Abstract: In order to perform high efficient cooling without boiling cooling liquid and to improve maintainability such as replacement of a lamp, the present invention provides a liquid crystal projector including a light source lamp, a liquid crystal panel, a power source, a fan for removing heat generated by the power source and the lamp, a water-cooling jacket provided on an inner surface of an external wall portion opposed to the lamp in the liquid crystal projector, a metal pipe arrangement for radiation which is placed in the external wall portion, and a pump for driving cooling liquid to flow in the water-cooling jacket so that the cooling liquid receiving the heat from the lamp circulates in a circulation path through the water-cooling jacket, the metal pipe arrangement, and the pump to emit the heat to the outside through the metal pipe arrangement.

Abstract: The present invention provides a liquid crystal display device and a liquid crystal cooling unit, which are reduced in noise and have high cooling capability, and in which air is not directly blown on a liquid crystal panel module or a polarizing plate. A cooling jacket having an internal flow channel is formed by being adhered to a periphery of a light-transmissive, highly heat-conducting sapphire plate larger than a light transmitting area to which a polarizing film is applied or attached, by means of a highly heat-conducting adhesive. A liquid crystal cooling unit is formed by clamping the liquid crystal panel module by inserting a light-transmissive, highly heat-conducting substance. Further, the liquid crystal panel module and the polarizing film are cooled by circulating a cooling medium in the internal flow channel of the cooling jacket.

Abstract: A projector having an image display element for modulating light on the basis of an image signal and a projection lens for projecting light emitted from the image display element on a screen, includes: a lamp which has a light emitting source for emitting light; a reflector which reflects light emitted from the light emitting source; a cover glass which covers an emission surface of light from the reflector; a cooling fan disposed outside the reflector; and an air direction changing unit which changes a direction of cooling air caused by the cooling fan. The air direction changing unit is disposed within a space surrounded by the reflector and the cover glass, and outside an emitted light path of light reflected by the reflector. Cooling air within the space is exhausted outside the projector through the cooling fan.

Abstract: Reduction of noise is achieved by devising an arrangement of heat generating parts such as a light bulb element, an electric power source, a light source, etc. and an arrangement of cooling fans. In cooling the light source, the electric power source and liquid crystal panels, a cooling wind path for the liquid crystal panels and the electric power source is made separate from and independent of a cooling wind path for the light source that generates much heat, a cooling air volume is optimized for the respective cooling wind paths, and noise accompanying the rotation of the cooling fans is reduced. Also, by arranging the cooling fans substantially centrally of the respective cooling wind paths, that volume of noise, which leaks from air intake ports and air exhaust port that are opened to a housing of a unit, is reduced.

Abstract: In order to perform high efficient cooling without boiling cooling liquid and to improve maintainability such as replacement of a lamp, the present invention provides a liquid crystal projector including a light source lamp, a liquid crystal panel, a power source, a fan for removing heat generated by the power source and the lamp, a water-cooling jacket provided on an inner surface of an external wall portion opposed to the lamp in the liquid crystal projector, a metal pipe arrangement for radiation which is placed in the external wall portion, and a pump for driving cooling liquid to flow in the water-cooling jacket so that the cooling liquid receiving the heat from the lamp circulates in a circulation path through the water-cooling jacket, the metal pipe arrangement, and the pump to emit the heat to the outside through the metal pipe arrangement.

Abstract: A projective display apparatus having an illumination unit which includes a light source, an integrator lens and a collimator lens, a light splitter unit which splits light beams from the illumination unit into a plurality of color components, a plurality of light valves, a cooling fan, and a wind guiding unit. A respective one of the light valves corresponds to a respective one of the color components. The wind guiding unit guides the cooling wind from the cooling fan to the illumination unit and the light valves. The wind guiding unit splits and forms at least two branch wind guiding paths. One of the branch wind guiding paths guides cooling wind from the cooling fan to the illumination unit and another of the branch wind guiding paths guides the cooling wind to the light valves.

Abstract: A projective display apparatus having an illumination unit which includes a light source, an integrator lens and a collimator lens, a light splitter unit which splits light beams from the illumination unit into a plurality of color components, a plurality of light valves, a cooling fan, and a wind guiding unit. A respective one of the light valves corresponds to a respective one of the color components. The wind guiding unit guides the cooling wind from the cooling fan to the illumination unit and the light valves. The wind guiding unit splits and forms at least two branch wind guiding paths. One of the branch wind guiding paths guides cooling wind from the cooling fan to the illumination unit and another of the branch wind guiding paths guides the cooling wind to the light valves.

Abstract: A display optical unit includes a light valve which modulates light to form picture information, a light splitter which splits light into a plurality of color components and for directing each of the color components to the light valve, an illumination unit which directs light emanated from a light source to the light splitter, and a projection lens which magnifies and projects the modulated light having the picture information for displaying a picture. An optical axis of the projection lens is shifted from an optical axis of the illumination unit and the light splitter, and a projection lens unit including the light valve and the projection lens has a positioning mechanism which determines a position thereof when attached and is attachable and detachable in a direction perpendicular to an optical axis of the projection lens unit.

Abstract: A film formation apparatus for plasma CVD and etching methods making use of inductive coupling plasma generators. The apparatus comprises a plurality of plasma generators for inductive coupling methods, one or more film formation gas discharge pipes, and a substrate setting table facing the plurality of plasma generators via a reaction zone. The film formation gas discharge pipes are included in each of two movable members capable of performing reciprocating motions along a substrate surface on the substrate setting table, while intersecting each other. Thereby, a plasma with a relatively high density can be uniformly created over a large area, the film formation gas excited by free radicals in the plasma can uniformly spread over the film formation target, and a film can be formed with a high deposition rate. Consequently, a large-sized substrate with a good quality of thin film can be provided.

Abstract: A film formation apparatus in plasma CVD and etching methods making use of an inductive coupling method. The apparatus comprises a plurality of plasma generators in inductive coupling method, one or more film formation gas discharge means, and a substrate setting means facing the plurality of plasma generators via a reaction zone. The film formation gas discharge means is included in each of two movable members capable of performing reciprocating motions along a substrate surface on the substrate setting means, while intersecting each other. Thereby, a plasma with a relatively high density can be uniformly created over a large area, the film formation gas excited by free radicals in the plasma can uniformly spread over the film formation target, and a film can be formed with a high deposition rate. Consequently, a large-sized substrate with a good quality of thin film can be provided.

Abstract: A display optical unit includes a light valve which modulates light to form picture information, a light splitter which splits light into a plurality of color components and for directing each of the color components to the light valve, an illumination unit which directs light emanated from a light source to the light splitter, and a projection lens which magnifies and projects the modulated light having the picture information for displaying a picture. An optical axis of the projection lens is shifted from an optical axis of the illumination unit and the light splitter, and a projection lens unit including the light valve and the projection lens has a positioning mechanism which determines a position thereof when attached and is attachable and detachable in a direction perpendicular to an optical axis of the projection lens unit.

Abstract: A display optical unit and apparatus in which the optical axis of a projection lens is shifted from the optical axis of an illumination unit and light splitter. The projection lens is attachable and detachable in a direction in which the optical axes are shifted from each other. A light valve or a polarizer is cooled by cooling winds blown by a cooling device to the light valve or polarizer through a plurality of wind supply openings are arranged in directions different from one another and within the range of 45 degrees to 315 degrees so as to enable cooling of the display optical unit.

Abstract: An active matrix display device comprising an integrated peripheral driver circuit improved in image quality, provided in such a constitution that the feed through voltage &Dgr;Vs is set lower than the voltage Vgr necessary for realizing a single gradation. In this manner, a stable gradation display is obtained without being influenced by the feed through voltage &Dgr;Vs even when the fluctuation in the characteristics of the thin-film transistors provided in active matrix circuit may fluctuate the &Dgr;Vs.

Abstract: Metal organic precursor compounds are dissolved in an organic solvent to form a nonaqueous liquid precursor. The liquid precursor is applied to the inner envelope surface of a fluorescent lamp and heated to form a metal oxide thin film layer. The metal oxide thin film layer may be a conductor, a protective layer or provide other functions. The films have a thickness of from 20 nm to 500 nm. A conductive layer comprising tin-antimony oxide with niobium dopant may be fabricated to have a differential resistivity profile by selecting a combination of precursor composition and annealing temperatures.

Abstract: In an active matrix display device integrated with a peripheral drive circuit using thin film transistors, when Vgr is a voltage required for one gradation, Ct is capacitance of all pixels, Cgd is capacitance between a gate and a drain, .DELTA.Vg is a difference between ON/OFF gate voltages, and .DELTA.Vs is a feedthrough voltage, the respective parameters satisfy an expression: .vertline.Vgr.vertline.>.vertline.(1/Ct) [Cgd.multidot..DELTA.Vg-Ct.multidot..DELTA.Vs].vertline.. According to this, even if dispersion occurs in the characteristics of the thin film transistors arranged for a buffer circuit or an active matrix circuit, it is possible to prevent the dispersion from influencing the gradation display.

Abstract: In an active matrix display device integrated with a peripheral drive circuit using thin film transistors, when Vgr is a voltage required for one gradation, Ct is capacitance of all pixels, Cgd is capacitance between a gate and a drain, .DELTA.Vg is a difference between ON/OFF gate voltages, and .DELTA.Vs is a feedthrough voltage, the respective parameters satisfy an expression: .vertline.vgr.vertline.>.vertline.(1/Ct)[Cgd.multidot..DELTA.Vg-Ct.multido t..DELTA.Vs].vertline.. According to this, even if dispersion occurs in the characteristics of the thin film transistors arranged for a buffer circuit or an active matrix circuit, it is possible to prevent the dispersion from influencing the gradation display.

Abstract: A line plasma source (20) comprises a plasma chamber (30) configured so that plasma (32) is situated remotely and on-edge with respect to a polycrystalline silicon surface (20S) to be treated, thereby preventing damage to the surface, facilitating treatment of large substrates, and permitting low temperature operation. Active species exit the plasma chamber through a long narrow ("line") outlet aperture (36) in the plasma chamber to a reaction zone (W) whereat the active species react with a reaction gas on the polycrystalline silicon surface (e.g., to form a deposited thin film). The polycrystalline silicon surface is heated to a low temperature below 6000.degree. C. Hydrogen is removed from the reactive surface in the low temperature line plasma source by a chemical displacement reaction facilitated by choice of dominant active species (singlet delta state of molecular oxygen).

Abstract: In an active matrix type liquid-crystal display device, in a peripheral circuit portion, there is arranged a TFT having a high mobility and capable of allowing a large amount of on-state current to flow. In a pixel portion, there is arranged a TFT having a small off-state current. These TFTs having different characteristics are constituted by using crystalline silicon film whose crystal has grown in a direction parallel with a substrate. That is, an angle formed between a crystal growing direction and a carrier moving direction are made different from each other, thereby to control a resistance imposed on the carriers when moving to determine the characteristics of the TFT. For example, when the crystal growing direction coincides with the carrier moving direction, high mobility can be given to the carriers. Further, when the crystal growing direction is arranged perpendicular to the carrier moving direction, the off-state current can be lowered.

Abstract: In an active matrix type liquid-crystal display device, in a peripheral circuit portion, there is arranged a TFT having a high mobility and capable of allowing a large amount of on-state current to flow. In a pixel portion, there is arranged a TFT having a small off-state current. These TFTs having different characteristics are constituted by using crystalline silicon film whose crystal has grown in a direction parallel with a substrate. That is, an angle formed between a crystal growing direction and a carrier moving direction are made different from each other, thereby to control a resistance imposed on the carriers when moving to determine the characteristics of the TFT. For example, when the crystal growing direction coincides with the carrier moving direction, high mobility can be given to the carriers. Further, when the crystal growing direction is arranged perpendicular to the carrier moving direction, the off-state current can be lowered.

Abstract: A device and a method for inputting/outputting an image are disclosed. The device includes: an image display section which selectively transmits light; and an image input section having a photodetective portion for converting part of the light which has been transmitted through the image display section and reflected from an original surface to be imaged, into an electric signal. The method is performed by using the device.