Abstract: A method for storage a workpiece used in fabrication of a semiconductor device includes disposing the workpiece on a workpiece carrier, disposing the workpiece carrier with the workpiece in a workpiece container via a workpiece storage system, identifying a content of the workpiece container, and adjusting a storage condition inside the workpiece container in response to the content of the workpiece container via the workpiece storage system.

Abstract: A pivot device with an interlocking lifting mechanism includes a first interlocking member to which first and second shafts and a second interlocking member are pivotably connected. A torque device is mounted around the first and second shafts. A third interlocking member is pivotably connected to the second interlocking member and includes a sliding groove. A fixing seat includes a pivotal member extending through the sliding groove. The second interlocking member is slidably received in a guiding groove of the guiding seat. When the first shaft pivots through a certain angle, the first interlocking member pivots about the second shaft and actuates the second interlocking member. The third interlocking member pivots relative to the fixing seat. The sliding groove slides relative to the pivotal member. The second distal end synchronously slides relative to the first guiding groove to lift an auxiliary screen unit connected to the third proximal end.

Abstract: The present invention provides a waterproof, moisture-permeable composite non-woven fabric able to block viruses and blood, and consists of a non-woven fabric, which is provided with two surfaces and has a basic weight of ?70 g/m2; and a multi-layer breathable membrane, which is at least a three-layer co-extruded membrane. The basic weight of the multi-layer breathable membrane lies between 5˜30 g/m2 and is attached to one of the surfaces of the non-woven fabric. A powder in the multi-layer breathable membrane has a percentage by weight of 40˜60% and an extension ratio ?300%. The present invention has characteristics including a synthetic blood permeability able to resist pressure of 2.0 psi sustainable for at least one minute, a Phi-X17 bacteriophage penetrability able to resist pressure of 2.0 psi sustainable for at least one minute, and a moisture capacity ?1500 g/m2·24 hr.

Abstract: A method of operating a transport system includes detecting an anomalous condition of a wafer transfer vehicle; sending the wafer transfer vehicle along a rail to a diagnosis station adjacent to the rail; and inspecting properties of the wafer transfer vehicle, such as a speed, a weight, an audio frequency, a noise level, a temperature, and an image of the wafer transfer vehicle, by using the diagnosis station.

Abstract: A pivot device includes first and second shafts. A first torque component unit is coupled to an end of the first shaft. A second torque component unit is coupled to an end of the second shaft. A positioning unit is coupled to another ends of the first and second shafts and includes a first positioning board, a second positioning board, and a positioning block. A first transmission unit is disposed between the first and second positioning boards. A second transmission unit is disposed between the second positioning board and the positioning block. Each of the first and second transmission units includes a wheel mounted on the first shaft, a cam mounted on the second shaft, and a sliding block movable between the wheel and the cam, with each sliding block selectively stopping the wheel or the cam to prevent rotation of the first or second shaft, providing multi-stage switching.

Abstract: A wafer transport device is moved on a transport rail, and stopped above a load port having a top surface. A light beam is projected onto the top surface of the load port, and image of the top surface is and the light beam is captured. A position of the hoist unit of the wafer transport device is aligned with respect to a position of the load port according to the image. The hoist unit is lowered toward the load port.

Abstract: A method for monitoring a transport vehicle is provided. The method includes the operations as follows. A transport vehicle is scanned by a monitor during the transport vehicle is operated on a rail to acquire a vehicle pattern of the transport vehicle. The vehicle pattern of the transport vehicle is analyzed. An abnormal transport vehicle is determined based on the vehicle pattern. The monitor is placed nearby the rail. A method for transport vehicle maintenance is also provided.

Abstract: Disclosed herein is a use of an amniotic fluid stem cell spheroid in the preparation of a composition or pharmaceutical composition for treating urinary incontinence, wherein said pharmaceutical composition may further comprise hyaluronic acid.

Abstract: A coach apparatus and a cooperative operation controlling method for a coach-driven multi-robot cooperative operation system are provided. The coach apparatus connects with a plurality of action robots and receives state space data from each action robot. The coach apparatus divides the action robots into a plurality of action group. The coach apparatus reduces the state space data of the action robots in each action group to generate reduced state space data of each action group, and trains and builds a cooperative model based on the reduced state space data. In addition, for each action group, the coach apparatus selects a group strategy based on the reduced state space data, and transmits the cooperative model and the group strategy to the action robots in the action group to make them carry out an action mission according to the cooperative model and the group strategy.

Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a first region, a second region, and a third region; forming a first gate structure on the first region, a second gate structure on the second region, and a third gate structure on the third region; forming an interlayer dielectric (ILD) layer around the first gate structure, the second gate structure, and the third gate structure; removing the first gate structure, the second gate structure, and the third gate structure to form a first recess, a second recess, and a third recess; forming a first interfacial layer in the first recess, the second recess, and the third recess; removing the first interfacial layer in the second recess; and forming a second interfacial layer in the second recess.

Abstract: A method of operating a transport system includes detecting an anomalous condition of a wafer transfer vehicle; sending the wafer transfer vehicle along a rail to a diagnosis station adjacent to the rail; and inspecting properties of the wafer transfer vehicle, such as a speed, a weight, an audio frequency, a noise level, a temperature, and an image of the wafer transfer vehicle, by using the diagnosis station.

Abstract: An apparatus for semiconductor manufacturing includes an input port to receive a carrier, wherein the carrier includes a carrier body, a housing installed onto the carrier body, and a filter installed between the carrier body and the housing. The apparatus further includes a first robotic arm to uninstall the housing from the carrier and to reinstall the housing into the carrier; one or more second robotic arms to remove the filter from the carrier and to install a new filter into the carrier; and an output port to release the carrier to production.

Abstract: An automated method of unpacking a container containing semiconductor wafers from a sealed bag is provided. The method includes inflating the bag with a gas using an automated gas dispenser. After inflating the bag, the bag is cut using an automated cutting device to expose the container, and the cut bag is removed from around the container.

Abstract: A fault detection method in a semiconductor fabricating factory is provided. The method includes delivering a test vehicle along a rail to a test region. The method further includes projecting a test signal from a transducer that is positioned on the test vehicle over a check board when the test vehicle is located within the test region. The check board and the test vehicle are arranged along an axis that is parallel to the rail. The method also includes performing an analysis of the test signal projected over the check board. In addition, the method includes issuing a warning alarm when an abnormality is detected based on the analysis result.

Abstract: A method includes receiving a carrier with a plurality of wafers inside; supplying a purge gas to an inlet of the carrier; extracting an exhaust gas from an outlet of the carrier; and generating a health indicator of the carrier while performing the supplying of the purge gas and the extracting of the exhaust gas.

Abstract: An automated method of unpacking a container containing semiconductor wafers from a sealed bag is provided. The method includes inflating the bag with a gas using an automated gas dispenser. After inflating the bag, the bag is cut using an automated cutting device to expose the container, and the cut bag is removed from around the container.

Abstract: A wafer processing tool is capable of detecting wafer warpage. The wafer processing tool includes a wafer holder on which a wafer is held and at least one sensor set. The at least one sensor set is disposed above the wafer or under the wafer, and a projection of each of the at least one sensor set on the wafer radially extending from a center of the wafer to an edge of the wafer. The at least one sensor set is configured to scan an entire surface of the wafer so as to measure warpage of the wafer while the wafer holder and the at least one sensor set are rotatable relative to each other.

Abstract: A wafer transport device is moved on a transport rail, and stopped above a load port having a top surface. A light beam is projected onto the top surface of the load port, and image of the top surface is and the light beam is captured. A position of the hoist unit of the wafer transport device is aligned with respect to a position of the load port according to the image. The hoist unit is lowered toward the load port.

Abstract: A coach apparatus and a cooperative operation controlling method for a coach-driven multi-robot cooperative operation system are provided. The coach apparatus connects with a plurality of action robots and receives state space data from each action robot. The coach apparatus divides the action robots into a plurality of action group. The coach apparatus reduces the state space data of the action robots in each action group to generate reduced state space data of each action group, and trains and builds a cooperative model based on the reduced state space data. In addition, for each action group, the coach apparatus selects a group strategy based on the reduced state space data, and transmits the cooperative model and the group strategy to the action robots in the action group to make them carry out an action mission according to the cooperative model and the group strategy.

Abstract: A monitor vehicle for a rail system includes a wheeled trolley, an overhead vehicle, a supporting structure, and a first sensor. The wheeled trolley is above a rail of the rail system, is operable to move over the rail, and has a bottom surface. The overhead vehicle body is suspended by the wheeled trolley and below the rail. The supporting structure connects the wheeled trolley and the overhead vehicle body. The first sensor is on the bottom surface of the wheeled trolley and is configured to detect a first parameter of the rail of the rail system.