Abstract: A method is disclosed for determining an electrical signal characteristic indicative of the magnitude of and/or change in an impedance that varies in response to a magnetic, electric, or electromagnetic field affected by an approaching object. The method includes performing measurements over at least one group of measurement intervals, each group preceded by at least one compensation interval. A sinusoidal excitation voltage is applied to the impedance during each interval, inducing a measuring current. A compensation current is determined during the compensation interval and subtracted from the measuring current of at least one subsequent measurement interval to generate an analog evaluation current. The evaluation current serves as a signal representative of the impedance's magnitude and/or change in the impedance.

Abstract: A fan assembly includes an internal housing having an outer internal housing, and an inner internal housing partially disposed within the outer internal housing. The inner internal housing defines an internal cavity, and has a curved exterior surface. Stator blades extend between the inner internal housing and the outer internal housing.

Abstract: A mask metrology measuring device, comprising a radiation source, an illumination system, an imaging system and an image sensor. The illumination system is designed in a first measuring state to illuminate a first illumination field on a photomask with radiation emitted by the radiation source. The imaging system is designed to image an image representation on the image sensor from the first illumination field. The measuring device can be switched between a first measuring state and a second measuring state. A second illumination field on the photomask is illuminated in the second measuring state, with the first illumination field being arranged within the second illumination field. The first illumination field is not illuminated in the second measuring state. Stray light generated in the second measuring state is recorded by the image sensor.

Abstract: A track assembly comprising a first track having a curved configuration; a second track slidably connected to the first track; a seat assembly connected to move with the second track, the seat assembly comprising a seat base and a seat back adjustable to a plurality of seat positions relative to the second track; a lock configured to selectively lock the first track and the second track; and a release lever configured to automatically actuate the lock.

Abstract: A fan assembly configured to address expansion losses and associated noises in centrifugal fans modifies the blades and housing to enhance the efficiency of air flow. The fan assembly can include a centrifugal fan wheel and shaped housing incorporating curved walls that guide the airflow along an efficient path, minimizing abrupt directional changes and resulting in improved energy efficiency and reduced noise levels compared to conventional housed centrifugal fans. Additionally, fan assembly includes a low-profile, energy-efficient motor positioned within an interior region defined by the centrifugal fan wheel, reducing the overall size of the fan assembly. In embodiments, the fan assemblies can function as standalone fans or be arranged in an array configuration to effectively move large volumes of air.

Abstract: A fan assembly configured to address expansion losses and associated noises in centrifugal fans modifies the blades and housing to enhance the efficiency of air flow. The fan assembly can include a centrifugal fan wheel and shaped housing incorporating curved walls that guide the airflow along an efficient path, minimizing abrupt directional changes and resulting in improved energy efficiency and reduced noise levels compared to conventional housed centrifugal fans. Additionally, fan assembly includes a low-profile, energy-efficient motor positioned within an interior region defined by the centrifugal fan wheel, reducing the overall size of the fan assembly. In embodiments, the fan assemblies can function as standalone fans or be arranged in an array configuration to effectively move large volumes of air.

Abstract: A fan assembly includes an internal housing having an outer internal housing, and an inner internal housing partially disposed within the outer internal housing. The inner internal housing defines an internal cavity, and has a curved exterior surface. Stator blades extend between the inner internal housing and the outer internal housing.

Abstract: Method for operating a mask-metrology measurement apparatus, wherein an image of a section of a photomask is recorded with a first image sensor and wherein an aerial image is generated by virtue of the image raw data obtained with the image sensor being subjected to a clear normalization. The aerial image is subjected to a non-linearity adaptation, which comprises the following steps. In step a., the aerial image is mathematically combined with a clear image (CT2T). In step b., linearity correction (Plin1) is applied to the image data generated in step a. to correct a linearity error of the first image sensor. In step c., a non-linearity adaptation (P?1lin2) is applied to the linearity-corrected image data obtained in step b. to imprint a linearity signature of a second image sensor not arranged in the beam path of the measurement apparatus on the image data. In step d., a clear normalization is applied to the linearity-adapted image data generated in step c.

Abstract: A fan assembly includes an internal housing having an outer internal housing, and an inner internal housing partially disposed within the outer internal housing. The inner internal housing defines an internal cavity, and has a curved exterior surface. Stator blades extend between the inner internal housing and the outer internal housing.

Abstract: A fan assembly configured to address expansion losses and associated noises in centrifugal fans modifies the blades and housing to enhance the efficiency of air flow. The fan assembly can include a centrifugal fan wheel and shaped housing incorporating curved walls that guide the airflow along an efficient path, minimizing abrupt directional changes and resulting in improved energy efficiency and reduced noise levels compared to conventional housed centrifugal fans. Additionally, fan assembly includes a low-profile, energy-efficient motor positioned within an interior region defined by the centrifugal fan wheel, reducing the overall size of the fan assembly. In embodiments, the fan assemblies can function as standalone fans or be arranged in an array configuration to effectively move large volumes of air.

Abstract: A fan assembly includes an internal housing having an outer internal housing, and an inner internal housing partially disposed within the outer internal housing. The inner internal housing defines an internal cavity, and has a curved exterior surface. Stator blades extend between the inner internal housing and the outer internal housing.

Abstract: A fan assembly includes an internal housing having an outer internal housing, and an inner internal housing partially disposed within the outer internal housing. The inner internal housing defines an internal cavity, and has a curved exterior surface. Stator blades extend between the inner internal housing and the outer internal housing.

Abstract: The invention relates to a method and an apparatus for characterizing a microlithographic mask. In a method according to the invention, structures of a mask intended for use in a lithography process in a microlithographic projection exposure apparatus are illuminated by an illumination optical unit, wherein the mask is imaged onto a detector unit which has a plurality of pixels by an imaging optical unit.

Abstract: A fan assembly includes an internal housing having an outer internal housing, and an inner internal housing partially disposed within the outer internal housing. The inner internal housing defines an internal cavity, and has a curved exterior surface. Stator blades extend between the inner internal housing and the outer internal housing.

Abstract: The invention relates to a method and an apparatus for characterizing a microlithographic mask. In a method according to the invention, structures of a mask intended for use in a lithography process in a microlithographic projection exposure apparatus are illuminated by an illumination optical unit, wherein the mask is imaged onto a detector unit which has a plurality of pixels by an imaging optical unit.

Abstract: The invention relates to a device and a method for characterizing a microlithographic mask. A device according to the invention has an illumination optical unit for illuminating structures of a mask intended for use in a lithography process in a microlithographic projection exposure apparatus, a detector unit, and an evaluation unit for evaluating the data recorded by the detector unit, wherein the detector unit is configured for the spatially resolved determination of both the intensity and the polarization state of the respectively impinging light emanating from the mask.

Abstract: The invention relates to a device for determining the exposure energy during the exposure of an element in an optical system, in particular for microlithography, comprising an optical element, a diffractive structure which has a locally varying grating period, and an intensity sensor arrangement, wherein electromagnetic radiation diffracted at the diffractive structure during operation of the optical system, in at least one order of diffraction, is directed to the intensity sensor arrangement by way of total internal reflection effected in the optical element.