Abstract: An optical element-mounting substrate that makes it easy to optically couple the optical semiconductor element to the optical fiber or to the lens and that can be highly integrated while suppressing deterioration in the high-frequency signals. The optical element-mounting substrate for optically coupling the optical semiconductor element to the optical fiber through the lens, comprises an insulating film formed on the surface of the optical element-mounting substrate, grooves formed on the substrate for installing the optical fiber and the lens, a thin-film electrode formed on the insulating film, a thin-film capacitor and a thin-film temperature sensor arranged maintaining a distance from the thin-film electrode, and a solder film formed on the insulating film in a region where the optical semiconductor element is mounted so as to be electrically connected to the thin-film electrode.

Abstract: In an electric characteristic testing process corresponding to a process of the semiconductor apparatus manufacturing processes, in order to test a large area of the electrode pad of the body to be tested in a lump, an electric characteristic testing is performed by pressing a testing structure provided with electrically independent projections having a number equal to a number of conductor portions to be tested formed on an area to be tested of a body to be tested to the body to be tested.

Abstract: In an electric characteristic testing process corresponding to a process of the semiconductor apparatus manufacturing processes, in order to test a large area of the electrode pad of the body to be tested in a lump, an electric characteristic testing is performed by pressing a testing structure provided with electrically independent projections having a number equal to a number of conductor portions to be tested formed on an area to be tested of a body to be tested to the body to be tested.

Abstract: An optical switch for switching an optical path of an input optical signal comprises a substrate composed of a silica glass substrate, a separation layer formed on the silica glass substrate, a plurality of cantilever beams and formed in parallel to one another on the separation layer and connected at their tip ends to a connection member, at least one silica glass optical waveguide core formed on the cantilever beams, a plurality of optical waveguide fixed in opposition to the silica glass optical waveguide core, a cover for covering the cantilever beams, and a switch drive unit for bending the cantilever beams. The switch drive unit comprises electromagnetic actuators, which comprise soft magnetic bodies formed on the connection member for the cantilever beams and on the substrate, soft magnetic yokes formed of a soft magnetic body, permanent magnets, and wire coils.

Abstract: An optical switch for switching an optical path of an input optical signal comprises a substrate composed of a silica glass substrate, a separation layer formed on the silica glass substrate, a plurality of cantilever beams and formed in parallel to one another on the separation layer and connected at their tip ends to a connection member, at least one silica glass optical waveguide core formed on the cantilever beams, a plurality of optical waveguide fixed in opposition to the silica glass optical waveguide core, a cover for covering the cantilever beams, and a switch drive unit for bending the cantilever beams. The switch drive unit comprises electromagnetic actuators, which comprise soft magnetic bodies formed on the connection member for the cantilever beams and on the substrate, soft magnetic yokes formed of a soft magnetic body, permanent magnets, and wire coils.

Abstract: An optical switch for switching an optical path of an input optical signal comprises a substrate composed of a silica glass substrate, a separation layer formed on the silica glass substrate, a plurality of cantilever beams and formed in parallel to one another on the separation layer and connected at their tip ends to a connection member, at least one silica glass optical waveguide core formed on the cantilever beams, a plurality of optical waveguide fixed in opposition to the silica glass optical waveguide core, a cover for covering the cantilever beams, and a switch drive unit for bending the cantilever beams. The switch drive unit comprises electromagnetic actuators, which comprise soft magnetic bodies formed on the connection member for the cantilever beams and on the substrate, soft magnetic yokes formed of a soft magnetic body, permanent magnets, and wire coils.