Patents by Inventor Ting-An Chien

Ting-An Chien has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11495737
    Abstract: A magnetic tunnel junction (MTJ) device includes a bottom electrode, a reference layer, a tunnel barrier layer, a free layer and a top electrode. The bottom electrode and the top electrode are facing each other. The reference layer, the tunnel barrier layer and the free layer are stacked from the bottom electrode to the top electrode, wherein the free layer includes a first ferromagnetic layer, a spacer and a second ferromagnetic layer, wherein the spacer is sandwiched by the first ferromagnetic layer and the second ferromagnetic layer, wherein the spacer includes oxidized spacer sidewall parts, the first ferromagnetic layer includes first oxidized sidewall parts, and the second ferromagnetic layer includes second oxidized sidewall parts. The present invention also provides a method of manufacturing a magnetic tunnel junction (MTJ) device.
    Type: Grant
    Filed: June 29, 2020
    Date of Patent: November 8, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Da-Jun Lin, Shih-Wei Su, Bin-Siang Tsai, Ting-An Chien
  • Publication number: 20220344153
    Abstract: A method for forming a semiconductor device is provided. The method for forming a semiconductor device is provided. The method includes coating a photoresist film over a target layer; performing a lithography process to pattern the photoresist film into a photoresist layer; performing a directional ion bombardment process to the photoresist layer, such that a carbon atomic concentration in the photoresist layer is increased; and etching the target layer using the photoresist layer as an etch mask.
    Type: Application
    Filed: August 9, 2021
    Publication date: October 27, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Tien SHEN, Chih-Kai YANG, Hsiang-Ming CHANG, Chun-Yen CHANG, Ya-Hui CHANG, Wei-Ting CHIEN, Chia-Cheng CHEN, Liang-Yin CHEN
  • Publication number: 20220334723
    Abstract: A flash memory control method, a flash memory storage device and a flash memory controller are provided. The method includes the following. A flash memory module is instructed to perform a data merge operation to copy first data in a first physical unit into at least one second physical unit. After the first data is copied and before the first physical unit is erased, another programming operation is performed on the first physical unit to change a data storage state of at least a part of memory cells in the first physical unit from a first state into a second state. After the first physical unit is programmed, an erase operation is performed on the first physical unit.
    Type: Application
    Filed: April 27, 2021
    Publication date: October 20, 2022
    Applicant: PHISON ELECTRONICS CORP.
    Inventors: Yu-Siang Yang, Wei Lin, An-Cheng Liu, Yu-Heng Liu, Chun-Hsi Lai, Ting-Chien Zhan
  • Publication number: 20220336225
    Abstract: A method of exposing a wafer to a high-tilt angle ion beam and an apparatus for performing the same are disclosed. In an embodiment, a method includes forming a patterned mask layer over a wafer, the patterned mask layer including a patterned mask feature; exposing the wafer to an ion beam, a surface of the wafer being tilted at a tilt angle with respect to the ion beam; and moving the wafer along a scan line with respect to the ion beam, a scan angle being defined between the scan line and an axis perpendicular to an axis of the ion beam, a difference between the tilt angle and the scan angle being less than 50°.
    Type: Application
    Filed: June 30, 2022
    Publication date: October 20, 2022
    Inventors: Chia-Cheng Chen, Wei-Ting Chien, Liang-Yin Chen, Huicheng Chang, Yee-Chia Yeo
  • Publication number: 20220328631
    Abstract: In an embodiment, a device includes: a gate structure on a channel region of a substrate; a gate mask on the gate structure, the gate mask including a first dielectric material and an impurity, a concentration of the impurity in the gate mask decreasing in a direction extending from an upper region of the gate mask to a lower region of the gate mask; a gate spacer on sidewalls of the gate mask and the gate structure, the gate spacer including the first dielectric material and the impurity, a concentration of the impurity in the gate spacer decreasing in a direction extending from an upper region of the gate spacer to a lower region of the gate spacer; and a source/drain region adjoining the gate spacer and the channel region.
    Type: Application
    Filed: June 10, 2021
    Publication date: October 13, 2022
    Inventors: Wei-Ting Chien, Wen-Yen Chen, Li-Ting Wang, Su-Hao Liu, Liang-Yin Chen, Huicheng Chang
  • Patent number: 11462441
    Abstract: A method for fabricating a semiconductor device includes the steps of first forming a fin-shaped structure on a substrate, forming a dielectric layer surrounding the fin-shaped structure, performing an anneal process to transform the dielectric layer into a shallow trench isolation (STI), removing the fin-shaped structure to form a trench, and forming a stack structure in the trench. Preferably, the stack structure includes a first semiconductor layer on the fin-shaped structure and a second semiconductor layer on the first semiconductor layer and the first semiconductor layer and the second semiconductor layer include different materials.
    Type: Grant
    Filed: January 13, 2021
    Date of Patent: October 4, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Shih-Wei Su, Hao-Che Feng, Hsuan-Tai Hsu, Chun-Yu Chen, Wei-Hao Huang, Bin-Siang Tsai, Ting-An Chien
  • Publication number: 20220311212
    Abstract: A vertical cavity surface emitting laser includes an active area, an inner trench, an outer trench, and a first implantation region. The active area includes a first mirror, an active region, a second mirror, and an etch stop layer. The first mirror is formed over a substrate. The active region is formed over the first mirror. The second mirror is formed over the active region. The etch stop layer with an aperture is formed between the active region and the second mirror. The inner trench surrounds the active area in a top view. The outer trench if formed beside the inner trench. The first implantation region is formed below the inner trench.
    Type: Application
    Filed: March 25, 2021
    Publication date: September 29, 2022
    Inventors: Min-Chang TU, Jiun-Tsuen LAI, Wan-Ting CHIEN
  • Publication number: 20220307963
    Abstract: A slurry analysis system (14) for estimating a first characteristic of a slurry (12) having a plurality of particles (18) suspended in a dispersion medium (20) can include a slurry filter (40) that filters the slurry (12); and a control system (26) that estimates the first characteristic of the slurry (12) using a flow rate of a filtrate (50) through the slurry filter (40) and a slurry filtration pressure of the slurry (12).
    Type: Application
    Filed: June 25, 2020
    Publication date: September 29, 2022
    Inventors: Takashi Nagata, Ting-Chien Teng, Yohei Konishi, Kiyoshi Nozaki
  • Patent number: 11456373
    Abstract: In an embodiment, a device includes: a fin on a substrate, fin having a Si portion proximate the substrate and a SiGe portion distal the substrate; a gate stack over a channel region of the fin; a source/drain region adjacent the gate stack; a first doped region in the SiGe portion of the fin, the first doped region disposed between the channel region and the source/drain region, the first doped region having a uniform concentration of a dopant; and a second doped region in the SiGe portion of the fin, the second doped region disposed under the source/drain region, the second doped region having a graded concentration of the dopant decreasing in a direction extending from a top of the fin to a bottom of the fin.
    Type: Grant
    Filed: April 29, 2020
    Date of Patent: September 27, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chia-Ling Chan, Liang-Yin Chen, Wei-Ting Chien
  • Patent number: 11450757
    Abstract: A finFET device and methods of forming a finFET device are provided. The method includes depositing a dummy gate over and along sidewalls of a fin extending upwards from a semiconductor substrate, forming a first gate spacer along a sidewall of the dummy gate, and plasma-doping the first gate spacer with carbon to form a carbon-doped gate spacer. The method further includes forming a source/drain region adjacent a channel region of the fin and diffusing carbon from the carbon-doped gate spacer into a first region of the fin to provide a first carbon-doped region. The first carbon-doped region is disposed between at least a portion of the source/drain region and the channel region of the fin.
    Type: Grant
    Filed: September 6, 2020
    Date of Patent: September 20, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Chang Lin, Chun-Feng Nieh, Huicheng Chang, Wei-Ting Chien, Chih-Pin Tsao, Hou-Ju Li, Tien-Shun Chang
  • Publication number: 20220293185
    Abstract: A memory control method, a memory storage device, and a memory control circuit unit are provided. The memory control method includes: programming multiple first memory cells in a first physical erasing unit in a rewritable non-volatile memory module; and applying an electronic pulse to at least one word line in the rewritable non-volatile memory module. The at least one word line is coupled to multiple second memory cells in the first physical erasing unit. The second memory cells include the first memory cells. The electronic pulse is not configured to read, program, or erase the second memory cells.
    Type: Application
    Filed: March 29, 2021
    Publication date: September 15, 2022
    Applicant: PHISON ELECTRONICS CORP.
    Inventors: Yu-Siang Yang, Wei Lin, An-Cheng Liu, Yu-Heng Liu, Chun-Hsi Lai, Ting-Chien Zhan
  • Publication number: 20220262939
    Abstract: A method for forming a high electron mobility transistor is disclosed. A substrate is provided. A channel layer is formed on the substrate. An electron supply layer is formed on the channel layer. A dielectric passivation layer is formed on the electron supply layer. A gate recess is formed into the dielectric passivation layer and the electron supply layer. A surface modification layer is conformally deposited on an interior surface of the gate recess. The surface modification layer is then subjected to an oxidation treatment or a nitridation treatment. A P-type GaN layer is formed in the gate recess and on the surface modification layer.
    Type: Application
    Filed: February 18, 2021
    Publication date: August 18, 2022
    Inventors: Chih-Wei Chang, Yao-Hsien Chung, Shih-Wei Su, Hao-Hsuan Chang, Ting-An Chien, Bin-Siang Tsai
  • Patent number: 11401450
    Abstract: Fluid synthesis system and corresponding method for synthesis of slurry containing abrasive particles. The system and method are configured to substantially segregate the abrasive particles passing through the filter, used at the filtering step of the process, from the sticky components that clog such filter prior to the filtering step of the synthesis process to achieve a sustaining filtration of the slurry as a result of which the filter remains substantially unclogged for the whole predetermined duration of the filtering process.
    Type: Grant
    Filed: July 22, 2019
    Date of Patent: August 2, 2022
    Inventors: Takashi Nagata, Ting-Chien Teng, Nobutaka Magome, Bausan Yuan
  • Patent number: 11393695
    Abstract: A method of exposing a wafer to a high-tilt angle ion beam and an apparatus for performing the same are disclosed. In an embodiment, a method includes forming a patterned mask layer over a wafer, the patterned mask layer including a patterned mask feature; exposing the wafer to an ion beam, a surface of the wafer being tilted at a tilt angle with respect to the ion beam; and moving the wafer along a scan line with respect to the ion beam, a scan angle being defined between the scan line and an axis perpendicular to an axis of the ion beam, a difference between the tilt angle and the scan angle being less than 50°.
    Type: Grant
    Filed: March 18, 2021
    Date of Patent: July 19, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chia-Cheng Chen, Wei-Ting Chien, Liang-Yin Chen, Huicheng Chang, Yee-Chia Yeo
  • Publication number: 20220189770
    Abstract: A method for fabricating a semiconductor device includes the steps of first forming a fin-shaped structure on a substrate, forming a dielectric layer surrounding the fin-shaped structure, performing an anneal process to transform the dielectric layer into a shallow trench isolation (STI), removing the fin-shaped structure to form a trench, and forming a stack structure in the trench. Preferably, the stack structure includes a first semiconductor layer on the fin-shaped structure and a second semiconductor layer on the first semiconductor layer and the first semiconductor layer and the second semiconductor layer include different materials.
    Type: Application
    Filed: January 13, 2021
    Publication date: June 16, 2022
    Inventors: Shih-Wei Su, Hao-Che Feng, Hsuan-Tai Hsu, Chun-Yu Chen, Wei-Hao Huang, Bin-Siang Tsai, Ting-An Chien
  • Publication number: 20220165866
    Abstract: An HEMT includes a first III-V compound layer. A second III-V compound layer is disposed on the first III-V compound layer. The composition of the first III-V compound layer is different from the composition of the second III-V compound layer. A trench is disposed within the first III-V compound layer and the second III-V compound layer. The trench has a first corner and a second corner. The first corner and the second corner are disposed in the first III-V compound layer. A first dielectric layer contacts a sidewall of the first corner. A second dielectric layer contacts a sidewall of the second corner. The first dielectric layer and the second dielectric layer are outside of the trench. A gate is disposed in the trench. A source electrode and a drain electrode are respectively disposed at two sides of the gate. A gate electrode is disposed directly on the gate.
    Type: Application
    Filed: January 6, 2021
    Publication date: May 26, 2022
    Inventors: Chih-Wei Chang, Yao-Hsien Chung, Shih-Wei Su, Hao-Hsuan Chang, Da-Jun Lin, Ting-An Chien, Bin-Siang Tsai
  • Publication number: 20220152449
    Abstract: A yoga mat is provided, including: a cushion body, including at least one first thread and at least one second thread, at least one functioned thread of the at least one first thread being woven by a plurality of filaments and at least one rubber filament, the at least one rubber filament being at least partially exposed on an outer surface of the at least one functioned thread.
    Type: Application
    Filed: November 18, 2020
    Publication date: May 19, 2022
    Inventor: Wei-Ting CHIEN
  • Publication number: 20220140229
    Abstract: A method for fabricating memory cell of magnetoresistive RAM includes forming a memory stack structure on a first electrode layer. The memory stack structure includes a SAF layer to serve as a pinned layer; a magnetic free layer and a barrier layer sandwiched between the SAF layer and the magnetic free layer. A second electrode layer is then formed on the memory stack structure. The SAF layer includes a first magnetic layer, a second magnetic layer, and a spacer layer of a first metal element sandwiched between the first magnetic layer and the second magnetic layer. The first metal element is phase separated from a second metal element of the first and second magnetic layers, and the second metal element of the first magnetic layer and the second magnetic layer interfaces with the spacer layer.
    Type: Application
    Filed: January 12, 2022
    Publication date: May 5, 2022
    Applicant: United Microelectronics Corp.
    Inventors: Da-Jun Lin, Bin-Siang Tsai, Ting-An Chien
  • Publication number: 20220132749
    Abstract: An absorbent ecological fabric is provided, including: at least one first fiber element, each of the at least one first fiber element being absorbent and elongate, each of the at least one first fiber element being woven by a plurality of filaments. The absorbent ecological fabric can provide a large region for plants to attach and climb.
    Type: Application
    Filed: October 29, 2020
    Publication date: May 5, 2022
    Inventor: Wei-Ting Chien
  • Publication number: 20220140239
    Abstract: The invention provides a semiconductor structure, the semiconductor structure includes a substrate, a resistance random access memory on the substrate, an upper electrode, a lower electrode and a resistance conversion layer between the upper electrode and the lower electrode, and a cap layer covering the outer side of the resistance random access memory, the cap layer has an upper half and a lower half, and the upper half and the lower half contain different stresses.
    Type: Application
    Filed: December 7, 2020
    Publication date: May 5, 2022
    Inventors: Shih-Wei Su, Da-Jun Lin, Chih-Wei Chang, Bin-Siang Tsai, Ting-An Chien