Abstract: A polishing apparatus includes a polishing table with a polishing pad for polishing a film formed on a semiconductor wafer. The polishing apparatus includes a first sensor that outputs a first signal corresponding to the film thickness of the film and a second sensor that is more sensitive than the first sensor and that outputs a second signal corresponding to the film thickness of the film. When the film thickness of the film is equal to or less than a predetermined film thickness, the film thickness detector detects the film thickness of the film according to a second signal. When the film is thicker than the predetermined film thickness, the film thickness detector detects the film thickness of the film according to the first signal and the second signal.

Abstract: A polishing apparatus capable of acquiring accurate film thickness distribution information is disclosed. The polishing apparatus includes a polishing table, a plurality of film thickness sensors, and a controller. The controller analyzes film thickness distribution information of a substrate while identifying a notch position of the substrate based on the measured film thickness information, and outputs visualization information of the film thickness distribution with the notch position as a reference position.

Abstract: The eddy current sensor for measuring the film thickness of a conductive film formed on a substrate includes a core made of a magnetic material that has a base portion, and outer legs provided to the base portion at both end portions in a first direction of the base portion respectively, an excitation coil that is arranged on the core and forms an eddy current in the conductive film, and a detection coil that is arranged on the core and detects the eddy current formed in the conductive film. The length of the base portion in the first direction is not less than the length of the base portion in a second direction that is substantially orthogonal to the first direction.

Abstract: An organic electroluminescence device includes an emitting layer, in which the emitting layer includes at least one single layer containing a first host material, a second host material, and an emitting compound; the first host material and the second host material are mutually different; and a triplet energy of the first host material T1(H1), a triplet energy of the second host material T1(H2), and a triplet energy of the emitting compound T1(D) satisfy at least one of a relationship of a numerical formula (Numerical Formula 1) or a relationship of a numerical formula (Numerical Formula 2) below, T1(D)>T1(H1)??(Numerical Formula 1) T1(D2)>T1(H2)??(Numerical Formula 2).

Abstract: A system of manufacturing a corrugated cardboard box to which an electronic tag is attached. The system includes: a corrugated cardboard sheet forming part that forms a corrugated cardboard sheet 14p; a blank forming part that forms a box blank 24p from the corrugated cardboard sheet; a folder gluer that assembles the box blank 24p into a flat plate-shaped corrugated cardboard box; a product stacker that stacks the flat plate-shaped corrugated cardboard box assembled in the folder gluer; and a tag sticking device that sticks the electronic tag having an adhesive portion to a surface that becomes an outer surface of a box as a workpiece by using the adhesive portion between the corrugated cardboard sheet forming part and the product stacker.

Abstract: A torque estimation method according to the present disclosure estimates a value of shaft torque of a rotary motion transmitting mechanism. The torque estimation method includes: a step of specifying a maximum value of a torsion angle between an input shaft and an output shaft from the time when a measurement value of the torsion angle is zero to the time when the value of the shaft torque is estimated; and a step of specifying the maximum value of the torsion angle. In the step of specifying the maximum value of the torsion angle, the maximum value of the torsion angle is specified based on a difference between the measurement value of the torsion angle subjected to low-pass filter processing at a first cutoff frequency and the measurement value of the torsion angle subjected to low-pass filter processing at a second cutoff frequency.

Abstract: The eddy current sensor includes a first detector that detects an eddy current generated in a semiconductor wafer WH and a second detector that detects the eddy current. The first detector includes a first exciting coil configured to generate the eddy current and a first detecting coil configured to detect the eddy current. The first exciting coil and the first detecting coil are air-core coils. The second detector includes second exciting coil configured to generate the eddy current and second detecting coil configured to detect the eddy current. The second exciting coil and the second detecting coil are coils with a magnetic core.

Abstract: A test sample of a vulcanized rubber material is placed under a preset placement condition in a fixing frame in a test tank having a predetermined ozone concentration, and digital image data is acquired by capturing at a fixed point, over time, with at least one camera device, images of a surface of the test sample that has been placed in the test tank; and determining a change in a surface state of the test sample between a plurality of points in time by analyzing, with a computation device, the image data that has been acquired. Such evaluation method for evaluating ozone deterioration of a vulcanized rubber material can accurately determine a change over time in ozone deterioration while reducing working man-hours.

Abstract: It is possible to effectively prevent lowering of work efficiency while stabilizing an operation of a robot or the like. A torque estimation system estimates friction torque of a rotation mechanism. The torque estimation system inclues angular velocity detecting means for detecting an angular velocity of the rotation mechanism, and limit value setting means for setting an upper limit value and a lower limit value according to the angular velocity of the rotation mechanism detected by the angular velocity detection means, the upper limit value and the lower limit value limiting an upper limit and a lower limit, respectively, of the friction torque of the estimated friction torque.

Abstract: An eddy current sensor assembly includes an eddy current sensor and an output signal processing circuit that processes an output signal from the eddy current sensor. The output signal processing circuit includes a mixer circuit that accepts the output signal and a signal of the predetermined frequency as input, multiplies the two signals received as input, and outputs an output signal obtained by the multiplication, and a low-pass filter that accepts the output signal output by the mixer circuit as input, cuts a high-frequency signal included in the output signal received as input, and outputs at least a direct-current (DC) signal.

Abstract: An eddy current sensor assembly includes an eddy current sensor and an output signal processing circuit that processes an output signal from the eddy current sensor. The output signal processing circuit includes a mixer circuit that accepts the output signal and a signal of the predetermined frequency as input, multiplies the two signals received as input, and outputs an output signal obtained by the multiplication, and a low-pass filter that accepts the output signal output by the mixer circuit as input, cuts a high-frequency signal included in the output signal received as input, and outputs at least a direct-current (DC) signal.

Abstract: The present invention relates to a technique of determining a time to replace a polishing pad used in a polishing apparatus for polishing a workpiece, such as wafer, substrate, or panel. A polishing apparatus (1) includes: a polishing table (5) configured to support a polishing pad (2); a polishing head (7) configured to press a workpiece (W) against a polishing surface (2a) of the polishing pad (2); a dresser (40) configured to dress the polishing surface (2a) of the polishing pad (2); a detection sensor (60) configured to detect friction between the dresser (40) and the polishing pad (2), the detection sensor (60) being fixed to the dresser (40); and a wear monitoring device (63) configured to determine a wear index value from a plurality of output values of the detection sensor (60) and generate an alarm signal when the wear index value is smaller than a predetermined lower limit.

Abstract: An information processing device is provided that includes an acquisition unit that acquires information indicating a force generated between a first tool and an object in a trial motion using the first tool by a robot, and an estimation unit that estimates information of executing a specific task using the first tool based on the information acquired by the acquisition unit and information indicating a force generated between a specific tool and the object in the specific task using the specific tool.

Abstract: The information processing device includes an acquisition unit, a recognition unit, and a specification unit. The acquisition unit is configured to acquire information indicating an action trajectory of an expert for a specific task. The recognition unit is configured to recognize each operation on the target object in time series based on the action trajectory. The specification unit is configured to specify each operation for causing the robot to execute the task based on each operation recognized by the recognition unit and a configuration of the robot.

Abstract: A magnetic element for strengthening a magnetic field formed in an object and an eddy current sensor using the magnetic field are provided. The eddy current sensor includes a bottom face portion which is a magnetic body, a magnetic core portion provided at the middle of the bottom face portion and a peripheral wall portion provided on the periphery of the bottom face portion. The eddy current sensor further includes an excitation coil disposed on an outer periphery of the magnetic core portion and capable of generating a magnetic field and an excitation coil disposed on an outer periphery of the peripheral wall portion and capable of generating a magnetic field.

Abstract: An external force estimation device is configured to estimate an external force acting on a motor. The external force estimation device includes a processor. The processor is configured to: calculate an output torque of the motor by using a value of a current supplied to the motor; estimate an inertia torque of the motor by using rotational position information of the motor; estimate a first friction torque of the motor by using the rotational position information of the motor; perform temperature-based correction for the first friction torque by using temperature information of the motor; and estimate the external force by subtracting the inertia torque and the first friction torque after the temperature-based correction from the output torque.

Abstract: An eddy current detection device configured to form a stronger magnetic field in a polishing target and a polishing apparatus employing the same eddy current detection device are provided. An eddy current detection device that can be disposed near a semiconductor wafer on which a conductive film is formed includes a plurality of eddy current sensors. The plurality of eddy current sensors are disposed near to one another. Each of the plurality of eddy current sensors includes a pot core, an exciting coil disposed in the pot core and configured to form an eddy current in the conductive film, and a detection coil disposed in the pot core and configured to detect the eddy current formed in the conductive film.

Abstract: A machine learning method includes: a first learning step which is performed in a phase before a neural network is installed in a mobile robot and in which a stationary first obstacle is placed in a set space and the first obstacle is placed at different positions using simulation so that the neural network repeatedly learns a path from a starting point to the destination which avoids the first obstacle; and a second learning step which is performed in a phase after the neural network is installed in the mobile robot and in which, when the mobile robot recognizes a second obstacle that operates around the mobile robot in a space where the mobile robot moves, the neural network repeatedly learns a path to the destination which avoids the second obstacle every time the mobile robot recognizes the second obstacle.

Abstract: A method in which an acoustic sensor disposed in a polishing apparatus can be accurately calibrated is disclosed. In this method, polishing sounds of a substrate are acquired using an acoustic sensor; and then at least two distinctive sounds, having distinctive frequencies respectively, are selected from the acquired polishing sounds. Further, the at least two distinctive sounds are output from a sound source coupled to any of a polishing table, the acoustic sensor, and a substrate holder to cause the at least two distinctive sounds to be input to the acoustic sensor. Next, output values of the acoustic sensor are calibrated, such that the output values of the acoustic sensor relative to the at least two distinctive sounds come within an allowable range.

Abstract: A polishing table holds a polishing pad. A top ring holds a semiconductor wafer. A swing arm holds the top ring. The swing arm swings around a swing center on the swing arm during polishing. An optical sensor is disposed on the polishing table and measures an optical characteristic changeable in accordance with a variation in film thickness of the semiconductor wafer. A fluid supply control apparatus determines a distance from an axis of rotation to the optical sensor when the semiconductor wafer is rotated by the top ring. An end point detection section detects a polishing end point indicating an end of polishing based on the optical characteristic measured by the optical sensor and the determined distance.