Patents by Inventor Thomas Feil
Thomas Feil has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20210005715Abstract: A semiconductor transistor device is described that has a source region, a body region including a vertical channel region, a drain region, a gate region laterally aside the channel region, a body contact region formed by doping, a diffusion barrier layer, and a conductive region formed of a conductive material. The body contact region electrically contacts the body region, the diffusion barrier layer being arranged in between. The doping of the body contact region is of the same conductivity type but of higher concentration than a doping of the body region. The conductive region has a contact area that forms an electrical contact to the body contact region, the contact area of the conductive region being arranged vertically above an upper end of the channel region. A method for manufacturing the semiconductor transistor device is also described.Type: ApplicationFiled: July 2, 2020Publication date: January 7, 2021Inventor: Thomas Feil
-
Patent number: 10868172Abstract: A semiconductor device includes: a gate trench extending into a Si substrate; a body region in the Si substrate, the body region including a vertical channel region adjacent a sidewall of the gate trench; a source region in the Si substrate above the body region; a contact trench extending into the Si substrate and separated from the gate trench by a portion of the source region and by a portion of the body region; an electrically conductive material in the contact trench; and a diffusion barrier structure interposed between a sidewall of the contact trench and the vertical channel region, the diffusion barrier structure including alternating layers of Si and oxygen-doped Si and configured to increase carrier mobility within the vertical channel region. Corresponding methods of manufacture are also described.Type: GrantFiled: December 18, 2019Date of Patent: December 15, 2020Assignee: Infineon Technologies Austria AGInventors: Oliver Blank, Thomas Feil, Maximilian Roesch, Martin Poelzl, Robert Haase, Sylvain Leomant, Bernhard Goller, Andreas Meiser
-
Patent number: 10861966Abstract: A semiconductor device includes: a gate trench extending into a Si substrate; a body region in the Si substrate adjacent the gate trench; a source region in the Si substrate above the body region; a diffusion barrier structure adjacent a sidewall of the gate trench, the diffusion barrier structure including alternating layers of Si and oxygen-doped Si and a Si capping layer on the alternating layers of Si and oxygen-doped Si; and a channel region formed in the Si capping layer and which vertically extends along the sidewall of the gate trench. Corresponding methods of manufacture are also described.Type: GrantFiled: December 18, 2019Date of Patent: December 8, 2020Assignee: Infineon Technologies Austria AGInventors: Thomas Feil, Robert Haase, Martin Poelzl, Maximilian Roesch, Sylvain Leomant, Bernhard Goller, Ravi Keshav Joshi
-
Publication number: 20200273956Abstract: Disclosed is a transistor device which includes a semiconductor body having a first surface, a source region, a drift region, a body region being arranged between the source region and the drift region, a gate electrode adjacent the body region and dielectrically insulated from the body region by a gate dielectric, and a field electrode adjacent the drift region and dielectrically insulated from the drift region by a field electrode dielectric. The field electrode includes a first layer and a second layer. The second layer includes a different conductive material as the first layer. A portion of the second layer is disposed above and directly contacts a portion of the first layer.Type: ApplicationFiled: May 12, 2020Publication date: August 27, 2020Inventor: Thomas Feil
-
Publication number: 20200273750Abstract: In an embodiment, a composite semiconductor substrate includes a first polymer layer and a plurality of semiconductor dies having a first surface, a second surface opposing the first surface, side faces extending between the first surface and the second surface and a first metallization structure on the first surface. Edge regions of the first surface and at least portions of the side faces are embedded in the first polymer layer. At least one metallic region of the first metallization structure is exposed from the first polymer layer. A second metallization structure is arranged on the second surface of the plurality of semiconductor dies. A second polymer layer is arranged on edge regions of the second surface of the plurality of semiconductor dies and on the first polymer layer in regions between the side faces of neighbouring ones of the plurality of semiconductor dies.Type: ApplicationFiled: May 14, 2020Publication date: August 27, 2020Inventors: Paul Ganitzer, Carsten von Koblinski, Thomas Feil, Gerald Lackner, Jochen Mueller, Martin Poelzl, Tobias Polster
-
Patent number: 10720500Abstract: Disclosed is a transistor device and a method for producing a transistor device. The transistor device includes: a source region, a drift region, and a body region arranged between the source region and the drift region; a gate electrode adjacent the body region and dielectrically insulated from the body region by a gate dielectric; and a field electrode adjacent the drift region and dielectrically insulated from the drift region by a field electrode dielectric. The field electrode includes first and second layers.Type: GrantFiled: February 8, 2019Date of Patent: July 21, 2020Assignee: Infineon Technologies Austria AGInventor: Thomas Feil
-
Patent number: 10716180Abstract: A lamp for a headlamp is provided. The lamp includes at least two light source groups each including at least one controllable light source. The light sources of one light source group are set up for emitting yellow light. The light sources of another light source group are set up for emitting at least one of white or blue light. At least the light sources of the at least two light source groups are arranged for producing light that is collectively emittable.Type: GrantFiled: October 8, 2018Date of Patent: July 14, 2020Assignee: OSRAM Beteiligungsverwaltung GmbHInventors: Thomas Feil, Daniel Weissenberger, Martin Petzold
-
Patent number: 10672664Abstract: In an embodiment, a method includes forming at least one trench in non-device regions of a first surface of a semiconductor wafer, the non-device regions being arranged between component positions, the component positions including device regions and a first metallization structure, applying a first polymer layer to the first surface of a semiconductor wafer such that the trenches and edge regions of the component positions are covered with the first polymer layer and such that at least a portion of the first metallization structure is uncovered by the first polymer layer, removing portions of a second surface of the semiconductor wafer, the second surface opposing the first surface, revealing portions of the first polymer layer in the non-device regions and producing a worked second surface and inserting a separation line through the first polymer layer in the non-device regions to form a plurality of separate semiconductor dies.Type: GrantFiled: February 27, 2017Date of Patent: June 2, 2020Assignee: Infineon Technologies AGInventors: Paul Ganitzer, Carsten von Koblinski, Thomas Feil, Gerald Lackner, Jochen Mueller, Martin Poelzl, Tobias Polster
-
Publication number: 20200166190Abstract: An optical system includes optical fibers, a decoupling surface, an intersecting surface and a connecting portion. The optical fibers are arranged in at least one row. Each of the optical fibers includes a coupling surface onto which light from a light source is received. Light is directed through the optical fibers along an optical main axis. Light emitted from the optical fibers is directed onto a decoupling surface. The connecting portion is planar and is disposed between the decoupling surface and the optical fibers. The intersecting surface bounds the decoupling surface and is parallel to the optical main axis. Each of the optical fibers has an intersecting face oriented parallel to the optical main axis and parallel to the intersecting surface. The intersecting surface and the intersecting faces of the optical fibers generate a sharp outer edge of a light pattern formed by light emitted from the optical system.Type: ApplicationFiled: November 28, 2019Publication date: May 28, 2020Inventors: Andreas Hartmann, Thomas Feil
-
Publication number: 20200127134Abstract: A semiconductor device includes: a gate trench extending into a Si substrate; a body region in the Si substrate, the body region including a vertical channel region adjacent a sidewall of the gate trench; a source region in the Si substrate above the body region; a contact trench extending into the Si substrate and separated from the gate trench by a portion of the source region and by a portion of the body region; an electrically conductive material in the contact trench; and a diffusion barrier structure interposed between a sidewall of the contact trench and the vertical channel region, the diffusion barrier structure including alternating layers of Si and oxygen-doped Si and configured to increase carrier mobility within the vertical channel region. Corresponding methods of manufacture are also described.Type: ApplicationFiled: December 18, 2019Publication date: April 23, 2020Inventors: Oliver Blank, Thomas Feil, Maximilian Roesch, Martin Poelzl, Robert Haase, Sylvain Leomant, Bernhard Goller, Andreas Meiser
-
Publication number: 20200127135Abstract: A semiconductor device includes: a gate trench extending into a Si substrate; a body region in the Si substrate adjacent the gate trench; a source region in the Si substrate above the body region; a diffusion barrier structure adjacent a sidewall of the gate trench, the diffusion barrier structure including alternating layers of Si and oxygen-doped Si and a Si capping layer on the alternating layers of Si and oxygen-doped Si; and a channel region formed in the Si capping layer and which vertically extends along the sidewall of the gate trench. Corresponding methods of manufacture are also described.Type: ApplicationFiled: December 18, 2019Publication date: April 23, 2020Inventors: Thomas Feil, Robert Haase, Martin Poelzl, Maximilian Roesch, Sylvain Leomant, Bernhard Goller, Ravi Keshav Joshi
-
Publication number: 20200111896Abstract: A method of forming recess for a trench gate electrode includes forming a trench in a first major surface of a semiconductor substrate, the trench having a base and a side wall extending from the base to the first major surface, forming a first insulating layer on the base and the side wall of the trench, inserting a first conductive material into the trench that at least partially covers the first insulation layer to form a field plate in a lower portion of the trench, applying a second insulating layer to the first major surface and the trench such that the second insulating layer fills the trench and covers the conductive material, removing the second insulating layer from the first major surface and partially removing the second insulating layer from the trench by etching and forming a recess for a gate electrode in the second insulating layer in the trench.Type: ApplicationFiled: October 8, 2019Publication date: April 9, 2020Inventors: Thomas Feil, Jyotshna Bhandari, Christoph Gruber, Heimo Hofer, Ravi Keshav Joshi, Olaf Kuehn, Juergen Steinbrenner
-
Patent number: 10580888Abstract: A semiconductor device includes a gate trench extending into a Si substrate, a body region in the Si substrate, the body region including a channel region which extends along a sidewall of the gate trench, a source region in the Si substrate above the body region, a contact trench extending into the Si substrate and separated from the gate trench by a portion of the source region and a portion of the body region, the contact trench being filled with an electrically conductive material which contacts the source region at a sidewall of the contact trench and a highly doped body contact region at a bottom of the contact trench, and a diffusion barrier structure formed along the sidewall of the contact trench and disposed between the highly doped body contact region and the channel region, the diffusion barrier structure including alternating layers of Si and oxygen-doped Si.Type: GrantFiled: August 8, 2018Date of Patent: March 3, 2020Assignee: Infineon Technologies Austria AGInventors: Oliver Blank, Thomas Feil, Maximilian Roesch, Martin Poelzl, Robert Haase, Sylvain Leomant, Bernhard Goller, Andreas Meiser
-
Patent number: 10573742Abstract: A semiconductor device includes a gate trench extending into a Si substrate, a body region in the Si substrate adjacent the gate trench, a source region in the Si substrate above the body region, a contact trench extending into the Si substrate and filled with an electrically conductive material which contacts the source region at a sidewall of the contact trench and a highly doped body contact region at a bottom of the contact trench, a diffusion barrier structure formed along the sidewall of the gate trench, the diffusion barrier structure comprising alternating layers of Si and oxygen-doped Si and a Si capping layer on the alternating layers of Si and oxygen-doped Si, and a channel region formed in the Si capping layer and which vertically extends along the sidewall of the gate trench. Corresponding methods of manufacture are also described.Type: GrantFiled: August 8, 2018Date of Patent: February 25, 2020Assignee: Infineon Technologies Austria AGInventors: Thomas Feil, Robert Haase, Martin Poelzl, Maximilian Roesch, Sylvain Leomant, Bernhard Goller, Ravi Keshav Joshi
-
Patent number: 10563833Abstract: A socket for a lamp includes a connection which is prepared for retaining at least one light source, an optical element which is prepared for optical coupling to the light source, and a bearing. The optical element is movably mounted by the bearing for adaptation to a position of a light exit unit of a connectable light source.Type: GrantFiled: August 21, 2018Date of Patent: February 18, 2020Assignee: OSRAM BETEILIGUNGSVERWALTUNG GmbHInventors: Thomas Feil, Daniel Weissenberger
-
Publication number: 20200052109Abstract: A semiconductor device includes a gate trench extending into a Si substrate, a body region in the Si substrate, the body region including a channel region which extends along a sidewall of the gate trench, a source region in the Si substrate above the body region, a contact trench extending into the Si substrate and separated from the gate trench by a portion of the source region and a portion of the body region, the contact trench being filled with an electrically conductive material which contacts the source region at a sidewall of the contact trench and a highly doped body contact region at a bottom of the contact trench, and a diffusion barrier structure formed along the sidewall of the contact trench and disposed between the highly doped body contact region and the channel region, the diffusion barrier structure including alternating layers of Si and oxygen-doped Si.Type: ApplicationFiled: August 8, 2018Publication date: February 13, 2020Inventors: Oliver Blank, Thomas Feil, Maximilian Roesch, Martin Poelzl, Robert Haase, Sylvain Leomant, Bernhard Goller, Andreas Meiser
-
Publication number: 20200052110Abstract: A semiconductor device includes a gate trench extending into a Si substrate, a body region in the Si substrate adjacent the gate trench, a source region in the Si substrate above the body region, a contact trench extending into the Si substrate and filled with an electrically conductive material which contacts the source region at a sidewall of the contact trench and a highly doped body contact region at a bottom of the contact trench, a diffusion barrier structure formed along the sidewall of the gate trench, the diffusion barrier structure comprising alternating layers of Si and oxygen-doped Si and a Si capping layer on the alternating layers of Si and oxygen-doped Si, and a channel region formed in the Si capping layer and which vertically extends along the sidewall of the gate trench. Corresponding methods of manufacture are also described.Type: ApplicationFiled: August 8, 2018Publication date: February 13, 2020Inventors: Thomas Feil, Robert Haase, Martin Poelzl, Maximilian Roesch, Sylvain Leomant, Bernhard Goller, Ravi Keshav Joshi
-
Patent number: 10529845Abstract: In an embodiment, a semiconductor device includes a semiconductor body having a field effect transistor device with an active region and an edge termination region that surrounds the active region on all sides. The active region includes a first serpentine trench in the semiconductor body, a first field plate in the first serpentine trench, a second serpentine trench in the semiconductor body, and a second field plate in the second serpentine trench. The first serpentine trench is separate and laterally spaced apart from the second serpentine trench.Type: GrantFiled: March 9, 2018Date of Patent: January 7, 2020Assignee: Infineon Technologies Austria AGInventors: Ashita Mirchandani, Thomas Feil, Maximilian Roesch, Britta Wutte
-
Patent number: 10529811Abstract: According to an embodiment of a power semiconductor device, the device includes a semiconductor body coupled to a first load terminal and a second load terminal and configured to conduct a load current between the first load terminal and the second load terminal. A trench extends into the semiconductor body along an extension direction and includes an insulator. A first electrode structure included in the trench is configured to control the load current. A second electrode structure included in the trench is arranged separately and electrically insulated from the first electrode structure. The first electrode structure and the second electrode structure are spatially displaced from each other along the extension direction such that they do not have a common extension range along the extension direction. Each of the first electrode structure and the second electrode structure is made of a metal.Type: GrantFiled: January 18, 2019Date of Patent: January 7, 2020Assignee: Infineon Technologies Austria AGInventors: Thomas Feil, Michael Hutzler
-
Publication number: 20190326277Abstract: Disclosed is an electronic circuit. The electronic circuit includes a first transistor device and a clamping circuit. The first transistor device includes a control node and a load path between a first load node and a second load node, and the clamping circuit includes a second transistor device and a drive circuit. The second transistor device includes a control node and a load path connected in parallel with the load path of the first transistor device, and the drive circuit includes a capacitor coupled between the second load node of the first transistor device, and a first resistor coupled between the control node of the second transistor device and a further circuit node.Type: ApplicationFiled: April 18, 2019Publication date: October 24, 2019Inventors: Thomas Feil, Gerhard Noebauer