anchor portion, and a base layer formed on the liner layer, includes a brittle material having a composition different from that of the liner layer, and having a film thickness larger than that of the liner layer.

Abstract: According to one embodiment, a method of driving an electrostatic actuator includes a first electrode provided on a substrate, a second electrode arranged above the first electrode to be movable in a vertical direction, and an insulating film provided between the first electrode and the second electrode, includes boosting a power supply voltage to generate a driving voltage of the electrostatic actuator, and applying the driving voltage to each of the first electrode and the second electrode when setting the electrostatic actuator in an up state.

Abstract: According to one embodiment, a semiconductor device includes an electrostatic actuator including first and second lower electrodes, an upper electrode, and an insulating film provided between the upper electrode and the first and second lower electrodes, the first lower electrode and upper electrode configuring a first variable capacitance element, the second lower electrode and upper electrode configuring a second variable capacitance element, a first fixed capacitance element connected to the first lower electrode, a second fixed capacitance element connected to the second lower electrode, and a detection circuit connected to the upper electrode and configured to detect a charge amount stored in the insulating film.

Abstract: According to one embodiment, an electrostatic actuator apparatus includes a first voltage generation circuit configured to generate a first voltage, a first switch connected between the first voltage generation circuit and a first node, a second voltage generation circuit configured to generate a second voltage, a second switch connected between the second voltage generation circuit and a second node, a capacitor connected between the first node and the second node, an electrostatic actuator having a drive electrode connected to the first node, and a control circuit configured to perform an operation of sequentially turning on the first switch, turning off the first switch and turning on the second switch when the electrostatic actuator is driven.

Abstract: According to one embodiment, an electrostatic actuator apparatus includes a first voltage generation circuit configured to generate a first voltage, a first switch connected between the first voltage generation circuit and a first node, a second voltage generation circuit configured to generate a second voltage, a second switch connected between the second voltage generation circuit and a second node, a capacitor connected between the first node and the second node, an electrostatic actuator having a drive electrode connected to the first node, and a control circuit configured to perform an operation of sequentially turning on the first switch, turning off the first switch and turning on the second switch when the electrostatic actuator is driven.