Patents by Inventor Till Schlosser

Till Schlosser has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6566187
    Abstract: DRAM cell arrangement and method for fabricating it Word lines and bit lines are arranged above a main area of a substrate, with the result that they have a planar construction and can be produced together with gate electrodes of transistors of a periphery of the cell arrangement. A depression of the substrate is provided per memory cell, a storage node of a storage capacitor being arranged in the lower region of said depression and a gate electrode of a vertical transistor being arranged in the upper region of said depression. The depressions of the memory cells are arranged between trenches filled with isolating structures. Upper source/drain regions of the transistors are arranged between two mutually adjacent isolating structures and between two mutually adjacent depressions. Lower source/drain regions are arranged in the substrate and adjoin the storage nodes. For process steps, alignment tolerances are so large that the space requirement for the memory cell can amount to 4F2.
    Type: Grant
    Filed: May 11, 2001
    Date of Patent: May 20, 2003
    Assignee: Infineon Technologies AG
    Inventors: Josef Willer, Franz Hoffmann, Till Schlösser
  • Publication number: 20030087519
    Abstract: A bit line configuration for contact-connecting at least one memory cell, in particular a DRAM memory cell, has bit lines disposed above the plane of the memory cell. A first bit line in a first bit line level is disposed below a second bit line in a second bit line level and the second bit line penetrates through the first bit line at at least one location of the first bit line for the purpose of producing a contact with the at least one memory cell at penetration locations. It is thus possible to provide space-saving structures, in particular sub-8F2 structures.
    Type: Application
    Filed: November 5, 2002
    Publication date: May 8, 2003
    Inventors: Dirk Manger, Till Schlosser
  • Publication number: 20030072198
    Abstract: A storage cell field has a plurality of storage cells formed in a substrate of a first doping type, said storage cells comprising a trench capacitor arranged in said substrate and a selection transistor associated with said trench capacitor and provided with a transistor body which is arranged in said substrate. An implantation having an increased dopant concentration of the first doping type is provided in said substrate. This implantation prevents space-charge zones, which are located at the trench capacitors and which are caused in predetermined storage states of said trench capacitors, from constricting a substrate region, which is available for applying a predetermined potential to the transistor bodies, in such a way that said predetermined potential cannot be applied.
    Type: Application
    Filed: October 7, 2002
    Publication date: April 17, 2003
    Inventors: Matthias Goldbach, Till Schlosser
  • Patent number: 6538273
    Abstract: A ferroelectric transistor is disclosed which has two source/drain regions and a channel region disposed in between in a semiconductor substrate. A metallic intermediate layer is disposed on the surface of the channel region and forms a Schottky diode with the semiconductor substrate, and a ferroelectric layer and a gate electrode are disposed on its surface. The ferroelectric transistor is fabricated using steps appertaining to silicon process technology.
    Type: Grant
    Filed: May 4, 2001
    Date of Patent: March 25, 2003
    Assignee: Infineon Technologies AG
    Inventors: Josef Willer, Georg Braun, Till Schlösser, Thomas Haneder
  • Patent number: 6534820
    Abstract: An integrated dynamic memory cell having a small area of extent on a semiconductor substrate is described. The memory cell has a selection MOSFET with a gate connection area that is connected to a word line, a source connection doping area which is connected to a bit line, and a drain connection doping area. A memory MOSFET has a gate connection area which is connected via a thin dielectric layer to a connection doping region which connects a source connection doping area of the memory MOSFET to the drain connection doping area of the selection MOSFET. The memory MOSFET further has a drain connection doping area that is connected to a supply voltage. The selection and memory MOSFETs are disposed on opposite sidewalls of a trench, which is etched in the substrate, and the connection doping region forms a bottom of the trench.
    Type: Grant
    Filed: December 21, 2000
    Date of Patent: March 18, 2003
    Assignee: Infineon Technologies AG
    Inventors: Franz Hofmann, Wolfgang Krautschneider, Till Schlösser
  • Patent number: 6521935
    Abstract: A MOS transistor includes an upper source/drain region, a channel region, and a lower source/drain region that are stacked as layers one above the other and form a projection of a substrate. A gate dielectric adjoins a first lateral area of the projection. A gate electrode adjoins the gate dielectric. A conductive structure adjoins a second lateral area of the projection in the region of the channel region. The conductive structure adjoins the gate electrode.
    Type: Grant
    Filed: December 26, 2001
    Date of Patent: February 18, 2003
    Assignee: Infineon Technologies AG
    Inventors: Wolfgang Krautschneider, Till Schlösser, Josef Willer
  • Patent number: 6518613
    Abstract: A MOS transistor of a memory cell and a bit line connected thereto are disposed on a first surface of a substrate. A capacitor of the memory cell is disposed on a second surface of the substrate, the second surface being opposite to the first surface. A contact is disposed in the substrate and connects the capacitor to the MOS transistor.
    Type: Grant
    Filed: October 1, 2001
    Date of Patent: February 11, 2003
    Assignee: Infineon Technologies AG
    Inventors: Josef Willer, Hans Reisinger, Till Schlosser, Reinhard Stengl
  • Patent number: 6512259
    Abstract: A capacitor in a semiconductor configuration on a substrate includes a noble-metal-containing first capacitor electrode which is formed with a plurality of mutually spaced-apart lamellae. The lamellae are oriented substantially parallel to a surface of the substrate and are mechanically and electrically connected to one another on a flank by a support structure. The capacitor furthermore has a capacitor dielectric formed of high-∈ dielectric or ferroelectric material disposed on the first capacitor electrode. The capacitor also has a second capacitor electrode on the capacitor dielectric.
    Type: Grant
    Filed: May 23, 2001
    Date of Patent: January 28, 2003
    Assignee: Infineon Technologies AG
    Inventors: Gerrit Lange, Till Schlösser
  • Patent number: 6504200
    Abstract: Bit lines are arranged in the lower parts of trenches of a substrate. Word lines are located above the substrate except for protuberances or bulges, which extend downwards into the trenches and which are arranged above the bit lines. The transistors are vertical transistors whose source/drain regions are located below the word lines and between adjacent trenches. The capacitors are linked with the upper source/drain regions. Conductive structures that surround the word lines from the top and the sides while being insulated from the word lines and bordering on the upper source/drain regions can link the upper source/drain regions with the capacitors.
    Type: Grant
    Filed: September 12, 2001
    Date of Patent: January 7, 2003
    Assignee: Infineon Technologies AG
    Inventors: Till Schlösser, Bernhard Sell, Josef Willer
  • Patent number: 6462979
    Abstract: The integrated memory has memory cells with a magnetoresistive storage effect in a memory cell array in the form of a matrix. The memory cells are each connected between one of the column lines and one of the row lines. The column lines are each connected to a read amplifier for reading a data signal from a memory cell. The read amplifier has an operational amplifier with feedback, and a first control input connected to one of the column lines. A capacitor is connected between a second control input of the operational amplifier and a terminal for a supply potential and is used to compensate for any offset voltage at the control inputs of the operational amplifier. This allows a data signal which is to be read from one of the memory cells to be detected comparatively reliably.
    Type: Grant
    Filed: March 5, 2001
    Date of Patent: October 8, 2002
    Assignee: Infineon Technologies AG
    Inventors: Till Schlösser, Roland Thewes
  • Publication number: 20020127803
    Abstract: The method of the invention, in contrast to conventional trench capacitors wherein the memory node is formed in a trench, normally in the form of a drilled hole, includes the steps of forming the memory node in the monocrystalline silicon of the substrate and remains as a web during an etching process while a trench is filled with the common opposing electrode of the memory cell array. In the method, it is advantageous for the selection transistor to be in the form of a vertical transistor above the memory node in the freestanding web.
    Type: Application
    Filed: March 12, 2002
    Publication date: September 12, 2002
    Inventors: Till Schlosser, Franz Hofmann
  • Publication number: 20020127796
    Abstract: The process first forms trench capacitors in a substrate, which are filled with a trench fill and in which a first insulating layer is disposed over the conductive trench fill. The first insulating layer is then overgrown laterally by a selectively grown epitaxial layer. The selective epitaxial layer is so structured that a ridge is formed from it. Next, the ridge is partially undercut, whereby the etch selectivity of the ridge relative to the first insulating layer is utilized for a wet-chemical etching procedure. Next, a contact layer is arranged in the undercut region, which connects the ridge and a transistor that has been formed in the ridge to the conductive trench fill. Lateral margin ridges are then formed next to the ridge as a gate, and a doped region is incorporated into the ridge as a source/drain zone of the transistor.
    Type: Application
    Filed: March 12, 2002
    Publication date: September 12, 2002
    Inventors: Franz Hofmann, Till Schlosser
  • Patent number: 6448600
    Abstract: The memory cells each have a capacitor and a transistor. A storage node of the capacitor is arranged in a first depression formed in a substrate. A gate electrode of the transistor is arranged in a second depression at a first lateral surface of the second depression. The second depression is spaced apart from the first depression. An upper source/drain region of the transistor adjoins the storage node and the second depression. A lower source/drain region of the transistor is formed deeper in the substrate than the upper source/drain region and it adjoins the second depression.
    Type: Grant
    Filed: November 15, 2000
    Date of Patent: September 10, 2002
    Assignee: Infineon Technologies AG
    Inventors: Till Schlösser, Franz Hofmann, Josef Willer
  • Patent number: 6445609
    Abstract: A DRAM memory (50) having a number of DRAM memory cells (51) is described, the memory cells (51) in each case having a storage capacitor (52) and a selection transistor (12) which are formed in the area of an at least essentially rectangular cell area (59), the cell areas (59) having a greater extent in the longitudinal direction (L) than in the width direction (B) and which are wired or can be wired to the cell periphery via a word line (56, 57) and a bit line (55). The word lines (56, 57) and the bit line (55) are conducted over the memory cells (51) and are at least essentially oriented perpendicularly to one another.
    Type: Grant
    Filed: March 9, 2001
    Date of Patent: September 3, 2002
    Assignee: Infineon Technologies AG
    Inventors: Alexander Frey, Werner Weber, Till Schlösser
  • Patent number: 6442065
    Abstract: Each memory cell of a cell configuration includes at least one memory transistor. To write first or second information on the memory cell, a gate electrode of the memory transistor is charged such that a first voltage or a second voltage is applied in the memory transistor. A reading voltage is applied in a second source/drain area of the memory transistor to read first information and second information respectively. The first voltage is applied between the second voltage and the reading voltage. The reading voltage is applied between the first voltage less a threshold voltage of the memory transistor and the second voltage less the threshold voltage of the memory transistor.
    Type: Grant
    Filed: August 22, 2001
    Date of Patent: August 27, 2002
    Assignee: Infineon Technologies AG
    Inventors: Franz Hofmann, Wolfgang Krautschneider, Till Schlösser, Josef Willer
  • Patent number: 6438022
    Abstract: The memory cells of a memory cell configuration each have a selection transistor, a memory transistor and a ferroelectric capacitor. The selection transistor and the memory transistor are connected in series. The ferroelectric capacitor is connected between a control electrode of the memory transistor and a first terminal of the selection transistor.
    Type: Grant
    Filed: May 10, 2001
    Date of Patent: August 20, 2002
    Assignee: Infineon Technologies AG
    Inventors: Till Schlösser, Wolfgang Krautschneider, Franz Hofmann, Thomas-Peter Haneder
  • Publication number: 20020102828
    Abstract: To simplify a method for manufacturing a memory device having a multiplicity of MRAM cells in a crossing area of conductor elements, a method for manufacturing a semiconductor circuit system, in particular, a memory device or the like, having a plurality of memory cells includes the step of structuring each of the memory elements simultaneously with the structuring of the first and second conductor elements.
    Type: Application
    Filed: January 31, 2002
    Publication date: August 1, 2002
    Inventor: Till Schlosser
  • Publication number: 20020096699
    Abstract: A MOS transistor includes an upper source/drain region, a channel region, and a lower source/drain region that are stacked as layers one above the other and form a projection of a substrate. A gate dielectric adjoins a first lateral area of the projection. A gate electrode adjoins the gate dielectric. A conductive structure adjoins a second lateral area of the projection in the region of the channel region. The conductive structure adjoins the gate electrode.
    Type: Application
    Filed: December 26, 2001
    Publication date: July 25, 2002
    Inventors: Wolfgang Krautschneider, Till Schlosser, Josef Willer
  • Patent number: 6421271
    Abstract: A magnetoresitive random access memory (MRAM) configuration is described in which one switching transistor is respectively allocated to a plurality of TMR memory cells. In this manner, the space requirement for constructing the MRAM configuration is greatly reduced because the number of switching transistors required is greatly reduced. Therefore, the packing density of the MRAM configuration can be increased.
    Type: Grant
    Filed: August 23, 2001
    Date of Patent: July 16, 2002
    Assignee: Infineon Technologies AG
    Inventors: Dietmar Gogl, Till Schlösser
  • Publication number: 20020079527
    Abstract: Bit lines are arranged in the lower parts of trenches of a substrate. Word lines are located above the substrate except for protuberances or bulges, which extend downwards into the trenches and which are arranged above the bit lines. The transistors are vertical transistors whose source/drain regions are located below the word lines and between adjacent trenches. The capacitors are linked with the upper source/drain regions. Conductive structures that surround the word lines from the top and the sides while being insulated from the word lines and bordering on the upper source/drain regions can link the upper source/drain regions with the capacitors.
    Type: Application
    Filed: September 12, 2001
    Publication date: June 27, 2002
    Inventors: Till Schlosser, Bernhard Sell, Josef Willer