Patents by Inventor Timothy N. Thomas
Timothy N. Thomas has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20230221521Abstract: Embodiments of the present disclosure relate to mount apparatuses for digital micromirror devices of digital lithography systems and methods of mounting the digital micromirror devices. The mount apparatuses described herein retain spatial light modulators, such as DMDs. The mount apparatus enables the flattening of the DMD by providing a force such that the pair of contact pads contact the DMD. The DMD is positioned in a mounting frame of the mount apparatus. Contact pads of the mounting frame are operable to apply pressure to the DMD.Type: ApplicationFiled: September 10, 2021Publication date: July 13, 2023Inventors: Timothy N. THOMAS, Robert Jordan LEAR, Douglas E. HOLMGREN, Assaf KIDRON, Nigel SWEHLA
-
Patent number: 10840100Abstract: The present invention generally describes one ore more methods that are used to perform an annealing process on desired regions of a substrate. In one embodiment, an amount of energy is delivered to the surface of the substrate to preferentially melt certain desired regions of the substrate to remove unwanted damage created from prior processing steps (e.g., crystal damage from implant processes), more evenly distribute dopants in various regions of the substrate, and/or activate various regions of the substrate. The preferential melting processes will allow more uniform distribution of the dopants in the melted region, due to the increased diffusion rate and solubility of the dopant atoms in the molten region of the substrate. The creation of a melted region thus allows: 1) the dopant atoms to redistribute more uniformly, 2) defects created in prior processing steps to be removed, and 3) regions that have hyper-abrupt dopant concentrations to be formed.Type: GrantFiled: November 26, 2018Date of Patent: November 17, 2020Assignee: Applied Materials, Inc.Inventors: Paul Carey, Aaron Muir Hunter, Dean Jennings, Abhilash J. Mayur, Stephen Moffatt, William Schaffer, Timothy N. Thomas, Mark Yam
-
Patent number: 10409172Abstract: Embodiments of the present disclosure generally relate to apparatuses and systems for performing photolithography processes. More particularly, compact apparatuses for projecting an image onto a substrate are provided. In one embodiment, an image projection apparatus includes a light pipe coupled to a first mounting plate, and a frustrated prism assembly, one or more digital micro-mirror devices, one or more beamsplitters, and one or more projection optics, which are coupled to a second mounting plate. The first and second mounting plates are coplanar, such that the image projection apparatus is compact and may be aligned in a system having a plurality of image projection apparatuses, each of which is easily removable and replaceable.Type: GrantFiled: January 23, 2017Date of Patent: September 10, 2019Assignee: APPLIED MATERIALS, INC.Inventors: David Markle, Thomas Laidig, Timothy N. Thomas
-
Publication number: 20190139773Abstract: The present invention generally describes one ore more methods that are used to perform an annealing process on desired regions of a substrate. In one embodiment, an amount of energy is delivered to the surface of the substrate to preferentially melt certain desired regions of the substrate to remove unwanted damage created from prior processing steps (e.g., crystal damage from implant processes), more evenly distribute dopants in various regions of the substrate, and/or activate various regions of the substrate. The preferential melting processes will allow more uniform distribution of the dopants in the melted region, due to the increased diffusion rate and solubility of the dopant atoms in the molten region of the substrate. The creation of a melted region thus allows: 1) the dopant atoms to redistribute more uniformly, 2) defects created in prior processing steps to be removed, and 3) regions that have hyper-abrupt dopant concentrations to be formed.Type: ApplicationFiled: November 26, 2018Publication date: May 9, 2019Inventors: Paul CAREY, Aaron Muir HUNTER, Dean JENNINGS, Abhilash J. MAYUR, Stephen MOFFATT, William SCHAFFER, Timothy N. THOMAS, Mark YAM
-
Patent number: 10162268Abstract: Implementations disclosed herein generally relate to a light pipe, or kaleido, for homogenizing light such that the light is uniform once the light exits the light pipe. By reflecting the light inside the light pipe, light uniformity is increased. In one implementation, a light pipe for an image projection apparatus is provided. The light pipe comprises an elongated rectangular body having a refractive index that provides total internal reflection within the elongated rectangular body. The elongated rectangular body has an input face for accepting light into the elongated rectangular body. The input face disposed substantially orthogonal to a longitudinal axis of the elongated rectangular body. The elongated rectangular body has an output face for releasing light from the elongated rectangular body. The output face is disposed substantially orthogonal to the longitudinal axis. The elongated rectangular body has a twist along the longitudinal axis.Type: GrantFiled: July 21, 2017Date of Patent: December 25, 2018Assignee: APPLIED MATERIALS, INC.Inventors: David Markle, Timothy N. Thomas
-
Patent number: 10141191Abstract: The present invention generally describes one ore more methods that are used to perform an annealing process on desired regions of a substrate. In one embodiment, an amount of energy is delivered to the surface of the substrate to preferentially melt certain desired regions of the substrate to remove unwanted damage created from prior processing steps (e.g., crystal damage from implant processes), more evenly distribute dopants in various regions of the substrate, and/or activate various regions of the substrate. The preferential melting processes will allow more uniform distribution of the dopants in the melted region, due to the increased diffusion rate and solubility of the dopant atoms in the molten region of the substrate. The creation of a melted region thus allows: 1) the dopant atoms to redistribute more uniformly, 2) defects created in prior processing steps to be removed, and 3) regions that have hyper-abrupt dopant concentrations to be formed.Type: GrantFiled: August 12, 2010Date of Patent: November 27, 2018Assignee: APPLIED MATERIALS, INC.Inventors: Paul Carey, Aaron Muir Hunter, Dean Jennings, Abhilash J. Mayur, Stephen Moffatt, William Schaffer, Timothy N. Thomas, Mark Yam
-
Patent number: 9908200Abstract: The present invention generally relates to an optical system that is able to reliably deliver a uniform amount of energy across an anneal region contained on a surface of a substrate. The optical system is adapted to deliver, or project, a uniform amount of energy having a desired two-dimensional shape on a desired region on the surface of the substrate. Typically, the anneal regions may be square or rectangular in shape. Generally, the optical system and methods of the present invention are used to preferentially anneal one or more regions found within the anneal regions by delivering enough energy to cause the one or more regions to re-melt and solidify.Type: GrantFiled: September 8, 2014Date of Patent: March 6, 2018Assignee: APPLIED MATERIALS, INC.Inventors: Bruce E. Adams, Samuel C. Howells, Dean Jennings, Jiping Li, Timothy N. Thomas, Stephen Moffatt
-
Publication number: 20180024441Abstract: Implementations disclosed herein generally relate to a light pipe, or kaleido, for homogenizing light such that the light is uniform once the light exits the light pipe. By reflecting the light inside the light pipe, light uniformity is increased. In one implementation, a light pipe for an image projection apparatus is provided. The light pipe comprises an elongated rectangular body having a refractive index that provides total internal reflection within the elongated rectangular body. The elongated rectangular body has an input face for accepting light into the elongated rectangular body. The input face disposed substantially orthogonal to a longitudinal axis of the elongated rectangular body. The elongated rectangular body has an output face for releasing light from the elongated rectangular body. The output face is disposed substantially orthogonal to the longitudinal axis. The elongated rectangular body has a twist along the longitudinal axis.Type: ApplicationFiled: July 21, 2017Publication date: January 25, 2018Inventors: David MARKLE, Timothy N. THOMAS
-
Publication number: 20180017781Abstract: The present disclosure generally relates to frustrated cube assemblies having a first prism having a first surface, a second surface, and a first hypotenuse, and a second prism having a third surface, a fourth surface, and a second hypotenuse. The first and second hypotenuses face one another and are separated by an air gap. The frustrated cube assembly may include a tilted mirror adjacent the second surface. The second surface may be a reflective diffraction grating. Light is reflected to a digital micromirror device (DMD) adjacent to the frustrated cube assembly at a normal incidence angle and through an image projection system along a single optical axis. The direction of light incident on the DMD is such that light reflected from an “on” mirror is directed along the normal to the DMD surface and at 45 degrees to the hypotenuses. The input and output light beams are parallel.Type: ApplicationFiled: June 30, 2017Publication date: January 18, 2018Inventors: David MARKLE, Thomas L. LAIDIG, Timothy N. THOMAS, Jang Fung CHEN
-
Publication number: 20170219934Abstract: Embodiments of the present disclosure generally relate to apparatuses and systems for performing photolithography processes. More particularly, compact apparatuses for projecting an image onto a substrate are provided. In one embodiment, an image projection apparatus includes a light pipe coupled to a first mounting plate, and a frustrated prism assembly, one or more digital micro-mirror devices, one or more beamsplitters, and one or more projection optics, which are coupled to a second mounting plate. The first and second mounting plates are coplanar, such that the image projection apparatus is compact and may be aligned in a system having a plurality of image projection apparatuses, each of which is easily removable and replaceable.Type: ApplicationFiled: January 23, 2017Publication date: August 3, 2017Inventors: David MARKLE, Thomas LAIDIG, Timothy N. THOMAS
-
Patent number: 9346094Abstract: An automatic indexing dimpler includes a housing having an interior channel substantially centered along a longitudinal axis. A cam is slidably and rotatably disposed within the interior channel. The cam includes a first longitudinal groove, a second longitudinal groove and an angled groove adjoining the first longitudinal groove at a groove bottom end and the second longitudinal groove at a groove top end. Each longitudinal groove defines a discrete indexing position. A cam follower attached to the housing engages the first and second longitudinal grooves and the angled groove to operably rotate the cam about the longitudinal axis as the cam follower tracks along the angled groove from the groove bottom end to the groove top end. At least one dimple engagable with a workpiece and operable for forming a recessed region in the workpiece is operably connected to the cam for concurrent movement therewith.Type: GrantFiled: September 23, 2015Date of Patent: May 24, 2016Assignee: Welker Engineered Products CompanyInventors: G. Scott Kreft, Timothy N. Thomas
-
Publication number: 20160082497Abstract: An automatic indexing dimpler includes a housing having an interior channel substantially centered along a longitudinal axis. A cam is slidably and rotatably disposed within the interior channel. The cam includes a first longitudinal groove, a second longitudinal groove and an angled groove adjoining the first longitudinal groove at a groove bottom end and the second longitudinal groove at a groove top end. Each longitudinal groove defines a discrete indexing position. A cam follower attached to the housing engages the first and second longitudinal grooves and the angled groove to operably rotate the cam about the longitudinal axis as the cam follower tracks along the angled groove from the groove bottom end to the groove top end. At least one dimple engagable with a workpiece and operable for forming a recessed region in the workpiece is operably connected to the cam for concurrent movement therewith.Type: ApplicationFiled: September 23, 2015Publication date: March 24, 2016Applicant: WELKER ENGINEERED PRODUCTS COMPANYInventors: G. Scott Kreft, Timothy N. Thomas
-
Publication number: 20150053658Abstract: The present invention generally relates to an optical system that is able to reliably deliver a uniform amount of energy across an anneal region contained on a surface of a substrate. The optical system is adapted to deliver, or project, a uniform amount of energy having a desired two-dimensional shape on a desired region on the surface of the substrate. Typically, the anneal regions may be square or rectangular in shape. Generally, the optical system and methods of the present invention are used to preferentially anneal one or more regions found within the anneal regions by delivering enough energy to cause the one or more regions to re-melt and solidify.Type: ApplicationFiled: September 8, 2014Publication date: February 26, 2015Applicant: APPLIED MATERIALS, INC.Inventors: Bruce E. ADAMS, Samuel C. HOWELLS, Dean JENNINGS, Jiping LI, Timothy N. THOMAS, Stephen MOFFATT
-
Patent number: 8829392Abstract: The present invention generally relates to an optical system that is able to reliably deliver a uniform amount of energy across an anneal region contained on a surface of a substrate. The optical system is adapted to deliver, or project, a uniform amount of energy having a desired two-dimensional shape on a desired region on the surface of the substrate. Typically, the anneal regions may be square or rectangular in shape. Generally, the optical system and methods of the present invention are used to preferentially anneal one or more regions found within the anneal regions by delivering enough energy to cause the one or more regions to re-melt and solidify.Type: GrantFiled: February 21, 2012Date of Patent: September 9, 2014Assignee: Applied Materials, Inc.Inventors: Bruce E. Adams, Samuel C. Howells, Dean Jennings, Jiping Li, Timothy N. Thomas, Stephen Moffatt
-
Patent number: 8693095Abstract: A method and apparatus for decorrelating coherent light from a light source, such as a pulsed laser, in both time and space in an effort to provide intense and uniform illumination are provided. The techniques and apparatus described herein may be incorporated into any application where intense, uniform illumination is desired, such as pulsed laser annealing, welding, ablating, and wafer stepper illuminating.Type: GrantFiled: January 29, 2013Date of Patent: April 8, 2014Assignee: Applied Materials, Inc.Inventors: Dean Jennings, Timothy N. Thomas, Stephen Moffatt, Jiping Li, Bruce E. Adams, Samuel C. Howells
-
Publication number: 20140009829Abstract: A method and apparatus for decorrelating coherent light from a light source, such as a pulsed laser, in both time and space in an effort to provide intense and uniform illumination are provided. For some embodiments employing a pulsed light source, the output pulse may be stretched relative to the input pulse width. The methods and apparatus described herein may be incorporated into any application where intense, uniform illumination is desired, such as pulsed laser annealing, welding, ablating, and wafer stepper illuminating.Type: ApplicationFiled: September 13, 2013Publication date: January 9, 2014Applicant: Applied Materials, Inc.Inventors: Dean JENNINGS, Timothy N. THOMAS, Stephen MOFFATT, Jiping LI, Bruce E. ADAMS, Samuel C. HOWELLS
-
Patent number: 8518838Abstract: Methods used to perform an annealing process on desired regions of a substrate are disclosed. In one embodiment, an amount of energy is delivered to the surface of the substrate to preferentially melt certain desired regions of the substrate to remove unwanted damage created from prior processing steps (e.g., crystal damage from implant processes), more evenly distribute dopants in various regions of the substrate, and/or activate various regions of the substrate. The preferential melting processes will allow more uniform distribution of the dopants in the melted region, due to the increased diffusion rate and solubility of the dopant atoms in the molten region of the substrate. The creation of a melted region thus allows: 1) the dopant atoms to redistribute more uniformly, 2) defects created in prior processing steps to be removed, and 3) regions that have hyper-abrupt dopant concentrations to be formed.Type: GrantFiled: February 21, 2012Date of Patent: August 27, 2013Assignee: Applied Materials, Inc.Inventors: Paul Carey, Aaron Muir Hunter, Dean Jennings, Abhilash J. Mayur, Stephen Moffatt, William Schaffer, Timothy N. Thomas, Mark Yam
-
Publication number: 20130141788Abstract: A method and apparatus for decorrelating coherent light from a light source, such as a pulsed laser, in both time and space in an effort to provide intense and uniform illumination are provided. The techniques and apparatus described herein may be incorporated into any application where intense, uniform illumination is desired, such as pulsed laser annealing, welding, ablating, and wafer stepper illuminating.Type: ApplicationFiled: January 29, 2013Publication date: June 6, 2013Inventors: Dean JENNINGS, Timothy N. THOMAS, Stephen MOFFATT, Jiping LI, Bruce E. ADAMS, Samuel C. HOWELLS
-
Patent number: 8432613Abstract: Substrate processing equipment and methods are used to improve the uniformity of illumination across an illuminated portion of a substrate by processing light with multiple optical homogenizers. The multiple optical homogenizers each include micro-lens arrays and Fourier lens. The multiple optical homogenizers are arranged so that the output numerical aperture of one of the optical homogenizers is within 5% of the input numerical aperture of another optical homogenizer.Type: GrantFiled: April 18, 2010Date of Patent: April 30, 2013Assignee: Applied Materials, Inc.Inventors: Dean C. Jennings, Timothy N. Thomas, Samuel C. Howells, Bruce E. Adams, Jiping Li
-
Patent number: 8363320Abstract: A method and apparatus for decorrelating coherent light from a light source, such as a pulsed laser, in both time and space in an effort to provide intense and uniform illumination are provided. The techniques and apparatus described herein may be incorporated into any application where intense, uniform illumination is desired, such as pulsed laser annealing, welding, ablating, and wafer stepper illuminating.Type: GrantFiled: April 27, 2011Date of Patent: January 29, 2013Assignee: Applied Materials, Inc.Inventors: Dean Jennings, Timothy N. Thomas, Stephen Moffatt, Jiping Li, Bruce E. Adams, Samuel C. Howells