Abstract: A method of operating a transport system includes detecting an anomalous condition of a wafer transfer vehicle; sending the wafer transfer vehicle along a rail to a diagnosis station adjacent to the rail; and inspecting properties of the wafer transfer vehicle, such as a speed, a weight, an audio frequency, a noise level, a temperature, and an image of the wafer transfer vehicle, by using the diagnosis station.

Abstract: When there is an interruption in power to an area of an integrated circuit manufacturing facility, product may be stranded in a vehicle mounted to an automated material handling system. An automated rescue vehicle can be deployed to retrieve the stranded vehicle so that a payload carried by that vehicle can be recovered and processing can resume. The rescue vehicle can carry a battery payload. The battery payload provides backup power while the rescue operation is performed. With such an automated system, no human intervention is needed to recover product during a power outage. In addition to improving wafer throughput during the power outage, such a rescue operation may prevent quality degradation for time-critical sequences of processing operations.

Abstract: A method includes disposing, by using a transport module of a workpiece storage system, a first workpiece on a first workpiece carrier; disposing, by using the transport module, the first workpiece carrier with the first workpiece in a workpiece container; disposing, by using the transport module, a second workpiece in the workpiece container, wherein the first workpiece and the second workpiece have different sizes; and transferring, by using the transport module, the workpiece container containing the second workpiece and the first workpiece carrier with the first workpiece to a stocker to store the workpiece container.

Abstract: Disclosed herein is a use of an amniotic fluid stem cell spheroid in the preparation of a composition or pharmaceutical composition for treating urinary incontinence, wherein said pharmaceutical composition may further comprise hyaluronic acid.

Abstract: A system includes a plurality of semiconductor processing tools; a carrier purge station; a carrier repair station; and an overhead transport (OHT) loop for transporting one or more substrate carriers among the plurality of semiconductor processing tools, the carrier purge station, and the carrier repair station. The carrier purge station is configured to receive a substrate carrier from one of the plurality of semiconductor processing tools, purge the substrate carrier with an inert gas, and determine if the substrate carrier needs repair. The carrier repair station is configured to receive a substrate carrier to be repaired and replace one or more parts in the substrate carrier.

Abstract: An automated method of unpacking a container containing semiconductor wafers from a sealed bag is provided. The method includes inflating the bag with a gas using an automated gas dispenser. After inflating the bag, the bag is cut using an automated cutting device to expose the container, and the cut bag is removed from around the container.

Abstract: An apparatus for semiconductor manufacturing includes an input port to receive a carrier, wherein the carrier includes a carrier body, a housing installed onto the carrier body, and a filter installed between the carrier body and the housing. The apparatus further includes a first robotic arm to uninstall the housing from the carrier and to reinstall the housing into the carrier; one or more second robotic arms to remove the filter from the carrier and to install a new filter into the carrier; and an output port to release the carrier to production.

Abstract: A non-woven protective clothing against blood and viruses, which is composed from: a non-woven fabric layer, which has two surfaces; and a high waterproof moisture-permeable layer, which is a porous film that is laminated to one of the surfaces of the non-woven fabric layer; and an elastic pore filling layer, which is a hydrophilic polyurethane. The elastic pore filling layer is coated or printed onto the surface of the high waterproof moisture-permeable layer, and the thickness of the elastic pore filling layer is thinner than that of the high waterproof moisture-permeable layer. The synthetic blood permeability of the non-woven protective clothing against blood and viruses can resist a pressure of 2.0 psi for one minute, and the Phi-X174 bacteriophage penetrability thereof can resist a pressure of 2.0 psi for one minute.

Abstract: A method includes disposing, by using a transport module of a workpiece storage system, a first workpiece on a first workpiece carrier; disposing, by using the transport module, the first workpiece carrier with the first workpiece in a workpiece container; disposing, by using the transport module, a second workpiece in the workpiece container, wherein the first workpiece and the second workpiece have different sizes; and transferring, by using the transport module, the workpiece container containing the second workpiece and the first workpiece carrier with the first workpiece to a stocker to store the workpiece container.

Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a first region, a second region, and a third region; forming a first gate structure on the first region, a second gate structure on the second region, and a third gate structure on the third region; forming an interlayer dielectric (ILD) layer around the first gate structure, the second gate structure, and the third gate structure; removing the first gate structure, the second gate structure, and the third gate structure to form a first recess, a second recess, and a third recess; forming a first interfacial layer in the first recess, the second recess, and the third recess; removing the first interfacial layer in the second recess; and forming a second interfacial layer in the second recess.

Abstract: A method of operating a transport system includes detecting an anomalous condition of a wafer transfer vehicle; sending the wafer transfer vehicle along a rail to a diagnosis station adjacent to the rail; and inspecting properties of the wafer transfer vehicle, such as a speed, a weight, an audio frequency, a noise level, a temperature, and an image of the wafer transfer vehicle, by using the diagnosis station.

Abstract: A pivot device with an interlocking lifting mechanism includes a first interlocking member to which first and second shafts and a second interlocking member are pivotably connected. A torque device is mounted around the first and second shafts. A third interlocking member is pivotably connected to the second interlocking member and includes a sliding groove. A fixing seat includes a pivotal member extending through the sliding groove. The second interlocking member is slidably received in a guiding groove of the guiding seat. When the first shaft pivots through a certain angle, the first interlocking member pivots about the second shaft and actuates the second interlocking member. The third interlocking member pivots relative to the fixing seat. The sliding groove slides relative to the pivotal member. The second distal end synchronously slides relative to the first guiding groove to lift an auxiliary screen unit connected to the third proximal end.

Abstract: A method includes moving a wafer transport device to a position above a load port; lowering a hoist unit of the wafer transport device above the load port, wherein the wafer transport device has a plurality of belts, each of the belts is connected to the hoist unit and wound around a respective belt winding drum; detecting sound waves from the belts by using at least one acoustic sensor to measure tensions of the belts; and comparing the tensions from the belts to determine an inclination of the hoist unit.

Abstract: A method for storage a workpiece used in fabrication of a semiconductor device includes disposing the workpiece on a workpiece carrier, disposing the workpiece carrier with the workpiece in a workpiece container via a workpiece storage system, identifying a content of the workpiece container, and adjusting a storage condition inside the workpiece container in response to the content of the workpiece container via the workpiece storage system.

Abstract: A pivot device with an interlocking lifting mechanism includes a first interlocking member to which first and second shafts and a second interlocking member are pivotably connected. A torque device is mounted around the first and second shafts. A third interlocking member is pivotably connected to the second interlocking member and includes a sliding groove. A fixing seat includes a pivotal member extending through the sliding groove. The second interlocking member is slidably received in a guiding groove of the guiding seat. When the first shaft pivots through a certain angle, the first interlocking member pivots about the second shaft and actuates the second interlocking member. The third interlocking member pivots relative to the fixing seat. The sliding groove slides relative to the pivotal member. The second distal end synchronously slides relative to the first guiding groove to lift an auxiliary screen unit connected to the third proximal end.

Abstract: The present invention provides a waterproof, moisture-permeable composite non-woven fabric able to block viruses and blood, and consists of a non-woven fabric, which is provided with two surfaces and has a basic weight of ?70 g/m2; and a multi-layer breathable membrane, which is at least a three-layer co-extruded membrane. The basic weight of the multi-layer breathable membrane lies between 5˜30 g/m2 and is attached to one of the surfaces of the non-woven fabric. A powder in the multi-layer breathable membrane has a percentage by weight of 40˜60% and an extension ratio ?300%. The present invention has characteristics including a synthetic blood permeability able to resist pressure of 2.0 psi sustainable for at least one minute, a Phi-X17 bacteriophage penetrability able to resist pressure of 2.0 psi sustainable for at least one minute, and a moisture capacity ?1500 g/m2·24 hr.

Abstract: A method of operating a transport system includes detecting an anomalous condition of a wafer transfer vehicle; sending the wafer transfer vehicle along a rail to a diagnosis station adjacent to the rail; and inspecting properties of the wafer transfer vehicle, such as a speed, a weight, an audio frequency, a noise level, a temperature, and an image of the wafer transfer vehicle, by using the diagnosis station.

Abstract: A pivot device includes first and second shafts. A first torque component unit is coupled to an end of the first shaft. A second torque component unit is coupled to an end of the second shaft. A positioning unit is coupled to another ends of the first and second shafts and includes a first positioning board, a second positioning board, and a positioning block. A first transmission unit is disposed between the first and second positioning boards. A second transmission unit is disposed between the second positioning board and the positioning block. Each of the first and second transmission units includes a wheel mounted on the first shaft, a cam mounted on the second shaft, and a sliding block movable between the wheel and the cam, with each sliding block selectively stopping the wheel or the cam to prevent rotation of the first or second shaft, providing multi-stage switching.

Abstract: A wafer transport device is moved on a transport rail, and stopped above a load port having a top surface. A light beam is projected onto the top surface of the load port, and image of the top surface is and the light beam is captured. A position of the hoist unit of the wafer transport device is aligned with respect to a position of the load port according to the image. The hoist unit is lowered toward the load port.

Abstract: A method for monitoring a transport vehicle is provided. The method includes the operations as follows. A transport vehicle is scanned by a monitor during the transport vehicle is operated on a rail to acquire a vehicle pattern of the transport vehicle. The vehicle pattern of the transport vehicle is analyzed. An abnormal transport vehicle is determined based on the vehicle pattern. The monitor is placed nearby the rail. A method for transport vehicle maintenance is also provided.