Abstract: When a sheet bundle is being conveyed by any one pair of plural pairs of rollers independently movable toward and away from the bundle sheet, before the bound portion of the sheet bundle passes the pair of rollers, the pair of rollers on the downstream side nearest to the bound portion are separated from the sheet bundle, and the pairs of rollers more downstream than that pair convey the sheet bundle. Thereby, it happens less often that the pairs of rollers gather the air collected between adjacent ones of the sheets of the sheet bundle to the bound portion to thereby cause a slack to the sheets, and the occurrence of wrinkles or twists in the sheet bundle can be reduced. Also, the pair of rollers are separated from the sheet bundle before the bound portion passes the pair of rollers, whereby it happens less often that the pair of rollers are damaged by the bound portion, and the sheet bundle can be conveyed smoothly.

Abstract: The present invention relates to a technology for depositing a thin metal film by using a plasma sputtering technique on a top surface of a target object, e.g., a semiconductor wafer or the like, and on a surface of a recess opened at the top surface. The film deposition method is characterized in that a film deposition process to deposit a metal film on a sidewall of the recess by generating metal ions by way of making a metal target sputter with a plasma generated from a discharge gas in the processing container and by applying to the mounting table a bias power to cause a metal film deposition based on a metal ion attraction and a sputter etching based on the plasma generated from the discharge gas simultaneously on the top surface of the target object.

Abstract: A structure to couple exterior components of a vehicle includes a first exterior component and a second exterior component located apart from the first exterior component, wherein the first exterior component comprises an upper protrusion configured to overlap the second exterior component, and wherein the first exterior component comprises a side protrusion configured to overlap the second exterior component. A method to couple exterior components of a vehicle includes providing a protrusion about at least a portion of a first exterior component, installing the first exterior component proximal to a second exterior component, overlapping the protrusion of the first exterior component about a at least a portion of the second exterior component, interposing an elastic member between a peripheral surface of the first exterior component and an edge of the second exterior component, and positioning the elastic member beneath the protrusion of the first exterior component.

Abstract: A method of fabricating a semiconductor device includes the steps of forming a via-hole in an interlayer insulation film such that a metal interconnection pattern formed underneath the interlayer insulation film is exposed at a bottom of the via-hole, forming a conductive barrier film on the interlayer insulation film so as to cover a sidewall surface of the via-hole and the exposed metal interconnection pattern in conformity with a shape of the via-hole and forming a metal film on the conductive barrier film, wherein there is provided a preprocessing step, after the step of forming the via-hole but before the step of forming the conductive barrier film, of processing the interlayer insulation film including the sidewall surface of the via-hole and a bottom surface of the via-hole, with plasma containing hydrogen having energy not causing sputtering of the metal interconnection pattern.

Abstract: Even if a sheet surface detection mechanism outputs a signal indicating that an uppermost sheet among blown-up sheets is within a conveyance range, if a trailing edge sheet surface sensor outputs a signal indicating that the uppermost sheet among the blown-up sheets is lower than the conveyance range when the conveyed uppermost sheet passes by the trailing edge sheet surface sensor, a lifting and lowering portion is controlled to lift the tray so that the uppermost sheet is positioned within the conveyance range.

Abstract: An image forming apparatus includes a sheet storage unit, a sheet feeding unit, a conveyance path for conveying a sheet to the image forming unit, a plurality of sheet detection sensors disposed along the conveyance path, a determination unit for determining whether predetermined time elapses from a detection of a front end of the sheet until a detection of a rear end of the sheet and a discharge unit. When the determination unit determines that the predetermined time has elapsed based on the detection by the sheet detection sensor disposed in the furthest upstream position among the plurality of sheet detection sensors, the sheet is discharged from the discharge unit, and when the determination unit determines that the predetermined time has elapsed based on the detection by the sheet detection sensors other than that disposed in the furthest upstream position, the sheet is stopped.

Abstract: A sheet feeding apparatus includes a sheet stacking unit, a suction conveyance unit configured to convey an uppermost sheet stacked on the sheet stacking unit, a suction unit configured to adsorb the sheets onto the suction conveyance unit, and an adsorption completion detection unit. In the sheet feeding apparatus, when the tab-attached sheets are stacked on the sheet stacking unit and fed such that their tab portions are on the downstream side in a sheet feeding direction, the suction unit starts to adsorb the sheet in response to a sheet feeding signal, and the suction conveyance unit starts to convey the sheet immediately after the adsorption completion detection unit detects the completion of the adsorption. When the sheets other than the tab-attached sheets are fed, the suction unit previously adsorbs the sheet onto the suction conveyance unit, and the suction conveyance unit starts to convey the sheet in response to the sheet feeding signal.

Abstract: When a sheet bundle is being conveyed by any one pair of plural pairs of rollers independently movable toward and away from the bundle sheet, before the bound portion of the sheet bundle passes the pair of rollers, the pair of rollers on the downstream side nearest to the bound portion are separated from the sheet bundle, and the pairs of rollers more downstream than that pair convey the sheet bundle. Thereby, it happens less often that the pairs of rollers gather the air collected between adjacent ones of the sheets of the sheet bundle to the bound portion to thereby cause a slack to the sheets, and the occurrence of wrinkles or twists in the sheet bundle can be reduced. Also, the pair of rollers are separated from the sheet bundle before the bound portion passes the pair of rollers, whereby it happens less often that the pair of rollers are damaged by the bound portion, and the sheet bundle can be conveyed smoothly.

Abstract: A sheet feeding device includes a sheet accommodating unit supported by an apparatus main body in an insertable and withdrawable manner in a direction orthogonal to a feeding direction of the sheets, a leading edge regulating unit provided fixedly to the sheet accommodating unit, a trailing edge regulating unit provided in the sheet accommodating unit, a side edge regulating unit provided in the sheet accommodating unit, and an insertion position limiting unit configured to contact a frame on a rear of the apparatus main body in an inserting direction of the sheet accommodating unit to limit an insertion position of the sheet accommodating unit, wherein the insertion position limiting unit is arranged on a rear of the sheet accommodating unit and on an upstream of a position of center of gravity of the sheet accommodating unit along a sheet feeding direction.

Abstract: A tabbed sheet table is detachably attached to a lifting and lowering tray when a tabbed sheet is fed. A tabbed sheet regulating member is provided in a side surface on an upstream side in a sheet feeding direction of the tabbed sheet table while being movable in a vertical direction. The tabbed sheet regulating member includes an abutting portion and a contacting portion. The abutting portion is vertically extended, and the abutting portion abuts on a tab of the tabbed sheet. The contacting portion is extended along the tabbed sheet table, and the contacting portion is contacted on the top-most tabbed sheet placed on the tabbed sheet table. In lifting a tray, a length in a vertical direction of the tabbed sheet is set such that a state in which the regulating member is contacted on the tabbed sheet is maintained irrespective of the lifting of the tray.

Abstract: A sheet feeding device which feeds a sheet by loosening a sheet by loosening sheets by blowing air to the end portions of the sheets, comprising: a sheet tray provided to be capable of lifting up/down supporting the sheets; air blowing means which loosens the sheets by blowing air to the end portion at the topside of the sheets supported by the sheet tray; and a pair of restricting members which restricts both end portions in the direction perpendicular to the sheet feeding direction of the sheet with sheet opposing faces opposing the end portions of the sheets, wherein the interval between the sheet opposing faces at the top side of the pair of the restricting members is set larger than the interval between the sheet opposing faces below the position in which air is blown to the sheets with the air blowing means.

Abstract: Disclosed is a technique for embedding metal in a recess provided in the surface of a process object, such as a semiconductor wafer W, only by plasma sputtering. The metal is copper as a typical example. The recess has a microscopic hole or trench having a diameter or width of 100 nm or less as a typical example. A film forming step and a diffusion step are alternately performed a plurality of times. The film forming step deposits a small amount of a metal film in the recess. The diffusion step moves the deposited metal film toward the bottom portion of the recess. In the film forming step, bias power to be applied to a stage for supporting the wafer W is set to a value ensuring that, on the surface of the wafer W, the rate of metal deposition due to the drawing-in of metal particles is substantially equal to the rate of the sputter etching by plasma. In the diffusion step, the wafer W is maintained at a temperature which permits occurrence of surface diffusion of the metal film deposited in the recess.

Abstract: A sheet surface detecting mechanism, which detects the upper surface of sheets stacked on a tray, including: a sensor disposed in a position spaced apart from a conveying portion; a pivotal sensor flag turning the sensor ON/OFF; and a sheet surface detecting member being disposed in parallel with the sheets stacked on the tray, moving in a vertical direction while causing the sensor flag to pivot in contact with the upper surface of the sheets, and turning the sensor ON/OFF via the sensor flag.

Abstract: An air blowing portion blows air to the end of sheets supported by a lifting and lowering tray. The sheets blown up by the air from the air blowing portion are sucked and conveyed by a sucking and conveying portion. The sheets are preliminarily blown up above the suckable rang. Then, the sheets are lowered to the suckable range before a sucking and conveying operation is started. In the above operation, the tray is lifted, and thereafter the tray is lowered until the sheets reach the suckable range while repeating a step operation of performing a lowering operation and a stop operation based on detection of the upper surface of the sheets by a sheet detecting mechanism.

Abstract: The present invention provides a sheet conveying apparatus and an image forming apparatus which can obtain high operability and productivity when a tabbed sheet is conveyed. In the representative configuration thereof, a trailing edge regulation plate is abutted on tab portions of some of tabbed sheets stacked and supported on a tray to regulate the position of the tabbed sheet. Tab portion regulation portions of a tabbed sheet regulation unit provided at the upper end of the trailing edge regulation plate are abutted on the tab portion of the tabbed sheet formed in the position where the tab portion is not abutted on the regulation portion and regulate the position of the tabbed sheet. The tab portion regulation portions of the tabbed sheet regulation unit can be moved. The tab portion regulation portions are moved with the lifting of the tray when being abutted on the lifting tray.

Abstract: If an edge of a sheet metal of an image forming apparatus damages an electric cable, the image signal is distorted and a correct image is not formed since the damage causes feeding failure and signal deterioration. This is remarkable in the conventional digital electrophotographic apparatus, since the drive signal to drive a laser or a light emitting diode (LED) for exposing the photosensitive body becomes higher in frequency as resolution and speed are increased and tends to generate the electric noise. In order to prevent damage of an electric cable by a metal frame, an apparatus having a holder for holding a feed cable is provided.

Abstract: An air blowing portion blows air toward an edge surface on a downstream side in a sheet feeding direction of a sheet. A presser portion presses an upper surface of the sheet at both side edge portions in a width direction of the sheet, thereby allowing, throughout an entire region of the sheets in a sheet feeding direction, a central portion in a width direction perpendicular to the sheet feeding direction of the sheet to blow up with the air blown by the air blowing portion.

Abstract: A semiconductor device, which suppresses formation of an organic impurity layer and has excellent adhesiveness to a copper film and a metal to be a base, is manufactured. A substrate (wafer W) coated with a barrier metal layer (base film) 13 formed of a metal having a high oxidation tendency, such as titanium, is placed in a processing chamber. At the time of starting to supply water vapor or after that, a material gas containing an organic compound of copper (for instance, Cu(hfac)TMVS) is supplied, and a copper film is formed on the surface of the barrier metal layer 13 whereupon the oxide layer 13a is formed by the water vapor. Then, heat treatment is performed on the wafer W, and the oxide layer 13a is converted into an alloy layer 13b of a metal and copper which constitute the barrier metal layer 13.

Abstract: Provided is a semiconductor device which has excellent adhesiveness to a copper film and a base film thereof and has a small resistance between wirings. The semiconductor device includes a porous insulating layer (SIOC film 11) which absorbed water from the atmosphere, and a substrate (wafer W) having a trench 100 formed on such insulating film is placed in a processing chamber. The substrate is coated with a first base film (Ti film 13) made of a valve metal. The surface of the first film brought into contact with the insulating film is oxidized by the water discharged from the insulating layer, and a passivation film 13a is formed. The surface of the first base film is coated with a second base film made of nitride or carbide of the valve metal, and a copper film 15 is formed on the surface of the second base film by CVD by using a copper organic compound as a material.

Abstract: A plasma processing unit of the present invention includes: a processing chamber having a dielectric wall; and a stage provided in the processing chamber, the stage having a placement surface onto which an object to be processed is placed. An induction plasma is generated in the processing chamber via the dielectric wall. The plasma processing unit is provided with a dielectric member capable of detachably covering at least the placement surface of the stage.